KR20120118847A - Seal structure for gate valve - Google Patents

Abstract

The compact device configuration provides a gate valve seal structure suitable for obtaining a high performance gate valve. The gate valve GV in which the sheet-shaped member W is inserted and sealed includes a pushing member 2 having a pushing surface 1; A supporting member 4 having a supporting surface 3 opposite to the pushing surface 1; A gate 5 having one end opened to the support surface 3; An annular first seal member 6 which seals the gap around the open end of the gate 5; A second seal member 7 adjacent to the first seal member 6 when the pushing surface 1 is pushed against the support surface 3; When the pushing surface 1 is pushed against the supporting surface 3, the pushing surface 1 passes through the pressing surface 1, the supporting surface 3, the first and second sealing materials 6 and 7 and the gate 5; A space 8 surrounded by the sheet-like member W; A differential exhaust passage 9 in communication with the space 8; the space 8 is exhausted through the differential exhaust passage 9 to seal the small gap around the sheet-like member W by differential exhaust. It becomes a differential pressure chamber of a differential exhaust seal.

Description

Seal structure for gate valve

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a seal structure of a gate valve in which a base substrate such as an electronic paper, an organic EL, a thin film solar cell, a color filter of a liquid crystal display, or other sheet-shaped member is sandwiched and sealed. This is to improve the seal performance.

12 intermittently transfers the above-described sheet-like member into a vacuum chamber or a hermetic chamber (hereinafter referred to as "chamber"), and performs processing such as PVD or CVD on the member surface of the sheet-shaped member stopped in the chamber. For example, it is a conceptual diagram of a vacuum processing apparatus.

In the vacuum processing apparatus of FIG. 12, the gate valve is provided in the entrance and exit of the chamber which becomes a vacuum state by a vacuum pump. The gate valve inserts a sheet-like member and seals the member surface so as to partition the inside and the outside of the chamber so that the inside of the chamber can be maintained in a vacuum. About the gate valve provided with such a function and a structure, it is disclosed by patent document 1 (refer FIG. 2 and FIG. 3 of the same document 1).

The gate valve disclosed in the same document 1 (hereinafter referred to as a "conventional gate valve") includes an elastic cylinder 35 through which a sheet-like member is inserted and an upper and lower piston 71A elastically deforming the elastic cylinder 35 in the radial direction. , 71B) (see FIGS. 2 and 3 of the same document). In this gate valve, the elastic cylinder 35 is bent inwardly by the upper and lower pistons 71A and 71B, and the sheet-like member 10 is inserted into the curved elastic cylinder 35 to sandwich the seat-like member 10. Both sides of the member are sealed by the inner surface of the elastic cylinder 35.

However, in the conventional gate valve, when the sheet-like member 10 is sandwiched between the elastic cylinders 35, there is a difference in hardness between the upper and lower sides of the elastic cylinder 35, Must be connected to the upper piston 71A and the lower piston 71B, respectively. Therefore, when replacement of the elastic cylinder 35 is required for maintenance or the like, replacement is very laborious. In addition, when the sheet-like member 10 is inserted into the elastic cylinder 35, minute gaps are formed at both ends of the elastic cylinder 35 and the sheet-like member 10, and the inside of the chamber is opened with two gate valves on both sides of the chamber. It is difficult to achieve high vacuum.

As a means for maintaining the high vacuum in the chamber, it is conceivable to add a differential exhaust chamber, a gate valve and a vacuum pump separately from the gate valve provided in the chamber, to differentially evacuate the apparatus. There is a flaw.

The code | symbol in the said parenthesis is the code used by patent document 1. As shown in FIG.

Patent Document 1: Japanese Unexamined Patent Publication No. 2009-30754

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a seal structure of a gate valve suitable for obtaining a gate valve having good sealing and maintainability in a compact device configuration.

