JP2011179529A - Seal structure of gate valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive easy-maintenance seal structure having good sealing characteristics for a gate valve. <P>SOLUTION: In a gate valve GV clamping a sheet member W for sealing, an annular first sealant 6 is arranged on the slant plane 1B of a pressing surface 1, and a second sealant 7 is arranged on the horizontal plane 3A of a receiving surface 3. When the pressing surface 1 is pressed to the receiving surface 3, the upper part of the first sealant 6 slanted to member surfaces W1 and W2 of the sheet member W passed through a gate 5 is brought into contact with the member surface W1 on one side of the sheet member W, and thereby, a clearance around the member surface W1 is sealed. At the same time, a clearance around the member surface W2 is sealed when the second sealant 7 parallel to the member surfaces W1 and W2 of the sheet member W passed through the gate 5 is brought into contact with the member surface W2 on the other side of the sheet member. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a gate valve sealing structure that sandwiches and seals base materials such as electronic paper, organic EL, thin film solar cells, color filters of liquid crystal display devices, and other sheet-like members, and in particular, reduces the cost of gate valves. It is intended to improve maintenance and sealing performance.

  FIG. 16 shows that the above-described sheet-like member is intermittently transferred into a vacuum chamber or a sealed chamber (hereinafter referred to as “chamber”), and PVD, CVD, or the like is applied to the member surface of the sheet-like member stopped in the chamber. It is a conceptual diagram of the vacuum processing apparatus which processes.

  In the vacuum processing apparatus of FIG. 16, a gate valve is installed at the entrance and exit of a chamber that is evacuated by a vacuum pump. This gate valve sandwiches a sheet-like member and seals the surface of the member, thereby partitioning the inside of the chamber from the outside and keeping the inside of the chamber in a vacuum. A gate valve having such a function and configuration is disclosed in, for example, Patent Document 1 (see FIGS. 2 and 3 of the same document 1).

  The gate valve disclosed in Patent Document 1 (hereinafter referred to as “conventional gate valve”) includes an elastic cylinder (35) through which a sheet-like member is inserted, and upper and lower pistons that elastically deform the elastic cylinder (35) in the radial direction. (Refer to FIG. 2 and FIG. 3 of the same document). In this gate valve, the elastic cylinder (35) is bent inward by the upper and lower pistons (71A, 71B), and the sheet-like member (10) is held between the bent elastic cylinder (35). Both surfaces of the sheet-like member (10) are sealed with the inner surface of the elastic cylinder (35).

  However, according to the conventional gate valve, since the elastic cylinder (35) is configured to bend inward, a commercially available inexpensive O-ring can be used as such an elastic cylinder (35). Therefore, the cost of the entire gate valve cannot be reduced by using such an O-ring.

  Moreover, in the conventional gate valve, both ends of the elastic cylinder (35) are fixed with screws using holding members (43, 44) and bolts (47, 51). For this reason, when performing maintenance such as removing and inspecting or replacing the elastic cylinder (35), the bolt (47) is attached to one end of the elastic cylinder (35) and the other end of the elastic cylinder farther away from the elastic cylinder (35). , 51) is required to loosen or tighten, and the maintenance is not good.

  Further, in the conventional gate valve, when the sheet-like member (10) is sandwiched between the elastic cylinders (35), there is no difference in hardness between the upper and lower sides of the elastic cylinder (35), and the sheet-like member may be deformed. Also, when the sheet-like member (10) is sandwiched between the elastic cylinders (35), there is always a minute gap between both ends of the elastic cylinder (35) and the sheet-like member (10). It is difficult to create a high vacuum inside the chamber with two valves.

  In addition, the code | symbol in the said parenthesis is a code | symbol used by patent document 1. FIG.

JP 2009-30754 A

  The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a gate valve seal structure suitable for obtaining a gate valve that is inexpensive, excellent in maintainability and good in sealing performance. There is.

