TWI238231B - Tight-seal construction - Google Patents

Abstract

A tight-seal construction composed of an elastic seal, an attachment member having a dovetail groove, and a corresponding member. The elastic seal is not symmetric with respect to a center line L, having a high-position shoulder portion on a clean space side K, and having a middle-position shoulder portion on an atmosphere side M.

Description

1238231 " ____________ V. Description of the invention (丨) " -------- One " [Technical Field to which Fa 1 belongs] The present invention relates to a sealing structure used for fluid (vacuum) sealing: ' In particular, the present invention relates to a sealing structure used in a gas gate portion of a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus. [Prior art]

Hakuchi is used for sealing structures of semiconductor (liquid crystal) manufacturing equipment, etc. The 6th A-shaped 0-ring (seal 4a) is widely used. Furthermore, as shown in Japanese Patent Publication No. 2000 ~ 3 5 6 2 6 7, a structure consisting of a densely packed 6-piece piece with a triangular cross section and a dovetail groove is also widely known. Furthermore, the sealing structure formed by the elastic seals 4lb, 41c, 4ld, 41e, and the dovetail groove 42 of various cross-sectional shapes shown in Figs. 6C, 6D, and 6E is also widely known. No, any one of the elastic seals 41b, 41c, 41d, 41e is formed into an overall annular shape as shown in the upper view in FIG. In addition, the O-ring (seal 4ia) is formed into an overall circular ring in a free state, and a deformed rectangular shape is embedded in the dovetail groove 42 as shown in FIG. 7. The corners will cause tensile tension, which will cause problems with the sealing surface. —The trifurcated elastic seals and seals described in Japanese Patent Application Laid-Open No. 2000-356267 and the elastic seals 41b, 4le of the cross-section shape shown in Figures 6B, 6D, or 6E. An unstable posture is formed in the dovetail groove 42 to cause a state of instability in the sealing performance. Since the stability to the bottom surface of the groove is deteriorated, dust may be generated by meandering. This dust is strictly prohibited in the manufacture of liquid crystals or halves. Furthermore, the elastic seal (o-ring) 41 a shown in FIG. 6A

1238231 V. Description of the invention (2) There will be distortion in the tail groove 42, and the cover body will be elastically tight to the fracture due to the crimping of the cover body. Furthermore, due to the problem of the shedding from the dovetail groove 42, ) 41a is fixed on the cover, so the open end edges 43 and 43 are rubbed, and, in addition, there is also a problem with the dovetail groove 42. Furthermore, it may be remote to form friction powder (dust particles). Next, as shown in Figure 6C ii ;! Touch. Internal retort together; t. The trapping piece 41c has a friction powder (dust ^ °) that forms rubber toward the dovetail groove 42 and "is the same as that in Fig. 6A", which will produce a sound of backlash within κ ^ shown in Fig. 6D. The seal 41d has a problem in that it forms a dovetail groove (dust particle). In addition, "there are also friction powders that produce rubber in Figures 6C and 6D", especially the arrow κ belongs to the clean space side (inside diameter side), which belongs to the liquid crystal or semiconductors that need to be stored in high definition. The space side 'opposite to the open space side (inner diameter side) K of the clean space side 43. The elastic branch seals 41 c and 41 d are in the shape of friction powder (dust particles) due to friction. '[Summary of the invention] The main object of the present invention is to provide a sealing structure which solves the problems of the conventional seals described above so that the elastic space and the dovetail slot openings are not generated on the clean space side (the inner diameter side). The friction powder (dust particles) at the edge can be easily broken into the dovetail groove, and once installed, it will not fall off from the dovetail groove intentionally. ... The sealing structure according to the present invention includes an adhered member, an elastic seal member, and a corresponding member, and seals the clean space side and the atmosphere side at a time. Attach

