WO2011104861A1

WO2011104861A1 - Seal structure for gate valve

Info

Publication number: WO2011104861A1
Application number: PCT/JP2010/053079
Authority: WO
Inventors: 秀彦吉田
Original assignee: 入江工研株式会社
Priority date: 2010-02-26
Filing date: 2010-02-26
Publication date: 2011-09-01
Also published as: CN102762905B; JP5514893B2; KR101458167B1; CN102762905A; JPWO2011104861A1; KR20120118847A

Abstract

Provided is a seal structure for a gate valve, which is suitable for obtaining a gate valve that is comprised of compact components and has an excellent sealing capability. A gate valve (GV) to be sealed using a sheet-like member (W) is comprised of a pressing member (2) having a pressing surface (1); a receiving member (4) having a receiving surface (3) opposed to the pressing surface (1); a gate (5) having one end opened toward the receiving surface (3); a first annular sealing element (6) which seals a clearance around the open end of the gate (5); a second sealing element (7) which is adjacent to the first sealing element (6) when the pressing surface (1) is pressed to the receiving surface (3); a space (8) surrounded by the pressing surface (1), the receiving surface (3), the first and second sealing elements (6, 7), and the sheet-like member (W) passing through the gate (5) when the pressing surface (1) is pressed to the receiving surface (3); and a differential evacuation passage (9) which is in communication with the space (8). The space (8) is evacuated via the differential evacuation passage (9) and, accordingly, functions as a differential pressure chamber for a differential evacuation seal for sealing a microscopic clearance around the sheet-like member (W) using a differential evacuation.

Description

Gate valve seal structure

The present invention relates to a sealing structure of a gate valve for sealing a sheet material such as an electronic paper, an organic EL, a thin film solar cell, a color filter of a liquid crystal display and other sheet members. It is intended to improve the sealing performance of the valve.

In FIG. 12, the sheet-like member mentioned above is intermittently transferred into a vacuum chamber or a closed chamber (hereinafter both are referred to as a "chamber"), and the member surface of the sheet-like member stopped in the chamber is PVD or CVD or the like It is a conceptual diagram of the vacuum processing apparatus which processes, for example.

In the vacuum processing apparatus shown in FIG. 12, a gate valve is installed at an inlet and an outlet of a chamber evacuated by a vacuum pump. The gate valve sandwiches the sheet-like member and seals the member surface, thereby separating the inside of the chamber from the outside thereof and maintaining the inside of the chamber in vacuum. About the gate valve provided with such a function and structure, it is disclosed by patent document 1 (refer FIG. 2 and FIG. 3 of the patent document 1), for example.

The gate valve (hereinafter referred to as "conventional gate valve") disclosed in the same document 1 comprises an elastic cylindrical body (35) through which a sheet-like member is inserted and upper and lower pistons which elastically deform the elastic cylindrical body (35) in the radial direction. And (71A, 71B) (see FIGS. 2 and 3 of the same document). In this gate valve, the elastic cylinder (35) is bent inward by the upper and lower pistons (71A, 71B), and the sheet-like member (10) is sandwiched and held by the bent elastic cylinder (35). The both surfaces of the sheet-like member (10) are sealed by the inner surface of the elastic cylinder (35).

However, in the conventional gate valve, when the sheet-like member (10) is sandwiched by the elastic cylinder (35), the sheet-like member may be deformed with no difference in hardness between the upper and lower sides of the elastic cylinder (35). , The elastic cylinder (35) must be connected to the upper piston (71A) and the lower piston (71B) respectively, and when it becomes necessary to replace the elastic cylinder (35) for maintenance etc. Very time-consuming. In addition, when the sheet-like member (10) is sandwiched by the elastic cylindrical body (35), a minute gap is always formed at both ends of the elastic cylindrical body (35) and the sheet-like member (10). It is difficult to evacuate the inside of the chamber with a table.

As means for maintaining high vacuum in the chamber, differential evacuation chamber, gate valve and vacuum pump may be added separately from the gate valve provided in the chamber, and differential evacuation may be considered. Has the disadvantage of becoming large.