In order to achieve the above object, the present invention is a seal structure of the gate valve to seal the sheet-like member, the push member having a pushing surface; A supporting member having a supporting surface opposite to the pushing surface; A gate having one end opened to the support surface; An annular first sealing material interposed between the supporting surface and the pushing surface, and sealing a gap around the open end of the gate; A second seal member adjacent to the first seal member in a state in which the pushing surface is pressed against the supporting surface; A space surrounded by the pushing surface, the supporting surface, the first and second sealing members, and the sheet-like member passed through the gate when the pushing surface is pressed against the supporting surface; A differential exhaust passage communicating with the space, wherein the space is evacuated through the differential exhaust passage to seal the differential gap around the sheet-shaped member by differential exhaust; It is characterized by being a yarn.

In the present invention, the first seal member is mounted on the push surface, and the second seal member is mounted on the same push surface adjacent to the first seal member, or the first seal member is mounted on the support surface, and the second seal member is mounted on the support surface. The sealing material can adopt the structure attached to the same support surface adjacent to the 1st sealing material.

In the present invention, the first seal member is mounted on the push surface, the second seal member is mounted on the support surface, and the second seal material on the support surface is made of the push surface at the step of pushing the push surface to the support surface. The structure disposed adjacent to the first seal member, or the first seal member is mounted on the support surface, the second seal member is mounted on the push surface, and the first step of the push surface at the step of pushing the push surface to the support surface. The structure in which 2 sealing materials are arrange | positioned adjacent to the 1st sealing material of a support surface may be employ | adopted.

In the present invention, the pushing surface and the supporting surface have a surface approximately parallel to the member surface of the sheet-like member passed through the gate and a surface inclined with respect to the member surface, and each of the approximately parallel surfaces oppose each other. Even if the inclined surfaces of the surfaces are opposed to each other, the first seal member is mounted on the inclined surface of the pushing surface or the supporting surface, and the second seal member is mounted on the substantially parallel surface of the pressing surface or the supporting surface. do.

In the present invention, the inclined surface can be flat.

In this invention, the following effects are acquired by employ | adopting the said structure.

(1) Since the gap between the open end of the gate is sealed by the first seal member and the gap between the sheet-shaped member passed through the gate is sealed by differential exhaust, a differential exhaust device is provided separately from the gate valve. There is no need to install it, so a compact device configuration provides a gate valve with good sealing performance.

(2) In addition, according to the configuration in which the inclined surface is mounted on the inclined surface of the pushing surface or the supporting surface, the inclined surface in the plane is used. By using a seal groove, such as a dovetail groove, as a means to attach the first seal member to such a plane and the plane, the seal groove can be formed in the plane, so that the seal groove can be easily and inexpensively formed. In this regard, cost reduction of the entire gate valve can be achieved.

(3) Moreover, in the structure which a 1st sealing material is attached to the inclined surface of a pushing surface or a support surface, According to the structure which makes the inclined surface into a plane, since a 1st sealing material is arrange | positioned in a plane, it is a 1st sealing material The maintenance work of the gate valve can be improved by easily removing and inspecting or replacing the valve.

1 is a cross-sectional view of a gate valve (open state) to which the present invention is applied.
FIG. 2 is a cross-sectional view when the gate valve of FIG. 1 is closed. FIG.
3 is an explanatory diagram of a boundary between a substantially parallel plane and an inclined plane of a space and a supporting surface of the gate valve of FIG.
4 is a plan view of the pushing member constituting the gate valve of FIG.
5 is a plan view of the supporting member constituting the gate valve of FIG.
6 is an explanatory view of the positional relationship between the first and second seal members, the differential exhaust passage, and the sheet-like member constituting the gate valve of FIG. 1;
7 is an enlarged cross-sectional view of the AA arrow of FIG.
8 is an explanatory diagram of another embodiment of a second seal member;
9 is an explanatory diagram of another embodiment of the present invention.
10 is an explanatory diagram of another embodiment of the present invention.
11 is an explanatory diagram of another embodiment of the present invention.
12 is a conceptual diagram of a vacuum processing apparatus having a vacuum chamber with a gate valve.

