KR20110102166A - Sealing material for groove - Google Patents

Abstract

An object of the present invention is to provide a sealing material for grooves in which the amount of compression is increased and the sealing property is improved.
The groove sealing material 20 includes the first convex portion 21, the second convex portion 22, the third convex portion 23, the fourth convex portion 24, and the fifth which are sequentially arranged along the cross-sectional circumferential direction. In the state which has the convex part 25 and attached to the seal groove 50, the 1st convex part 21 becomes a protrusion which protrudes from the opening edge part of a seal groove, and the 3rd convex part 23 and the 4th convex The portions 24 are in contact with the bottom plane 52 of the seal groove 50, respectively, so that the first recess 31 and the seal groove 50 between the third convex portion 23 and the fourth convex portion 24. A first space portion for absorbing the deformation amount when the first protrusion 21 is pressed by the bottom plane 52 of the bottom face), and between and between the second protrusion 22 and the third protrusion 23. The second concave portion 32 and the third concave portion 33 are formed between the four convex portions 24 and the fifth convex portion 25, respectively, and the second concave portion 32 and the third concave portion 33 are formed. ) And the inner wall surface of the seal groove 50, when the first convex portion 21 is pressed, cooperate with the first space portion 41 to absorb the deformation amount. 4 to form a space portion 44, the fifth space (45).

Description

Seal material for home {SEALING MATERIAL FOR GROOVE}

This invention relates to the sealing material for grooves applied between two contact members in a vacuum apparatus.

In addition to securing sealing properties, various sealing and sealing functions, such as a cross-sectional trapezoidal dovetail groove and sealing a gap between two members in contact, require various functions such as durability. . Therefore, in order to satisfy such a requirement, the groove | channel sealing material which made the cross-sectional shape into the special shape other than circular shape is known (for example, refer patent document 1).

The sealing material for grooves of patent document 1 was developed in order to prevent generation | occurrence | production of a bleeding, a cloud movement, and a torsion, etc. in addition to sealing property, The cross-sectional shape is the flat base which contacts the bottom face of a dovetail groove, and Right and left quadrilateral rising obliquely outward from both sides of the base, and left and right protruding shoulders provided at the distal ends of the left and right quadrangles, and a central convex portion protruding upward from the opening of the dovetail groove in the center of the left and right protruding shoulders. And a recess formed between the protruding shoulder and the central convex portion.

Japanese Patent Application Publication No. 2003-014126

However, when the conventional sealing material for grooves attempts to obtain a sufficient amount of crushing (hereinafter referred to as "compression amount"), the reaction force increases more than necessary, and a sufficient amount of crushing is not obtained. There was a possibility that sufficient sealing property might not be obtained.

An object of the present invention is to provide a sealing material for grooves which can increase the amount of compression and improve the sealing property.

In order to solve the said subject, the groove sealing material of Claim 1 is attached to the seal groove formed in the surface of one member in the contact part of two members, and contacts the other member surface, and seals the clearance gap between these two members. In the annular groove sealing material having a single cross-sectional shape perpendicular to the stretching direction, the cross-sectional shape includes a first convex portion, a second convex portion, and a third convex portion sequentially arranged along the circumferential direction. And a fourth convex portion and a fifth convex portion, in a state where the first convex portion is formed in the seal groove, the first convex portion forms a protruding portion that protrudes from an opening end of the seal groove, and the isosceles have the first convex portion as a vertex. The third convex portion and the fourth convex portion located at the bottom angle of the triangle respectively contact the bottom plane of the seal groove and are formed between the third convex portion and the fourth convex portion. Between the concave portion and the bottom plane of the seal groove, a first space portion for absorbing the deformation amount when the first convex portion is pressed is formed, and the second convex portion and the fifth convex portion are opposed to the seal grooves. Respectively close to two wall surfaces and between the first convex portion and the third convex portion, between the fourth convex portion and the fifth convex portion, and between the inner wall surface of the seal groove; A second space portion and a third space portion, which cooperate to absorb the deformation amount when the first convex portion is pressed, are respectively formed.

The grooved sealant according to claim 2 is the grooved sealant according to claim 1, wherein a ratio with respect to the depth of the seal groove of the length protruding from the open end of the seal groove of the protruding portion is 10 to 35%. do.

As for the sealing material for grooves of Claim 3, the said sealing member for grooves of Claim 1 or 2 WHEREIN: When the said 1st convex part is pressed, the said 2nd convex part, the 3rd convex part, the 4th convex part, and the 5th convex part, respectively It is characterized in that it is in contact with the inner wall surface of the seal groove to suppress the twisting of the sealing material.

The grooved sealing material according to claim 4 is the grooved sealing material according to any one of claims 1 to 3, wherein an interval between the third convex portion and the fourth convex portion is equal to or less than an opening width of the opening of the seal groove. do.