  In order to achieve the above object, the present invention provides a gate valve sealing structure that sandwiches and seals a sheet-like member, and includes a pressing member having a pressing surface, and a receiving member having a receiving surface facing the pressing surface. A gate having one end opened on the receiving surface, an annular first sealing material interposed between the pressing surface and the receiving surface and sealing the periphery of the opening end of the gate, and between the pressing surface and the receiving surface And the pressing surface and the receiving surface have a plane parallel to the member surface of the sheet-like member passed through the gate and a plane inclined with respect to the member surface of the sheet-like member. And each parallel plane is opposed to each other, and each inclined plane is opposed to each other, and the first inclined plane of the pressing surface and the receiving surface is Sealing material The second sealing material is provided on the other parallel plane, and is inclined with respect to the member surface of the sheet-like member passed through the gate when the pressing surface is pressed against the receiving surface. The upper part of the first sealing material abuts against one member surface of the sheet-like member to seal a gap near the member surface, and parallel to the member surface of the sheet-like member passed through the gate. The second sealing material is in contact with the other member surface of the sheet-like member to seal a gap near the member surface.

  In the present invention, as the first seal material, for example, a commercially available inexpensive O-ring can be adopted, thereby reducing the cost of the entire gate valve.

  In the present invention, the first sealing material has a curved tip, and the boundary between the parallel plane of the receiving surface and the inclined plane is a radius of curvature equal to or larger than the curved surface of the first sealing material tip. It can be a curved surface with a radius of curvature. Thereby, since a boundary part becomes no corner | angular surface, damage to a 1st sealing material can be prevented.

  In the present invention, it is also possible to adopt a configuration in which irregularities are provided on the surface of the second sealing material with which the member surface of the sheet-like member abuts, thereby preventing the sticking phenomenon of the sheet-like member to the second sealing material. It can be effectively suppressed.

  In the present invention, by adopting a configuration in which the hardness of the second seal material is higher than the hardness of the first seal material, the first seal material is sunk into the second seal material side, the sheet-like member is bent, or the sheet-like member is indented. You may make it prevent malfunctions, such as attaching.

  According to the present invention, the following effects can be obtained by adopting the above configuration.

  (1) By adopting a configuration in which an annular first sealing material is provided on a flat surface, an inexpensive commercially available O-ring can be used as the first sealing material, and a means such as a dovetail groove as a means for attaching the first sealing material to the flat surface. If a simple seal groove is used, the seal groove only needs to be processed into a flat surface. Therefore, the seal groove can be formed easily and inexpensively, and the cost of the entire gate valve can be reduced.

  (2) Since the first sealing material is provided on a flat surface, it is easy to perform maintenance work such as removing the first sealing material for inspection or replacement, and the maintenance performance of the gate valve can be improved.

  (3) By adopting a configuration in which the second sealing material is provided on a plane parallel to the member surface of the sheet-like member passed through the gate, the sheet-like member and the second sealing material become parallel. A long seal length can be provided in the vertical direction, and the sealing performance of the gate valve can be improved.

Sectional drawing of the gate valve (open state) to which this invention is applied. Sectional drawing when the gate valve of FIG. 1 is a closed state. The gate valve of FIG. 1 WHEREIN: Explanatory drawing of the boundary part of the parallel plane of a receiving surface, and the inclined plane. The top view of the pressing member which comprises the gate valve of FIG. The top view of the receiving member which comprises the gate valve of FIG. The positional relationship figure of the 1st and 2nd sealing material and sheet-like member in the gate valve of FIG. Sectional drawing of the gate valve (open state) which added the differential exhaust seal to the gate valve of FIG. Sectional drawing when the gate valve of FIG. 7 is a closed state. FIG. 8 is an explanatory diagram of a space serving as a differential pressure chamber of the differential exhaust seal and a boundary portion between a parallel plane and an inclined plane of the receiving surface in the gate valve of FIG. 7. The top view of the pressing member which comprises the gate valve of FIG. The top view of the receiving member which comprises the gate valve of FIG. Explanatory drawing of the positional relationship of the 1st-3rd sealing material which comprises the gate valve of FIG. 7, a differential exhaust passage, and a sheet-like member. FIG. 10 is an enlarged cross-sectional view taken along the line AA in FIG. 3 or FIG. 9. Explanatory drawing of other embodiment of a 2nd sealing material. Explanatory drawing of other embodiment of a 3rd sealing material. The conceptual diagram of the vacuum processing apparatus which has a vacuum chamber with a gate valve.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.