EMBODIMENT OF THE INVENTION Hereinafter, the best form for implementing this invention is demonstrated in detail, referring an accompanying drawing.

1 is a cross-sectional view of a gate valve (open state) to which the present invention is applied, FIG. 2 is a cross-sectional view when the gate valve of FIG. 1 is in a closed state, and FIG. 3 is a differential pressure chamber of a differential exhaust seal in the gate valve of FIG. Explanatory drawing of the boundary between the substantially parallel plane and the inclined plane of the space and the supporting surface, FIG. 4 is a plan view of the pushing member constituting the gate valve of FIG. 1, and FIG. 6 is an explanatory view of the positional relationship between the first and second sealing materials, the differential exhaust passage and the sheet-like member constituting the gate valve of FIG.

<Overview of Gate Valve GV of FIG. 1>

The main gate valve GV of FIG. 1 is a gate valve in which a seat-shaped member W is inserted and sealed, and includes a pushing member 2 having a pushing surface 1; A supporting member 4 having a supporting surface 3 opposite to the pushing surface 1; A gate 5 having one end opened to the support surface 3; An annular first sealing member 6 interposed between the pushing surface 1 and the supporting surface 3 to seal a gap around the open end of the gate 5; A second seal member 7 adjacent to the first seal member 6 in the state in which the pushing surface 1 is pushed onto the supporting surface 3 (see FIG. 2); When the pushing surface 1 is pushed against the supporting surface 3, the pushing surface 1 passes through the pressing surface 1, the supporting surface 3, the first and second sealing materials 6 and 7 and the gate 5; A space 8 surrounded by the sheet-like member W (see FIGS. 2 and 3); And a differential exhaust passage 9 communicating with the space 8. And the space 8 is exhausted through the differential exhaust passage 9, so that the differential pressure chamber of the differential exhaust seal sealing the small gap G (see FIG. 7) around the sheet-shaped member W by differential exhaust is provided. do.

<Details of the pushing member 2 and the supporting member 4>

Both the pushing surface 1 of the pushing member 2 and the supporting surface 3 of the supporting member 4 are planes substantially parallel to the member surface W1 or W2 of the sheet-like member W as shown in FIG. 1A, 3A and planes 1B, 3B that are inclined with respect to the member surface W1 or W2 of the sheet-like member W, and each of substantially parallel planes 1A, 3A face each other Each of the inclined planes 1B and 3B faces each other.

As shown in FIG. 3, a portion of the first seal member 6 is in contact with the boundary portion 3C between the substantially parallel plane 3A of the support surface 3 and the inclined plane 3B. For this reason, since the 1st sealing material 6 is easy to be damaged when 3 C of boundary parts are each surface, in this gate valve GV, this boundary part 3C is distal to the 1st sealing material 6 tip. It is formed so as to be a curved surface having a radius of curvature larger than the curved surface of. 3 C of these boundary parts may be formed so that it may become the curved surface of the curvature radius equivalent to the curved surface of the front end of the 1st sealing material 6.

In the inclined plane 1B of the pushing surface 1, the seal groove 10 (refer FIG. 3) which consists of a dovetail groove as an example of the attachment means of the 1st sealing material 6 is formed in ring shape. Since the process of forming the annular seal groove 10 is performed with respect to the plane 1B, it is easy and inexpensive and greatly contributes to the cost reduction of the entire gate valve GV. Moreover, the seal groove 11 which consists of a dovetail groove is formed in the substantially parallel plane 1A of the pushing surface 1 as an example of the mounting means of the 2nd sealing material 7. As shown in FIG. Since the formation process of this seal groove 11 is also performed with respect to the flat surface 1A, it is easy and inexpensive.

The pushing member 2 is attached to the tip of the lifting shaft 12, and the pushing surface 1 of the pushing member 2 is supported by the supporting member 4 by the lifting operation of the lifting shaft 12. As shown in FIG. It is pushed to the surface 3. In addition, by the lowering operation of the lifting shaft 12, the pushing surface 1 of the pushing member 2 is separated from the supporting surface 3 of the supporting member 4.