As for the groove sealing material of Claim 5, in the groove sealing material of any one of Claims 1-4, a predetermined clearance gap is formed between the said 2nd convex part, the said 5th convex part, and the inner wall surface of the said seal groove, respectively. It is characterized by.

As for the sealing material for grooves of Claim 6, in the grooved sealing material of Claim 5, the ratio of the cross-sectional area of the said predetermined clearance gap with respect to the whole cross-sectional area of the said seal groove is less than 3%, It is characterized by the above-mentioned.

The grooved sealing material according to claim 7 is the grooved sealing material according to any one of claims 1 to 6, wherein the second convex portion and the third convex portion, and the fourth convex portion and the fifth convex portion, respectively. When the second concave portion and the third concave portion are formed, and the first convex portion is pressed between the second concave portion and the third concave portion and the inner wall surface of the seal groove, the first concave portion cooperates with the first space portion. A fourth space portion and a fifth space portion, which are the same reaction force as the sealing member having a circular cross section under the same pressing condition and obtain a large compression amount, are formed, respectively.

The sealing material for grooves of Claim 8 is a sealing material for grooves of Claim 7 WHEREIN: The ratio with respect to the whole cross-sectional area of the said seal groove of the cross-sectional area in the cross section perpendicular | vertical to the said extending direction of a said 1st space part is 10-25. It is characterized by the above-mentioned.

The sealing material for grooves of Claim 9 is a sealing material for grooves of Claim 7 or 8 WHEREIN: The cross-sectional area of the cross section perpendicular | vertical to the said extending | stretching direction of the said 4th space part and the 5th space part is the whole cross-sectional area of the said seal groove. The ratio is relative to 2 to 10%, respectively.

The grooved sealing material according to claim 10 is the grooved sealing material according to any one of claims 7 to 9, between the first convex portion and the second convex portion, and between the fifth convex portion and the first convex portion, A fourth concave portion and a fifth concave portion, which cooperate with the first space portion, the fourth space portion, and the fifth space portion to increase the compression amount, respectively, are formed.

The grooved sealing material according to claim 11 is the grooved sealing material according to any one of claims 1 to 6, wherein between the second convex portion and the third convex portion, and between the fourth convex portion and the fifth convex portion, The first planar part and the second planar part are provided, respectively, and cooperate with the first space part when the first convex part is pressed between the first planar part and the second planar part and the inner wall surface of the seal groove. The amount of deformation is absorbed, and at the beginning of the pressing, the same amount of compression and reaction force as in the sealing material of the circular cross section under the same pressing condition are obtained, and then, the reaction force increases rapidly, and the amount of compression under the same pressing conditions is obtained. A sixth space portion and a seventh space portion that are smaller than the amount of compression in the cross-sectional circular sealing material are formed, respectively.

The sealing material for grooves of Claim 12 is a sealing material for grooves of Claim 11 WHEREIN: The ratio with respect to the whole cross-sectional area of the said seal groove of the cross-sectional area in the cross section perpendicular | vertical to the said extending direction of a said 1st space part is 1-15. It is characterized by the above-mentioned.

The sealing material for grooves of Claim 13 is a sealing material for grooves of Claim 11 or 12 WHEREIN: The cross-sectional area in the cross section perpendicular | vertical with respect to the said extending | stretching direction of the said 6th space part and a 7th space part is a whole cross-sectional area of the said seal groove. The ratio to is characterized by 2 to 7%, respectively.

The grooved sealing material according to claim 14 is the grooved sealing material according to any one of claims 11 to 13, wherein between the first convex portion and the second convex portion and between the fifth convex portion and the first convex portion, respectively. When the first convex portion is pressed in cooperation with the first space portion, the sixth space portion, and the seventh space portion, respectively, the compression start original has the same amount of compression and reaction force as that of the sealing member having a circular cross section under the same pressing conditions. Is obtained, and then, the reaction force increases rapidly, and the 3rd planar part and 4th planar part which respectively make the said compression amount smaller than the compression amount in the said cross-sectional circular sealing material in the said press condition are provided, respectively. It is characterized by.

The grooved sealing material according to claim 15 is made of an elastic material in the grooved sealing material according to any one of claims 1 to 14.

