TWI522554B - Groove seal - Google Patents

Description

Groove sealing material

The present invention relates to a sealing material for a groove between two abutting members used in a vacuum apparatus.

A sealing material which is attached to a sealing groove (for example, a dovetail groove having a trapezoidal cross section) to close a gap between two abutting components is required to have various functions such as durability in addition to ensuring the sealing property. Then, in order to satisfy the above-mentioned requirements, a sealing material for a groove having a special shape other than a circular shape is known (for example, JP-A-2003-014126).

The groove sealing material of the above-mentioned patent document is intended to prevent the occurrence of biting, rotation, twisting, etc., in addition to the sealing property, and has a cross-sectional shape having a flat bottom edge that abuts against the bottom surface of the dovetail groove, from the bottom. The left and right oblique sides extending obliquely outward from the sides and the left and right extension shoulders respectively disposed at the front ends of the left and right oblique sides are disposed at the center of the left and right extension shoulders and protrude upward from the opening of the dovetail groove a central convex portion and a concave portion disposed between the extended shoulder portion and the central convex portion.

However, when the conventional sealing material for a groove is to obtain a sufficient amount of crushing (hereinafter referred to as "compression amount"), the reaction force is increased to be larger than the required reaction force, and a sufficient amount of flattening cannot be obtained. Therefore, there is a possibility that a sufficient sealing property is not obtained at the abutting portions of the two components.

The present invention provides a sealing material for a groove which can increase the amount of compression and improve the sealing property.

In order to solve the above problems, the first application of the patent scope is a sealing material for a groove, which is a sealing groove provided on a surface of one of the abutting portions of two components, and is abutted against the surface of another component. a sealing material for an annular groove formed by closing a gap between two components and having a single shape perpendicular to a direction of extension; wherein the cross-sectional shape has a shape along the circumference The first convex portion, the second convex portion, the third convex portion, the fourth convex portion, and the fifth convex portion which are arranged in this order are formed in the sealing groove, and the first convex portion is formed from the sealing groove a protruding portion protruding from the open end; the third convex portion and the fourth convex portion positioned at a bottom corner of the double equilateral triangle having the first convex portion as a vertex, respectively abutting against a bottom plane of the sealing groove; a first space portion that absorbs a deformation amount when the first convex portion is pressed is formed between the first concave portion provided between the convex portion and the fourth convex portion and the bottom surface of the sealing groove; 2 the convex portion and the fifth convex portion respectively approach two wall surfaces facing the sealing groove; the second convex portion and 3, a surface between the convex portions, and a surface between the fourth convex portion and the fifth convex portion and an inner wall surface of the sealing groove are respectively formed to move together with the first space portion to absorb the first convex portion The second space portion and the third space portion of the amount of deformation when the portion is pressed.

The groove sealing material according to claim 2, wherein the ratio of the length of the protruding portion protruding from the open end of the sealing groove to the depth of the sealing groove is the groove sealing material according to claim 1 It is 10~35%.

The groove sealing material according to the first or second aspect of the invention, wherein the second convex portion and the third convex portion are pressed when the first convex portion is pressed. The fourth convex portion and the fifth convex portion respectively abut against the inner wall surface of the sealing groove to suppress the distortion of the sealing material.

The groove sealing material according to any one of claims 1 to 3, wherein the interval between the third protrusion and the fourth protrusion is the seal groove. The opening width of the opening is equal to or less.

The groove sealing material according to any one of claims 1 to 4, wherein the second convex portion and the fifth convex portion are inside the sealing groove A specific gap is formed between the walls.

The groove sealing material of claim 6 is the groove sealing material according to claim 5, wherein a ratio of a sectional area of the specific gap to a total sectional area of the sealing groove is less than 3%.

The groove sealing material according to any one of claims 1 to 6, wherein the second convex portion and the third convex portion and the fourth convex portion are the same. A second recess and a third recess are respectively provided between the second portion and the fifth projection; and the fourth space and the fifth space are formed between the second recess and the third recess and the inner wall surface of the seal groove. When the first convex portion is pressed, the portion is operated together with the first space portion to obtain a reaction force similar to that of the circular sealing material under the same pressing condition and a large amount of compression.

The groove sealing material according to claim 7 is the groove sealing material according to claim 7, wherein a sectional area perpendicular to the extending direction of the first space portion is opposite to the sealing groove The ratio of all sectional areas is 10 to 25%.

The groove sealing material according to claim 7 is the groove sealing material according to claim 7 or 8, wherein the fourth space portion and the fifth space portion have a cross section perpendicular to the extending direction. The ratio of the area to the entire sectional area of the sealing groove is 2 to 10%, respectively.