<Details of the gate 5>

The gate 5 consists of a hole formed horizontally from the rear surface of the supporting member 4 toward the inclined plane 3B of the supporting surface 3, and includes a low pressure chamber (for example, a high vacuum chamber) and a high pressure chamber ( For example, an atmospheric pressure chamber) or the like serves as a passage connecting two chambers with a pressure difference. The sheet-like member W located in one chamber can advance to the other chamber by passing through this gate 5. The same applies to the case of advancing from one thread to the other. Moreover, one end of the gate 5 opened to the support surface 3 is formed so that it may continue flat evenly with respect to the substantially parallel plane 3A of the support surface 3 without a level | step difference.

In this gate valve GV, as shown in FIG. 1, the one end side of the gate 5 opened to the support surface 3 communicates with the high vacuum chamber, and the other end side of the gate 5 communicates with the atmospheric pressure chamber. Although the structure in which the thread is connected via the gate 5 and the structure in which the sheet-shaped member W is transferred from the atmospheric pressure chamber to the high vacuum chamber through the gate 5 are adopted, the configuration is not limited to these. For example, a configuration in which one end side of the gate 5 communicates with the high vacuum chamber and the other end side of the gate 5 communicates with the atmospheric pressure chamber can also be adopted.

<The details of the first sealing material 6>

The first seal member 6 is made of a commercially available O-ring (see Fig. 4) having a curved end, and is inclined plane 1B of the pushing surface 1 by being inserted into the seal groove 10 described above. ) Thereby, the 1st sealing material 6 is provided so that it may incline with respect to the member surface W1 or W2 of the sheet-like member W which passed through the gate 5. And in this gate valve GV, when the pushing surface 1 is pushed to the support surface 3 as shown in FIG. 2, the upper part of the 1st sealing material 6 which is inclined in this way becomes a sheet-shaped member ( It is comprised so that it may contact one member surface W1 of W). The first seal member 6 may be molded by applying a seal member to the seal groove 10.

Moreover, even sealing materials other than a commercial O ring can be employ | adopted as the 1st sealing material 6 as long as it is an annular sealing material.

<The details of the second sealing material (7)>

The second seal member 7 is made of an elastic member such as rubber or the like, and is inserted into the seal groove 11 described above, and is substantially parallel to the same pressing surface 1 adjacent to the first seal member 6. It is attached to 1A. Thereby, the 2nd sealing material 7 is provided so that it may become substantially parallel with respect to the member surface W1 or W2 of the sheet-like member W. As shown in FIG. And in this gate valve GV, when the pushing surface 1 is pushed to the support surface 3 like FIG. 2, the 2nd sealing material 7 which becomes substantially parallel in the same way also has a sheet-like member It is comprised so that it may contact one member surface W1 of (W). Moreover, the 2nd sealing material 7 can also be shape | molded by the method of apply | coating a sealing material to the said seal groove 11.

Moreover, the 2nd sealing material 7 is formed so that it may fully push out from the width direction both sides of the sheet-like member W which passed through the gate 5 like FIG. Moreover, as for this 2nd sealing material 7, both ends 7A and 7B are bent and connected to the side surface of the 1st sealing material 6, as shown in FIG. 4, a narrow and long gap with the 1st sealing material 6 (Hereinafter, referred to as "sealing material gap 13").

In the gate valve GV, when the sheet-like member W passes through the gate 5 and the pushing surface 1 is pushed onto the supporting surface 3, the upper surface of the sealing member gap 13 is supported. By closing with the surface of the surface 3 and the member surface of the sheet-like member W, the said space 8 (refer FIG. 3), ie, the pushing surface 1, the supporting surface 3, the 1st and 2nd sealing material It is comprised so that the space 8 surrounded by the 6 and 7 and the sheet-like member W which passed through the gate 5 may be formed.

<Details of the differential exhaust passage>

The differential exhaust passage 9 is constituted by the exhaust groove 9A and the exhaust hole 9B formed in the support member 4 as shown in Figs. 1 and 5.