  1 is a cross-sectional view of a gate valve (open state) to which the present invention is applied, FIG. 2 is a cross-sectional view when the gate valve of FIG. 1 is closed, and FIG. 3 is a cross-sectional view of the receiving surface of the gate valve of FIG. FIG. 4 is a plan view of a pressing member constituting the gate valve of FIG. 1, FIG. 5 is a plan view of a receiving member constituting the gate valve of FIG. 6 is a positional relationship diagram of the first and second sealing materials and the sheet-like member in the gate valve of FIG.

<Outline of Gate Valve GV in FIG. 1>
The gate valve GV in FIG. 1 is a gate valve that sandwiches and seals the sheet-like member W, and includes a pressing member 2 having a pressing surface 1, a receiving member 4 having a receiving surface 3 facing the pressing surface 1, A gate 5 having one end opened on the receiving surface 3, an annular first sealing material 6 interposed between the pressing surface 1 and the receiving surface 3 and sealing the periphery of the opening end of the gate 5, and the pressing surface 1 and the receiving surface 2 and a second sealing material 7 interposed between them.

<Details of pressing member 2 and receiving member 4>
As shown in FIG. 1, the pressing surface 1 of the pressing member 2 and the receiving surface 3 of the receiving member 4 are both flat surfaces 1A and 3A parallel to the member surface W1 or W2 of the sheet-like member W, and the sheet-like member W. The planes 1B and 3B are inclined with respect to the member surface W1 or W2, and the parallel planes 1A and 3A are opposed to each other, and the inclined planes 1B and 3B are opposed to each other. It has become.

  As shown in FIG. 3, a part of the first seal material 6 comes into contact with a boundary portion 3 </ b> C between the parallel plane 3 </ b> A of the receiving surface 3 and the inclined plane 3 </ b> B. For this reason, if the boundary portion 3C is a square surface, the first sealing material 6 is easily damaged. Therefore, in the present gate valve GV, the boundary portion 3C is a curved surface having a larger radius of curvature than the curved surface at the tip of the first sealing material 6. It is formed to become. In addition, you may form this boundary part 3C so that it may become a curved surface of the curvature radius equivalent to the curved surface of the 1st sealing material 6 front-end | tip.

  On the inclined plane 1B of the pressing surface 1, a seal groove 10 (see FIG. 3) formed of a dovetail groove is formed in an annular shape as an example of a mounting means for the first seal material 6. Since the forming process of the annular seal groove 10 is performed on the plane 1B, it is easy and inexpensive, and greatly contributes to the cost reduction of the entire gate valve GV.

  The pressing member 2 is attached to the tip of the lifting shaft 12, and the pressing surface 1 of the pressing member 2 is pressed against the receiving surface 3 of the receiving member 4 as the lifting shaft 12 moves up. Further, the pressing surface 1 of the pressing member 2 is separated from the receiving surface 3 of the receiving member 4 by the lowering operation of the lifting shaft 12.

<Details of Gate 5>
The gate 5 is a hole that is horizontally drilled from the rear surface of the receiving member 4 toward the inclined plane 3B of the receiving surface 3, such as a low pressure chamber (for example, a high vacuum chamber) and a high pressure chamber (for example, an atmospheric pressure chamber). It functions as a passage connecting two chambers with a pressure difference between them. The sheet-like member W located in one chamber can advance to the other chamber by passing through the gate 5. The same applies to the case of proceeding from one chamber to the other chamber. In addition, one end of the gate 5 opened in the receiving surface 3 is formed so as to be flat without any step with respect to the parallel plane 3A of the receiving surface 3.