The groove sealing material according to any one of claims 7 to 9, wherein the first convex portion and the second convex portion and the fifth convex portion are used. A fourth recess and a fifth recess that increase the amount of compression are provided between the first portion and the first portion, respectively, and the first space portion, the fourth space portion, and the fifth space portion.

The groove sealing material according to any one of claims 1 to 6, wherein the second convex portion and the third convex portion and the fourth convex portion are A first flat portion and a second flat portion are respectively disposed between the first portion and the second flat portion, and a sixth space portion is formed between the first flat portion and the second flat portion and an inner wall surface of the seal groove. And the seventh space portion is configured to absorb the amount of deformation together with the first space portion when the first convex portion is pressed, and the cross section is circularly obtained at the beginning of the pressing and under the same pressing condition. The same amount of compression and reaction force of the sealing material, after which the reaction force is sharply increased, so that the compression amount is smaller than the compression amount of the circular sealing material in the cross section under the same pressing condition.

The groove sealing material of claim 12 is the groove sealing material according to claim 11, wherein a sectional area perpendicular to the extending direction of the first space portion is opposite to the sealing groove The ratio of all sectional areas is 1 to 15%.

The groove sealing material of claim 13 is the groove sealing material according to claim 11 or 12, wherein a cross section perpendicular to the extending direction of the sixth space portion and the seventh space portion is obtained. The ratio of the area to the total sectional area of the sealing groove is 2 to 7%, respectively.

The groove sealing material according to any one of claims 11 to 13, wherein the first convex portion and the second convex portion and the fifth convex portion are A third planar portion and a fourth planar portion are respectively provided between the first portion and the first convex portion, and operate together with the first space portion, the sixth space portion, and the seventh space portion, respectively, and the first convex portion When pushed, the pressing force initially obtains the same amount of compression and reaction force as the circular sealing material under the same pressing condition, and then the reaction force increases sharply, so that the compression amount is smaller than the same pressing force. The section under the condition is the amount of compression of the circular sealing material.

The groove sealing material according to any one of claims 1 to 14, which is composed of an elastic material.

According to the present invention, the amount of compression can be increased and the sealing property can be improved.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

Fig. 1 is a plan view schematically showing the structure of a substrate processing system which is a vacuum apparatus using a sealing material for a trench according to an embodiment of the present invention. The substrate processing system is a multi-processing chamber type substrate processing system for applying an etching treatment to a glass substrate for a flat panel display (FPD).

In FIG. 1, the substrate processing system 10 includes a transfer chamber 11 disposed at the center, a load chamber 12 connected to the transfer chamber 11, and three plasma processing apparatuses 13 arranged in a cluster around the transfer chamber 11, and a transfer chamber. 11 is an arm support table 14 connected to the loading chamber 12 on the opposite side, and two wafer cassettes 15 connected to both sides of the arm support table 14.

One of the wafer cassettes 15 accommodates a plurality of unprocessed glass substrates (hereinafter simply referred to as "substrates"), and the other wafer cassette 15 accommodates a plurality of processed substrates. The arm support table 14 is provided with a transfer arm 16 that takes out an unprocessed substrate from one of the wafer cassettes 15 and carries it into the load chamber 12, and takes out the processed substrate from the load chamber 12 and carries it into another crystal. Round box 15.

Each of the plasma processing apparatuses 13 applies an etching treatment to the substrate, and the transfer chamber 11 carries out the substrate in and out of the respective plasma processing apparatuses 13 by means of a built-in transfer arm (not shown). The loading chamber 12 has a temporary storage area (not shown) for temporarily placing the substrate, and the transfer arm 16 and the transfer arm of the transfer chamber 11 are placed on the temporary storage area or the substrate is taken out from the temporary storage area. The exchange of substrates is performed. Both the transfer chamber 11 and the load chamber 12 can be decompressed.

A gate valve 17 that partitions the passage between the transfer chamber 11 and each of the plasma processing apparatuses 13 and between the transfer chamber 11 and the load chamber 12 and between the load chamber 12 and the outside atmosphere is provided. Each of the gate valves 17 is freely openable and closable, and the gate valve 17 is hermetically sealed by using a sealing material for the grooves.

2 is a cross-sectional view showing a valve body portion of the gate valve 17 disposed between the transfer chamber 11 and the plasma processing apparatus 13 of FIG.

In Fig. 2, the gate valve 17 is mainly composed of a valve body 17a, a seal groove 17b provided on the surface of the valve body 17a, and a groove sealing material 20 attached to the seal groove 17b. The gate valve 17 is for sealing, for example, the communication port 18 between the transfer chamber 11 and the plasma processing apparatus 13. However, the seal groove 17b and the groove sealing material 20 may be provided on the side of the plasma processing apparatus 13 with respect to the valve body 17a.