The reference numerals in the parentheses are reference numerals used in Patent Document 1.

JP, 2009-30754, A

The present invention has been made to solve the above-mentioned problems, and an object thereof is to provide a sealing structure of a gate valve suitable for obtaining a gate valve having a good sealing property and maintainability in a compact configuration. It is.

In order to achieve the above object, the present invention is a seal structure of a gate valve for sandwiching and sealing a sheet-like member, and a pressing member having a pressing surface, and a receiving member having a receiving surface opposed to the pressing surface. An annular first sealing member interposed between the receiving surface and the pressing surface and sealing the gap around the opening end of the gate; and the receiving surface receiving the pressing surface. The second seal adjacent to the first seal in a pressed state, and the pressing surface, the receiving surface, the first and second seals, and the pressing when the pressing surface is pressed against the receiving surface A space surrounded by the sheet-like member passed through the gate and a differential exhaust passage communicating with the space, the space being exhausted through the differential exhaust passage, the sheet-like member is surrounded. Characterized by comprising a differential pressure chamber of the differentially pumped seal for sealing a micro-gap in the differential pumping.

In the present invention, the first seal member is attached to the pressing surface, and the second seal member is attached to the same pressing surface adjacent to the first seal member, or the first seal member is attached to the receiving surface, the second seal The material may be configured to be attached to the same receiving surface adjacent to the first seal material.

In the present invention, the first seal member is attached to the pressing surface, the second seal member is attached to the receiving surface, and when the pressing surface is pressed against the receiving surface, the second seal on the receiving surface is the first seal of the pressing surface. The first seal member is attached to the receiving surface, the second seal member is attached to the pressing surface, and the second seal of the pressing surface is pressed when the pressing surface is pressed against the receiving surface. It is also possible to employ a configuration in which the material is disposed adjacent to the first seal on the receiving surface.

In the present invention, the pressing surface and the receiving surface have a surface substantially parallel to the member surface of the sheet-like member passed through the gate and a surface inclined with respect to the member surface, and the respective substantially parallel surfaces. The first sealing material is attached to the pressing surface or the inclined surface of the receiving surface, and the second sealing material is on the pressing surface or the receiving surface, with the inclined surfaces facing each other. A configuration of attaching to substantially parallel surfaces may be adopted.

In the present invention, the inclined surface may be flat.

In the present invention, the following effects can be obtained by adopting the above-mentioned configuration.

(1) Since the first seal material seals the gap around the opening end of the gate, and at the same time the minute gap around the sheet-like member passed through the gate is sealed by differential exhaust, a differential exhaust system is provided separately from the gate valve. It is possible to obtain a gate valve with good sealing performance in a compact device configuration without the need to

(2) Also, in the configuration in which the first seal member is attached to the inclined surface of the pressing surface or the receiving surface, an inexpensive commercially available O-ring is used as the first seal member according to the configuration in which the inclined surface is flat. What can be done, and if a seal groove such as a dovetail groove is used as a means for attaching the first seal member to such a plane, the seal groove may be processed into a plane, so that the seal groove can be formed easily and inexpensively, etc. Thus, the cost of the entire gate valve can be reduced.

(3) Further, in the configuration in which the first seal member is attached to the inclined surface of the pressing surface or the receiving surface, the first seal member is disposed in a flat surface according to the configuration in which the inclined surface is flat. (1) It is easy to carry out maintenance work such as removing the seal material for inspection or replacement, and also improve the maintainability of the gate valve.