1238231

The attachment system is close to or close to the protruding part of the dove and the pair corresponds to the mouth part of the dove, and a shoulder groove includes a second side wall in the tail groove. Department. The bottom of the flat shoulder groove of the mid-shoulder shoulder proximate to the abutment. Corresponding to the protrusion, an opening is formed, and the surface and the bottom counterpart are elastically dense. The bottom surface is on the side of the wall surface corresponding to the median shoulder atmosphere. The gap and the sealing surface of the wall of each other are straight. The bottom surface is flat. Mouth trough. The first elastic sealing member close to the elastic sealing portion is a straight portion from the bottom surface of the dovetail and a high portion is attached to the unpressed portion which is compressed. A seal of a side wall surface of the dovetail groove on the side of the space is in contact with the shoulder of the dovetail groove in a contracted state in a depth dimension of the first side wall surface. From the opening side of the opening portion, a groove protrusion is installed inside the shoulder, and the opening is formed to form the south end and the middle end edge.

Furthermore, according to the sealing structure of the present invention, the elastic seal is a side straight portion and a-portion or an inclined portion of the bottom wall surface of the dovetail groove in a vertical direction, forming a straight portion from the high shoulder to the bottom surface. Horizontal shape. Further, according to the sealing structure of the present invention, the high shoulder portion is to be adjacent or abutted, and the high-end dimension from the bottom wall surface to the high shoulder portion is set to 8 in the depth dimension of the dovetail groove. 0% ~ 95%, and the middle position ^ abuts against the second side wall surface, and the bottom wall surface to the middle shoulder is white ^ The height dimension is set to 30% ~ 7 of the depth dimension of the dovetail groove 0%. [Embodiment] An embodiment of the present invention will be described in detail with reference to the drawings. Figures 1 to 4 show an implementation of the sealing structure of the present invention.

1238231 V. Description of the invention (4) 3: In $: 3, the system includes an attached piece 2 with a dovetail groove 2, and the clothes a are 20 in the dovetail groove 3, and can be pressed and pressed. Dovetail groove ': ground two elastic seals 1 and-flat seals belong to about: ^ steep / seal 1 corresponding piece 21. A ring shape (ellipse shape) and other ring shapes (as shown in Figure 7 of Maizhao) or sports systems: 5: f is preferably used in semiconductor manufacturing equipment or (large) liquid crystal doors. (Mainly vacuum) sealed. Therefore, its relative m (^ n) arbitrarily approaching and leaving (in addition to " 'may be between m or valve seat). The corresponding piece 21 of the corresponding flat surface is equivalent to the shape of the tail groove 3 and the shape of the platform in the cross section. The tail groove 3 includes a first side wall surface 5 and a second side wall 4 which approach each other toward the opening 4. A side wall surface 6 'and a bottom wall surface 7. # 者 ， The bottom wall surface 7 and the first side wall surface corner 隅 4 2 8 and the bottom wall surface 7 and the second side wall surface 6 corner part ⑼, which are tied = rounded (curved). In this way, the dovetail groove 3 is formed into a (slightly circular) k-shaped cross-section about a pedestal, and is recessed on a flat surface 仏 to form an internally enlarged tf shape. 5 1-A clean space (inner diameter side) K refers to the storage semiconductor Or liquid crystal, etc., and the side where the air cell space is subjected to various processes, especially the space required to be clean (no fine dust). In Figures 1 and 2, the first side wall surface 5 of the dovetail groove 3 corresponds to the clean space side (inner diameter side) κ, and the second side wall surface 6 corresponds to an atmospheric side (outer diameter side) M. The sealing structure of the present invention is capable of blocking the clean space side K and the atmospheric side µ. The cross-sectional shape of the elastic seal 1 will be described. The elastic seal 1 is installed in the dovetail groove 3, and is not pushed (connected) on the flat surface 2 of the corresponding piece 21.

