JP6189078B2 - Sealing material - Google Patents

Description

  The present invention relates to a seal material, and in particular, has plasma resistance and corrosion resistance used for valves in chemical transportation pipes in medical and food fields, gate valves of semiconductor manufacturing equipment, chamber lids, and the like. It relates to a sealing material.

As the sealing material for the above-mentioned use, as shown in FIG. 9A, a PTFE anti-corrosion ring 37 is fitted in the sealing groove 38 on the corrosive fluid storage chamber Z side, and the outer side is elastic. A double groove double seal in which a rubber seal (O-ring) 39 is fitted into a dovetail seal groove 36 has been known.

In the double seal shown in FIG. 9A, when the flat surface 15A of the mating member 15 approaches as shown by the arrow in FIG. 10A, the elastic rubber seal 39 and the corrosion-resistant ring 37 are compressed and deformed, mainly elastic. The rubber seal 39 provides a sealing action, and the PTFE anti-corrosion ring 37 serves to prevent the corrosive fluid 21 from the corrosive fluid storage chamber Z from contacting the elastic rubber seal 39. Next, as shown in FIG. 10B, when the mating member 15 is separated in the direction of the arrow, the elastic rubber seal 39 (made of rubber) is restored to its original shape, but PTFE does not restore the distortion, and FIG. As shown in FIG. 10B, the deformation remains.
Therefore, the double seal shown in FIGS. 9A, 10A, and 10B has the following problems. (I) Residual distortion of the PTFE ring 37 makes it difficult to use multiple times and increases costs. (Ii) Two seal grooves 36 and 38 must be formed, which inevitably increases the size of the entire apparatus. (iii) The fitting direction of the PTFE ring 37 differs depending on the device, and depending on the direction of the seal groove 38, the PTFE ring 37 may drop off when opened.

Therefore, conventionally, as shown in FIG. 9B, a composite seal has been proposed in which one seal groove 36 is fitted with an elastic rubber seal 39A having a semi-circular cross section and a PTFE ring 37A having an I-shaped cross section. ing. However, such a composite seal has the following problems. (I) Residual distortion of PTFE occurs, making it difficult to use multiple times and increasing costs. (Ii) In some cases, the ring 37A and the elastic rubber seal 39A are bonded and integrated. In such a case, depending on the operating temperature and the degree of compression, there is a risk of peeling at the mutual bonding interface. (iii) In a high temperature environment, there are problems of fluid leakage and gas generation due to deterioration of the adhesive.
Further, as shown in FIG. 11, a seal material is also proposed in which a rubber (elastic rubber seal) 40 is disposed on the atmosphere side 22 and a corrosion-resistant material (C-shaped ring) 41 is disposed on the corrosive fluid 21 side. (See Patent Document 1).

Japanese Patent Laid-Open No. 11-2328

However, since the conventional composite sealing material shown in FIG. 11 has a circular cross section, the corrosion-resistant material 41 having low elasticity in the compression use state in which a compressive load is received from the mating member 20 has the mounting groove and the mating material. The range in close contact with the member 20 is small, and the sealing performance cannot be sufficiently exhibited. Accordingly, the corrosive fluid 21 leaks from the sealing surface, and the rubber 40 cannot be reliably protected from the corrosive fluid 21, and the deterioration of the rubber 40 cannot be prevented for a long time. That is, if two kinds of materials (fluororesin and rubber) having different elasticity are mixed on the seal surface, (i) contact surface leakage occurs.
In the case of repeated compression / release, (ii) due to the residual strain of the corrosion-resistant material 41, the sealing performance of the rubber 40 is significantly reduced. In other words, it is difficult to use a plurality of times, and parts replacement and maintenance work are required, which may increase costs. (iii) When the rubber 40 and the corrosion-resistant material 41 are bonded, there is a possibility that peeling occurs at the interface between the rubber 40 and the corrosion-resistant material 41 depending on the use temperature and the degree of compression. Furthermore, (iv) in a high temperature environment, there is a problem that outflow into the fluid due to deterioration of the adhesive, generation of gas, etc. can be considered.