Sectional drawing of the gate valve (open state) which applied this invention. Sectional drawing when the gate valve of FIG. 1 is in a closed state. The gate valve of FIG. 1 WHEREIN: Explanatory drawing of the space used as the differential pressure chamber of a differential exhaust seal | sticker, and the boundary part of the substantially parallel plane of a receiving surface, and the inclined plane. The top view of the press member which comprises the gate valve of FIG. The top view of the receiving member which comprises the gate valve of FIG. Explanatory drawing of the positional relationship of the 1st and 2nd sealing material which comprises the gate valve of FIG. 1, a differential exhaust passage, and a sheet-like member. AA arrow cross-sectional enlarged view of FIG. Explanatory drawing of other embodiment of a 2nd sealing material. Explanatory drawing of other embodiment of this invention. Explanatory drawing of other embodiment of this invention. Explanatory drawing of other embodiment of this invention. The conceptual diagram of the vacuum processing apparatus which has a vacuum chamber with a gate valve.

Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the attached drawings.

1 is a cross-sectional view of a gate valve (open state) to which the present invention is applied, FIG. 2 is a cross-sectional view when the gate valve of FIG. 1 is in a closed state, and FIG. A space serving as a differential pressure chamber of the seal, and an explanatory view of a boundary between a substantially parallel plane of the receiving surface and an inclined plane, FIG. 4 is a plan view of a pressing member constituting the gate valve of FIG. FIG. 6 is an explanatory view of the positional relationship between the first and second seal members, the differential exhaust passage, and the sheet-like member which constitute the gate valve of FIG.

<Outline of gate valve GV in FIG. 1>
The present gate valve GV shown in FIG. 1 is a gate valve which sandwiches and seals a sheet-like member W, and includes a pressing member 2 having a pressing surface 1 and a receiving member 4 having a receiving surface 3 opposed to the pressing surface 1. An annular first seal member 6 which is interposed between the pressing surface 1 and the receiving surface 3 and seals the gap around the opening end of the gate 5, and the pressing surface 1 The second seal member 7 adjacent to the first seal member 6 when pressed against the receiving surface 3 (see FIG. 2), and the pressing surface 1 and the receiving surface 3 when the pressing surface 1 is pressed against the receiving surface 3 A space 8 (see FIGS. 2 and 3) surrounded by the sheet-like member W passed through the first and

second seal members

6 and 7 and the gate 5, and a differential exhaust passage 9 communicating with the space 8; ,have. Then, the space 8 is evacuated through the differential exhaust passage 9 to become a differential pressure chamber of a differential exhaust seal that seals the minute gap G (see FIG. 7) around the sheet-like member W by differential exhaust. .

<Details of the pressing member 2 and the receiving member 4>
Both the pressing surface 1 of the pressing member 2 and the receiving surface 3 of the receiving member 4 are

flat surfaces

1A and 3A substantially parallel to the member surface W1 or W2 of the sheet-like member W as shown in FIG. It has

planes

1B and 3B inclined with respect to the member surface W1 or W2 of W, and the substantially

parallel planes

1A and 3A face each other, and the

inclined planes

1B and 3B face each other It is supposed to be.

As shown in FIG. 3, the tip of a part of the first seal member 6 abuts on a boundary 3C between the substantially parallel flat surface 3A of the receiving surface 3 and the inclined flat surface 3B. For this reason, if the boundary 3C is an angular surface, the first seal member 6 is easily broken. Therefore, in the present gate valve GV, the boundary 3C is a curved surface having a curvature radius larger than the curved surface of the tip of the first seal 6 It is formed to be The boundary 3 </ b> C may be formed to be a curved surface having a radius of curvature equivalent to the curved surface at the tip of the first seal member 6.

On the inclined flat surface 1B of the pressing surface 1, a seal groove 10 (see FIG. 3) formed of a dovetail groove is formed annularly as an example of a mounting means of the first seal member 6. Since the forming process of the annular seal groove 10 is performed on the flat surface 1B, it is easy and inexpensive and greatly contributes to the cost reduction of the entire gate valve GV. Further, in the substantially parallel flat surface 1A of the pressing surface 1, a seal groove 11 formed of a dovetail groove is formed as an example of a mounting means of the second seal member 7. Since the forming process of the seal groove 11 is also performed on the flat surface 1A, it is easy and inexpensive.

