JP5780730B2 - Annular sealing material - Google Patents

Description

  The present invention relates to an annular seal member that is mounted in an annular seal groove formed in a mounting member and is used for sealing between the mounting member and an abutting member, and more specifically, a processing pot. The present invention relates to an annular sealing material used for sealing between a housing portion and a lid.

  Conventionally, for example, fumigation has been performed using a treatment kettle. Such a processing hook includes a substantially cylindrical accommodating portion, and one and the other lid provided to seal both ends of the accommodating portion. For example, a sealing groove is formed on the lid side. The annular sealing material is mounted in the seal groove, and the annular sealing material is sealed between the lid and the accommodating portion by making the lid and the accommodating portion face each other and the annular sealing material is brought into contact with the accommodating portion. It comes to stop.

  Incidentally, as shown in FIG. 13, the annular sealing material 100 used for sealing has a substantially U-shaped cross section, and is continuously extended from the bulging portion 102 and the bulging portion 102. A main body portion 108 including a first lip portion 104 and a second lip portion 106, and a recess 114 is formed between the first lip portion 104 and the second lip portion 106, and an annular seal The width of the material 100 is set to be approximately the same as the width of the seal groove to be mounted.

  As shown in FIG. 14, when the annular sealing material 100 is mounted in, for example, the sealing groove 230 provided in the lid body 220 of the processing pot 200, first, the first lip 104 and the first lip portion 104 of the annular sealing material 100 are The lip 106 is mounted so that the lip 106 side is located on the bottom 232 side of the seal groove 230 and the bulging part 102 is located on the opening 240 side, and the bulging part 102 bulges slightly outside the opening 240. Installed.

  When the annular seal member 100 is mounted in the seal groove 230, it is annular between the radially inner surface 236 of the seal groove 230 and the radially inner peripheral side 110 of the annular seal member 100 and between the radially outer surface 238 of the seal groove 230 and the annular groove. The space between the outer peripheral side 112 of the sealing material 100 is sealed.

  Next, in this state, the lid body 220 and the housing portion 210 are opposed to each other, and the fluid 300 is introduced into the seal groove 230 from the fluid introduction hole 234 on the bottom portion 232 side of the seal groove 230 formed in the lid body 220.

  Then, the concave portion 114 of the annular sealing material 100 receives the fluid 300, and the annular sealing material 100 is pressed toward the opposing accommodating portion 210, and the bulging portion 102 is brought into contact with the accommodating portion 210, so that the bulging portion 102 and the accommodating portion are accommodated. The space between the portions 210 is sealed.

  By sealing these three places, the space between the housing portion 210 and the lid 220 can be completely sealed with the annular sealing material 100.

  By the way, when the space between the housing portion 210 and the lid body 220 is sealed with the annular sealing material 100 in this way, when the pressure of the fluid 300 introduced from the bottom 232 side of the sealing groove 230 is increased, the annular sealing material. As shown in FIG. 15A, 100 is strongly pushed toward the housing portion 210 by the pressure of the fluid 300 introduced from the bottom 232 side of the seal groove 230, and in particular, the entire bulging portion 102 is pressed against the housing portion 210. The contact surface 212 is pressed and deformed.

At this time, the corner portions 116 and 118 of the bulging portion 102 may protrude between the mounting surface 222 of the lid 220 and the contact surface 212 of the housing portion 210.
Then, after the protruding portion is sealed, the space between the housing portion 210 and the lid body 220 is sealed, and then a fluid 302 such as carbon dioxide gas is introduced into the housing portion 210 as shown in FIG. When the pressure is generated from the inside to the outside of the housing portion 210, the corner portion 116 on the radially inner peripheral side 110 of the bulging portion 102 will be pressed toward the radially outer peripheral side 112 in the future. The corner portion 118 of 112 further protrudes between the mounting surface 222 of the lid body 220 and the contact surface 212 of the housing portion 210.

  As described above, when only the corner portion 118 of the bulging portion 102 protrudes between the mounting surface 222 of the lid body 220 and the contact surface 212 of the housing portion 210, the posture of the annular sealing material 100 is changed within the seal groove 230. Will be inclined.