  Accordingly, the present invention provides a sealing material that has vacuum retention (sealing) and corrosion resistance, and can be used multiple times while maintaining the vacuum retention (sealing) and corrosion resistance for a long period of time. The purpose is to do.

A sealing material according to the present invention is an annular sealing material mounted in an annular mounting groove having an opening, a first side wall surface, a second side wall surface, and a bottom wall surface. A corrosion-resistant ring disposed so as to approach or contact the first side wall surface on the storage chamber side; and an elastic seal body disposed so as to approach or contact the second side wall surface and the bottom wall surface. The corrosion-resistant ring has a cross section V having a first side portion and a second side portion with a top portion bent in a projecting manner toward a mating member that is relatively close to and away from the opening portion. Furthermore, the V-shaped groove formed at the first side and the second side opens toward the bottom wall surface, and the elastic seal body has a cross section in an uncompressed state. A projecting chevron projecting toward the mating member, and a side projecting bulging toward the second side wall surface, A flat bottom surface portion corresponding to the serial bottom wall, said a bayonet groove second side portion is plugged, has, the second side portion in the insertion groove, insertion without using an adhesive In the compression use state, the angle protrusion and the top are in close contact with the mating member, and the first side is in close contact with the first side wall surface. Furthermore, a gap is formed between the corrosion-resistant ring and the bottom wall surface in the uncompressed state and the compressed use state, and the corrosion-resistant ring is connected to the mating member and the bottom wall surface. The compressive load is not directly applied .

Further, the corrosion-resistant ring has a fall-preventing return portion protruding from the second side portion.
Further, in the uncompressed state, the vertical length from the flat bottom surface to the top of the anticorrosion ring is set to 0.7 to 1.0 times the height of the elastic seal body. It is what.
Further, in the uncompressed state of mounting, the left-right length dimension from the outer end of the side protrusion to the outer end of the first side is 1.1 times the opening width dimension of the opening. It is set to 5 times.

In the uncompressed state, the contact width dimension in which the bottom wall surface and the flat bottom surface portion contact in the left-right direction is set to 0.3 to 0.7 times the groove bottom width dimension of the bottom wall surface. It is what.
Moreover, the thickness dimension of the said corrosion-resistant ring is set to 0.2 mm to 2.0 mm in the uncompressed state .

  According to the sealing material of the present invention, the anti-corrosion ring can prevent the corrosive fluid from flowing to the elastic seal body side, and the elastic seal body has a sealing action, for example, the atmosphere is on the vacuum side (corrosive fluid). Can be prevented from entering the storage room side). Therefore, since the elastic seal body is not deteriorated by the corrosive fluid, the sealing performance can be maintained for a long time. Since dust generation does not occur from the elastic seal main body due to the deterioration, it is possible to prevent impurities from adhering to the product in a semiconductor manufacturing apparatus or the like. Since the compression load from the mating member is not applied only to the anti-corrosion ring (the elastic seal body supports it elastically), when the compression load is released, the anti-corrosion ring is restored to its original state and deformed. It does not remain and can be used many times for the compression / release operation part. Only one mounting groove is required, and the apparatus can be miniaturized. Dropping off when the compression load is released can be prevented, and since no adhesive is used, problems such as adhesive mixing and gas generation can be solved. As described above, the present invention is a sealing material suitable for a valve in a chemical transportation pipe in the medical and food fields, a gate valve of a semiconductor manufacturing apparatus, a chamber lid, and the like, and has plasma resistance and corrosion resistance. Demonstrate.