The pressing member 2 is attached to the tip of the elevating shaft 12, and the pressing surface 1 of the pressing member 2 is pressed against the receiving surface 3 of the receiving member 4 by the upward movement of the elevating shaft 12. Further, the pressing surface 1 of the pressing member 2 is separated from the receiving surface 3 of the receiving member 4 by the lowering operation of the elevating shaft 12.

<Details of Gate 5>
The gate 5 is a hole which is horizontally drilled from the rear surface of the receiving member 4 toward the inclined flat surface 3B of the receiving surface 3 and is like a low pressure chamber (for example, high vacuum chamber) and a high pressure chamber (for example, atmospheric pressure chamber) Function as a passage connecting two chambers with a pressure difference. The sheet-like member W located in one chamber can advance to the other chamber by passing through the gate 5. The same is true when going from the other room to one room. Further, one end of the gate 5 opened in the receiving surface 3 is formed to be flat and continuous to the substantially parallel flat surface 3A of the receiving surface 3 without any step.

In this gate valve GV, as shown in FIG. 1, one end of the gate 5 opened in the receiving surface 3 communicates with the high vacuum chamber, and the other end of the gate 5 communicates with the atmospheric pressure chamber. Although a configuration in which the chamber and the atmospheric pressure chamber are connected through the gate 5 and a configuration in which the sheet-like member W is transferred from the atmospheric pressure chamber to the high vacuum chamber through the gate 5 are adopted, these configurations are limited There is nothing to do. For example, a configuration in which one end side of the gate 5 communicates with the high vacuum chamber and the other end side of the gate 5 communicates with the atmospheric pressure chamber may be employed.

<Details of First Sealing Material 6>
The first seal member 6 is made of a commercially available O-ring (see FIG. 4) having a curved front end, and is attached to the inclined flat surface 1B of the pressing surface 1 by fitting into the seal groove 10 described above. is there. Thereby, the first seal member 6 is provided to be inclined with respect to the member surface W1 or W2 of the sheet-like member W passed through the gate 5. Then, in the present gate valve GV, when the pressing surface 1 is pressed against the receiving surface 3 as shown in FIG. 2, the upper portion of the first seal member 6 thus inclined is one member surface W1 of the sheet-like member W. It is configured to abut on. The first seal material 6 can also be formed by a method of applying a seal material to the seal groove 10.

A sealing material other than a commercially available O-ring can be employed as the first sealing material 6 if it is an annular sealing material.

<Details of Second Sealing Material 7>
The second seal member 7 is made of an elastic member such as rubber or the like, and is fitted into the seal groove 11 described above, so that the second seal member 7 is adjacent to the first seal member 6 and substantially parallel flat 1A of the pressing surface 1. It is attached. Thereby, the second sealing material 7 is provided so as to be substantially parallel to the member surface W1 or W2 of the sheet-like member W. And in this gate valve GV, when the pressing surface 1 is pressed against the receiving surface 3 as shown in FIG. It is configured to abut on. The second seal material 7 can also be formed by a method of applying a seal material to the seal groove 11.

Further, as shown in FIG. 6, the second sealing material 7 is formed so as to protrude sufficiently from both sides in the width direction of the sheet-like member W passed through the gate 5. Further, as shown in FIG. 4, the second seal member 7 is bent at both ends 7A and 7B and connected to the side surface of the first seal member 6 to form an elongated gap with the first seal member 6 (see FIG. Hereinafter, the “sealing material gap 13” is formed.

In the gate valve GV, the upper surface of the sealing material gap 13 is closed by the receiving surface 3 and the member surface of the sheet-like member W when the pressing surface 1 is pressed against the receiving surface 3 through the sheet-like member W through the gate 5 Thus, the space 8 (see FIG. 3), that is, the space 8 surrounded by the pressing surface 1, the receiving surface 3, the first and

second seals

6, 7 and the sheet-like member W passed through the gate 5 is formed. Configured to be

<Details of differential exhaust passage>
As shown in FIGS. 1 and 5, the differential exhaust passage 9 is constituted by an exhaust groove 9A formed in the receiving member 4 and an exhaust hole 9B.