1238231_ S. Description of the invention (5) '' " '~' '---- Touch) In the uncompressed device state (please refer to Figures 丨 and 2), an asymmetry is formed by the left and right center lines L of the dovetail groove 3. The shape, for example, the protrusion 9 protruding from the dovetail groove 3 is the relevant central line L, forms an asymmetric shape, and is biased toward the clean space side (the inner diameter side) K. Further, the flat surface 20 of the corresponding member 21 directly presses the upper portion 10 of the protruding portion 9. In addition, the elastic seal 丨 has a flat bottom portion 1 1 ′, and the bottom flat portion 11 corresponds to the bottom wall surface 7 of the dovetail groove 3. In the uncompressed installation state, the elastic seal 1 has a high shoulder 12 h and a middle shoulder 12 L. The high shoulder 1 2 is near the opening 4 and corresponds to the side of the clean space. The first side wall surface 5 of K forms an abutment or (slightly) abutment; the median shoulder 12 L is at an intermediate height% of the dovetail groove depth, and abuts against the second side wall surface 6 corresponding to the atmospheric side M. From the middle shoulder portion 12L to the protruding portion 9, a gap portion g is formed between the elastic seal 1 and the opening end edge portion 4b (corner,) of the atmospheric side μ of the opening portion 4. Specifically, the spring-down seal 1 is provided with an inclined portion 14 having a predetermined inclination angle (9 in the arc-shaped upper portion 10 in cross section (9, the inclination angle < 9 is the first one with the dovetail groove 3). The inclination angles of the two side wall surfaces 6 are slightly the same, and the inclined portion 14 and the second side wall surface 6 are slightly parallel and form a gap portion g of a predetermined width. The high shoulder portion 1 2 is close to the first side wall surface 5 or The abutment is slight, and the height dimension Η13 from the bottom wall surface 7 to the high shoulder 12 is set at 80% to 95% of the dovetail groove depth dimension Η3. That is, 〇 80 X H3 SH13 S0 · 95 X Η3. In addition, the middle shoulder portion 12L is in contact with the second side wall surface 6, and the height dimension Η12 from the bottom wall surface 7 to the middle shoulder portion 12L is set at 30% to 70% of the dovetail groove depth dimension Η3. That is, 0 · 30 X H3 $ H12 S0 · 70 X Η3. Furthermore, the relation of Η12 < Η13 can also be established.

C: \ L0G0-5 \ FIVE C0NTINENTSXPF1278.ptd Page 9 1238231 V. Description of the invention ¢ 6) Please refer to FIG. 3 for a more detailed description of the cross-sectional shape of the elastic seal 1 of the present invention. In conjunction with Figures 1 and 2, it will be described. On the clean space side K (right half of Figure 3) of the elastic seal 1, it is drawn with a larger radius R! Large rounded portion 16 of the semi-circular portion 15. The lower end (right end) of the large rounded portion 16 corresponds to the high shoulder portion 1 2 Η, and a side straight portion 17 is formed from the high shoulder portion 1 2 Η, and the side straight portion 17 is formed. At a position approximately perpendicular to the vertical direction of the bottom wall surface 7 of the dovetail groove 3. From the lower end of the flat portion 17 on the side, a shape is formed in which a rounded portion (arc portion) 18 with a small radius Rg smoothly connects the bottom flat portion j J. Taking the left and right centerline L as the center, the clean space side K in the right half of the drawing can be said to have a shape in which the rice ball is longitudinally cut in half. In addition, instead of the rounded corner portion 8, a straight inclined portion may be inclined, and the side straight portion 17 and the bottom straight portion 11 may be connected (illustration omitted). & In addition, on the atmospheric side (outer diameter side of the elastic seal 1) (left half of FIG. 3), it is connected to the inclined portion 14 with a half-curved portion 19 and a corner portion 16 smaller than the radius R1. In addition, in FIG. 3, the basin can also have the short upper flat portion 22 interposed between the large rounded corner portion 16 and the upper flat portion 22 to form a larger surface than that shown in FIG. 3 according to the needs of use. It should be longer so that the upper surface of the protruding portion 9 is flat and omitted.) The posture of the son-in-law is in contact (the middle shoulder portion 12L in the figure forms a circle with a smaller half n and the inclined portion 14). The connected corners and corners 1 are smaller and smaller than the small recesses 23 of 4 to form each other ;: two; are formed-the shape of the smaller radius h inverse, ,, and 0. Figure 4 described later

