JP2003240123A - Sealing material for dovetail groove - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sealing material for a dovetail groove, which constantly obtains secured air-tightness, hardly wears, also obtains a space of high cleanness, with respect to the annular sealing material used by being fitted to the dovetail groove, while projecting its upper end part. <P>SOLUTION: This sealing material 4 for dovetail groove has a lower end part 11 of a sectional shape, formed in a state of being in face-contact with a bottom face 7 of the dovetail groove 5, a width of the lower end part 11 is same as or narrower than an opening part 6 of the dovetail groove 5, a tapered inclination face 12 is upwardly formed from both sides of the lower end part 11, a maximum width part 13 of the sectional shape, is formed in a depth of the dovetail groove 5, a width of the maximum width part 13 is determined to be wider than a width of the opening part 6 of the dovetail groove 5, a stopper part 14 abutted on a lower side of the opening part 6 of the dovetail groove 5 for stopping, is formed on the maximum width part 13, and the upper end part 10 projecting from the opening part 6 of the dovetail groove 5 has a curved face of the circular arc shape. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dovetail groove sealant used by being mounted in a dovetail groove in order to obtain airtightness, such as a vacuum device used in semiconductor manufacturing.

[0002]

2. Description of the Related Art As a sealing material mounted in a dovetail groove, there is one disclosed in, for example, Japanese Patent Laid-Open No. 2000-356267. This sealing material has a cross-sectional shape that includes a first arc-shaped portion and a second arc-shaped portion that fit in the dovetail groove, and a protrusion that protrudes from the opening of the dovetail groove, and the first arc-shaped portion and the second arc-shaped portion. It is formed in a three-pronged shape having a recessed portion between it and the portion. According to this, the width of the protruding portion is 30 times the width dimension of the dovetail groove opening portion.
The protrusion length of the protrusion is set to 40 to 90% of the depth dimension of the dovetail groove, and a concave portion is formed between the first arc-shaped portion and the second arc-shaped portion. Since the seal member is formed, the sealing member is compressed so as to open the concave portion and flatten as a whole by compressing the protruding portion to obtain airtightness. This compression can be performed under a low load, and good sealing performance can be obtained.

However, since the airtightness is obtained by pushing the relatively narrow projection having a large amount of projection and crushing the whole, it is possible to obtain good airtightness against a straight load. However, with respect to a load applied from an oblique direction, the projecting portion may be bent, the compression deformation may not be performed as desired, and sufficient airtightness may not be obtained. In addition, in this case, the protruding portion is crushed obliquely, so that twisting or breakage is likely to occur.

As for the twist, it tends to occur when a vacuum is drawn after the airtight state. Especially, in the case of a narrow protruding portion having a large protruding amount as described above, the protruding portion can be compressed and deformed. Only the deformation is likely to occur.

As described above, the projecting portion is apt to be deformed or twisted unexpectedly, and the first arc-shaped portion and the second arc-shaped portion are relatively greatly deformed in the dovetail groove. Friction occurs between them and wear of the seal material occurs. For this reason, there is a problem in that a large amount of dust, that is, foreign matter, due to wear of the seal material enters the space that must be clean.

[0006]

Therefore, the main object of the present invention is to make it possible to always obtain a reliable airtightness and to make it possible to obtain a highly clean space by making it hard to wear.

[0007]

[Means for Solving the Problems] A means therefor is a dovetail groove sealing material which is used by being fitted into a dovetail groove in a state where an upper end portion is projected. It is formed so that it can come into surface contact with the bottom of the
In the depth of the dovetail groove, the width of the lower end portion is formed to be the same as or smaller than the opening portion of the dovetail groove, and a tapered inclined surface is formed from both sides of the lower end portion upward. The widest maximum width portion of the cross-sectional shape is formed, the width dimension of the maximum width portion is set to be wider than the width of the opening of the dovetail groove, and the opening of the dovetail groove is formed above the maximum width portion. Is a sealing material for a dovetail groove, which forms a retaining part that abuts along the lower side of the dovetail to prevent it from coming off, and the upper end portion protruding from the opening of the dovetail groove is formed by an arcuate curved surface. And The above-mentioned opening means the narrowest part including the rounded part when the rounded part is formed on the edge of the opening.