  In particular, as in the state shown in FIG. 15B, both the pressure by the fluid 300 introduced from the bottom 232 of the annular seal member 100 and the pressure by the fluid 302 generated from the inside of the housing portion 210 are used. When pressure is applied, the entire annular sealing material 100 is pulled in the direction in which this protrusion occurs (the lower left direction in FIG. 15B), and the diameter of the inner diameter side 110 of the annular sealing material 100 and the diameter of the seal groove 230 are increased. The sealing performance between the inner surface 236 and the inner surface 236 is deteriorated, and the fluid introduced from the inner diameter side 110 of the annular seal member 100 and the inner diameter surface 236 of the seal groove 230 from the bottom 232 side of the seal groove 230. 300 may leak out.

Such leakage of the fluid 300 is a particularly serious problem because it causes a failure to obtain a desired sealing performance.
In addition, since a large load is locally applied to the protruding portion of the annular sealing material 100, it is a factor that shortens the product life, and between the housing portion 210 and the lid 220. Due to rubbing, particles may be generated or broken, and the present situation is that solutions for these problems are required.

  The present invention has been made in view of such a current situation, and the fluid introduced from the bottom side of the seal groove does not leak from the seal groove, and the gap between the mounting member and the contact member is reliably sealed. It aims at providing the annular sealing material which can be stopped.

  Furthermore, the present invention does not cause the corner portion of the bulging portion to protrude from between the mounting member and the abutting member, thereby causing no inclination in the seal groove, suppressing the generation of particles and tearing, An object of the present invention is to provide an annular sealing material capable of reliably sealing between the mounting member and the contact member.

The present invention was invented to solve the problems in the prior art as described above,
The annular sealing material of the present invention is
Mounted in a straight seal groove formed on the mounting surface of the mounting member in an annular shape from the bottom toward the opening, and after facing the mounting surface of the mounting member and the contact surface of the contact member, An annular sealing material that is pressed against the contact surface by introducing a fluid from the bottom of the seal groove, thereby sealing between the mounting member and the contact member,
When the annular sealing material is mounted in the straight-shaped sealing groove, in its cross section,
A bulging portion disposed so as to be positioned on the opening side of the seal groove, and bulging to a contact surface side from the mounting surface;
A first lip portion and a second lip disposed so as to be located on the bottom side of the seal groove and continuously extending from the bulge portion along the radially inner side surface and the radially outer side surface of the seal groove, respectively. And
A main body having at least
The main body is
A radially outer side and a radially inner peripheral side of the bulging portion are formed in a straight shape in accordance with a radially outer surface and a radially inner surface of the straight-shaped seal groove, and a radially outer side formed in the straight shape On the side surface on the inner diameter side, convex portions that are respectively projected on the outer diameter side and the inner diameter side are formed.
Furthermore, the first lip and the second lip are
It has a line-symmetric shape .

  If the convex portion is formed in this way, even if the annular sealing material is inclined in the seal groove, the convex portion firmly contacts the inner diameter surface and the outer diameter surface of the seal groove. The fluid introduced from the bottom side of the seal does not leak from the inner diameter side of the seal groove and the inner diameter side of the annular seal material and between the outer diameter surface of the seal groove and the outer diameter side of the ring seal material. It is possible to reliably seal between the member and the contact member.

The annular sealing material of the present invention is
The main body is
A protrusion preventing chamfered portion is formed at a corner portion located on the inner diameter side and / or outer diameter side of the bulging portion.

  The state in which such a chamfered portion for preventing protrusion is provided is a state in which the corner portion where the protrusion has conventionally occurred is eliminated, and as a result, the corner portion of the bulging portion is formed between the mounting member and the contact member. The annular sealing material does not protrude from the gap, and the annular sealing material does not tilt, so that the gap between the mounting member and the contact member can be reliably sealed.

  Alternatively, the fact that no protrusion occurs does not apply a large load locally to the annular sealing material, so that it is possible to prevent the product life from being shortened, and also to prevent generation of particles and tearing.

The annular sealing material of the present invention is
The main body is
A protrusion ring for preventing protrusion is made of a material harder than the main body at the corners located on the inner diameter side and / or the outer diameter side of the bulging part.