1238231 V. Description of the invention (7) When the edge of the sealing member is twisted and installed in the tail groove 3, the small recess 23 has an important task (function). The left end of the bottom straight portion "Figure 3 (atmosphere, which is circled by" 24 "and (inclined in the direction of the width dimension minus ν on the side of the bottom straight portion 11) 25 straight inclination portions 12L · Connection. The wind and the crumbs are shown in the second figure. The dotted line 26 indicates the false τ and Λ that are the same as the flat surface ^ of the attached object 2. In the uncompressed installation state, Take: (thickness) to the right centerline Λϋ imaginary cutting line, (left) inclined portion 14 and (right) great circle = intersection point] k, which is equal to the former, and the latter is set to be greater than the former Moreover, as described above, when the corresponding member 21 (of FIG. 1) is pushed, the protruding portion 9 made of a rubber elastic material is elastically deformed to be accommodated in the gap portion G (refer to FIG. (Shown in Fig. 5a). [Following LI if Yan 1 ~ 3, 'from the middle shoulder m is connected by a small recess 23, which is formed in a vertical direction (parallel to the central line L == clean space side ( Inner diameter side) κ tilt, which can follow the above: Sex :: 'Exactly into the gap (elastic deformation part). Such as 1 large * fillet The upper part formed by a part of the temple 16 and the 不 (strong) contact the opening end edge portion 4a, so that the hair straightening portion 11 of the dust particles (rubber friction powder) can be prevented from forming larger, so it can often be transmitted Since the bottom surface is flattened, the posture in the dovetail groove 3 is kept secure, and the son-in-law's airtightness is displayed without distortion. Because the middle shoulder 12L and the high shoulder 12H are in contact with each other (Crimping)

1238231

-The first side wall surfaces 6 and 5 can prevent the elastic seal 丨 from being pulled out of the dovetail groove 3. For example, when the corresponding member 21 is pressed against the upper portion 10 as shown in Fig. 5, after the state (on the opening of the lid, etc.), when the corresponding member 21 leaves, the elastic seal 1 is fixed on its flat surface. The surface 2 ′ can effectively prevent pull-out from the tail groove 3. … Please refer to FIG. 4, rotate the elastic seal to form an inclined shape, and insert it from the protruding middle shoulder 丨 2L toward the opening 4, and make the protruding middle shoulder 12L and the inclined One side of the small recessed portion 23 between the portions 14 corresponds to (contacts) the opening end edge portion 4b, and as shown by the arrow! ^, The rounded portion 18 is pushed into the dovetail groove 3 to form the shape shown in Figs. 1 and 2. status. Under the cross section, while rotating in the direction of the arrow N and pressing on the small recessed portion 23 as the center, the rounded portion 18 can be smoothly installed over the open end edge portion 4a and installed in the tail groove 3 Inside. Further, the thickness dimension Tls from the corner portion of the small recessed portion 23 to the fillet portion 8 is set to be slightly larger than the width dimension% of the opening portion 4 of the dovetail groove 3. In addition, a part or the entire shape of the rounded corner portion 18 (the width dimension is reduced in the direction of the bottom surface) may be a straight inclined surface (not shown). Next, please refer to FIG. 5A, which shows that the elastic seal 1 of the present invention is installed in the dovetail groove 3, and the flat surface 2 of the corresponding member 21 is pushed to form a compressed use state, and in this state FEM analysis diagram of contact surface pressure P (based on finite element method). Moreover, please refer to FIG. 5B, which reveals the FEM analysis diagram of the contact surface pressure of the conventional 0-ring 41a under the same compression use state. Comparing the FIGS. 5A and 5B, it can be seen that the conventional 0-ring 41a The upper and lower contact areas are formed approximately the same, and the contact surface pressure p with the counterpart 21 is