  In this gate valve GV, as shown in FIG. 1, one end side of the gate 5 opened in the receiving surface 3 communicates with the high vacuum chamber, and the other end side of the gate 5 communicates with the atmospheric pressure chamber. The configuration in which the chamber and the atmospheric pressure chamber are connected through the gate 5 and the configuration in which the sheet-like member W is transferred from the atmospheric pressure chamber to the high vacuum chamber through the gate 5 are limited to these configurations. There is nothing. For example, a configuration in which one end side of the gate 5 communicates with the high vacuum chamber and the other end side of the gate 5 communicates with the atmospheric pressure chamber can be employed.

<Details of the first sealing material 6>
The first sealing material 6 is made of a commercially available O-ring (see FIG. 4) having a curved tip, and is attached to the inclined plane 1B of the pressing surface 1 by fitting into the sealing groove 10 described above. is there. Thereby, the first sealing material 6 is provided so as to be inclined with respect to the member surface W1 or W2 of the sheet-like member W passed through the gate 5. In the gate valve GV, when the pressing surface 1 is pressed against the receiving surface 3 as shown in FIG. 2, the upper portion of the first sealing material 6 that is inclined as described above is one member surface W1 of the sheet-like member W. It is comprised so that it may contact | abut.

  Note that a sealing material other than a commercially available O-ring can be used as the first sealing material 6 if it is an annular sealing material.

<Details of the second sealing material 7>
The second sealing material 7 is made of an elastic member such as rubber, and is disposed on the parallel plane 3A of the receiving surface 3 (see FIG. 5), so that the member surface W1 of the sheet-like member W passed through the gate 5 or It is provided so as to be parallel to W2. In the gate valve GV, when the pressing surface 1 is pressed against the receiving surface 3 as shown in FIG. 2, the second sealing material 7 that is parallel to the pressing surface 1 is the other member surface W2 of the sheet-like member W. It is comprised so that it may contact | abut.

  The second sealing material 7 is formed so as to sufficiently protrude from both sides in the width direction of the sheet-like member W as shown in FIG.

  As for the method of providing the second sealing material 7 on the receiving surface 3, for example, as shown in FIG. Various methods such as a method of applying a sealing material to a plane 3A parallel to the receiving surface 3 can be employed.

  Due to the force of pressing the pressing surface 1 against the receiving surface 3, the first sealing material 6 is sunk into the second sealing material 7 and the sheet-like member W is bent or the sheet-like member W is indented. Therefore, the hardness of the second sealing material 7 is provided to be higher than the hardness of the first sealing material 6.

<Description of the operation of the gate valve GV shown in FIG. 1>
The gate 5 of the gate valve GV shown in FIG. 1 is opened. When closing the opened gate 5, a valve operation switch (not shown) is turned ON. If it does so, the pressing member 2 will approach the receiving member 4 by the raising operation | movement of the raising / lowering axis | shaft 12, and the pressing surface 1 will be pressed by the predetermined pressure to the receiving surface 3 like FIG.

  Thereby, the pressing surface 1 closes the opening end of the gate 5 and the gate 5 is closed. At this time, the gap around the opening end of the gate 5 is sealed by the first sealing material 6. Further, when the upper portion of the first sealing material 6 abuts against one member surface W1 of the sheet-like member W, the gap near the member surface W1 is sealed. Furthermore, when the second sealing material 7 comes into contact with the other member surface W2 of the sheet-like member W, the gap near the member surface W2 is sealed.

  As described above, according to the gate valve GV of FIG. 1, by adopting a configuration in which the annular first sealing material 6 is provided on the plane 1B, an inexpensive commercially available O-ring can be used as the first sealing material 6. When the seal groove 10 such as a dovetail groove is used as a means for attaching the first seal material 6 to the plane 1B, the seal groove 10 may be processed into the plane 1B. The cost of the entire gate valve GV is reduced because it can be formed.

  Furthermore, in the gate valve GV of FIG. 1, since the first sealing material 6 is provided on the flat surface 1B, maintenance work such as removing the first sealing material 6 for inspection and replacement is easy. It can also improve the performance.

  Further, in the gate valve GV of FIG. 1, by adopting a configuration in which the second sealing material 7 is provided on the plane 3 </ b> A parallel to the member surface W <b> 1 or W <b> 2 of the sheet-like member W passed through the gate 5, Since the member W and the second sealing material 7 are parallel to each other, the seal length can be increased in the length direction of the sheet-like member W, and the sealing performance of the gate valve GV can be improved.