According to the present invention, the amount of compression can be increased, and the sealing property can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS The top view which shows schematically the structure of the substrate processing system as a vacuum apparatus to which the sealing material for homes which concerns on embodiment of this invention is applied.
FIG. 2 is a cross-sectional view of a valve body portion of a gate valve disposed between the transfer chamber of FIG. 1 and the plasma processing apparatus. FIG.
It is a figure which shows the cross-sectional shape of the sealing material for groove | channels which concerns on 1st Embodiment of this invention, and shows the initial state which press force is "0".
It is a figure which shows the cross-sectional shape of the sealing material for groove | channels which concerns on 1st Embodiment of this invention, and shows the use state to which predetermined | prescribed pressing force was applied.
It is a figure which shows the cross-sectional shape of the grooved sealing material which concerns on 2nd Embodiment of this invention, and shows the initial state whose pressing force is "0".
It is a figure which shows the cross-sectional shape of the sealing material for grooves which concerns on 2nd Embodiment of this invention, and shows the state of use to which predetermined pressing force was applied.
The figure which shows the reaction force-compression amount curve in the sealing material for grooves which concerns on 1st Embodiment and 2nd Embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail, referring drawings.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view which shows roughly the structure of the substrate processing system as a vacuum apparatus to which the sealing material for homes which concerns on embodiment of this invention is applied. This substrate processing system is a multi-chamber type substrate processing system for performing an etching process on the glass substrate for flat panel displays (FPD), for example.

In FIG. 1, the substrate processing system 10 is clustered around a transfer chamber 11 disposed at the center, a load lock chamber 12 connected to the transfer chamber 11, and a transfer chamber 11. Three plasma processing apparatuses 13 arranged in a shape, an arm support 14 connected to the load lock chamber 12 on the opposite side to the transfer chamber 11, and connected to both sides of the arm support 14. Two cassettes 15 are provided.

One cassette 15 houses a plurality of unprocessed glass substrates (hereinafter, simply referred to as a "substrate"), and the other cassette 15 houses a plurality of processed substrates. A transfer arm 16 is arranged on the arm support 14, and the transfer arm 16 takes out an unprocessed substrate from one cassette 15, carries it into the load lock chamber 12, and simultaneously loads the load lock chamber 12. The processed substrate is taken out from the bag and loaded into the other cassette 15.

Each plasma processing apparatus 13 performs an etching process on a board | substrate, and the conveyance chamber 11 carries in / out of a board | substrate to each plasma processing apparatus 13 with the conveyance arm (not shown) which a built-in. The load lock chamber 12 has a buffer (not shown) for temporarily loading a substrate, and the transfer arms 16 and the transfer arms of the transfer chamber 11 load the substrate into the buffer or take out the substrate from the buffer. The board is replaced. Both the conveyance chamber 11 and the load lock chamber 12 can depressurize an inside.

These communication paths are partitioned between the transfer chamber 11 and each plasma processing apparatus 13, between the transfer chamber 11 and the load lock chamber 12, and between the load lock chamber 12 and the atmospheric atmosphere outside thereof. The gate valve 17 is provided. Each gate valve 17 can be opened and closed, and a groove sealing material is applied to the gate valve 17 for hermetically sealing each communication path.

FIG. 2 is a cross-sectional view of a valve body portion of the gate valve 17 disposed between the transfer chamber 11 and the plasma processing apparatus 13 of FIG. 1.

In FIG. 2, the gate valve 17 is a valve body 17a, a seal groove 17b formed on one surface of the valve body 17a, and a groove sealing material 20 mounted on the seal groove 17b. It is mainly composed of). The gate valve 17 seals the communication port 18 between the transfer chamber 11 and the plasma processing apparatus 13, for example. However, the seal groove 17b and the seal member 20 for the grooves may be formed on the side of the plasma processing apparatus 13 facing the valve body 17a.

By the way, in recent years, as a vacuum apparatus enlarges, each communication port becomes large, and deformation | transformation, such as a distortion and curvature, tends to generate | occur | produce in the peripheral part of a communication hole at the time of an apparatus operation. In such a situation, in order to secure the seal performance, when the seal member has a circular cross-sectional sealing material and the sealing material cross-sectional dimension and the compression amount are increased to absorb the deformation, the reaction force may be too large and the gate valve may bend. In order to suppress the curvature of a gate valve, it is necessary to strengthen a gate structure, but it leads to a cost increase by the rigidity of a gate structure.

Hereinafter, the sealing material for grooves which concerns on the 1st Embodiment of this invention mainly applied to the gate valve inserted in two spaces with a small pressure difference which can increase the amount of compression, and can reduce the reaction force and reduce the load to an apparatus mechanism. Explain about.

3 and 4 show cross-sectional shapes of the grooved sealing material according to the first embodiment of the present invention, FIG. 3 shows an initial state in which the pressing force is "0", and FIG. 4 shows a predetermined pressing force. It is a figure which shows a use state. This groove sealing material 20 is applied to the gate valve 17 provided, for example between the conveyance chamber 11 and the plasma processing apparatus 13 in FIG. Both the transfer chamber 11 and the plasma processing apparatus 13 are maintained in a reduced pressure state, and the pressure difference is not so large.