C: \ L0G0-5 \ FIVE C0NTINENTS \ PF1278.ptd 1238231 V. Description of the invention (9) The distribution system forms a round mountain shape and generates a peak pressure in the center, which can be easily fixed to the corresponding part 2 1 'and open to the corresponding part On 21, there is a possibility that the dovetail groove 3 may fall off with the counterpart 2 1. Furthermore, since the O-ring 41a is compressed by friction with the edges of the left and right opening ends 4a and 4b, rubber friction powders (dust particles) are easily generated, which adversely affects the clean space side K. On the contrary, in the present invention, as shown in FIG. 5A, the contact surface pressure P of the corresponding part 21 forms a relatively smooth plateau shape, and the difference between the upper and lower widths (the upper difference is lower than the lower The difference is large), so it is more difficult to fix it to the corresponding piece 2 1. Furthermore, as shown in FIG. 5A, because it forms a smoother contact surface pressure P distribution, compared with the round mountain shape shown in FIG. 5B, its integral value (and the load value) is larger, It can withstand higher loads, and can prevent the counterpart 21 and the adhered member 2 from contacting each other (so-called metal contact). As described above, according to the sealing structure of the present invention, it includes a quilt member 2, an elastic seal member 1, and a corresponding member 21, and blocks the sealed clean space # side K and the atmospheric side M, and the attachment member 2 is provided with a Dovetail groove 3 including opening portion 4, first side wall surface 5, second side wall surface 6, and bottom wall surface 7 approaching each other to the side of the opening portion 4; an elastic seal 1 is installed in the dovetail groove 3; a corresponding piece 21 pushes the elastic portion 9 of the elastic seal 1 protruding from the tail fill groove 3; the elastic seal 1 is provided with a flat bottom portion 11, a high shoulder 1 2 η and a middle shoulder 12L The bottom surface straight portion 11 is attached to the dovetail groove 3, and the flat surface 20 of the corresponding member 21 corresponds to the bottom wall surface of the tail groove 3 in the uncompressed installation state without being pushed. The bottom flat portion 11 of 7; the high shoulder 丨 2 η is near the opening portion 4, and the first side wall corresponding to the clean space side κ

C: \ L0G0-5 \ FIVE C0NTINENTSXPF1278.ptd Page 13 1238231 V. Description of the invention (10) Face 5 forms close contact or abutment; the middle shoulder 丨 2L is at the middle height of the dovetail groove depth dimension H3, for The second side wall surface 6 corresponding to the atmospheric side M forms abutment; from the middle shoulder portion 2L to the protruding portion 9, the elastic seal j is formed between the opening end edge portion 4b of the opening portion 4 A gap portion g. Therefore, the straight portion of the bottom surface can always maintain a stable posture and can withstand high loads. Even on the clean space side K, there is no space (gap) between it and the open end edge portion 4a of the dovetail groove 3. Therefore, it does not accumulate oxidized garbage during film formation. On the opposite atmospheric side M, due to the formation of the gap portion G, an appropriate compression elastic deformation can be generated, and even if dust and other garbage are accumulated in the atmospheric side M, it will not affect the semiconductor manufacturing gas chamber without affecting "Any problem arises. Moreover, when the corresponding member 21 pushes the protruding portion 9, the protrusion elastically deforms toward the gap portion G and the rubber escapes. Therefore, it is possible to prevent the opposite side ^ high shoulder portion 12H from strongly rubbing against the first sidewall surface 5, And it can prevent the occurrence of dust particles. Moreover, the middle shoulder 12L is crimped to the second side wall surface 6, so it can effectively close the door cover (corresponding to 21) together from the tail filler "I. Furthermore, because of its Since it forms the shape of the gap G from the middle shoulder m, it can be placed in the dovetail groove 3 as shown in Fig. 4. The opening of the lotus JL field 丨 large = acre = elastic seal 1 A side straight portion 17 and a circle that are substantially perpendicular to the bottom wall surface 7 of the dovetail groove 3 form a slope from the high shoulder portion 12H to the bottom straight portion. Therefore, as shown in FIG. 4, Elastic seal seal] x / shape side K of the open end edge portion 4a, and; good = can pass through the clean space 1 Of Eight seasons and it's loaded book industry in the three pairs of dovetail slots