That is, in this dovetail groove sealing material, if it is fitted into the dovetail groove from the lower end side and mounted, the lower end portion makes surface contact with the bottom surface of the dovetail groove and is stable, and the maximum width portion is the depth of the dovetail groove. It is set so as to be caught inside, and the retaining portion comes into contact with the lower side of the opening portion of the dovetail groove from below to prevent the retaining portion.
If the slip-out prevention part is made of a surface, the fall-out prevention can be performed more strongly. Further, the inclined surface below the maximum width portion serves as a guide for deforming the maximum width portion at the time of fitting,
It can be installed smoothly.

In the mounted state, the upper end portion consisting of an arcuate curved surface projects from the dovetail groove, but in order to obtain airtightness, if the chamber in which this sealing material is mounted is closed by closing it, the above-mentioned upper end portion is formed. The portion is compressed and the sealing material is entirely compressed and deformed to obtain an airtight state. At this time,
Since the upper end is curved in an arc shape, there is no big difference in the way it is compressed, not only when it is applied straight from above, but also when it is applied diagonally, making sure it is airtight. Can be obtained.

Further, since the retaining portion is in contact with the lower side of the opening of the dovetail groove, the retaining portion can be prevented. Moreover, the pressing force is increased due to the deformation of the upper end portion at the time of sealing, and since there is no large displacement, friction with the dovetail groove is small.
Therefore, it is possible to suppress the generation of dust (foreign matter) due to the displacement caused by the repeated opening and closing, and a highly clean space can be obtained.

Further, in the airtight state, the pressure from the upper end, which is compressed and deformed, is transmitted to the lower end as well as the retaining portion, and the lower end is firmly attached to the bottom surface of the dovetail groove as if rooted on the surface. Even if a pressure difference is generated between the inside and the outside by drawing a vacuum, twisting does not occur, wear of the sealing material is suppressed, and a highly clean space can be obtained. This action is also promoted by the curved surface shape of the upper end portion.

Further, in particular, when the upper end portion is formed smoothly and continuously from the retaining portion, it becomes a solid shape with a wide skirt so that it can be stably received by a load applied from any direction. Therefore, it is possible to further improve airtightness and reduce wear.

Further, if the lower end portion is formed only by a flat surface that comes into surface contact with the bottom surface of the dovetail groove, a large contact area can be obtained, the stability of the sealing material in the dovetail groove is increased, and the twisting force is increased. Can be prevented.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view showing a schematic structure of a vacuum device 1 used in semiconductor manufacturing or the like to evacuate an internal space 1a. As shown in this figure, the vacuum device 1
In addition to the exhaust port 2, an openable / closable lid 3 is provided, and a dovetail groove sealing material 4 (hereinafter referred to as a sealing material) is attached to the inner surface of the lid 3 so that airtightness can be obtained. ing.

The seal member 4 is formed in an annular shape (endless shape) from an elastic material such as an appropriate rubber material. The annular shape may be rectangular, square, or circular, depending on the shape of the mounting position.

The mounting is performed by fitting it into the dovetail groove 5 formed on the inner surface of the lid 3 (see FIG. 2). The ant groove 5 is
As is well known, the groove has a dovetail-shaped cross section (see FIG. 3), and the bottom surface 7 on the inner side of the opening 6 at the upper end is wider and has an inclined surface 8 having a V-shape. The dovetail groove 5 is formed such that the edge of the opening 6 and both ends of the bottom surface 7 are rounded. The radius of the edge of the opening 6 is a curved surface 9 that softens the contact with the sealing material 4, and may be formed to have an appropriate cross-sectional shape without corners.

Explaining the cross-sectional shape of the sealing material 4, the sealing material 4 is used by being fitted into the dovetail groove 5 with the upper end 10 protruding, and the lower end 11 in the cross-sectional shape is formed flat. The bottom surface 7 of the dovetail groove 5 is formed so as to be in surface contact with only a flat surface. Then, the width w1 of the lower end portion 11 is formed to be the same as or smaller than the opening portion 6 of the dovetail groove 5, and the tapered inclined surface 12 is formed upward from both sides of the lower end portion 11, Within the depth of the dovetail groove 5, the widest maximum width portion 13 of the sectional shape is formed. A retaining portion 14 is formed on the maximum width portion 13 along the lower side of the opening 6 of the dovetail groove so as to come into contact with the surface to prevent the retaining portion 14, and the retaining portion 14 smoothly moves upward. The upper end portion 10 projecting from the opening 6 of the dovetail groove 5 is continuously formed with an arcuate curved surface.