<Other embodiments>
7 is a cross-sectional view of a gate valve (open state) in which a differential exhaust seal is added to the gate valve of FIG. 1, FIG. 8 is a cross-sectional view when the gate valve of FIG. 7 is closed, and FIG. 7 is an explanatory view of a space serving as a differential pressure chamber of the differential exhaust seal and a boundary portion between a parallel plane and an inclined plane of the receiving surface, FIG. 10 is a pressing member constituting the gate valve of FIG. FIG. 11 is a plan view of a receiving member constituting the gate valve of FIG. 7, and FIG. 12 is a position of first to third sealing materials, differential exhaust passages, and sheet-like members constituting the gate valve of FIG. It is explanatory drawing of a relationship.

  The gate valve GV in FIG. 7 has a third sealing material 14 adjacent to the first sealing material 6 and the pressing surface 1 on the receiving surface 3 when viewed from the pressing surface 1 pressed on the receiving surface 3 (see FIG. 8). A space 8 (see FIGS. 8 and 9) surrounded by the pressing surface 1, the receiving surface 3, the first to third sealing materials 6, 7, 14, and the sheet-like member W passed through the gate 5 when pressed. And a differential exhaust passage 9 communicating with the space 8, and the space 8 is exhausted through the differential exhaust passage 9 to form a minute gap G (see FIG. 13) around the sheet-like member W. It becomes the differential pressure chamber of the differential exhaust seal that seals with differential exhaust. In addition, since it is the same as that of the gate valve GV of FIG. 1 about structures other than these, the same code | symbol is attached | subjected to the same member and the detailed description is abbreviate | omitted.

<Details of the third sealing material 14>
As shown in FIG. 9, a seal groove 15 is formed in the parallel plane 1 </ b> A of the pressing surface 1 as an example of a mounting means for the third seal material 14. Since the process of forming the seal groove 15 is also performed on the plane 1A, it is easy and inexpensive.

  The third sealing member 14 is made of an elastic member such as rubber and is attached to the parallel flat surface 1A of the same pressing surface 1 adjacent to the first sealing member 6 by being fitted into the sealing groove 15 described above. It is. Thereby, the 3rd sealing material 14 is provided so that it may become parallel with respect to the member surface W1 or W2 of the sheet-like member W. FIG. In the gate valve GV, when the pressing surface 1 is pressed against the receiving surface 3, the third sealing material 14 that is parallel to the pressing surface 1 is also in contact with one member surface W1 of the sheet-like member W. It is.

  Further, the third sealing material 14 has a length sufficiently protruding from both sides in the width direction of the sheet-like member W passed through the gate 5 as shown in FIG. Further, as shown in FIG. 10, the third seal member 14 is bent at both ends 14 </ b> A and 14 </ b> B and connected to the side surface of the first seal member 6, thereby forming a narrow gap between the third seal member 14 and the first seal member 6. (Hereinafter referred to as “sealing material gap 13”).

  In this gate valve GV, when the pressing surface 1 is pressed against the receiving surface 3 through the gate 5 through the sheet-like member W, the upper surface of the sealing material gap 13 is the receiving surface 3, the second sealing material 7, and the sheet-like member W. The space 8 is formed by being closed with the member surface.

<Details of differential exhaust passage>
The differential exhaust passage 9 is provided in the receiving member 4. One end 9A of the passage 9 is located on both sides of the second sealing material 7 as shown in FIGS. 11 and 12, and is opposed to the sealing material gap 13 described above at that position, and the pressing surface 1 is When pressed against the receiving surface 3, it is configured to communicate with the sealing material gap 13 as shown in FIG. The other end 9B of the passage 9 is connected to an exhaust pump (not shown).

<Description of Operation of Gate Valve GV in FIG. 7>
Next, the operation of the gate valve GV of FIG. 7 configured as described above will be described.