It is an expanded sectional view of the free state which shows one embodiment of the present invention. It is sectional drawing which shows a mounting | wearing uncompressed state. It is sectional drawing which shows a compression use state. It is an expanded sectional view of the mounting uncompressed state which shows other embodiments of the present invention. It is an expanded sectional view of the mounting uncompressed state which shows another embodiment of the present invention. It is an expanded sectional view of mounting uncompressed showing an example applied to another mounting groove. It is an expanded sectional view of mounting uncompressed showing an example applied to another mounting groove. It is the schematic explanatory drawing which showed an example of the apparatus to which the sealing material of this invention is applied. It is principal part sectional drawing which shows a prior art example. It is principal part sectional drawing which shows the conventional double seal. It is principal part sectional drawing which shows the other example of the past.

Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments.
The sealing material of the present invention is used in a site where a highly aggressive fluid is used. For example, a valve seal in a chemical transportation pipe in the medical and food fields, a gate valve seal in a semiconductor manufacturing apparatus, and a chamber lid seal Etc. are used.
As shown in FIGS. 1 to 3, a planar annular mounting groove 5 is formed in the seal attachment member 23, and the mounting groove 5 is a first that approaches the opening 4 and the first closes to the opening 4. The side wall surface 1, the second side wall surface 2, and the bottom wall surface 3 are provided. That is, the mounting groove 5 of FIGS. 1 to 3 is formed in a dovetail shape having a trapezoidal cross section. In the present invention, “annular” includes a circular shape, a rectangular shape, an oval shape, and other shapes.

  As shown in FIGS. 2 and 3, the sealing material of the present invention is a sealing material that is mounted in the mounting groove 5 (the whole is annular), and the mating member 20 is a flat surface 23A of the seal mounting member 23. It is comprised in the flat surface shape which approaches / separates relatively.

FIG. 1 shows a free state of the sealing material of the present invention, FIG. 2 shows a mounted uncompressed state in which the sealing material is mounted in the mounting groove 5 and does not receive a compressive load from the mating member 20, and FIG. The compression use state in which the sealing material receives a compression load from the counterpart member 20 is shown.
Z shown in FIGS. 2 and 3 is a corrosive fluid (aggressiveness) containing reactive gas (specifically, carbon tetrafluoride, carbon trifluoride, sulfur hexafluoride) or gas in a plasma state. Is a corrosive fluid storage chamber for storing 21, and 22 is the atmosphere side. In the illustrated example, the mounting groove 5 has a first side wall surface 1 disposed on the corrosive fluid storage chamber Z side and a second side wall surface 2 disposed on the atmosphere side 22.
The sealing material of the present invention is close to the corrosion-resistant ring 6 disposed so as to approach or contact the first side wall surface 1 on the corrosive fluid storage chamber Z side, and approaches or contacts the second side wall surface 2 and the bottom wall surface 3. It comprises an elastic seal body 7 so as to come into contact. In other words, the anticorrosion ring 6 that is resistant to aggressive fluid is disposed on the corrosive fluid storage chamber Z side (inner peripheral side), and the anticorrosion ring 6 is swallowed by the elastic seal body 7. It is a composite sealing material to be held (in a crushed state). It should be noted that no adhesive is used when the corrosion-resistant ring 6 is fitted.

  Incidentally, in FIGS. 1 to 3 (and FIGS. 4 to 7 described later), the case where the mounting groove 5 is opened downward is illustrated, but the sealing material according to the present invention is (upside down). On the contrary, it may be opened upward, or it may be opened horizontally, or obliquely upward or obliquely downward with respect to the vertical. 1, 2, 4, and 5, the minute gap between the seal material and the inner surface of the mounting groove 5 is between the first side wall surface 1 and the corrosion-resistant ring 6, and the elastic seal body. 7 and the second side wall surface 2. However, due to the weight of the sealing material, the presence or absence of the adhesive force between the sealing material and the mounting groove 5, and the opening direction of the mounting groove 5 (described above), the micro gap is It may be formed between the bottom wall surface 3 (not shown), and a minute gap may be formed only on one side of the first side wall surface 1 and the second side wall surface 2 (not shown). ).