However, in recent years, as the size of the vacuum device has increased, the communication ports have also become large, and when the device is moved, deformations such as skew or depression are likely to occur in the peripheral portion of the communication port. In this case, in order to ensure the sealing performance, when the sealing material having a circular cross section is used to increase the cross-sectional size and the compression amount of the sealing material to absorb the deformation, there is a case where the reaction force is excessively large and the gate valve is recessed. Although the hardness of the gate structure must be increased in order to suppress the depression of the gate valve, an increase in the hardness of the gate structure may result in an increase in cost.

Hereinafter, the sealing material for a groove according to the first embodiment of the present invention will be described, which can increase the amount of compression on the one hand and reduce the reaction force on the other hand to reduce the load on the device mechanism, mainly for use in a pressure difference. Gate valve installed in 2 spaces.

3 and FIG. 4 are views showing a cross-sectional shape of the sealing material for a groove according to the first embodiment of the present invention, and FIG. 3 is a view showing an initial state in which the pressing force is “0”, and FIG. A diagram of the state of use of a particular push pressure. This groove sealing material 20 is used, for example, for the gate valve 17 provided between the transfer chamber 11 and the plasma processing apparatus 13 in Fig. 1 . Since the transfer chamber 11 and the plasma processing apparatus 13 are maintained in a reduced pressure state together, the pressure difference is not so large.

In FIG. 3 and FIG. 4, the groove sealing material 20 is an annular sealing material, and is formed by a single-shaped cross section perpendicular to the extending direction of the sealing material (hereinafter simply referred to as "cross section"). The first convex portion 21, the second convex portion 22, the third convex portion 23, the fourth convex portion 24, and the fifth convex portion 25 are arranged in this order along the circumferential direction.

When the groove sealing material 20 is attached to, for example, the dovetail groove 50 as a seal groove, the first convex portion 21 is formed as a protruding portion that protrudes from the open end of the opening portion 51 of the dovetail groove 50 (hereinafter also referred to as "protrusion portion 21". "). The ratio of the length of the protruding portion 21 protruding from the open end of the opening portion 51 of the dovetail groove 50 to the depth of the dovetail groove 50 is, for example, 10 to 35%.

The third convex portion 23 and the fourth convex portion 24 located at the bottom corners of the double equilateral triangle having the first convex portion 21 as a vertex are respectively in contact with the bottom plane 52 of the dovetail groove 50, and the third convex portion 23 and The first recessed portion 31 provided between the fourth convex portions 24 and the bottom flat surface 52 of the dovetail groove 50 are formed with the first space portion 41. The first space portion 41 absorbs the amount of deformation when the protruding portion 21 is pressed. The ratio of the area (sectional area) of the cross section of the first space portion 41 to the total sectional area of the dovetail groove 50 is 10 to 25%.

Further, the interval between the third convex portion 23 and the fourth convex portion 24 is the same as or narrower than the opening width of the opening portion 51 of the dovetail groove 50. Thereby, the groove sealing material 20 can be easily attached to the dovetail groove 50.

The second convex portion 22 and the fifth convex portion 25 are respectively close to the inclined inner wall surfaces 53 and 54 which form the two sides other than the upper bottom and the lower bottom of the trapezoidal cross section of the dovetail groove 50, and the second convex portion 22 and the third portion The second recess 32 and the third recess 33 are provided between the convex portions 23 and between the fourth convex portion 24 and the fifth convex portion 25, respectively. Then, the fourth space portion 44 and the fifth space portion 45 are provided between the second recessed portion 32 and the third recessed portion 33 and the inner wall surface of the dovetail groove 50, respectively, and the fourth space portion 44 and the fifth space portion 45 are combined with The space portion 41 operates together to absorb the amount of deformation when the protruding portion 21 is pressed to secure the amount of compression as the sealing material.

The internal volume of the fourth space portion 44 and the fifth space portion 45 is larger than a surface including a line connecting the second convex portion 22 and the third convex portion 23 (broken line in the drawing), and includes a fourth convex portion. When the surface of the line (the broken line in the figure) of the fifth convex portion 25 is a flat surface, the virtual space portion of the inner wall surface of the flat surface and the dovetail groove 50 is formed. Therefore, the amount of deformation absorption when the protruding portion 21 is pressed can also be increased.

The ratio of the cross-sectional area of the fourth space portion 44 and the fifth space portion 45 to the total cross-sectional area of the dovetail groove 50 is, for example, 2 to 10%.