  The gate 5 of the gate valve GV shown in FIG. 7 is opened. Even when the opened gate 5 is closed, a valve operation switch (not shown) is turned ON as in the gate valve GV shown in FIG. Then, the pressing member 2 approaches the receiving member 4 by the lifting operation of the lifting shaft 12, and the pressing surface 1 is pressed against the receiving surface 3 with a predetermined pressure as shown in FIG.

  Thereby, the pressing surface 1 closes the opening end of the gate 5 and the gate 5 is closed. At this time, the gap around the opening end of the gate 5 is sealed by the first sealing material 6.

  Further, the upper part of the first sealing material 6 that is inclined with respect to the member surface W1 or W2 of the sheet-like member W passed through the gate 5, and the first parallel to the member surface W1 or W2. When the three sealing materials 14 come into contact with one member surface W1 of the sheet-like member W, the gap in the vicinity of the member surface W1 is double-sealed.

  Furthermore, the second sealing material 7 parallel to the member surface W1 or W2 of the sheet-like member W abuts on the other member surface W2 of the sheet-like member W, so that a gap near the member surface W2 is obtained. Is sealed.

  Therefore, the amount of leakage of the gas GAS2 (see FIG. 12) that attempts to leak through the vicinity of the member surfaces W1 and W2 of the sheet-like member W to the high vacuum chamber side is greatly reduced.

  By the way, as shown in FIG. 13, since the sheet-like member W has a predetermined thickness t, a minute gap that cannot be sealed by the first sealing material 6 or the third sealing material 14 on both sides in the width direction of the sheet-like member W. G is inevitable.

  However, in the gate valve GV of FIG. 7, the minute gap G on both sides of the sheet-like member W as described above is sealed by differential exhaust, which will be described later, so that the amount of gas leaking through the minute gap G is greatly reduced. .

<Seal by differential exhaust>
When the pressing surface 1 is pressed against the receiving surface 3 while the sheet-like member W is passed through the gate 5 as shown in FIG. 8, the pressing surface 1, the receiving surface 3, the first to third sealing materials 6, 7, 14 and the sheet A space 8 shown in FIG. 9 surrounded by the W-shaped member W is formed, and a differential exhaust passage 9 communicates with the space 8 to operate an exhaust pump (not shown).

  As a result, the space 8 is exhausted through the differential exhaust passage 9, so that the pressure becomes lower than the pressure near the opening end of the gate 5 (substantially the same as the pressure in the atmospheric pressure chamber).

  Accordingly, as shown in FIG. 12, the gas GAS1 that tries to leak from the opening end of the gate 5 through the minute gap G on both sides of the sheet-like member W to the high vacuum chamber side is decompressed by the exhaust gas and is in a low pressure. And is differentially exhausted to the outside through the differential exhaust passage 9.

  In the gate valve GV of FIG. 7 described above, the gap around the opening end of the gate 5 is sealed by the first seal material 6 and at the same time one of the sheet-like members W is formed by the upper portion of the first seal material 6 and the third seal material 14. The gap near the member surface W1 is sealed, the other member surface W2 of the sheet-like member W is sealed with the second sealing material 7, and in addition to this, a minute gap on both sides in the width direction of the sheet-like member W is sealed. Since G is sealed by differential exhaust, sealing performance is improved with a compact device configuration without providing a differential exhaust device separately from the gate valve GV.

  FIG. 14 is an explanatory view of another embodiment of the second sealing material. In the gate valve GV of FIGS. 1 and 7, the second sealing material 7 having a flat surface is adopted, but in order to prevent the phenomenon that the member surface W2 of the sheet-like member W sticks to the second sealing material 7, For example, as shown in FIG. 14, unevenness 7 </ b> A extending in the width direction of the sheet-like member W may be provided on the surface of the two sealing material 7.