The corrosion-resistant ring 6 is preferably made of a soft material that is deformable by pressurization from the elastic seal main body 7 under compression and is thin. For example, fluororesin (PTFE), PFA, PP, PE, thin metal, thin metal coated with PTFE, or the like is preferable, but PTFE is most preferable in terms of corrosion resistance.
The elastic seal body 7 may be a known rubber material, and specifically, fluororubber, silicone rubber, perfluoroelastomer, EPDM, chloroprene, urethane rubber and the like can be applied depending on the use environment. In view of excellent property and corrosion resistance, silicone rubber and fluorine rubber are preferable.

As shown in FIGS. 1 and 2, the corrosion-resistant ring 6 is formed in a V-shaped cross section so that the top 30 protrudes toward the mating member 20 (relatively close to the opening 4). Bend into a V shape. That is, the first side portion 31 and the second side portion 32 are bent at the top portion 30.
The anti-corrosion ring 6 is configured so that a drop-out preventing return portion 8 protrudes from the tip of the second side portion 32 and does not easily fall off the elastic seal body 7. That is, the return portion 8 has a triangular saddle shape.
The thickness T of the corrosion-resistant ring 6 is set to 0.2 mm to 2.0 mm. When the thickness T of the corrosion-resistant ring 6 is 0.2 mm ungrooved, during compression, the elastic seal body 7 is deformed excessively by the pressure accompanying the compression elastic deformation of the elastic seal body 7, and residual strain (deformation) occurs. On the other hand, if the thickness T of the corrosion-resistant ring 6 exceeds 2.0 mm, the rigidity becomes too high and elastic deformation is difficult to occur, and the corrosive fluid 21 may not be shut off.

The elastic seal main body 7 includes a mountain-shaped protrusion 11 that protrudes toward the mating member 20 and a side protrusion that bulges toward the second side wall surface 2 in the cross section of the uncompressed state shown in FIG. 9, a flat bottom surface portion 33 corresponding to the bottom wall surface 3, and an insertion groove portion 34 into which the second side portion 32 is inserted.
Further, in the uncompressed state, the vertical length h from the flat bottom surface portion 33 to the top portion 30 of the corrosion-resistant ring 6 is 0.7 to 1.0 times the height dimension H of the elastic seal body 7. Is set. When the vertical dimension h is less than 0.7 times the height dimension H, the top portion 30 of the corrosion-resistant ring 6 does not sufficiently adhere to the mating member 20 under the compression use condition, and the corrosive fluid 21 is There is a possibility that it cannot be blocked. On the other hand, when the vertical length h is larger than the height dimension H, the mountain-shaped protrusion 11 does not sufficiently adhere to the mating member 20 under compression and the sealing performance is deteriorated.

In the uncompressed state shown in FIG. 2, the left and right length dimension L from the outer end of the side protrusion 9 to the outer end of the first side portion 31 is 1 of the opening width dimension W ₀ of the opening 4. It is set to 1 to 1.5 times.
When the left and right length L is less than 1.1 times the opening width W _0, there is a fear of falling off of the sealing material. Further, if the left and right length dimension L exceeds 1.5 times the opening width dimension W ₀ , it is difficult to push the mounting groove 5 into the mounting groove 5.

Further, in the uncompressed state, the contact width dimension W ₁ at which the bottom wall surface 3 and the flat bottom surface portion 33 contact in the left-right direction is 0.3 times to 0.7 times the groove bottom width dimension W ₂ of the bottom wall surface 3. It is set to double.
When the contact width W ₁ is less than 0.3 times the groove bottom width W _2, when compressive load opening, there is a possibility that exit by adsorption (sticking) of the mating member 20. Further, if the contact width W ₁ exceeds 0.7 times the groove bottom width W _2, At a compression use, can not perform sufficiently compressive elastic deformation of the elastic sealing body 7 (can not be ensured volume movement) There is a fear.