Forming an arcuate curved surface means forming a shape that does not have a surface that stands up vertically, that is, forming it like a round upper part of the O-ring.

The maximum width portion 13 is a parting line when the sealing material 4 is formed.

Here, as shown in FIG. 3, the dovetail groove 56
The width of the opening 6 (the narrowest portion because the curved surface 9 is formed as described above) is W1, and the width of the widest bottom portion 7 is W2. Further, the depth H is the distance from the upper surface of the dovetail groove 5 to the bottom surface 7.

The width w1 of the lower end of the seal member 4 is set to be slightly smaller than the opening width W1 of the dovetail groove (w1 <W1), and the width w2 of the maximum width portion 13 is the width W1 of the opening of the dovetail groove 5. Wider than the width W2 of the bottom 7 part (W1 <w2 <W
2) and set the height h1 to be thicker than the dovetail groove depth H1 (h1
> H1)

Preferably, w1 is about 70 to 85% of W1, w2 is about 110 to 120% of W1, and h1 is 1 of H1.
It is set to about 25 to 140%, and the position of the maximum width portion 13 is
If the height is about 60 to 70% from the bottom of H1, the lower end 1
1 and the retaining portion 14 can have a sufficient size, and the curved surface of the upper end portion 10 can be formed in a stable shape,
It is good because the effects described below can be effectively obtained.

As shown in FIG. 2, the annular seal member 4 having such a cross-sectional shape is mounted by fitting the lower end 11 of the dowel groove 5 into the dovetail groove 5.

In this mounting, the width w1 of the lower end 11 of the sealing material 4 is made narrower than the width W1 of the opening 6 of the dovetail groove 5, and the inclined surface 12 is formed above the lower end 11. Therefore, the inclined surface 12 serves as a guide for compressing the maximum width portion of the sealing material, so that the sealing material can be smoothly mounted.
In addition, since the lower end portion 11 is formed as a flat surface, it is possible to prevent the sealing material 4 from being twisted unexpectedly during mounting and exposing the parting line, that is, the maximum width portion 13 to the outside of the dovetail groove 5. . That is, the mounting is easy and reliable, and the mounting property is good.

Moreover, when mounted, the lower end portion 11 makes surface contact with the bottom surface 7 of the dovetail groove 5, and the retaining portion 14 above the maximum width portion 13 located in the dovetail groove 5 also has an opening portion of the dovetail groove 5. 6 Abut on the lower side to prevent coming off. In this mounted state, the entire lower end 11 which is a flat surface is the dovetail groove 5.
Since it is in surface contact with the bottom surface 7 of the, the contact resistance is large and strong.

After the lid 3 is mounted in such a state and the lid 3 is closed to obtain an airtight state, as shown in FIG.
The sealing material 4 is compressed and deforms. That is, the sealing material 4
The facing portion 15 is pressed against the upper end portion 10 of the and is crushed, and the pressure due to the deformation is exerted on the retaining portion 14 and the lower end portion 11. At this time, since the curved surface 9 is formed at the lower portion of the upper end portion 10 and the upper portion of the retaining portion 14 at the edge of the opening 6 of the dovetail groove 5, it is possible to avoid scratching or excessive rubbing.

Due to the above-mentioned compressive deformation, the pressure at the retaining portion 14 is further increased, and the lower side of the opening 6 of the dovetail groove 5 is pressed from below, and at the lower end portion 11, pressure is applied so as to be stretched toward both sides. Hang up. Therefore, the position of the sealing material 4 in the dovetail groove 5 is strongly fixed.