The exhaust groove 9A is formed in a substantially parallel flat surface 3A of the receiving surface 3 and has a length sufficiently protruding from both sides in the width direction of the sheet member W passed through the gate 5 as shown in FIG. The exhaust groove 9A is provided to face the seal material gap 13 described above, and when the pressing surface 1 is pressed against the receiving surface 3, it communicates with the seal material gap 13 as shown in FIG. It is supposed to be.

One end of the exhaust hole 9B opens to the exhaust groove 9A, and the other end of the exhaust hole 9B is connected to an exhaust pump (not shown). Further, in the gate valve GV of FIG. 1, one end of the exhaust hole 9B is opened at the protruding portion of the exhaust groove 9A as described above (see FIG. 6), but the present invention is not limited to this opening position. One end of the exhaust hole 9B may be connected to the exhaust groove 9A by being opened at any position of the exhaust groove 9A.

<Description of operation of gate valve GV>
Next, the operation of the gate valve GV of FIG. 1 configured as described above will be described.

The gate 5 of the gate valve GV shown in FIG. 1 is open. When closing the open gate 5, the valve operation switch (not shown) is turned on. Then, the pressing member 2 approaches the receiving member 4 by the upward movement of the elevating shaft 12, and the pressing surface 1 is pressed against the receiving surface 3 with a predetermined pressure as shown in FIG.

As a result, the pressing surface 1 blocks the open end of the gate 5 and the gate 5 is closed. At this time, the upper portion of the first seal member 6 which is inclined with respect to the member surface W1 or W2 of the sheet-like member W passed through the gate 5 and the member surface W1 or W2 are approximately parallel. The second sealing member 7 in contact with one of the member surfaces W1 of the sheet-like member W as shown in FIG. 3 seals the gap in the vicinity of the member surface W1 in a double manner. Further, the gap around the opening end of the gate 5 is sealed by the first seal member 6.

By the way, as shown in FIG. 7, since the sheet-like member W has a predetermined thickness t, a minute gap which can not be sealed by the first seal member 6 or the second seal member 7 on both sides in the width direction of the sheet-like member W It is inevitable that G will occur.

However, in the present gate valve GV, since the minute gaps G on both sides of the sheet-like member W as described above are sealed by differential evacuation described later, the amount of leaked gas passing through the minute gaps G is significantly reduced.

In addition, since the gap generated between the other member surface W2 of the sheet-like member W and the receiving surface 3 in direct contact with the other member surface W2 is also sealed by differential exhaust described later, the amount of gas leaked through the gap Is also greatly reduced.

<Seal by differential exhaust>
As shown in FIG. 2, when the sheet-like member W passes through the gate 5 and the pressing surface 1 is pressed against the receiving surface 3, the pressing surface 1, the receiving surface 3, the first and

second seal members

6, 7 and the sheet-like member The space 8 of FIG. 3 surrounded by W is formed, and the differential exhaust passage 9 communicates with the space 8 to operate an exhaust pump (not shown).

Then, the space 8 is evacuated through the differential exhaust passage 9 to be lower in pressure than the pressure near the opening end of the gate 5 (approximately the same as the pressure in the atmospheric pressure chamber).

Therefore, as shown in FIG. 6, the gas GAS1 which is going to leak from the opening end of the gate 5 through the minute gaps G (see FIG. 7) on both sides of the sheet member W to the high vacuum chamber side or the other of the sheet member W The gas GAS2 which leaks to the high vacuum chamber side through the gap between the member surface W2 and the receiving surface 3 in direct contact therewith (the gap in the vicinity of the member surface W2 of the sheet-like member W) It flows into the space 8 which is depressurized and reduced in pressure by the exhaust, and is differentially exhausted to the outside through the differential exhaust passage 9.