A gap G is formed between the corrosion-resistant ring 6 and the bottom wall surface 3 in the uncompressed state.
The gap G ensures a movable range of the corrosion-resistant ring 6. Due to this gap G, when a compressive load is applied from the mating member 20 under compression, the elastic seal body 7 supports the anticorrosion ring 6 while compressively elastically deforming and directly compresses the anticorrosion ring 6. It is comprised so that a load may not act.

Here, the elastic seal body 7 will be described in more detail.
The elastic seal body 7 is preferably made of silicone rubber when it is attached to a place where physical deterioration (where ionized atoms are damaged so as to scrape the elastic seal body 7) is likely to occur. On the other hand, when the elastic seal body 7 is mounted at a place where chemical deterioration (reactive gas comes into contact with the elastic seal body 7 to cause corrosion deterioration) is likely to occur, the elastic seal body 7 is made of fluoro rubber. Is preferred.

Furthermore, the elastic seal body 7 may be molded from the material (a) or (b) excellent in oxygen plasma resistance described below, particularly when used in an environment of oxygen plasma treatment (oxygen radical state). preferable.
(A) is a barium sulfate 20-100 weight with respect to 100 weight part of a vinylidene fluoride-hexafluoropropylene copolymer or / and a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene copolymer. This is a material obtained by vulcanizing a composition obtained by blending parts.
(I) is a tetrafluoroethylene resin with respect to 100 parts by weight of vinylidene fluoride-hexafluoropropylene copolymer and / or vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene copolymer. It is a material formed by blending 0.5 to 30 parts by weight.

  Further, when the sealing material of the present invention is disposed in a location where oxygen radicals are generated, in other words, in a location where there is little plasma and oxygen radicals are present, the material for the corrosion-resistant ring 6 is (plasma resistance and resistance). It is preferable to apply the above fluororesin (having oxygen radical properties).

As shown in FIG. 8, a plasma etching apparatus or the like in which the sealing material of the present invention is used has a corrosive fluid storage chamber Z, and plasma disposed in the corrosive fluid storage chamber (reaction tube) Z In the inner tube (etch tunnel) 44 for removal, N ₂ O and rare gas, N ₂ and O ₂ and rare gas, or O ₂ and rare gas are plasma-excited, and oxygen radicals are generated as oxygen-excited active species. Occur.
That is, a gas in which plasma and oxygen radicals are mixed is generated in the corrosive fluid storage chamber Z, the plasma is removed by the inner tube (etch tunnel) 44 of the corrosive fluid storage chamber Z, and the semiconductor wafer is formed only by oxygen radicals. Surface treatment (etching, etc.) is performed. After the surface treatment, oxygen radicals in the inner tube 44 are discharged from the pipe 45c by opening the door 46a, while the surface-treated semiconductor wafer is taken out by opening another door 46b.

  For example, as shown in FIG. 8, the sealing material of the present invention is applied to the connecting portion N between the corrosive fluid storage chamber Z and the pipe 45a, the connecting portion M between the pipes 45a and 45b communicating with the corrosive fluid storage chamber Z, and the like. Or a connecting portion (sealing portion of the opening / closing door 46a) P between the discharge pipe 45c and the corrosive fluid storage chamber Z, a sealing portion Q of the opening / closing door 46b for taking out the semiconductor wafer, and the like. The

The use method (action) of the sealing material of the present invention described above will be described.
As shown in FIG. 1, the second side portion 32 of the corrosion-resistant ring 6 is inserted and held in the insertion groove portion 34 of the elastic seal body 7. Note that the shape of the corrosion-resistant ring 6 and the elastic seal body 7 hardly change before and after fitting.
Next, as shown in FIG. 2, the elastic seal body 7 is pressed into the mounting groove 5 while being compressed, and the corrosion-resistant ring 6 approaches or contacts the first side wall surface 1 on the corrosive fluid storage chamber Z side. And it mounts | wears so that the elastic seal main body 7 may approach or contact the 2nd side wall surface 2 and the bottom wall surface 3 (mounting uncompressed state).