Therefore, even if the air in the internal space 1a is evacuated to form a vacuum, the sealing material 4 is unlikely to be affected. This effect is enhanced by the fact that the upper end 10 of the sealing material 4 is formed in an arcuate shape with a curved surface, and the sealing material 4 is compressed and deformed so as to close the opening 6 of the dovetail groove, and repeated opening and closing and , Not easily affected by changes in vacuum and atmospheric pressure. That is, no twisting occurs, and a high airtight state can always be obtained.

Further, since the upper end portion 10 of the sealing material 4 is formed of a curved surface, even if a force is applied from an oblique direction when closing as shown by a virtual line in FIG. Instead, it is compressed and deformed just as when a load is applied from directly above. For this reason, a reliable airtight state can always be obtained.

In addition, the compression deformation of the sealing material 4 which is completely accommodated in the dovetail groove 5 from the retaining portion 14 occurs only at a very small part of the upper end portion 10 outside the dovetail groove 5, and is therefore exposed. The deformation of the sealing material 4 in the portion is small, and the friction of the sealing material 4 mainly occurs only between the facing portion 15. Further, as described above, since unnecessary movement such as twisting of the sealing material 4 can be suppressed, friction occurs and the sealing material 4
Can be prevented from wearing more than necessary. Therefore, it is possible to suppress wear of the seal material 4 due to friction, and it is possible to prevent foreign matter generated by the wear from being mixed into the internal space 1a. That is, the internal space 1a can be made a highly clean space, and a good vacuum device 1 can be obtained.

[0031]

As described above, according to the present invention, the cross-sectional shape has a lower end portion that comes into surface contact with the bottom surface of the dovetail groove, a tapered inclined surface extending upward from the lower end portion, and the inclined surface. Since it is formed to have a maximum width portion at the upper end position, a retaining portion above this, and an upper end portion formed of an arcuate curved surface, it is possible to achieve good wearability and also to prevent falling off. Is obtained.

That is, at the time of mounting, the inclined surface serves as a guide, and in the dovetail groove, the lower end portion and the retaining portion are in contact with each other at three points, and are housed in the dovetail groove.
Good stability. Therefore, it is possible to prevent twisting due to displacement during opening and closing, and twisting that occurs when vacuuming is performed. This is to ensure high airtightness,
This means that the wear of the sealing material is suppressed.

Further, since the upper end portion is curved in a circular arc shape, it can be deformed as desired regardless of whether the load is straight or in which direction the load is applied, and a reliable airtight state can always be obtained. Further, since the deformation is caused only at the upper end portion outside the dovetail groove because the retaining portion is in contact with the lower side of the opening of the dovetail groove, there is no wear due to excessive deformation as in the conventional example. It is possible to suppress the mixing of foreign matter and obtain a highly clean space.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a vacuum device and a dovetail groove sealing material attached to the vacuum device.

FIG. 2 is a perspective view of a dovetail groove sealing material.

FIG. 3 is a sectional view of a dovetail groove and a sealing material for a dovetail groove.

FIG. 4 is an explanatory diagram of a working state.

[Explanation of symbols]

4 ... Seal material for dovetail groove 5 ... Ant groove 6 ... Opening 7 ... Bottom 10 ... Upper end 11 ... Lower end 12 ... Inclined surface 13 ... Maximum width 14 ... retaining part

Claims (3)

[Claims] A sealing material for a dovetail groove, which is used by being fitted into a dovetail groove with its upper end portion protruding, the lower end portion having a cross-sectional shape being formed so as to be in surface contact with the bottom surface of the dovetail groove. At the same time, the width of the lower end is formed to be the same as or narrower than the opening of the dovetail groove, and a tapered inclined surface is formed upward from both sides of the lower end so that Form the widest and widest part of the cross-sectional shape at,
The width dimension of the maximum width portion is set to be wider than the width of the opening of the dovetail groove, so that the maximum width portion abuts along the lower side of the opening of the dovetail groove to prevent slipping off. A sealing material for a dovetail groove, the upper end portion of which forms a portion and which protrudes from the opening of the dovetail groove is formed by an arcuate curved surface. 2. The dovetail groove sealing material according to claim 1, wherein the upper end portion is formed smoothly and continuously from the retaining portion. 3. The dovetail groove sealing material according to claim 1, wherein the lower end portion is formed only by a flat surface that is in surface contact with the bottom surface of the dovetail groove.