3 and 4, the seal member 20 for the groove is an annular seal member, and a cross section perpendicular to the stretching direction of the seal member (hereinafter simply referred to as "cross section") is formed in a single shape and the surroundings thereof. The 1st convex part 21, the 2nd convex part 22, the 3rd convex part 23, the 4th convex part 24, and the 5th convex part 25 which are arrange | positioned sequentially along the direction are provided.

When the groove sealing material 20 is attached to the dovetail groove 50 as a seal groove, for example, the first convex portion 21 protrudes from the opening end of the opening 51 of the dovetail groove 50. Hereinafter, the "protrusion part 21" is also formed. The ratio with respect to the depth of the dovetail groove 50 of the length which protrudes from the opening edge part of the opening part 51 of the dovetail groove 50 of the protrusion part 21 is 10 to 35%, for example.

The 3rd convex part 23 and the 4th convex part 24 which are located in the bottom angle of the isosceles triangle which make the 1st convex part 21 the apex are in contact with the bottom plane 52 of the dovetail groove 50, respectively, The first space portion 41 is formed by the first concave portion 31 formed between the third convex portion 23 and the fourth convex portion 24 and the bottom plane 52 of the dovetail groove 50. have. The first space portion 41 absorbs the deformation amount when the protrusion 21 is pressed. The ratio with respect to the whole cross-sectional area of the dovetail groove 50 of the area (cross-sectional area) of the cross section of the 1st space part 41 is 10 to 25%. In addition, the space | interval of the 3rd convex part 23 and the 4th convex part 24 is equal to or narrower than the opening width of the opening part 51 of the dovetail groove 50. As shown in FIG. This facilitates the attachment of the groove sealing material 20 to the dovetail groove 50.

The 2nd convex part 22 and the 5th convex part 25 are inclined inner wall surfaces which form two sides other than the upper and lower sides of trapezoidal cross section of the dovetail groove 50 ( 53 and 54, respectively, between the second convex portion 22 and the third convex portion 23, and between the fourth convex portion 24 and the fifth convex portion 25, respectively, the second concave portion ( 32 and the third concave portion 33 are formed. And between the 2nd recessed part 32 and the 3rd recessed part 33, and the inner wall surface of the dovetail groove 50, the 4th space part 44 and the 5th space part 45 are formed, respectively, The four space portion 44 and the fifth space portion 45 cooperate with the first space portion 41 to absorb the deformation amount when the protrusion 21 is pressed, thereby securing the compression amount as the sealing material.

The 4th space part 44 and the 5th space part 45 are the surface and the 4th convex which respectively contain the line (broken line in drawing) which connects the 2nd convex part 22 and the 3rd convex part 23, respectively. Virtual formed respectively by the said plane and the inner wall surface of the dovetail groove 50 in the case where the surface containing the line (broken line in drawing) which connects the part 24 and the 5th convex part 25 is made into a plane The contents are larger than the space part of. Therefore, the deformation absorbed amount when the protrusion 21 is pressed also becomes larger.

The ratio with respect to the total cross-sectional area of the dovetail groove 50 of the cross-sectional area of the 4th space part 44 and the 5th space part 45 is 2 to 10%, for example.

Further, the fourth concave portion 34 and the fifth concave portion, respectively, between the first convex portion 21 and the second convex portion 22 and between the fifth convex portion 25 and the first convex portion 21, respectively. 35 is formed. The 4th recessed part 34 and the 5th recessed part 35 act so that the deformation | transformation at the time of the compression of the protrusion part 21 may be easy, and the deformation amount may be enlarged and the compression amount as a sealing material may be increased.

The groove sealing material 20 of such a structure is applied to the gate valve provided in the communication port sealing surface with a small pressure difference, and when the protrusion part (1st convex part) 21 is pressed, the sealing material cross section is downward in FIG. Press and crush the protrusion 21 also moves downwards. At this time, the fourth concave portion 34 and the fifth concave portion 35 are formed on both sides of the protruding portion 21, and the amount of protrusion from the opening end of the dovetail groove 50 of the protruding portion 21 is formed in the dovetail groove 50. Since it is set to 10 to 35% of the depth of), the deformation amount of the protrusion part 21 becomes larger than the deformation amount of the cross-sectional circular sealing material in the same pressing condition. In addition, the deformation amount of the cross-sectional shape of the groove sealing material 20 is the first space part 41 provided in the bottom part which opposes the protrusion part 21, and the 4th space part 44 provided in the side part of the sealing material 20 for grooves. And since it absorbs by the 5th space part 45, reaction force does not become larger than reaction force of the sealing material of circular cross section in the same compression condition.