Next, when the seal mounting member 23 and the mating member 20 are relatively close to each other, when a compressive load is applied from the mating member 20 to the chevron 11 of the elastic seal body 7 and the top 30 of the corrosion-resistant ring 6, the chevron 11 Then, the top 30 is brought into close contact with the mating member 20 (elastically) to obtain the compression use state shown in FIG.
At this time, the chevron 11 of the elastic seal body 7 is greatly elastically compressed and deformed, and is elastically brought into close contact with the counterpart member 20 for sealing. Further, the elastic seal body 7 is compressed and crushed by the compressive load from the mating member 20, and the side protrusion 9 further bulges toward the second side wall surface 2 and is in close contact with the second side wall surface 2, and is flat. The bottom 33 is brought into close contact with the bottom wall surface 3 with a high surface pressure, and the elastic seal body 7 causes the corrosion-resistant ring 6 to be pressed from the inside (pressurized as indicated by the arrow S) by volume movement due to compression elastic deformation. The first side portion 31 is expanded (elastically) so as to protrude toward the first side wall surface 1 side.

That is, the anticorrosion ring 6 has its top portion 30 in close contact (adherence) to the mating member 20 and is deformed (elastically) in the leg-opening direction by the pressurization accompanying the compression elastic deformation of the elastic seal body 7. The portion 31 is brought into close contact with the first side wall surface 1 to block the elastic seal body 7 from the corrosive fluid storage chamber Z.
Under the compression use condition, the corrosion-resistant ring 6 is continuously pressurized to the elastic seal body 7, so that the top portion 30 comes into close contact (contact) with the mating member 20 and the first side portion 31 is the first side wall surface. The elastic seal main body 7 and the corrosive fluid storage chamber Z are shut off while maintaining a close (close) state to 1.

  When the seal mounting member 23 and the mating member 20 are relatively separated from each other, the compressive load (from the mating member 20) applied to the chevron 11 of the elastic seal body 7 and the top 30 of the corrosion-resistant ring 6 is obtained. Is released, and the elastic elastic seal body 7 caused by the compressive load is no longer compressed and elastically deformed, and is restored to its original shape (elastically). At this time, the pressure from the elastic seal body 7 is removed and the anticorrosion ring 6 is restored to its original shape (from the state in which the first side portion 31 projects outward). 1 Separate from the side wall surface 1. Since the corrosion resistant ring 6 is not directly subjected to the compressive load from the mating member 20, no distortion remains after opening, and it returns to the uncompressed state shown in FIG. Therefore, the sealing material of the present invention maintains the vacuum holding property (sealing property) and the corrosion resistance over a long period of time without deteriorating the sealing property in the operation portion that repeatedly compresses and releases multiple times. .

The design of the present invention can be changed. For example, as shown in FIG. 4, the anticorrosion ring 6 has an anti-falling return portion 8 of the second side portion 32 in a (cross-sectional) arrow shape. Two triangular hooks may be provided on both sides, or as shown in FIG.
The mounting groove 5 is not limited to the shape shown in FIGS. 1 to 3. For example, as shown in FIG. 6, the first side wall surface 1 and the second side wall surface 2 are positioned in the vicinity of the opening 4. 7 may be a dovetail shape formed so as to approach suddenly, or, as shown in FIG. 7, it may be a one-side dovetail shape in which only the first side wall surface 1 approaches as it approaches the opening 4. good.
Although not shown, when the corrosive fluid storage chamber Z is disposed on the outer peripheral side, a corrosion-resistant ring 6 that is resistant to the corrosive fluid is disposed on the outer peripheral side, and the elastic seal body 7 is disposed on the inner peripheral side. In this case, the first side wall surface 1 with which the corrosion-resistant ring 6 is in close contact under compression is the outer peripheral side, and the second side wall surface 2 with which the elastic seal body 7 is in close contact is with the inner peripheral side.