  If the backup ring for preventing protrusion is disposed in this way, the backup ring for preventing protrusion is harder than the main body, and therefore the corner portion of the bulging portion is less likely to be deformed, and the mounting member and the contact member It can be prevented from protruding from between. This also prevents the annular seal material from being inclined in the seal groove.

  Therefore, it is possible to prevent the product life of the annular sealing material from being shortened, further prevent generation of particles and tearing, and fluid introduced from the bottom side of the seal groove leaks from between the mounting member and the contact member. Can also be prevented.

The annular sealing material of the present invention is
A protrusion preventing chamfered portion is formed at a corner portion opposite to the corner portion where the protrusion preventing backup ring is disposed.

  In this way, when the protrusion prevention backup ring is provided on one side of the corner portion and the protrusion prevention chamfered portion is formed on the other side, it is further expanded than the case where only the protrusion prevention backup ring is provided. It is possible to prevent the corner portion of the protruding portion from being easily deformed and to protrude from between the mounting member and the abutting member, thereby further preventing the annular sealing material from being inclined in the seal groove.

The annular sealing material of the present invention is
The first lip portion and the second lip portion are
When the side continuous with the bulging portion is the front end and the opposite side is the rear end,
It is configured to expand outwardly from the width of the bulging portion as it goes from the front end to the rear end.

  If the first lip portion and the second lip portion are configured in this way, when the annular sealing material is mounted in the seal groove, both the lip portions are always stretched against the radially inner surface and the radially outer surface of the seal groove. Therefore, the fluid introduced into the seal groove from the bottom side of the seal groove is the inner diameter side of the seal groove, the inner diameter side of the annular seal material, and the outer diameter surface of the seal groove and the diameter of the annular seal material. It is possible to reliably prevent leakage from between the outer peripheral sides.

The annular sealing material of the present invention is
The first lip portion and the second lip portion are
It is characterized by having the same thickness from the front end to the rear end.

  If the first lip portion and the second lip portion are substantially the same thickness in this way, when the fluid is introduced into the seal groove from the bottom side of the seal groove, both lip portions are directed toward the inside of the seal groove. There is no turning over.

  Therefore, the fluid introduced into the seal groove from the bottom side of the seal groove is between the radially inner surface of the seal groove and the radially inner side of the annular seal material, and between the radially outer surface of the seal groove and the radially outer side of the annular seal material. It is possible to reliably prevent leakage from the air.

According to the annular sealing material of the present invention, since the convex portion is provided on the body portion of the annular sealing material, when the annular sealing material is mounted in the sealing groove, the fluid introduced from the bottom side of the sealing groove is Securely seals between the mounting member and the abutting member without leaking from the inner diameter side, the inner diameter side of the annular sealing material, and the outer diameter side surface of the seal groove and the outer diameter side of the annular sealing material. can do.

Furthermore, according to the annular sealing material of the present invention, since the chamfering portion for preventing the protrusion is provided at the corner portion located on the opening side of the main body portion, the corner portion of the bulging portion is located between the mounting member and the contact member. The gap between the mounting member and the abutting member can be reliably sealed without protruding.

Further, according to the annular sealing material of the present invention, since the protrusion preventing backup ring made of a material harder than the main body is disposed at the corner located on the opening side of the main body, the corner portion of the bulging portion Does not protrude from between the mounting member and the contact member, and the space between the mounting member and the contact member can be reliably sealed.

Furthermore, according to the annular sealing material of the present invention, in addition to the above-described configuration, the first lip portion and the second lip portion are configured to expand outward beyond the width of the body portion. Fluid introduced from the bottom side of the groove does not leak between the inner diameter side of the seal groove and the inner diameter side of the annular sealing material, and between the outer diameter surface of the sealing groove and the outer diameter side of the annular sealing material, The space between the mounting member and the contact member can be reliably sealed.