According to the present embodiment, the protrusion amount from the opening end of the dovetail groove 50 of the protrusion 21 is 10 to 35% of the depth of the dovetail groove 50, and the fourth protrusions are provided on both sides of the protrusion 21, respectively. The recessed part 34 and the 5th recessed part 35 are formed, the 1st space part 41 is provided in the bottom part which opposes the protrusion part 21, and the 4th space part 44 and the 1st part are formed in both sides, respectively. Since the five space parts 45 are formed, when the protrusion part 21 is pressed, the sealing material becomes easy to deform | transform, and the deformation amount is absorbed in each space part. Therefore, a larger compression amount can be obtained with almost the same reaction force as the cross-sectional circular sealing material under the same pressing condition, and the distance between the communication port seal surface and the valve body may be somewhat changed by this large compression amount. You can seal it. In addition, since the reaction force does not become too large, it is not necessary to make the gate structure highly rigid, and the groove sealing material 20 can be applied to the dovetail grooves of the development, and therefore it is not necessary to change the mechanism configuration of the gate valve.

Moreover, according to this embodiment, when the 1st convex part is pressed, since a 2nd convex part, a 3rd convex part, a 4th convex part, and a 5th convex part respectively contact the inner wall surface of the dovetail groove 50, It is possible to prevent the generation of particles due to twist and damage of the sealing material.

Moreover, according to this embodiment, since the space | interval of the 3rd convex part 23 and the 4th convex part 24 was made into below the opening width of the opening part 51 of the dovetail groove 50, the sealing material 20 for grooves Can be easily attached to the dovetail groove 50, and the sealing material can be twisted at the time of mounting to prevent damage from occurring.

In this embodiment, the ratio with respect to the depth of the dovetail groove 50 of the length which protrudes from the opening edge part of the opening part 51 of the dovetail groove 50 of the protrusion part 21 is 10 to 35%, for example. If this ratio is smaller than 10%, sufficient compression amount will not be obtained. If it is larger than 35%, reaction force as a sealing material will increase, and sufficient compression amount will not be obtained, and stable sealing property will not be secured. If the ratio with respect to the depth of the dovetail groove 50 of the length protruding from the opening end of the opening 51 of the dovetail groove 50 of the projection 21 is within the above range, the amount of compression is increased without increasing the reaction force, Good sealing property can be ensured.

In this embodiment, it is preferable that the ratio with respect to the whole cross-sectional area of the dovetail groove 50 of the cross-sectional area of the 1st space part 41 is 10 to 25%.

If this ratio is smaller than 10%, reaction force will become large and securing of compression amount will become difficult, and if it is larger than 25%, reaction force will become too small and sealability will not be secured. If the ratio of the cross-sectional area of the first space part 41 to the total cross-sectional area of the dovetail groove 50 is within the above range, the increase in reaction force is suppressed in cooperation with the fourth space part 44 and the fifth space part 45. While the compression amount can be increased.

In this embodiment, it is preferable that the ratio with respect to the total cross-sectional area of the dovetail groove 50 of the cross-sectional area of the 4th space part 44 and the 5th space part 45 is 2 to 10%, respectively.

If the ratio is smaller than 2%, the reaction force is increased and a sufficient amount of compression cannot be obtained. If the ratio is larger than 10%, the reaction force is too small and the sealing property may be deteriorated. When the ratio with respect to the total cross-sectional area of the dovetail groove 50 of the cross-sectional area of the 4th space part 44 and the 5th space part 45 is in the said range, it cooperates with the 1st space part 41, and the protrusion part at the time of press The amount of change in (21) is absorbed, and a compression amount of 1.8 to 2 times can be obtained with a reaction force almost the same as that of the sealing member of circular cross section under the same pressing condition.

In this embodiment, it is preferable to form a predetermined gap between the second convex portion 22 and the fifth convex portion 25 and the inner wall surface of the dovetail groove 50, respectively. This reduces the friction between the second convex portion 22 and the fifth convex portion 25 and the inner wall surface of the dovetail groove 50 when the protrusion 21 is pressed to deform the sealing material, thereby preventing wear of the sealing material. It is possible to prevent the generation of particles due to damage of the sealing material or the like. Here, the ratio of the cross-sectional area of each gap to the total cross-sectional area of the dovetail groove 50 is preferably less than 3%. At 3% or more, the torsion preventing effect of the seal member when the protrusion 21 is pressed is reduced, and rotation and torsion of the seal member occur in the dovetail groove.

In the present embodiment, the sealing property is secured by the protruding portion 21, the third convex portion 23, and the fourth convex portion 24 of the groove sealing material 20. The material of the groove sealing material 20 is viton, for example, and the hardness is Shore 60-80, for example.