  As described above, the sealing material according to the present invention is annularly mounted in the annular mounting groove 5 having the opening 4, the first side wall surface 1, the second side wall surface 2, and the bottom wall surface 3. A corrosion-resistant ring 6 disposed so as to approach or contact the first side wall surface 1 on the corrosive fluid storage chamber Z side, and the second side wall surface 2 and the bottom wall surface 3 The anticorrosion ring 6 has a top portion 30 bent into a protruding shape toward a mating member 20 that is relatively close to and away from the opening 4. In addition, the elastic seal body 7 has a V-shaped cross section having a first side portion 31 and a second side portion 32, and the elastic seal body 7 protrudes toward the mating member 20 in a cross section in an uncompressed state. The protrusion 11, the side protrusion 9 bulging toward the second side wall surface 2, the flat bottom surface 33 corresponding to the bottom wall surface 3, and the second side And the insertion groove part 34 into which 32 is inserted, in the compression use state, the mountain-shaped protrusion 11 and the top part 30 are in close contact with the mating member 20, and the first side part 31 is the first side wall surface 1. The anti-corrosion ring 6 has a second side 32 (inserted into the insertion groove 34 and held under pressure) so that the stable position is always maintained, and the top 30 is the counterpart. The first side 31 is in close contact with the first side wall surface 1 in pressure contact with the member 20, so that the anti-corrosion ring 6 can reliably prevent the corrosive fluid 21 from flowing toward the elastic seal body 7. Moreover, the elastic seal body 7 can reliably prevent the atmosphere side 22 and the like from entering the corrosive fluid storage chamber Z side. Therefore, since the elastic seal body 7 is not deteriorated by the corrosive fluid 21, the sealing performance can be maintained for a long period of time, and the dust generation of the elastic seal body 7 due to the deterioration does not occur (in a semiconductor manufacturing apparatus or the like). Therefore, it is possible to prevent impurities from adhering to the product. Since the compressive load from the mating member 20 is absorbed by the elastic deformation of the elastic seal body 7 and is not directly applied to the anticorrosion ring 6, when the compressive load is released, the anticorrosion ring 6 is not distorted and compressed several times. -It can be used by repeating the opening operation. Therefore, the cost of parts replacement / maintenance can be reduced. One mounting groove 5 is sufficient, which contributes to downsizing of the apparatus. Dropping when releasing the compression load can be prevented, and since no adhesive is used, problems such as mixing of adhesive and generation of gas can be solved.

  Further, since the anti-corrosion ring 6 is provided with the drop-out preventing return portion 8 on the second side portion 32, the anti-corrosion ring 6 does not fall off from the elastic seal body 7, and can always maintain a stable posture and maintain the corrosion resistance. .

  Further, in the uncompressed state, the vertical length h from the flat bottom surface portion 33 to the top portion 30 of the corrosion-resistant ring 6 is 0.7 to 1.0 times the height dimension H of the elastic seal body 7. Since it is set, vacuum retention (sealing performance) and corrosion resistance can be exhibited, and sealing performance can be secured even when used multiple times.

In the uncompressed state, the left and right length L from the outer end of the side projection 9 to the outer end of the first side 31 is 1.1 times the opening width W ₀ of the opening 4. Since it is set to ˜1.5 times, it is easy to attach to the mounting groove 5 and it is possible to prevent the dropout.

Further, in the uncompressed state, the contact width dimension W ₁ at which the bottom wall surface 3 and the flat bottom surface portion 33 contact in the left-right direction is 0.3 times to 0.7 times the groove bottom width dimension W ₂ of the bottom wall surface 3. Since it is set to double, it is possible to prevent the dropout due to adsorption (adherence) to the mating member 20 when the compression load is released.