1238231 V. Description of the invention (Π) Furthermore, since the high shoulder portion 1 2H is close to or abutting on the first side wall surface 5, and the height dimension Hi3 from the bottom wall surface 7 to the high shoulder portion 2 is set at The dovetail groove depth dimension is 80% to 95% of Hs, and the middle shoulder 12L is in contact with the second side wall surface 6, and the dimension Hu from the bottom wall surface 7 to the middle shoulder is set at Dovetail 30% to 70γ of the groove depth dimension 4. Therefore, it can be fixed on the flat surface 20 of the corresponding part 2, and can prevent the pull-out of the elastic two: cow 1, and can prevent the accumulation of oxygen during the film formation on the clean space side κ. Furthermore, on the opposite atmospheric side M ', a space for escape of the compressed elastically deformed garbage can be ensured. In the case of Shouzhi m0.80 × H3, the space between the open end edge and the space f generates space to accumulate the oxidized garbage during film formation. U °: 16 South. Conversely, the field of H13> 0.95xH3 is two ^ · The possibility of pulling out the tail groove 3 is increased. In addition, when the seal 1 moves from the dove 5 early, the gap portion G becomes too large. Conversely, in the case of: 12 < 30 30, the gap portion G becomes smaller. Yada 12 > 70 × h3 As described above, the sealing (inner diameter side) according to the present invention does not generate a rubber body at all, and it is a semiconductor or liquid crystal manufacturing device on the clean space side. 4 The second cold end (dust particles) is suitable for the side. The opening edge and the elastic seal are completely free of gaps in the field tail groove (the clean space will not accumulate during the semiconductor film formation). With the cover of the manufacturing device (corresponding to '7), the elastic seal prevents falling from the dovetail groove. Furthermore,% A is opened and pulled out, so it can maintain a stable posture. In the dovetail groove, the present invention can often be implemented in other different shapes without departing from the main characteristics. 1 C: \ LOGO-5 \ FIVE CONTINENTS \ PF1278. Ptd Page 15 1238231 5. Invention description (12). Therefore, The above-mentioned preferred embodiments are listed by way of example only, and should not be considered as a limitation of the present invention. The scope of the present invention is defined by the following patent application scope, not by the content of the description. Moreover, equivalent changes or modifications that fall within the scope of the patent application fall within the scope of the invention.

C: \ L0G0-5 \ FIVE CONTINENTS \ PF1278. Ptd Page 16 1238231 Brief description of the drawings [Simplified description of the drawings] Figure 1: Sectional view of the uncompressed installation state of the embodiment of the present invention. Fig. 2: Schematic diagram illustrating the relationship between shape and size in an embodiment of the present invention. FIG. 3 is a schematic diagram of a cross-sectional shape of an embodiment of the present invention. FIG. 4 is a schematic diagram of the installation operation of the embodiment of the present invention. Figures L, 5B • Comparison of the use of the embodiment of the present invention with the conventional 0-ring compression: explanatory diagrams 〇 6 ^ L ~ 6E Partial cross-sectional view for explaining the conventional embodiment 〇 FIG. 7: conventional embodiment The overall top view < Description of main component symbols] 1 Elastic seal 2 Flat surface of attached object 2a! —ΓΓ .. 一 —____________ ·: 'τ. 3 Dovetail slot 4 Open σ section 4a Open D end line Si 4b Open end edge portion 5 First side wall surface 6 Second side wall surface 7 Bottom wall surface 9 Protruding portion 10 Upper portion 11 Bottom flat portion 12H Surface shoulder portion 12L Median shoulder portion 14 Inclined portion 15 Quarter portion 16 Large rounded corners 17 Side straight sections 18 Rounded corners 19 Bended sections 20 Flat sections 21 Corresponding parts 22 Upper flat sections 23 Small recessed sections 24 Rounded sections 25 Reverse inclined sections 26 Dotted lines 28 Corner sections 41 Elastic seals 41a Seal 41b Elastic Seal 41 C Elastic 41d Elastic Seal 41e Elastic Seal