On the other hand, in the communication port of the load lock chamber which frequently repeats the fluctuation of the vacuum and the atmosphere, the pressure applied to the valve element in the vacuum and the atmosphere is different. For example, in the valve body which seals the communication path on the atmospheric side of the load lock chamber, when the load lock chamber is vacuum, a large pressure close to 1 atm is excessively applied. Therefore, all the parts which protrude from the seal groove in the sealing material at the time of vacuum will be crushed, whereby the communication path seal surface of the valve body of the gate valve and the load lock chamber which is a component member which opposes the said gate valve is made. There is a problem of metal touch. Moreover, in the sealing surface of the space which repeats vacuum and air | atmosphere, there exists a phenomenon which slides several millimeters width with pressure fluctuations, and it is not necessarily easy to ensure sealing property following this fine movement phenomenon.

The second aspect of the present invention is mainly used in a gate valve fitted in two spaces having a large pressure difference, to prevent metal touch due to crushing of all the protruding portions, and to ensure sealing property by following the fine movement of the seal surface. The sealing material for homes concerning embodiment is demonstrated.

5 and 6 show cross-sectional shapes of the grooved sealing material according to the second embodiment of the present invention, FIG. 5 shows an initial state in which the pressing force is "0", and FIG. 6 shows a predetermined pressing force. It is a figure which shows a use state.

This groove sealing material is applied to the gate valve 17 provided between the load lock chamber 12 and air | atmosphere in FIG. 1, for example. The inside of the load lock chamber 12 may be reduced in pressure to the same degree of vacuum as the inside of the transfer chamber 11, and in such a case, the pressure difference between the load lock chamber 12 and the atmosphere is large close to 1 atmosphere.

In FIG. 5 and FIG. 6, it is the 2nd convex part 62 and the 3rd convex that this groove sealing material 60 differs from the groove sealing material 20 of FIG. 3 and FIG. 4 which concerns on 1st Embodiment. The concave portion between the portions 63 and between the fourth convex portion 64 and the fifth convex portion 65 is removed, and the second convex portion 62 and the third convex portion 63 and the fourth convex portion 64 are removed. ) And the fifth planar portion 65 as the first planar portion 71 and the second planar portion 72, respectively, the first planar portion 71 and the second planar portion 72 and the dovetail groove ( The sixth space portion 86 and the seventh space portion 87 are formed between the inner wall surfaces of the 90, respectively, between the first convex portion 61 and the second convex portion 62 and the fifth convex portion 65. ) Between the first convex portion 61 and the second convex portion 62 and between the fifth convex portion 65 and the first convex portion 61. It is the point which provided the 3rd planar part 73 and the 4th planar part 74, respectively.

When the sealing material 60 for grooves of such a structure is applied to the sealing surface with a large pressure difference, and the protrusion part (1st convex part) 61 is pressed, the sealing material cross section will press down and crush in downward in FIG. 61 moves downward. At this time, the ratio of the amount of protrusion from the opening end of the opening 91 of the dovetail groove 90 of the protrusion 61 to the depth of the dovetail groove 90 is 10 to 35% and downward of the protrusion 61. Since the deformation amount of the sealing material accompanying the movement of is absorbed by the first space portion 81, the sixth space portion 86, and the seventh space portion 87, the reaction force is initially small and the large compression amount is secured. do. On the other hand, both side portions of the protruding portion 61 are not the concave portions, but the third planar portion 73 and the fourth planar portion 74, and the first space portion 81 and the sixth space portion 86. And the seventh space portion 87 is smaller than the first space portion 41, the fourth space portion 44, and the fifth space portion 45 in the first embodiment, so that the deformation absorbed amount of the sealing material is lower. It becomes relatively small compared with 1st Embodiment. As a result, the pressing force is increased to some extent, and when the amount of deformation absorption in each space portion approaches the upper limit, the reaction force increases rapidly and the increase rate of the amount of compression decreases.

According to this embodiment, since the 6th space part 86 and the 7th space part 87 were formed, the deformation | transformation amount when the protrusion part (1st convex part) 61 is pressed is compared with the 1st space part 81. FIG. Cooperatively absorbed, at the beginning of the pressing, a larger amount of compression is obtained by reaction force almost equal to that of the sealing member having a circular cross section under the same pressing conditions. On the other hand, when the compression width becomes 20-25% based on the height of the sealing material, for example, close to the limit of absorbing the deformation amount of the protrusion 61, the reaction force increases rapidly, and the compression amount is the same compression condition. It becomes smaller than the compression amount in the sealing material of the circular cross section in cross section. As a result, even a gate valve having a large pressure difference in which one side is exposed to the atmosphere and the pressure (atmospheric support) pressed by the atmosphere acts, the metal touch can be avoided and, for example, the generation of particles due to the metal touch can be prevented. Can be. In addition, even when the seal surface is microscopically moved several millimeters wide due to pressure fluctuations, the seal member can be prevented from rotating and twisting in the dovetail groove, thereby ensuring good sealing properties.