The exhaust groove 9A is formed in the substantially parallel plane 3A of the support surface 3, and also extends sufficiently from both sides in the width direction of the sheet-like member W passed through the gate 5 as shown in FIG. Have In addition, the exhaust groove 9A is provided to face the sealing material gap 13 described above, and when the pushing surface 1 is pushed against the supporting surface 3, the sealing material gap 13 is shown in FIG. It is supposed to communicate with.

One end of the exhaust hole 9B is opened in the exhaust groove 9A, and the other end of the exhaust hole 9B is connected to an exhaust pump (not shown). Moreover, in the gate valve GV of FIG. 1, the one end of the exhaust hole 9B is opened in the protruded part of the above-mentioned exhaust groove 9A (refer FIG. 6), It is not limited to this opening position. One end of the exhaust hole 9B may be connected to the exhaust groove 9A by opening to any position of the exhaust groove 9A.

<Description of operation of gate valve (GV)>

Next, operation | movement of the gate valve GV of FIG. 1 comprised as mentioned above is demonstrated.

The gate 5 of the gate valve GV shown in FIG. 1 is open. When closing this open gate 5, the valve operation switch (not shown) is turned ON. By doing so, the pushing member 2 approaches the supporting member 4 by the lifting operation of the lifting shaft 12, and the pushing surface 1 is pressed against the supporting surface 3 at a predetermined pressure as shown in FIG. Pushed.

As a result, the pushing surface 1 blocks the open end of the gate 5 so that the gate 5 is closed. At this time, the upper portion of the first seal member 6 inclined with respect to the member surface W1 or W2 of the sheet-like member W passed through the gate 5 and about the copper member surface W1 or W2. When the 2nd sealing material 7 made in parallel contacts one member surface W1 of the sheet-like member W like FIG. 3, the clearance gap in the vicinity of the member surface W1 will be double-sealed. In addition, the gap around the open end of the gate 5 is sealed by the first sealing material 6.

By the way, as shown in FIG. 7, since the sheet-shaped member W has predetermined thickness t, the 1st sealing material 6 and the 2nd sealing material are provided in the width direction both sides of the sheet-like member W. As shown in FIG. It is unavoidable that the microgap G which cannot be sealed in (7) arises.

However, in the gate valve GV, since the small gap G on both sides of the sheet-like member W as described above is sealed by the differential exhaust gas described later, the amount of gas leaking out of the small gap G is greatly reduced. Is reduced.

Moreover, since the clearance gap which arises between the other member surface W2 of the sheet-shaped member W, and the support surface 3 which is in direct contact with it is also sealed by the differential exhaust gas mentioned later, the gas which escapes the clearance gap The leakage amount of is also greatly reduced.

<Seal by differential exhaust>

As shown in FIG. 2, when the pushing surface 1 is pushed onto the supporting surface 3 while the sheet-like member W is passed through the gate 5, the pressing surface 1 and the supporting surface 3 and the first surface are formed. The space 8 of FIG. 3 surrounded by the 1st and 2nd sealing materials 6 and 7 and the sheet-like member W arises, The differential exhaust passage 9 communicates with this space 8, and is not shown in figure. The exhaust pump is running.

By doing so, the space 8 is exhausted through the differential exhaust passage 9 so that the pressure is lower than the pressure (nearly equal to the pressure in the atmospheric pressure chamber) near the open end of the gate 5.

Accordingly, as shown in FIG. 6, the gas GAS1 or the sheet-shaped member (step S7) or the sheet-shaped member (e.g. Gas which is to leak to the high vacuum chamber side through the gap between the member surface W2 of the other side of W) and the support surface 3 which is in direct contact therewith (the gap near the member surface W2 of the sheet-like member W) ( All of GAS2 flows into the said space 8 which is pressure-reduced by exhaust and becomes low pressure, and is differentially exhausted to the outside via the differential exhaust passage 9.