Further, the fourth concave portion 34 and the fifth concave portion 35 are provided between the first convex portion 21 and the second convex portion 22 and between the fifth convex portion 25 and the first convex portion 21, respectively. The fourth concave portion 34 and the fifth concave portion 35 function to easily deform the protruding portion 21 when pressed, and increase the amount of deformation to increase the amount of compression as the sealing material.

The groove sealing material 20 of the above configuration is used for a gate valve provided on a communication port sealing surface having a small pressure difference. When the protruding portion (first convex portion) 21 is pressed, the sealing material cross section is oriented in FIG. The lower portion is crushed and the projection 21 is also moved to the lower side. At this time, since the fourth recessed portion 34 and the fifth recessed portion 35 are provided on both sides of the protruding portion 21, and the protruding amount of the protruding portion 21 from the open end of the dovetail groove 50 is 10 to 35% of the depth of the dovetail groove 50, the protruding portion The deformation amount of 21 will be larger than the compression amount of the circular sealing material under the same pressing condition. In addition, the amount of deformation of the cross-sectional shape of the groove sealing material 20 is opposed to the first space portion 41 provided on the bottom portion of the protruding portion 21 and the fourth space portion 44 provided on the side portion of the groove sealing material 20 And the fifth space portion 45 absorbs, so the reaction force is not greater than the reaction force of the circular sealing material in the cross section under the same compression condition.

According to this embodiment, the protruding amount of the protruding portion 21 from the open end of the dovetail groove 50 is 10 to 35% of the depth of the dovetail groove 50, and the fourth concave portion 34 and the fifth concave portion are respectively disposed on both sides of the protruding portion 21. 35, the first space portion 41 is provided at the bottom portion of the protruding portion 21, and the fourth space portion 44 and the fifth space portion 45 are provided on both side portions. Therefore, when the protruding portion 21 is pressed, The sealing material is easily deformed and its deformation amount is absorbed by each space portion. Therefore, a larger amount of compression can be obtained with almost the same reaction force as a circular sealing material under the same pressing condition, and with the large compression amount, even the communication port sealing surface and the valve A slight change in the distance of the body still seals well. Further, since the reaction force is not excessively large, the hardness of the gate structure does not need to be too large, and since the groove sealing material 20 can be used for the existing dovetail groove, it is not necessary to change the mechanism structure of the gate valve.

Further, according to the present embodiment, when the first convex portion is pressed, the second convex portion, the third convex portion, the fourth convex portion, and the fifth convex portion abut against the inner wall surface of the dovetail groove 50, respectively. Therefore, it is possible to prevent the generation of particles due to damage of the sealing material due to the distortion of the sealing material.

Further, according to the present embodiment, since the interval between the third convex portion 23 and the fourth convex portion 24 is equal to or smaller than the opening width of the opening portion 51 of the dovetail groove 50, the groove sealing material 20 can be easily attached thereto. The dovetail groove 50 prevents damage to the sealing material during installation.

In the present embodiment, the ratio of the length of the protruding portion 21 protruding from the open end of the opening portion 51 of the dovetail groove 50 to the depth of the dovetail groove 50 is, for example, 10 to 35%. When the ratio is less than 10%, a sufficient amount of compression cannot be obtained, and if it is more than 35%, the reaction force as a sealing material increases, so that a sufficient amount of compression cannot be obtained, and stable sealing properties cannot be ensured. As long as the ratio of the length of the protruding portion 21 protruding from the open end of the opening portion 51 of the dovetail groove 50 to the depth of the dovetail groove 50 is within the above range, the reaction force is not increased, so that the amount of compression can be increased and a good sealing property can be ensured. .

In the present embodiment, the ratio of the cross-sectional area of the first space portion 41 to the total cross-sectional area of the dovetail groove 50 is preferably 10 to 25%.

If the ratio is less than 10%, the reaction force will increase, and it is difficult to ensure the amount of compression. If it is more than 25%, the reaction force will be too small to ensure the sealing property. When the ratio of the cross-sectional area of the first space portion 41 to the entire cross-sectional area of the dovetail groove 50 is within the above range, the fourth space portion 44 and the fifth space portion 45 can be operated together to suppress an increase in the reaction force and increase the compression. the amount.

In the present embodiment, the ratio of the cross-sectional area of the fourth space portion 44 and the fifth space portion 45 to the total cross-sectional area of the dovetail groove 50 is preferably 2 to 10%.

If the ratio is less than 2%, the reaction force is increased, and a sufficient amount of compression cannot be obtained. If it is more than 10%, the reaction force is too small and the sealing property is lowered. When the ratio of the cross-sectional area of the fourth space portion 44 and the fifth space portion 45 to the entire cross-sectional area of the dovetail groove 50 is within the above range, the first space portion 41 is operated together, and the protruding portion at the time of pressing is absorbed. The amount of change of 21 is 1.8 to 2 times the compression amount by almost the same reaction force as the circular sealing material under the same pressing condition.