C: \ L0G0-5 \ FIVE CONTINENTSXPF1278.ptd Page 17 1238231 Brief description of the drawing 42 Dovetail groove 43 Open α End edge 44 Recess T Thickness dimension Η Height dimension W Width dimension R Radius Θ Inclined angle κ Clean space side M Atmosphere Side L Centerline G Gap P Contact surface pressure

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Claims (1)

1238231 & 'Special attention in 51 ----- 1. A sealing structure' comprising an attached member (2), an elastic poor sealing member (1) and a corresponding member (21) ', which is used to block The clean seal ^ side (K) and the atmospheric side (Μ); " The attachment (2) 'is attached with a dovetail groove (3), the dovetail groove (3) includes an opening (4), One of them is close to the side of the opening (4). A side wall surface (5) and a second side wall surface (6), and a bottom wall surface (7). The elastic seal (1), which is installed In the dovetail groove (3); the counterpart (21) 'which pushes the elastic seal (1) from the protruding portion (9) protruding from the dovetail groove (3); ^ the elastic seal (1) is It has a straight bottom part (丨 丨), 4 high positions (1 2 Η) and a middle shoulder part (1 2 L); the straight bottom part (J 丨) is attached to the melon in the dovetail groove ( 3) In the flat surface (20) of the counterpart (21) in the uncompressed installation state without being pushed, the bottom surface straight portion corresponding to the bottom wall surface (7) of the tail groove (g) (11); the high shoulder (12 is near the opening (4), for Corresponding to the clean space side (the first side wall surface (5) of JQ is in close contact or abutment; the median shoulder (1 2 l) is tied to the middle height of the dovetail groove depth dimension (H3), The second side wall surface (6) on the atmospheric side (M) forms an abutment; from the middle shoulder portion (12L) to the protruding portion (9), the elastic seal (1) and the opening portion (4) A gap portion (G) is formed between the opening end edge portion (4b). 2. According to the sealing structure described in item 1 of the scope of the patent application, the elastic seal (1) is formed by connecting with the tail groove (3). ) A straight portion (1 7) and a rounded portion (1 8) or an inclined portion of a side surface of the bottom wall surface (7) in a vertical direction form the high shoulder portion (12H) to the bottom surface straight portion (11 Cross section C: \ L0G0-5 \ FIVE C0NTINENTS \ PF1278.ptd Page 19 1238231 6. Scope of Patent Application Shape. 3. According to the sealing structure described in item 1 or 2 of the scope of the patent application, the high shoulder (12H) forms a close contact or abutment with the first side wall surface (5), and from the bottom wall surface (7) to The height dimension (H! 3) of the position shoulder (1 2 Η) is set at 80% ~ 95% of the depth dimension of the dovetail groove (Η3), and the middle shoulder (1 2 L) is the first The two side wall surfaces (6) form abutment ', and the height dimension (2) from the bottom wall surface (7) to the median shoulder (1 2 L) is set to 30% of the depth dimension of the knitting groove (Η3) ~ 70%. C: \ LOGO-5 \ FIVE CONTINENTSXPF1278.ptd Page 20