As described above, according to the gate valve GV of FIG. 1, the gap between the open end of the gate 5 is sealed by the first sealing material 6 and a sheet-like shape passed through the gate 5 is provided. The minute gap around the member W (specifically, the micro gap G on both sides in the width direction of the sheet-like member W and the other member surface W2 of the sheet-shaped member W are in direct contact with the micro gap. Since the gap between the supporting surfaces 3 is sealed by differential exhaust, it is not necessary to provide a differential exhaust device separately from the gate valve GV, and the sealing performance is improved by a compact device configuration.

In addition, in the gate valve GV of FIG. 1, an inexpensive commercial O-ring can be used as the first sealing material 6 by adopting a configuration in which the annular first sealing material 6 is mounted on the plane 1B. Since the seal groove 10 should be machined on the plane 1B when the seal groove 10 such as the dovetail groove is used as a means for attaching the first seal member 6 to the point 1 and the plane 1B, The cost of the gate valve GV as a whole can be reduced in that the seal groove 10 can be formed simply and inexpensively.

In addition, in the gate valve GV of FIG. 1, since the 1st sealing material 6 is arrange | positioned at the plane 1B by employ | adopting the structure which the 1st sealing material 6 is attached to the plane 1B, 1 The maintenance work is easily performed by removing and inspecting and replacing the seal member 6, thereby improving the maintainability.

<Other Embodiments>

8 shows another embodiment of the second sealing material 7. The 2nd sealing material 7 of FIG. 8 has a structure which arrange | positioned the commercially available O-ring of diameter slightly larger than the 1st sealing material 6 outside the 1st sealing material 6. In the second seal member 7 of this structure, a space similar to that of the space 8 of FIG. 3 can be formed, and since this space is exhausted by the differential exhaust passage 9, it functions as a differential pressure chamber of the differential exhaust seal. As in the gate valve GV of FIG. 1, the sealing performance is improved by a compact device configuration. In addition, although not shown, the space 8 of FIG. 3 also has a structure in which a commercially available O-ring having a diameter slightly smaller than that of the first seal member 6 is disposed inside the first seal member 6 as the third seal member. The same space as can be formed.

In the gate valve GV of FIG. 1, the first seal member 6 is mounted on the pushing surface 1, and the second seal member 7 is adjacent to the first sealing member 6 in the same pushing surface. Although it is attached to (1), like the gate valve GV of FIG. 9, the 1st sealing material 6 is attached to the support surface 3, and the 2nd sealing material 7 is attached to the 1st sealing material 6 It may be configured to be attached to the same support surface (3) adjacent to the). Even in such a configuration, a space 8 similar to the space 8 of FIG. 3 is formed when the sheet-like member W passes through the gate 5 and the push surface 1 is pushed against the support surface 3. Since the space 8 is exhausted through the differential exhaust passage 9 to function as a differential pressure chamber of the differential exhaust seal, the seal performance is improved by the compact device configuration as shown in the gate valve GV of FIG. 1.

Like the gate valve GV of FIG. 10, the first seal member 6 is mounted on the push surface 1, and the second seal member 7 is mounted on the support surface 3, and also pushed on. In the step of pushing the surface 1 to the supporting surface 3, the second sealing material 7 of the supporting surface 3 is arranged so as to be adjacent to the first sealing material 6 of the pressing surface 1. You may also In addition, in the pushing step as described above, both ends 7A and 7B (see FIG. 4) of the second sealing material 6 adopt the configuration in which the first sealing material 6 is applied or the second sealing is omitted. When the ash 7 itself is formed in an annular shape, the sheet-like member W is passed through the gate 5 to push the pushing surface 1 to the supporting surface 3 as in the space 8 of FIG. 3. Space 8 is formed, and this space 8 is exhausted through the differential exhaust passage 9 to function as a differential pressure chamber of the differential exhaust seal, so that the compact device configuration as shown in the gate valve GV of FIG. Seal performance is improved.