FIG. 1 is a cross-sectional view of an annular sealing material in the first embodiment of the present invention. FIG. 2 is a cross-sectional view for explaining a state in which the annular sealing material in the first embodiment of the present invention is mounted in the seal groove. FIG. 3 is an explanatory view of the annular sealing material in the first embodiment of the present invention in which the bulging portion is deformed by the fluid, and FIG. 3 (a) is an illustration of the annular sealing material in a state where the fluid is introduced from the sealing groove. FIG. 3B is an explanatory view of the annular sealing material in a state where the fluid is introduced from the seal groove and the fluid is generated from the inside to the outside of the housing portion. FIG. 4 is a cross-sectional view of the annular sealing material in the second embodiment of the present invention. FIG. 5 is a cross-sectional view for explaining a situation in which the annular sealing material in the second embodiment of the present invention is mounted in the seal groove. FIG. 6 is an explanatory view of the annular sealing material in the second embodiment of the present invention in which the bulging portion is deformed by the fluid, and FIG. 6 (a) is an illustration of the annular sealing material in a state where the fluid is introduced from the sealing groove. FIG. 6B is an explanatory diagram of the annular sealing material in a state where the fluid is introduced from the seal groove and the fluid is generated from the inside to the outside of the housing portion. FIG. 7 is a cross-sectional view of the annular sealing material in the third embodiment of the present invention. FIG. 8 is a schematic view of a backup ring for preventing protrusion which is formed of a divided body. FIG. 9 is a cross-sectional view for explaining a situation in which the annular sealing material according to the third embodiment of the present invention is attached to the seal groove. FIG. 10 is an explanatory view of the annular sealing material in the third embodiment of the present invention in which the bulging portion is deformed by the fluid, and FIG. 10 (a) shows the annular sealing material in a state where the fluid is introduced from the sealing groove. FIG. 10B is an explanatory view of the annular sealing material in a state where the fluid is introduced from the seal groove and the fluid is generated from the inside to the outside of the housing portion. FIG. 11 is an explanatory view showing another form of the seal groove to which the annular sealing material of the present invention is attached. FIG. 12 is a cross-sectional view of an annular sealing material obtained by combining the second and third embodiments of the present invention. FIG. 13 is a cross-sectional view of a conventional annular sealing material. FIG. 14 is a cross-sectional view for explaining a situation where a conventional annular sealing material is mounted in a seal groove. FIG. 15 is an explanatory view of a conventional annular sealing material in which a bulging portion is deformed by a fluid, and FIG. 15 (a) is an explanatory view of the annular sealing material in a state where a fluid is introduced from a sealing groove, and FIG. ) Is an explanatory view of the annular sealing material in a state where the fluid is introduced from the seal groove and the fluid is generated from the inside to the outside of the housing portion.

Hereinafter, embodiments of the present invention will be described in more detail based on the drawings.
The annular sealing material of the present invention is used for sealing between a housing portion and a lid of a processing pot used for, for example, fumigation processing.

<First Embodiment>
First, as shown in FIG. 1, the annular sealing material 10a according to the first embodiment of the present invention has a substantially Y-shaped cross section, and a bulging portion 12 that comes into contact with the contact surface , The body part 13 continuously extended from the bulging part 12 , the first lip part 14 formed on the inner diameter side 20 and the outer diameter side 22, respectively, and continuously extending from the body part 13, and A body portion 18 having a second lip portion 16 is provided, and a recess 24 is formed between the first lip portion 14 and the second lip portion 16.

  As a particularly characteristic configuration, the outer peripheral surface of the main body 18 is in contact with the inner diameter surface 66 and / or the outer diameter surface 68 of the seal groove 60 when the annular sealing material 10a is mounted in the seal groove 60 described later. Protrusions 26 and 28 are formed at the contact points.

  In FIG. 1, each of the convex portions 26 and 28 is provided on the inner diameter side 20 and the outer diameter side 22, but the present invention is not limited to this. The number may be different between the inner diameter side 20 and the outer diameter side 22, or the position may be slightly shifted in the vertical direction between the inner diameter side 20 and the outer diameter side 22.

Width T2 of the body portion 13 including such projecting portions 26 and 28 is preferably 1.15 to 1.30 times the width T1 of the body portion 13.
Further, the first lip portion 14 and the second lip portion 16 have the width of the body portion 13 as extending from the front end to the rear end when the side continuous with the body portion 13 is the front end and the opposite side is the rear end. It is configured to expand outward.