Further, according to the present embodiment, the third planar portion 73 between the first convex portion 61 and the second convex portion 62 and between the fifth convex portion 65 and the first convex portion 61. And by providing the 4th planar part 74, pressurization is started and the amount of change of the protrusion part 61 after a predetermined time progress will become small compared with the deformation amount of the sealing material 20 for grooves of 1st Embodiment. Therefore, by the action of the third planar portion 73 and the fourth planar portion 74 and the synergistic action of the first space portion 81, the sixth space portion 86 and the seventh space portion 87 Although the initial compression amount and reaction force as the sealing material are almost the same as the sealing material having a circular cross section under the same pressing condition, the amount of change of the protrusion 61 is determined by the first space portion 81, the sixth space portion 86, and the like. When it approaches the limit absorbed by the 7th space part 87, reaction force increases rapidly. Therefore, sealing property can be ensured, reliably avoiding the metal touch in a sealing part.

In this embodiment, it is preferable that the ratio with respect to the total cross-sectional area of the dovetail groove 90 of the cross-sectional area of the 6th space part 86 and the 7th space part 87 is 2-7%, respectively. If this ratio is smaller than 2%, the amount of compression will be insufficient, and if it exceeds 7%, it will not be able to endure the pressure by the air support, and there is a possibility that metal touch will occur. When the ratio with respect to the total cross-sectional area of the dovetail groove 90 in the cross-sectional area of the 6th space part 86 and the 7th space part 87 is 2 to 7%, respectively, a sufficient compression amount can be ensured initially. Therefore, even if there is air support, the metal touch can be reliably avoided and the sealing property can be improved.

Moreover, it is preferable that the ratio with respect to the whole cross-sectional area of the dovetail groove 90 of the cross-sectional area of the 1st space part 81 is 1 to 15%. Thereby, the same effect can be ensured by cooperating with the 6th space part 86 and the 7th space part 87. FIG.

In this embodiment, securing of sealing property is performed by the protrusion part 61, the 3rd convex part 63, and the 4th convex part 64 of the sealing material 60 for grooves. The material of the sealing material applied to this embodiment is Viton, for example, and the hardness is Shore 60-80, for example.

In this embodiment, it is preferable to form a predetermined gap between the second convex portion 62 and the fifth convex portion 65 and the inner wall surface of the dovetail groove 90, respectively. This reduces the friction between the second convex portion 62 and the fifth convex portion 65 and the inner wall surface of the dovetail groove 90 when the protrusion 61 is pressed to deform the sealing material, thereby preventing wear of the sealing material. It is possible to prevent the generation of particles due to damage of the sealing material or the like. Here, it is preferable that the ratio with respect to the total cross-sectional area of the dovetail groove 90 of the cross-sectional area of each clearance gap is less than 3%. At 3% or more, the torsion preventing effect of the sealing material when the protrusion 61 is pressed is reduced, and rotation and twisting of the sealing material occur in the dovetail groove.

It is a figure which shows the reaction force-compression amount curve in the sealing material for grooves which concerns on 1st Embodiment and 2nd Embodiment. In FIG. 7, A represents a reaction force-compression amount curve of the grooved sealing material 20 in the first embodiment, and B represents a reaction force-compression amount curve of the grooved sealing material 60 in the second embodiment. Indicates. In addition, C represents the reaction force-compression amount curve in the conventional sealing member of circular cross section.

In FIG. 7, the sealing material 20 (A) for groove | channels in 1st Embodiment has a big compression amount by the same reaction force compared with the sealing material C of circular cross section, and the recommended application range is considerably large. It can be seen that it is enlarged. In addition, although the sealing material 60 (B) for groove | channel in 2nd Embodiment is compared with the sealing material C of a circular cross section, the reaction force and compression amount of substantially the same are obtained initially, but reaction force is rapid after that. It can be seen that the amount of compression is increased to a certain limit and thereby can withstand high pressure. In addition, the recommended application range of the home sealing material 60 (B) in 2nd Embodiment is narrower than the home sealing material 20 (A) in 1st Embodiment.

10: substrate processing system
11: return room
12: load lock room
13: plasma processing apparatus
17: gate valve
20, 60: sealing material for home
21, 61: 1st convex part (protrusion part)
22, 62: second convex portion
23, 63: 3rd convex part
24, 64: 4th convex part
25, 65: 5th convex part
41: first space part
44: fourth space part
45: fifth space part
86: sixth space part
87: seventh space
88: eighth space part

Claims (15)