In the present embodiment, a specific gap is preferably provided between the second convex portion 22 and the fifth convex portion 25 and the inner wall surface of the dovetail groove 50. Thereby, the friction between the second convex portion 22 and the fifth convex portion 25 and the inner wall surface of the dovetail groove 50 when the protruding portion 21 is pressed and the sealing material is deformed can be reduced, thereby preventing the wear of the sealing material and preventing the wear of the sealing material. Particles are generated due to damage of the sealing material or the like. Here, the ratio of the sectional area of each gap to the total sectional area of the dovetail groove 50 is preferably less than 3%. When it is 3% or more, when the protruding portion 21 is pressed, the effect of preventing the twisting of the sealing material is reduced, and the rotation and distortion of the sealing material occur in the dovetail groove.

In the present embodiment, the sealing property is ensured by the protruding portion 21, the third convex portion 23, and the fourth convex portion 24 of the groove sealing material 20. The material of the groove sealing material 20 is, for example, a fluorinated rubber (viton) having a hardness of, for example, 60 to 80 sters.

On the other hand, at the communication port of the load chamber where the vacuum and the atmosphere are frequently repeated, the pressure applied to the valve body during the vacuum and the atmosphere may be different. For example, for a valve body that seals the atmospheric side passage of the load chamber, a large pressure close to 1 atmosphere is excessively applied to the load chamber during vacuum compared to the atmosphere. Therefore, when vacuum is applied, the portion protruding from the sealing groove of the sealing material is completely flattened, so that the valve body of the gate valve and the connecting passage surface of the constituent component (loading chamber) of the gate valve are thus metal. The problem of metal touch. Further, in the sealing surface where the vacuum and the atmosphere space are repeated, there is a phenomenon that the pressure is fluctuated by a few millimeters with a pressure fluctuation, and it is not easy to follow the micro-motion phenomenon to ensure the sealing property.

In the following description, the sealing material for a groove according to the second embodiment of the present invention is mainly used, and a gate valve of two spaces having a large pressure difference is mainly used, and metal contact caused by the entire flattening of the protruding portion can be prevented, and It can also follow the fretting of the sealing surface to ensure the tightness.

Fig. 5 and Fig. 6 are views showing a cross-sectional shape of a sealing material for a groove according to a second embodiment of the present invention, and Fig. 5 is a view showing an initial state in which a pressing force is "0", and Fig. 6 is a view showing application of A diagram of the state of use of a particular push pressure.

The groove sealing material is used, for example, for the gate valve 17 provided between the load chamber 12 and the atmosphere in Fig. 1 . The load chamber 12 may be depressurized to a vacuum state similar to that in the transfer chamber 11. At this time, the pressure difference between the load chamber 12 and the atmosphere is a large pressure close to 1 atmosphere.

In FIG. 5 and FIG. 6, the groove sealing material 60 differs from the groove sealing material 20 of FIGS. 3 and 4 of the first embodiment in that the second convex portion 62 and the third convex portion 63 are different from each other. There is no recess between the fourth convex portion 64 and the fifth convex portion 65, and between the second convex portion 62 and the third convex portion 63 and between the fourth convex portion 64 and the fifth convex portion 65 The first plane portion 71 and the second plane portion 72 are respectively provided, and the sixth space portion 86 and the seventh space portion 87 are provided between the first plane portion 71 and the second plane portion 72 and the inner wall surface of the dovetail groove 90, respectively. The first convex portion 61 and the second convex portion 62 and the fifth convex portion 65 and the first convex portion 61 do not have a concave portion, respectively, and are between the first convex portion 61 and the second convex portion 62. The third planar portion 73 and the fourth planar portion 74 are provided between the fifth convex portion 65 and the first convex portion 61, respectively.

The groove sealing material 60 having the above configuration is used for a sealing surface having a large pressure difference, and when the protruding portion (first convex portion) 61 is pressed, the sealing material cross-section is flattened downward in FIG. 5, and The projection 61 will move to the lower side. At this time, the ratio of the protruding amount of the opening end of the opening portion 91 of the protruding portion 91 to the depth of the dovetail groove 90 is 10 to 35%, and the deformation of the sealing material accompanying the downward movement of the protruding portion 61 is caused. Since the amount is absorbed by the first space portion 81, the sixth space portion 86, and the seventh space portion 87, the first reaction force at the start of pressing is small, and a large amount of compression can be secured. On the other hand, the both side portions of the protruding portion 61 are not the concave portions, but the third flat portion 73 and the fourth flat portion 74, and the first space portion 81, the sixth space portion 86, and the seventh space portion 87 are respectively Since it is smaller than the first space portion 41, the fourth space portion 44, and the fifth space portion 45 in the first embodiment, the amount of deformation absorption of the sealing material is relatively small as compared with the first embodiment. Thereby, when the pressing force is increased to some extent such that the deformation absorption amount of each space portion approaches the upper limit, the reaction force is sharply increased, and the rate of increase of the compression amount is made small.