The spread width T3 between the first lip portion 14 and the second lip portion 16 is preferably about 1.30 to 1.40 times the width T1 of the body portion 13 .
The first lip portion 14 and the second lip portion 16 are set so that the thickness T4 is substantially the same from the front end to the rear end.

  The material of the annular sealing material 10a is not particularly limited as long as it is used for a normal sealing material. For example, nitrile rubber, hydrogenated nitrile rubber, fluorine rubber, silicone rubber, urethane rubber, ethylene propylene rubber ( Various synthetic rubber materials such as EPDM) can be used.

Among them, it is preferable to use silicone rubber or ethylene propylene rubber (EPDM) which is excellent in both sealing performance and shape retention.
When the annular sealing material 10a of the present invention configured as described above is mounted in the seal groove 60 provided in the lid 50 of the processing pot 80 as shown in FIG. The sealing material 10a is mounted such that the first lip portion 14 and the second lip portion 16 side are located on the bottom 62 side of the seal groove 60 and the bulging portion 12 is located on the opening 63 side.

The width T5 of the seal groove 60 is preferably about 0.90 to 1.05 times the width T1 of the body portion 13 . By setting such a width T5, it is easy to mount the annular sealing material 10a in the seal groove 60, and between the inner diameter side surface 66 of the sealing groove 60 and the inner diameter side 20 of the annular sealing material 10a. And, the sealing performance between the outer diameter surface 68 of the seal groove 60 and the outer diameter side 22 of the annular sealing material 10a can be ensured.

  As shown in FIG. 3A, when the fluid 70 is introduced into the seal groove 60 from the fluid introduction hole 64 on the bottom 62 side of the seal groove 60 formed in the lid 50, the recess 24 of the annular seal material 10a. Receives the fluid 70, the annular sealing material 10 a moves toward the opposing accommodating portion 40, the bulging portion 12 comes into contact with the abutting surface 42 of the accommodating portion 40, and the gap between the bulging portion 12 and the accommodating portion 40 is reached. Will be sealed.

Here, the fluid 70 introduced into the seal groove 60 is not particularly limited, but a gas is preferable, and nitrogen gas is particularly preferable because it is easy to handle.
Next, as shown in FIG. 3 (b), when a fluid 72 such as carbon dioxide gas is introduced into the inside of the housing portion 40 and pressure is generated from the inside of the housing portion 40 to the outside, it will bulge in the future. The corner portion 30 on the inner diameter side 20 of the portion 12 is crushed to the outer diameter side 22, and the corner portion 32 on the outer diameter side 22 is connected to the mounting surface 52 of the lid 50 and the contact surface 42 of the housing portion 40. It will be pressed toward the gap.

  As a result, normally, the entire annular sealing material 10 a is pulled in the direction of the corner portion 32 (the lower left direction in FIG. 3B), and the sealing force on the inner diameter side 20 is increased on the outer diameter side 22. There arises a state where the sealing force decreases.

  However, in the annular sealing material 10a of the present embodiment, since the convex portions 26 and 28 are provided on the inner diameter side 20 and the outer diameter side 22, even if the annular sealing material 10a is inclined in the seal groove 60, The convex portions 26 and 28 are in firm contact with the radially inner surface 66 and the radially outer surface 68 of the seal groove 60, and the fluid 70 introduced from the bottom 62 side of the seal groove 60 is in contact with the radially inner surface 66 of the seal groove 60. Between the lid 50 and the accommodating portion 40 without leaking from the inner diameter side 20 of the annular sealing material 10a and the outer diameter surface 68 of the sealing groove 60 and the outer diameter side 22 of the annular sealing material 10a. It can be surely sealed.

In addition, the first lip portion 14 and the second lip portion 16 because it is configured so as to be widened outward than the width T1 of the cylinder portion 13, is mounted an annular seal member 10a in the seal groove 60 in the At this time, the first lip portion 14 and the second lip portion 16 firmly come into contact with the radially inner side surface 66 and the radially outer side surface 68 of the seal groove 60.