In addition, like the gate valve GV of FIG. 11, the first seal member 6 is mounted on the support surface 3, and the second seal member 7 is mounted on the pushing surface 1. In the step of pushing the pushing surface 1 to the supporting surface 3, the second sealing material 7 of the pressing surface 1 is disposed adjacent to the first sealing material 6 of the supporting surface 3. You may comprise so that it may be. Also in this case, in the pushing step as described above, both ends 7A and 7B (see FIG. 4) of the second sealing material 6 adopt a configuration exceeding the first sealing material 6, or the illustration is omitted. When the seal member 7 itself is formed in an annular shape, the sheet-like member W is passed through the gate 5 to push the pushing surface 1 onto the supporting surface 3 and the space 8 of FIG. 3. Since the same space 8 is formed and this space 8 is exhausted through the differential exhaust passage 9, and functions as a differential pressure chamber of a differential exhaust seal, a compact apparatus structure like the gate valve GV of FIG. As the seal performance is improved.

In the gate valve GV of FIG. 1, FIG. 9 to FIG. 11, the differential exhaust passage 9 which consists of the exhaust groove 9A and the exhaust hole 9B is formed in the support member 4, and this differential exhaust passage ( 9 may be provided in the pushing member 2, and the structure which provides the differential exhaust passage 9 in both the supporting member 4 and the pushing member 2 is also employable. In Figs. 1 to 3 and Figs. 9 to 11, the pushing member 2 is disposed below the sheet-like member W, but the support member 4 and the pushing member 2 may be flipped upside down.

In addition, in embodiment described above, the substantially parallel plane 1A of the pushing surface 1, the inclined plane 1B, and the substantially parallel plane 3A of the support surface 3, or the inclined plane 3B. ) May be a curved surface.

1 Pushing surface
Approximately parallel plane of 1 A push-in surface
1B Inclined Plane on Pushing Surface
2 Pushing Member
3 support
Approximately parallel plane of 3A base
3B inclined plane on the base
3C boundary
4 support member
5 gate
6 first seal materials
7 second seal materials
8 spaces (differential pressure chamber)
9 differential exhaust passage
10, 11 seal home
12 lifting shaft
13 sealing material gap
GV gate valve
Small gaps on both sides of the G sheet member in the width direction
W sheet member
One member surface of W1 sheet-like member
W2 other member surface of sheet-like member

Claims (5)

As a seal structure of the gate valve which inserts and seals a sheet-shaped member,
Pushing member having a pushing surface;
A supporting member having a supporting surface opposite to the pushing surface;
A gate having one end opened to the support surface;
An annular first sealing material interposed between the supporting surface and the pushing surface and sealing a gap around the opening end of the gate;
A second seal member adjacent to the first seal member when the pushing surface is pressed against the supporting surface;
A space surrounded by the pushing surface, the supporting surface, the first and second sealing members, and the sheet-like member passed through the gate when the pushing surface is pressed against the supporting surface;
Having a differential exhaust passage communicating with the space;
The differential exhaust passage,
An exhaust groove formed in the pushing surface or the supporting surface in the space facing the one member surface or the other member surface of the sheet-like member passed through the gate;
An exhaust hole whose one end is opened into the exhaust groove;
And the space becomes a differential pressure chamber of a differential exhaust seal that seals a small gap around the sheet-like member by differential exhaust by being exhausted through the differential exhaust passage. The method of claim 1,
And the first seal member is attached to the push surface, and the second seal member is attached to the same push surface adjacent to the first seal member. The method of claim 1,
The pushing surface and the supporting surface have a surface approximately parallel to the member surface of the sheet-shaped member passed through the gate and a surface inclined with respect to the member surface, and each of the approximately parallel surfaces faces each other and is inclined. They are facing each other,
The first seal member is mounted on the inclined surface of the pushing surface or the supporting surface,
The seal structure of the gate valve is characterized in that the second seal member is mounted on a substantially parallel surface of the pushing surface or the supporting surface. The method of claim 3,
The inclined surface is a seal structure, characterized in that the plane. The method of claim 1,
And the first seal member is attached to the support surface, and the second seal member is attached to the same support surface adjacent to the first seal member.

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