According to the present embodiment, since the sixth space portion 86 and the seventh space portion 87 are formed, the first space portion 81 can be operated together to absorb the deformation when the protruding portion (first convex portion) 61 is pressed. At the beginning of the pressing, the pressing force can be obtained with almost the same reaction force as the circular sealing material under the same pressing condition. On the other hand, when the absorption upper limit of the amount of deformation of the protruding portion 61 is approached, for example, when the compression amplitude is 20 to 25% of the reference based on, for example, the height of the sealing material, the reaction force is rapidly increased, and the compression amount is increased. The section under the same pressing condition has a compression amount of a circular sealing material. Thereby, even a gate valve having a large pressure difference (the side of which is exposed to the atmosphere and exerts an atmospheric pressure (air support)) can prevent metal contact, thereby preventing, for example, metal contact. Particles are produced. Further, even if the sealing surface is slightly moved by a few millimeters with a pressure fluctuation, the rotation and distortion of the sealing material in the dovetail groove can be prevented, and the sealing property can be satisfactorily ensured.

Further, according to the present embodiment, the third flat portion 73 and the fourth flat portion 74 are provided between the first convex portion 61 and the second convex portion 62 and between the fifth convex portion 65 and the first convex portion 61. Then, the pressing starts, and the amount of change of the protruding portion 61 after a certain period of time is smaller than the amount of deformation of the first embodiment of the groove sealing material 20. Then, by the action of the third planar portion 73 and the fourth planar portion 74, the first space portion 81, the sixth space portion 86, and the seventh space portion 87 are multiplied together, and the initial compression amount as the sealing material is used. The reaction force is almost the same as the circular sealing material in the cross section under the same pressing condition, but the amount of change in the protruding portion 61 is close to the upper limit of absorption of the first space portion 81, the sixth space portion 86, and the seventh space portion 87. At the time, the reaction force will increase sharply. Thus, the metal contact at the sealing portion can be surely avoided and the sealing property can be ensured.

In the present embodiment, the ratio of the cross-sectional area of the sixth space portion 86 and the seventh space portion 87 to the total cross-sectional area of the dovetail groove 90 is preferably 2 to 7%. If the ratio is less than 2%, the amount of compression will be insufficient. If it exceeds 7%, the pressure caused by atmospheric support will not be tolerated, and there is a possibility of metal contact. When the ratio of the cross-sectional area of the sixth space portion 86 and the seventh space portion 87 to the entire cross-sectional area of the dovetail groove 90 is 2 to 7%, the compression amount can be sufficiently ensured at the beginning of the pressing, even if there is an atmosphere. The support is still able to reliably avoid metal contact, thereby improving the seal.

Further, the ratio of the cross-sectional area of the first space portion 81 to the total cross-sectional area of the dovetail groove 90 is preferably 1 to 15%. Thereby, it is possible to operate together with the sixth space unit 86 and the seventh space unit 87 to ensure the same operational effects.

In the present embodiment, the sealing property is ensured by the protruding portion 61, the third convex portion 63, and the fourth convex portion 64 of the groove sealing material 60. The material of the sealing material used in the present embodiment is, for example, a fluorinated rubber having a hardness of, for example, 60 to 80 dents.

In the present embodiment, a specific gap is preferably provided between the second convex portion 62 and the fifth convex portion 65 and the inner wall surface of the dovetail groove 90. Thereby, the friction between the second convex portion 62 and the fifth convex portion 65 and the inner wall surface of the dovetail groove 90 when the protruding portion 61 is pressed and the sealing material is deformed can be reduced, thereby preventing the wear of the sealing material and preventing the wear of the sealing material. Particles are generated due to damage of the sealing material or the like. Here, the ratio of the sectional area of each gap to the total sectional area of the dovetail groove 90 is preferably less than 3%. When it is 3% or more, the effect of preventing the distortion of the sealing material when the protruding portion 61 is pressed is reduced, and the rotation and distortion of the sealing material occur in the dovetail groove.

Fig. 7 is a view showing a reaction force-compression amount curve of the groove sealing material according to the first embodiment and the second embodiment. In Fig. 7, A shows the reaction force-compression amount curve of the trench sealing material 20 of the first embodiment, and B shows the reaction force-compression amount curve of the trench sealing material 60 of the second embodiment. Further, the C system shows a force-compression amount curve in which the conventional cross section is a circular seal member.