  Even if the fluid 70 is introduced into the seal groove 60 from the bottom 62 side of the seal groove 60, the first lip portion 14 and the second lip portion 16 stop the fluid 70, and the fluid 70 is within the diameter of the seal groove 60. It is possible to reliably prevent leakage from between the side surface 66 and the radially inner side 20 of the annular seal member 10a and the radially outer surface 68 of the seal groove 60 and the radially outer side 22 of the annular seal member 10a.

  The first lip portion 14 and the second lip portion 16 are set so as to have substantially the same thickness T4 from the front end to the rear end, so that the rear end is not turned up by the fluid 70. Further, there is no possibility that the fluid 70 leaks from the inner diameter side surface 66 of the seal groove 60 and the inner diameter side 20 of the annular sealing material 10a and from the outer diameter surface 68 of the sealing groove 60 and the outer diameter side 22 of the annular sealing material 10a. Is.

  According to the annular sealing material 10a in the first embodiment, since it has the above-described configuration, the fluid 70 introduced from the bottom 62 side of the sealing groove 60 is caused to cause the inner diameter surface 66 of the sealing groove 60 and the annular sealing material. The gap 50 is securely sealed between the lid 50 and the housing portion 40 without leaking from the inner diameter side 20 of the 10a and the outer diameter surface 68 of the seal groove 60 and the outer diameter side 22 of the annular sealing material 10a. can do.

<Second Embodiment>
Next, an annular sealing material 10b according to a second embodiment of the present invention will be described with reference to FIGS.

  Since the annular sealing material 10b shown in FIGS. 4 to 6 basically has the same configuration as the annular sealing material 10a in the first embodiment shown in FIGS. The same reference numerals are assigned and detailed description thereof is omitted.

  The annular sealing material 10b shown in FIG. 4 is different from the annular sealing material 10a of the first embodiment in that a chamfered portion 90 for preventing protrusion is formed at the corner portion 32 on the outer peripheral side 22 of the diameter.

When the annular sealing material 10b is attached to the seal groove 60, the corner portion 32 on the outer circumferential side 22 is separated from the gap between the lid 50 and the accommodating portion 40 as shown in FIG. Become.
For this reason, as shown in FIG. 6A, even if the fluid 70 is introduced from the bottom 62 side of the seal groove 60, the corner portion 32 of the annular seal material 10 b remains between the lid body 50 and the accommodating portion 40. Therefore, it does not cause protrusion.

  As shown in FIG. 6B, even when a fluid 72 such as carbon dioxide gas is introduced into the housing portion 40 and pressure is generated from the inside to the outside of the housing portion 40, the expansion is also caused. Since the corner portion 30 on the inner diameter side 20 of the protruding portion 12 is crushed to the outer diameter side 22, and the corner portion 32 on the outer diameter side 22 does not protrude between the lid 50 and the accommodating portion 40, As a result, the annular sealing material 10b is not inclined in the seal groove 60, and generation of particles and tearing can be prevented.

  4 to 6, the chamfered shape of the protrusion preventing chamfer 90 is a 45-degree C chamfer, but it may be, for example, an R chamfer. As long as this portion is chamfered so that 32 is eliminated, the shape may be any shape, and the shape is not particularly limited.

  In addition, if the range where the protrusion preventing chamfered portion 90 is provided is made larger than necessary, the portion of the bulging portion 12 that comes into contact with the contact surface 42 becomes too small and the space between the bulging portion 12 and the contact surface 42 is reduced. Therefore, it is preferable to determine the size of the protrusion preventing chamfered portion 90 in consideration of the desired sealing performance.

  Therefore, the annular sealing material 10b in the second embodiment can surely seal between the lid 50 and the accommodating portion 40 more reliably than the annular sealing material 10a in the first embodiment.

<Third Embodiment>
Next, an annular sealing material 10c according to a third embodiment of the present invention will be described with reference to FIGS.

  Since the annular sealing material 10c shown in FIGS. 7 to 10 basically has the same configuration as the annular sealing material 10b in the second embodiment shown in FIGS. 4 to 6, The same reference numerals are assigned and detailed description thereof is omitted.