A cross-sectional shape perpendicular to the stretching direction, which is attached to a seal groove formed on the surface of one member in the contact portion of the two members and which seals the gap between the two members by contacting the surface of the other member, has a single shape. In the seal member for the annular groove,
The said cross-sectional shape has the 1st convex part, the 2nd convex part, the 3rd convex part, the 4th convex part, and the 5th convex part arrange | positioned sequentially along the circumferential direction,
In the state where it is attached to the said seal groove,
The first convex portion forms a protrusion that protrudes from an opening end of the seal groove,
The third convex portion and the fourth convex portion located at the bottom angle of an isosceles triangle having the first convex portion as vertices respectively contact the bottom plane of the seal groove,
A first space portion is formed between the first concave portion formed between the third convex portion and the fourth convex portion and the first convex portion that absorbs the deformation amount when the first convex portion is pressed between the bottom plane of the seal groove,
The second convex portion and the fifth convex portion are respectively close to two wall surfaces facing the seal groove,
The first convex portion is pressed in cooperation with the first space between the surface between the second convex portion and the third convex portion and between the fourth convex portion and the fifth convex portion and the inner wall surface of the seal groove. A sealing member for grooves, wherein a second space portion and a third space portion are respectively formed to absorb the amount of deformation when they are made. The grooved sealing material according to claim 1, wherein a ratio of the length of the protrusion to the depth of the seal groove, which protrudes from the opening end of the seal groove, is 10 to 35%. The said 2nd convex part, the 3rd convex part, the 4th convex part, and the 5th convex part contact a inner wall surface of the said seal groove, respectively, when the said 1st convex part is pressed, and it seals. A sealing material for grooves, characterized by suppressing twisting of the ashes. The sealing member for a groove according to claim 1 or 2, wherein an interval between the third convex portion and the fourth convex portion is equal to or less than an opening width of an opening of the seal groove. The grooved sealing material according to claim 1 or 2, wherein a predetermined gap is formed between the second convex portion and the fifth convex portion and an inner wall surface of the seal groove. The grooved sealing material according to claim 5, wherein the ratio of the cross-sectional area of the predetermined gap to the total cross-sectional area of the seal groove is less than 3%. The second concave portion and the third concave portion are formed between the second convex portion and the third convex portion, and between the fourth convex portion and the fifth convex portion, respectively.
When the first convex portion is pressed between the second concave portion and the third concave portion and the inner wall surface of the seal groove, the first convex portion cooperates with the first space portion to be the same as the seal member having a circular cross section under the same pressing condition. A sealing material for grooves, wherein a fourth space portion and a fifth space portion are formed for reaction force and for obtaining a large compression amount, respectively. The groove | channel sealing material of Claim 7 whose ratio with respect to the whole cross-sectional area of the said seal groove of the cross-sectional area in the cross section perpendicular | vertical to the said extending | stretching direction of a said 1st space part is 10 to 25%. The ratio of the cross-sectional area in the cross section perpendicular to the stretching direction of the fourth space portion and the fifth space portion to the total cross-sectional area of the seal grooves is 2 to 10%, respectively. , Sealing material for home. 8. The method according to claim 7, wherein the first space portion, the fourth space portion, and the fifth space portion cooperate with the first space portion, the fourth space portion, and the fifth space portion, respectively. The 4th recessed part and 5th recessed part which respectively increase the said compression amount are formed, The sealing material for grooves characterized by the above-mentioned. The first flat part and the second flat part are each provided between the second convex part and the third convex part, and between the fourth convex part and the fifth convex part.
When the said 1st convex part is pressed between the said 1st flat part and the 2nd flat part, and the inner wall surface of the said seal groove, it cooperates with the said 1st space part and absorbs a deformation | transformation quantity, and the press start initially is the same pressing condition. The compression amount and reaction force which are the same as the cross-sectional circular sealing material in are obtained, and reaction force increases rapidly after that, and the compression amount is made smaller than the compression amount in the cross-sectional circular sealing material in the same pressing condition. A sixth space portion and a seventh space portion, respectively, characterized in that the sealing material for the groove. 12. The sealant according to claim 11, wherein a ratio of the cross-sectional area in the cross section perpendicular to the stretching direction of the first space portion to the entire cross-sectional area of the seal groove is 1 to 15%. The ratio of the cross-sectional area in the cross section perpendicular to the stretching direction of the sixth space portion and the seventh space portion to the total cross-sectional area of the seal grooves is 2 to 7%, respectively. , Sealing material for home. 12. The method according to claim 11, wherein the first space portion, the sixth space portion, and the seventh space portion cooperate with the first convex portion and the second convex portion, and between the fifth convex portion and the first convex portion, respectively. When the first convex portion is pressed, at the beginning of the pressing, the same amount of compression and reaction force as in the sealing member of the circular cross section under the same pressing condition are obtained, and then, the reaction force increases rapidly, and the compression amount is equal to the same. The sealing material for grooves provided with the 3rd planar part and the 4th planar part which respectively make smaller than the compression amount in the said cross-sectional circular sealing material in press condition. The grooved sealing material according to claim 1 or 2, which is made of an elastic material.

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