In Fig. 7, the groove sealing material 20 (A) of the first embodiment can obtain a large amount of compression with the same reaction force as compared with the sealing material (C) having a circular cross section. The recommended range of use is quite extensive. Further, the groove sealing material 60 (B) of the second embodiment has a substantially same reaction force and compression amount as compared with the sealing material (C) having a circular cross section. The reaction force is rapidly increased so that the amount of compression approaches the upper limit to some extent, and it can be known that the high pressure can be withstood. In addition, the recommended range of use of the groove sealing material 60 (B) of the second embodiment is narrower than that of the groove sealing material 20 (A) of the first embodiment.

10. . . Substrate processing system

11. . . Transfer room

12. . . Loading room

13. . . Plasma processing device

14. . . Support table

15. . . Wafer cassette

16. . . Transport arm

17. . . gate

17a. . . Valve body

17b. . . the seal groove

18. . . Connecting port

20, 60. . . Groove sealing material

21, 61. . . First convex portion (protrusion)

22, 62. . . Second convex

23, 63. . . Third convex

24, 64. . . 4th convex

25, 65. . . Fifth convex

31. . . First recess

32. . . Second recess

33. . . Third recess

34. . . 4th recess

35. . . 5th recess

41. . . First space department

44. . . Fourth Space Department

45. . . Fifth Space Department

50, 90. . . Tail groove

51, 91. . . Opening

52. . . Bottom plane

53, 54, . . Inclined inner wall

71. . . First plane

72. . . 2nd plane

73. . . Third plane

74. . . 4th plane

81. . . First space department

86. . . The sixth space department

87. . . 7th Space Department

Fig. 1 is a plan view schematically showing the structure of a substrate processing system which is a vacuum apparatus using a sealing material for a trench according to an embodiment of the present invention.

Figure 2 is a cross-sectional view showing the valve body portion of the gate valve disposed between the transfer chamber and the plasma processing apparatus of Figure 1.

Fig. 3 is a view showing a cross-sectional shape of a sealing material for a groove according to a first embodiment of the present invention, which is a schematic view showing an initial state in which a pressing force is "0".

Fig. 4 is a view showing a cross-sectional shape of a sealing material for a groove according to a first embodiment of the present invention, which is a view showing a state of use in which a specific pressing force is applied.

Fig. 5 is a view showing a cross-sectional shape of a sealing material for a groove according to a second embodiment of the present invention, and is a view showing an initial state in which the pressing force is "0".

Fig. 6 is a cross-sectional view showing a sealing material for a groove according to a second embodiment of the present invention, showing a state of use in which a specific pressing force is applied.

Fig. 7 is a view showing a reaction force-compression amount curve of the groove sealing material according to the first embodiment and the second embodiment.

20. . . Groove sealing material

twenty one. . . First convex portion (protrusion)

twenty two. . . Second convex

twenty three. . . Third convex

twenty four. . . 4th convex

25. . . Fifth convex

31. . . First recess

32. . . Second recess

33. . . Third recess

34. . . 4th recess

35. . . 5th recess

41. . . First space department

44. . . Fourth Space Department

45. . . Fifth Space Department

50. . . Tail groove

51. . . Opening

52. . . Bottom plane

53, 54, . . Inclined inner wall

Claims (11)