  The annular sealing material 10c shown in FIG. 7 is the second point in that a protrusion preventing back-up ring 92 is provided instead of forming a protrusion preventing chamfer 90 at the corner portion 32 on the outer peripheral side 22 of the diameter. This is different from the annular sealing material 10b in the embodiment.

  The protruding prevention backup ring 92 may be made of any material as long as it is harder than the main body portion 18, but it is preferable to use, for example, high density polyester or polyacetal.

  The protrusion preventing backup ring 92 preferably has a form that can be hooked with respect to the main body 18 so as not to drop off when the backup ring 92 is attached to the seal groove 60 together with the main body 18.

  Although it does not specifically limit as such a form, For example, it is set as the reverse taper shape as shown in FIGS. 7-10, or it is set as the shape (not shown) which can be mutually fitted like a puzzle. It can be determined in consideration of the ease of processing.

  Further, the protrusion-preventing backup ring 92 does not have to be annular. For example, as shown in FIG. 8, a plurality of linear division bodies 98 formed in accordance with the outer peripheral length of the annular sealing material 10c are used. The divided bodies 98 may be mounted in the seal groove 60 so as to overlap each other.

When such an annular seal member 10c is mounted in the seal groove 60, the corner portion 32 is disposed so as to close the gap between the lid 50 and the accommodating portion 40 as shown in FIG.
For this reason, as shown in FIG. 10A, even if the fluid 70 is introduced from the bottom 62 side of the seal groove 60, the protrusion hardly protrudes so as to close the gap between the lid 50 and the accommodating portion 40. Since the prevention backup ring 92 is located, a part of the annular sealing material 10c is surely prevented from protruding into the gap between the lid 50 and the accommodating portion 40.

  As shown in FIG. 10B, even when a fluid 72 such as carbon dioxide gas is introduced into the housing portion 40 and pressure is generated from the inside of the housing portion 40 toward the outside, the diameter is also reduced. Since the protrusion prevention backup ring 92 is positioned so as to close the corner portion 32 on the outer peripheral side 22, a part of the annular sealing material 10 c does not protrude between the lid 50 and the accommodating portion 40. As a result, the annular sealing material 10c is not inclined in the seal groove 60.

  Therefore, the annular sealing material 10c in the third embodiment is more reliably the lid 50 and the accommodating portion 40 than the annular sealing material 10a in the first embodiment, like the annular sealing material 10b in the second embodiment. Can be sealed.

  As described above, the annular sealing material 10 in the first to third embodiments has the above-described form, so that the fluid 70 introduced from the bottom 62 side of the seal groove 60 is in the seal groove 60. The lid 50 and the accommodating portion 40 do not leak from the inner diameter side surface 66 and the inner diameter side 20 of the annular seal member 10 and from the outer diameter surface 68 of the seal groove 60 and the outer diameter side 22 of the annular seal member 10. However, the form of the seal groove 60 in which the annular sealing material 10 is mounted is not limited to that used in the above description. .

  For example, in the first to third embodiments, a straight seal groove 60 is illustrated. However, as shown in FIG. 11, the inner surface 66 and the outer surface 68 of the seal groove 60 are notched. The portions 94 and 96 may be provided, and the convex portions 26 and 28 of the annular sealing material 10 may be positioned closer to the contact surface 42 than the notches 94 and 96.

  The notches 94 and 96 are for preventing the annular sealing material 10 from dropping from the seal groove 60 when the processing pot 80 is opened and the load due to the fluids 70 and 72 is eliminated.

  Further, in Embodiments 1 to 3, the chamfered portion 90 for preventing protrusion is formed in the corner portion 32 on the diameter outer peripheral side 22 of the annular sealing material 10 or the backup ring 92 for preventing protrusion is disposed. The inner circumference side 20 or both sides 20 and 22 may be used. In short, these positions may be set in accordance with the direction in which the annular sealing material 10 is deformed by pressure.

  Further, the second embodiment and the third embodiment are combined, and a protrusion preventing chamfered portion 90 is provided in the corner portion 30 as shown in FIG. 12, and a protrusion preventing backup ring 92 is provided in the opposite corner portion 32. An annular sealing material 10d may be used, and the annular sealing material 10 of the present invention can be variously modified without departing from the object of the present invention.

