JPS6418149U - - Google Patents
Info
- Publication number
- JPS6418149U JPS6418149U JP10996287U JP10996287U JPS6418149U JP S6418149 U JPS6418149 U JP S6418149U JP 10996287 U JP10996287 U JP 10996287U JP 10996287 U JP10996287 U JP 10996287U JP S6418149 U JPS6418149 U JP S6418149U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- strip
- devices
- sealing device
- seals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
Description
第１図は本考案の一実施例を示す真空シール装
置の内部構造を示す断面図、第２図ａは、当該実
施例において用いられる締切装置の詳細を示す断
面図、第２図ｂは同図ａのＡ―Ａ断面図、第２図
ｃは同図ａのＢ―Ｂ断面図、第３図はシール用ロ
ールを備えた真空処理装置の説明図、第４図ａ，
ｂは従来の噛み込み型シール装置の構成を示す説
明図である。
図中１は真空シール締切装置、１０は遮断扉、
１１は遮断板、１００，１００は噛み込み部、１
０２はケーシング、１０３は凹部、２はストリツ
プ、２０は帯状体、３は真空室、３０は筒状体、
３１は中間室を各示す。
Fig. 1 is a sectional view showing the internal structure of a vacuum sealing device showing an embodiment of the present invention, Fig. 2a is a sectional view showing details of a shutoff device used in the embodiment, and Fig. 2b is the same. Fig. 2c is a sectional view taken along BB in Fig. a, Fig. 3 is an explanatory diagram of a vacuum processing apparatus equipped with a sealing roll, Fig. 4 a,
b is an explanatory diagram showing the configuration of a conventional bite-type seal device. In the figure, 1 is a vacuum seal shutoff device, 10 is a shutoff door,
11 is a blocking plate, 100, 100 is a biting part, 1
02 is a casing, 103 is a recess, 2 is a strip, 20 is a band-shaped body, 3 is a vacuum chamber, 30 is a cylindrical body,
31 indicates intermediate chambers.
Claims (1)
、該帯状体を移動路上で噛み込んでシールする締
切装置を夫々複数段設け、且つ各締切装置間を差
動排気可能な中間室としたことを特徴とする真空
シール装置。 A plurality of closing devices are provided on the inlet and outlet sides of a vacuum chamber in which the strip is vacuum-processed, each of which engages and seals the strip on the moving path, and an intermediate chamber capable of differential evacuation is provided between each of the cut-off devices. A vacuum sealing device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10996287U JPS6418149U (en) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10996287U JPS6418149U (en) | 1987-07-20 | 1987-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418149U true JPS6418149U (en) | 1989-01-30 |
Family
ID=31346685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10996287U Pending JPS6418149U (en) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418149U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011104861A1 (en) * | 2010-02-26 | 2011-09-01 | 入江工研株式会社 | Seal structure for gate valve |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS624866A (en) * | 1985-06-29 | 1987-01-10 | Ishikawajima Harima Heavy Ind Co Ltd | Sealing device for vacuum treating apparatus |
-
1987
- 1987-07-20 JP JP10996287U patent/JPS6418149U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS624866A (en) * | 1985-06-29 | 1987-01-10 | Ishikawajima Harima Heavy Ind Co Ltd | Sealing device for vacuum treating apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011104861A1 (en) * | 2010-02-26 | 2011-09-01 | 入江工研株式会社 | Seal structure for gate valve |
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