  In addition, since the wall thickness dimension T of the corrosion-resistant ring 6 is set to 0.2 mm to 2.0 mm in the uncompressed state, the elastic seal body 7 is appropriately deformed by pressurization accompanying the compression elastic deformation. And exhibit corrosion resistance.

  Further, since the gap G is formed between the corrosion-resistant ring 6 and the bottom wall surface 3 in the uncompressed state, the movable range of the corrosion-resistant ring 6 can be secured.

DESCRIPTION OF SYMBOLS 1 1st side wall surface 2 2nd side wall surface 3 Bottom wall surface 4 Opening part 5 Mounting groove 6 Corrosion-resistant ring 7 Elastic seal main body 8 Falling-out return part 9 Side protrusion 11 Angle protrusion 20 Counterpart member 30 Top part 31 First part 1 side part 32 2nd side part 33 flat bottom face part 34 insertion groove part Z corrosive fluid storage chamber h top and bottom length dimension H height dimension L left and right length dimension W ₀ opening width dimension W ₁ contact width dimension W ₂ groove bottom Width dimension T Wall thickness G Gap

Claims (6)

An annular seal member mounted in an annular mounting groove (5) having an opening (4), a first side wall surface (1), a second side wall surface (2), and a bottom wall surface (3). Because
Corrosion-resistant ring (6) disposed so as to approach or contact the first side wall surface (1) on the corrosive fluid storage chamber (Z) side, the second side wall surface (2), and the bottom wall surface An elastic seal body (7) disposed so as to approach or contact (3),
The corrosion-resistant ring (6) has a top portion (30) bent in a protruding shape toward a mating member (20) that is relatively close to and away from the opening (4), and a first side portion (31). ) And the second side part (32), and the V-shaped groove formed by the first side part (31) and the second side part (32) is the bottom wall surface. Open towards (3),
The elastic seal body (7) is formed on the side of the second side wall surface (2) and the angled protrusion (11) projecting toward the mating member (20) in the uncompressed transverse cross section. A bulging side projection (9), a flat bottom surface (33) corresponding to the bottom wall surface (3), and an insertion groove (34) into which the second side (32) is inserted. Have
Hold the second side portion (32) in the insertion groove portion (34) as an insertion shape without using an adhesive,
In the compression use state, the angle protrusion (11) and the top (30) are in close contact with the mating member (20), and the first side (31) is the first side wall surface (1). configured so as closely to,
Furthermore, a gap (G) is formed between the corrosion-resistant ring (6) and the bottom wall surface (3) in the uncompressed state and the compressed use state, and the corrosion-resistant ring (6). The sealing material is characterized in that the compressive load from the mating member (20) and the bottom wall surface (3) is not directly applied .   The sealing material according to claim 1, wherein the corrosion-resistant ring (6) is provided with a drop-out preventing return portion (8) protruding from the second side portion (32).   In the uncompressed state, the vertical length (h) from the flat bottom surface portion (33) to the top portion (30) of the anticorrosion ring (6) is the height of the elastic seal body (7). The sealing material according to claim 1 or 2, which is set to 0.7 to 1.0 times (H). In the uncompressed state of mounting, the left and right length dimension (L) from the outer end of the side protrusion (9) to the outer end of the first side (31) is the opening of the opening (4). The sealing material according to claim 1, 2, or 3, which is set to 1.1 to 1.5 times the width dimension (W ₀ ). The contact width dimension (W ₁ ) at which the bottom wall surface (3) and the flat bottom surface portion (33) abut in the left-right direction in the uncompressed state of attachment is the groove bottom width dimension (W The sealing material according to claim 1, 2, 3 or 4, which is set to 0.3 to 0.7 times of ₂ ).   The sealing material according to claim 1, 2, 3, 4 or 5, wherein a thickness dimension (T) of the corrosion-resistant ring (6) is set to 0.2 mm to 2.0 mm in an uncompressed state. .

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