  FIG. 15 is an explanatory view of another embodiment of the third sealing material. The third sealing material 14 in the figure has a structure in which a commercially available O-ring having a slightly larger diameter than the first sealing material 6 is disposed outside the first sealing material 6. The third seal member 14 having this structure can also form a space similar to the space 8 of FIG. 9, and this space functions as a differential pressure chamber of the differential exhaust seal by being exhausted by the differential exhaust passage 9. Therefore, the sealing performance is improved with a compact device configuration similar to the gate valve GV of FIG. In addition, although illustration is abbreviate | omitted, also in the structure which arrange | positions the commercially available O-ring a little smaller diameter than the 1st sealing material 6 inside the 1st sealing material 6 as a 3rd sealing material, the space similar to the space 8 of FIG. Can be formed.

  In the gate valve GV of FIGS. 1 and 7, the first sealing material 6 is provided on the inclined plane 1 </ b> B of the pressing surface 1, and the second sealing material 7 is provided on the parallel plane 3 </ b> A of the receiving surface 3. The material 6 may be provided on the inclined plane 3 </ b> B of the receiving surface 3, and the second sealing material 7 may be provided on the parallel plane 1 </ b> A of the pressing surface 1.

  In the gate valve GV of FIG. 7, the third seal material 14 is provided on the parallel plane 1 </ b> A of the pressing surface 1. Alternatively, the third seal material 14 may be provided on the parallel plane 3 </ b> A of the receiving surface 3. Well, even with such a configuration, a space similar to the space 8 of FIG. 9 can be formed, and this space functions as a differential pressure chamber of the differential exhaust seal by being exhausted by the differential exhaust passage 9. As with the gate valve GV in FIG. 7, the sealing performance is improved with a compact device configuration.

  Further, in the gate valve GV of FIG. 7, the differential exhaust passage 9 is provided in the receiving member 4, but instead, the differential exhaust passage 9 may be provided in the pressing member 2. Moreover, the structure which provides the differential exhaust passage 9 in both the receiving member 4 and the pressing member 2 can also be employ | adopted.

DESCRIPTION OF SYMBOLS 1 Pressing surface 1A Parallel plane 1B of pressing surface Inclined plane 2 of pressing surface 2 Pressing member 3 Receiving surface 3A Parallel surface 3B of receiving surface Inclined plane 3C of receiving surface Boundary part 4 Receiving member 5 Gate 6 First sealing material 7 Second sealant 8 Space (differential pressure chamber)
9 Differential exhaust passages 10, 11 Seal groove 12 Elevating shaft 13 Seal material gap 14 Third seal material 15 Seal groove GV Gate valve G Minute gap W Sheet-like member W1 One member surface W2 of the sheet-like member The other of the sheet-like member Material surface of

Claims (5)

A gate valve seal structure that sandwiches and seals a sheet-like member,
A pressing member having a pressing surface;
A receiving member having a receiving surface facing the pressing surface;
A gate having one end opened on the receiving surface;
An annular first sealing material that is interposed between the pressing surface and the receiving surface and seals around the opening end of the gate;
A second sealing material interposed between the pressing surface and the receiving surface,
The pressing surface and the receiving surface have a plane parallel to the member surface of the sheet-like member passed through the gate and a plane inclined with respect to the member surface of the sheet-like member, and each parallel plane is between Are arranged so that the inclined planes face each other,
Among the pressing surface and the receiving surface, the first sealing material is provided on one inclined plane, and the second sealing material is provided on the other parallel plane,
When the pressing surface is pressed against the receiving surface, the upper part of the first sealing material that is inclined with respect to the member surface of the sheet-like member passed through the gate contacts one member surface of the sheet-like member. The second sealing material that seals the gap near the member surface and is parallel to the member surface of the sheet-like member passed through the gate contacts the other member surface of the sheet-like member. This seals the gap in the vicinity of the member surface. The gate valve sealing structure according to claim 1, wherein the first sealing material is an O-ring. The first seal material has a curved tip.
The boundary portion between the parallel plane and the inclined plane of the receiving surface is a curved surface having a radius of curvature equal to or larger than the curved surface of the first seal material tip. Gate valve seal structure. The seal structure for a gate valve according to claim 1, wherein unevenness is provided on the surface of the second sealing material with which the member surface of the sheet-like member abuts. The gate valve sealing structure according to claim 1, wherein the hardness of the second sealing material is higher than the hardness of the first sealing material.

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