A sealing material for a groove is a sealing groove provided on a surface of one of the abutting portions of two components, and the gap between the two components is closed by abutting against the surface of the other component, A sealing material for an annular groove which is formed by a single shape in which a cross-sectional shape is perpendicular to an extending direction, and has a cross-sectional shape of a first convex portion and a second convex portion which are sequentially arranged along the circumferential direction. The third convex portion, the fourth convex portion, and the fifth convex portion are formed in the sealing groove, and the first convex portion forms a protruding portion that protrudes from the opening end of the sealing groove; The third convex portion and the fourth convex portion of the bottom corner of the double equilateral triangle having the convex portion as a vertex are respectively in contact with the bottom plane of the sealing groove; and the third convex portion and the fourth convex portion are disposed between the third convex portion and the fourth convex portion A first space portion that absorbs a deformation amount when the first convex portion is pressed is formed between the first concave portion and the bottom surface of the seal groove; and the second convex portion and the fifth convex portion are respectively Approaching two wall surfaces facing the seal groove; a surface between the second protrusion and the third protrusion; and the fourth protrusion and the fifth protrusion Surface between the inner wall surface of the groove and the sealing lines formed respectively will be absorbed along with the action of the first space portion a fourth space portion and a fifth space portion of a deformation amount when the first convex portion is pressed; a difference between the second convex portion and the third convex portion, and between the fourth convex portion and the fifth convex portion a second recess and a third recess are provided, and a fourth space portion and a fifth space portion are formed between the second recess portion and the third recess portion and the inner wall surface of the seal groove, and the first convex portion is When pressed, the first space portion is operated together to obtain a reaction force similar to that of the circular seal member under the same pressing condition and a large amount of compression; between the first convex portion and the second convex portion And a fourth recessed portion and a fifth portion that respectively move together with the first space portion, the fourth space portion, and the fifth space portion to increase the compression amount, respectively, between the fifth convex portion and the first convex portion Concave. The groove sealing material according to claim 1, wherein a ratio of a length of the outlet portion protruding from an open end of the seal groove to a depth of the seal groove is 10 to 35%. The groove sealing material according to claim 1, wherein when the first convex portion is pressed, the second convex portion, the third convex portion, the fourth convex portion, and the fifth convex portion are respectively abutted The inner wall surface of the sealing groove is used to suppress the distortion of the sealing material. The groove sealing material according to the first aspect of the invention, wherein the interval between the third convex portion and the fourth convex portion is equal to or smaller than an opening width of the opening portion of the sealing groove. Such as the groove sealing material of claim 1 of the patent scope, wherein the A specific gap is formed between each of the convex portion and the fifth convex portion and the inner wall surface of the seal groove. The groove sealing material according to claim 5, wherein a ratio of a sectional area of the specific gap to a total sectional area of the sealing groove is less than 3%. The groove sealing material according to the first aspect of the invention, wherein a ratio of a cross-sectional area of a cross section perpendicular to the extending direction of the first space portion to a total cross-sectional area of the seal groove is 10 to 25%. The groove sealing material according to claim 1, wherein a ratio of a cross-sectional area of a cross section perpendicular to the extending direction of the fourth space portion and the fifth space portion to a total cross-sectional area of the seal groove is 2~10%. A sealing material for a groove is a sealing groove provided on a surface of one of the abutting portions of two components, and the gap between the two components is closed by abutting against the surface of the other component, A sealing material for an annular groove which is formed by a single shape in which a cross-sectional shape is perpendicular to an extending direction, and has a cross-sectional shape of a first convex portion and a second convex portion which are sequentially arranged along the circumferential direction. The third convex portion, the fourth convex portion, and the fifth convex portion are formed in the sealing groove, and the first convex portion forms a protruding portion that protrudes from the open end of the sealing groove; The third convex portion and the fourth convex portion positioned at a bottom corner of the double equilateral triangle having the first convex portion as a vertex are respectively in contact with a bottom plane of the sealing groove; the third convex portion and the fourth convex portion A first space portion that absorbs a deformation amount when the first convex portion is pressed is formed between the first concave portion provided between the portions and the bottom surface of the seal groove; the second convex portion and the second portion The convex portions are respectively close to the two wall surfaces facing the seal groove, the surface between the second convex portion and the third convex portion, and the surface between the fourth convex portion and the fifth convex portion and the seal A sixth space portion and a seventh space portion that move together with the first space portion and absorb the deformation amount when the first convex portion is pressed are formed between the inner wall surfaces of the grooves; the second convex portion and the second convex portion are respectively formed between the inner wall surfaces of the grooves A first planar portion and a second planar portion are provided between the third convex portions and between the fourth convex portion and the fifth convex portion, and the first planar portion and the second planar portion are inside the sealing groove A sixth space portion and a seventh space portion are formed between the wall surfaces, and when the first convex portion is pressed, the first space portion is moved together to absorb the amount of deformation, and the pressing is initially obtained. the same with Under the pressing condition, the section has the same compression amount and reaction force as the circular sealing material, and then the reaction force is sharply increased, so that the compression amount is smaller than the compression amount of the circular sealing material in the section under the same pressing condition; A third planar portion and a fourth planar portion are provided between the first convex portion and the second convex portion and between the fifth convex portion and the first convex portion, respectively, and the first space portion and the first space portion 6 The space portion and the seventh space portion operate together, and when the first convex portion is pressed, the compression amount and the reaction force which are the same as the circular sealing material under the same pressing condition are obtained at the beginning of the pressing, and then The reaction force is sharply increased so that the compression amount is smaller than the compression amount of the circular sealing material in the cross section under the same pressing condition. The groove sealing material according to claim 9, wherein a ratio of a cross-sectional area of a cross section perpendicular to the extending direction of the first space portion to a total cross-sectional area of the seal groove is 1 to 15%. The groove sealing material according to claim 9, wherein a ratio of a cross-sectional area of a cross section perpendicular to the extending direction of the sixth space portion and the seventh space portion to a total cross-sectional area of the seal groove is 2~7%.