As described above, according to the gate valve GV of FIG. 1, the first seal member 6 seals the gap around the opening end of the gate 5 and at the same time the minute gap around the sheet member W passed through the gate 5 (specific In particular, the minute gaps G on both sides in the width direction of the sheet-like member W, and the gap between the other member surface W2 of the sheet-like member W and the receiving surface 3 in direct contact therewith are differentially discharged. In order to seal, it is not necessary to provide a differential exhaust system separately from the gate valve GV, and seal performance is improved with a compact device configuration.

Further, in the gate valve GV of FIG. 1, an inexpensive commercially available O-ring could be used as the first seal member 6 by adopting a configuration in which the annular first seal member 6 is attached to the flat surface 1B. When the seal groove 10 such as a dovetail groove is used as a means for attaching the first seal member 6 to the flat surface 1B, the seal groove 10 may be processed into the flat surface 1B. Cost reduction of the entire gate valve GV is achieved.

Furthermore, in the gate valve GV of FIG. 1, since the first seal member 6 is disposed on the flat surface 1B by adopting the configuration in which the first seal member 6 is attached to the flat surface 1B, the first seal member 6 is removed. Maintenance work such as inspection and replacement is easy, and improvement of maintainability is also planned.

Other Embodiments
FIG. 8 shows another embodiment of the second seal member 7. The second seal member 7 in the same figure has a structure in which a commercially available O-ring having a diameter slightly larger than that of the first seal member 6 is disposed outside the first seal member 6. The second seal material 7 of this structure can form a space similar to the space 8 of FIG. 3 and functions as a differential pressure chamber of the differential exhaust seal by exhausting such a space by the differential exhaust passage 9. Therefore, the sealing performance is improved with a compact device configuration as with the gate valve GV of FIG. Although the illustration is omitted, even if a commercially available O-ring slightly smaller in diameter than the first seal member 6 is disposed inside the first seal member 6 as the third seal member, the same space as the space 8 of FIG. It can be formed.

In the gate valve GV of FIG. 1, the first seal member 6 is attached to the pressing surface 1, and the second seal member 7 is attached to the same pressing surface 1 adjacent to the first seal member 6, but the gate of FIG. Like the valve GV, the first sealing member 6 may be attached to the receiving surface 3 and the second sealing member 7 may be attached to the same receiving surface 3 adjacent to the first sealing member 6. Even in such a configuration, when the sheet-like member W is passed through the gate 5 and the pressing surface 1 is pressed against the receiving surface 3, a space 8 similar to the space 8 of FIG. 3 is formed. Since the air is exhausted through 9 and functions as a differential pressure chamber of the differential exhaust seal, the sealing performance is improved with a compact device configuration as with the gate valve GV of FIG.

As in the gate valve GV of FIG. 10, the first sealing member 6 is attached to the pressing surface 1, the second sealing member 7 is attached to the receiving surface 3, and the pressing surface 1 is pressed against the receiving surface 3. For the first time, the second seal material 7 of the receiving surface 3 may be arranged adjacent to the first seal material 6 of the pressing surface 1. Further, at the stage of pressing as described above, the configuration in which both ends 7A and 7B (see FIG. 4) of the second sealing material 6 straddle the first sealing material 6 is adopted or the second sealing material 7 is not shown. By forming itself into an annular shape, when the sheet-like member W is passed through the gate 5 and the pressing surface 1 is pressed against the receiving surface 3, a space 8 similar to the space 8 of FIG. 3 is formed. Since the air is exhausted through the dynamic exhaust passage 9 and functions as a differential pressure chamber of the differential exhaust seal, the sealing performance is improved with a compact device configuration as with the gate valve GV of FIG.