DESCRIPTION OF SYMBOLS 10 ... Ring seal material 10a ... Ring seal material 10b ... Ring seal material 10c ... Ring seal material 10d ... Ring seal material 12 ... Bulge part
13 ... Body 14 ... First lip 16 ... Second lip 18 ... Main body 20 ... Diameter inner periphery 22 ... Diameter outer periphery 24 ... Recess 26 ..Convex part 28 ... Convex part 30 ... Corner part 32 ... Corner part 40 ... Accommodating part 42 ... Contact surface 50 ... Cover body 52 ... Mounting surface 60 ... Seal groove 62 ... Bottom 63 ... Opening 64 ... Fluid introduction hole 66 ... Diameter inner surface 68 ... Diameter outer surface 70 ... Fluid 72 ... Fluid 80 ... Treatment pot 90 ... Chamfering part for preventing protrusion 92 ... Backup ring for preventing protruding part 94 ... Notch part 96 ... Notch part 98 ... Divided body T1 ·· Body width T2 ··· widening the width between the width T3 · · first lip portion of the body including the protruding portion and the second lip portion T4 · · lip thick T5 · · Width 100 of the groove groove ... Annular seal material 102 ... Swelling portion 104 ... First lip portion 106 ... Second lip portion 108 ... Main body portion 110 ... Inner diameter side 112 · · · Outer diameter side 114 · · · Recess portion 116 · · · Corner portion 118 · · · Corner portion 200 · · · Treatment pot 210 · · · Housing portion 212 · · · Contact surface 220 · · · Lid 222 ... mounting surface 230 ... seal groove 232 ... bottom 234 ... fluid introduction hole 236 ... inner diameter side 238 ... outer diameter side 240 ... opening 300 ... fluid 302 ··fluid

Claims (5)

Mounted in a straight seal groove formed on the mounting surface of the mounting member in an annular shape from the bottom toward the opening, and after facing the mounting surface of the mounting member and the contact surface of the contact member, An annular sealing material that is pressed against the contact surface by introducing a fluid from the bottom of the seal groove, thereby sealing between the mounting member and the contact member,
When the annular sealing material is mounted in the straight-shaped sealing groove, in its cross section,
A body portion disposed to be closer to the opening side in the seal groove ;
A bulging portion that continuously extends from the body portion and bulges toward the contact surface side than the mounting surface;
A first lip portion and a second lip portion, which are disposed so as to be positioned on the bottom side of the seal groove and extend continuously from the body portion along the radially inner surface and the radially outer surface of the seal groove, respectively. When,
A main body having at least
The main body is
A diameter outer peripheral side and a diameter inner peripheral side of the body portion are formed in a straight shape in accordance with a diameter outer side surface and a diameter inner side surface of the straight-shaped seal groove, and the diameter outer peripheral side and the diameter formed in the straight shape are formed. On the side surface on the inner peripheral side, convex portions that are respectively projected on the outer diameter side and the inner diameter side are formed.
Furthermore, the first lip and the second lip are
When the side continuous with the body portion is the front end and the side opposite to the front end is the rear end, it is configured to have substantially the same thickness from the front end to the rear end and is in contact with the contact surface. The height from the end surface of the bulging portion to the rear end of the first lip portion is the same as the height from the end surface of the bulging portion in contact with the contact surface to the rear end of the second lip portion. An annular sealing material characterized by a height . The annular sealing material according to claim 1, wherein a chamfered portion for preventing protrusion is formed at a corner portion on the inner diameter side and / or on the outer diameter side of the main body portion located on the opening side. . Wherein the corner portion of the radially inner peripheral side and / or radially outward peripheral side located on the opening side of the main body portion, said body for preventing the backup ring protruding made of a hard material than portion is arranged The annular sealing material according to claim 1.   The annular sealing material according to claim 3, wherein a chamfered portion for preventing protrusion is formed at a corner portion opposite to the corner portion where the backup ring for preventing protrusion is disposed. The first lip portion and the second lip portion are
5. The annular sealing material according to claim 1, wherein the annular sealing material is configured to expand outward from the width of the body portion as it goes from the front end to the rear end.

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