Further, as in the gate valve GV of FIG. 11, the first seal member 6 is attached to the receiving surface 3, the second seal member 7 is attached to the pressing surface 1, and the pressing surface 1 is pressed against the receiving surface 3 Only at this stage, the second seal 7 of the pressing surface 1 may be disposed adjacent to the first seal 6 of the receiving surface 3. Also in this case, at the stage of pressing as described above, a configuration in which both ends 7A and 7B (see FIG. 4) of the second sealing material 6 straddle the first sealing material 6 is adopted or the second seal By forming the material 7 itself in an annular shape, when the sheet-like member W is passed through the gate 5 and the pressing surface 1 is pressed against the receiving surface 3, a space 8 similar to the space 8 of FIG. 3 is formed. Since the pressure sensor exhausts through the differential exhaust passage 9 and functions as a differential pressure chamber of the differential exhaust seal, the sealing performance is improved with a compact device configuration as with the gate valve GV of FIG.

In the gate valve GV shown in FIGS. 1 and 9 to 11, the differential exhaust passage 9 including the exhaust groove 9A and the exhaust hole 9B is formed in the receiving member 4. It may be formed, and a configuration in which the differential exhaust passage 9 is provided in both the receiving member 4 and the pressing member 2 may be adopted. Although the pressing member 2 is disposed below the sheet-like member W in FIGS. 1 to 3 and 9 to 11, the receiving member 4 and the pressing member 2 may be turned upside down.

In the embodiment described above, the substantially parallel flat surface 1A or inclined flat surface 1B of the pressing surface 1, and the substantially parallel flat surface 3A or inclined flat surface 3B of the receiving surface 3 may be curved surfaces.

DESCRIPTION OF SYMBOLS 1 pressing surface 1A substantially parallel flat surface 1B of pressing surface inclined flat surface 2 pressing member 3 receiving surface 3A substantially parallel flat surface 3B of receiving surface inclined flat 3C of receiving surface boundary 4 receiving member 5 gate 6 first Sealing material 7 Second sealing material 8 Space (differential pressure chamber)
9

differential exhaust passage

10, 11 seal groove 12 lift shaft 13 seal material gap GV gate valve G minute gap W on both sides of sheet-like member in the width direction W sheet-like member W1 one side of sheet-like member W2 one side of sheet-like member Member surface

Claims

A sealing structure of a gate valve which sandwiches and seals a sheet-like member,
A pressing member having a pressing surface;
A receiving member having a receiving surface facing the pressing surface;
A gate whose one end is opened on the receiving surface;
An annular first seal member interposed between the receiving surface and the pressing surface and sealing a gap around the open end of the gate;
A second seal member adjacent to the first seal member when the pressing surface is pressed against the receiving surface;
When the pressing surface is pressed against the receiving surface, a space surrounded by the pressing surface, the receiving surface, the first and second seal members, and the sheet-like member passed through the gate;
And a differential exhaust passage communicating with the space;
The space is formed into a differential pressure chamber of a differential exhaust seal that seals a minute gap around a sheet-like member by differential exhaust by being exhausted through the differential exhaust passage. .
The first seal is attached to the pressing surface and the second seal is attached to the same pressing surface adjacent to the first seal,
Or
The seal structure according to claim 1, wherein the first seal member is attached to the receiving surface, and the second seal member is attached to the same receiving surface adjacent to the first seal member.
The first sealing material is attached to the pressing surface, the second sealing material is attached to the receiving surface, and when the pressing surface is pressed against the receiving surface, the second sealing material on the receiving surface is adjacent to the first sealing material on the pressing surface Placed,
Or
The first sealing material is attached to the receiving surface, the second sealing material is attached to the pressing surface, and when the pressing surface is pressed against the receiving surface, the second sealing material of the pressing surface is adjacent to the first sealing material of the receiving surface The seal structure according to claim 1, wherein the seal structure is disposed.
The pressing surface and the receiving surface have a surface substantially parallel to the member surface of the sheet-like member passed through the gate, and a surface inclined with respect to the member surface, and the substantially parallel surfaces face each other. , Each inclined face is opposite to each other,
The first seal material is attached to the inclined surface of the pressing or receiving surface,
The seal structure of a gate valve according to claim 1, wherein the second seal member is attached to a substantially parallel surface of the pressing surface or the receiving surface.
The seal structure according to claim 4, wherein the inclined surface is a plane.