JP4768381B2

JP4768381B2 - Oxygen-resistant radical seal material

Info

Publication number: JP4768381B2
Application number: JP2005283726A
Authority: JP
Inventors: 王昭松浦; 康司加納; 一彦木挽
Original assignee: Mitsubishi Cable Industries Ltd
Current assignee: Mitsubishi Cable Industries Ltd
Priority date: 2005-09-29
Filing date: 2005-09-29
Publication date: 2011-09-07
Anticipated expiration: 2025-09-29
Also published as: JP2007092892A

Description

本発明は、半導体製造装置又は液晶パネルの表面処理装置等に使用される耐腐食ガス性に優れたシール材に係り、特には、シール性に加え、耐酸素ラジカル性、耐腐食性を兼ね備えた耐酸素ラジカルシール材に関する。 The present invention relates to a sealing material excellent in corrosion gas resistance used in a semiconductor manufacturing apparatus or a liquid crystal panel surface treatment apparatus, and in particular, in addition to sealing performance, has oxygen radical resistance and corrosion resistance. The present invention relates to an oxygen-resistant radical seal material.

半導体製造装置又は液晶パネルの表面処理装置に使用されるシール材は、真空環境を作り出すために、一般にフッ素ゴムのＯリングが用いられていたが、このＯリングは、半導体のドライエッチングや液晶パネルの表面処理プロセスに於て、反応性ガス（具体的には、四フッ化炭素、三フッ化炭素、六フッ化硫黄）雰囲気下、酸素ガス雰囲気下、又は、反応性ガスと酸素ガスとの混合気体雰囲気下でのプラズマ処理という過酷な条件に曝されるため、劣化（腐食）して発塵し、半導体ウエハー上にコンタミ（不純物・異物）を付着させる原因となっていた。
一方、耐腐食ガス性（耐反応ガス性及び耐プラズマ性）を有する材料には、フッ素樹脂等が挙げられるが、フッ素樹脂は弾性が小さいので、シール性が充分でなく接面漏れが発生し、真空を保持する目的には使用できなかった。 In order to create a vacuum environment, a fluorine rubber O-ring is generally used as a sealing material used in a semiconductor manufacturing apparatus or a liquid crystal panel surface treatment apparatus. This O-ring is used for dry etching of a semiconductor or a liquid crystal panel. In the surface treatment process, the reactive gas (specifically, carbon tetrafluoride, carbon trifluoride, sulfur hexafluoride) atmosphere, the oxygen gas atmosphere, or the reactive gas and the oxygen gas Since it was exposed to the harsh conditions of plasma treatment in a mixed gas atmosphere, it deteriorated (corroded) and generated dust, causing contamination (impurities / foreign matter) to adhere to the semiconductor wafer.
On the other hand, examples of the material having corrosion gas resistance (reaction gas resistance and plasma resistance) include fluororesins, but since fluororesins have low elasticity, sealing performance is not sufficient and contact surface leakage occurs. It could not be used for the purpose of maintaining a vacuum.

そこで、上記問題を解決するため、図９に示すように、従来の装着溝に装着されるＯリングは、合成ゴムの部位40と耐腐食性材料の部位41とから成り、合成ゴムの部位40を大気22側に配置し、耐腐食性材料の部位41を腐食ガス21側に配置することで、耐腐食性材料の部位41は合成ゴムの部位40を腐食ガス21から保護し、合成ゴムの部位40は真空を維持できた（例えば、特許文献１参照）。
特開平１１−２３２８号公報 Therefore, in order to solve the above problem, as shown in FIG. 9, the conventional O-ring mounted in the mounting groove is composed of a synthetic rubber portion 40 and a corrosion-resistant material portion 41. Is placed on the atmosphere 22 side, and the part 41 of the corrosion-resistant material is placed on the side of the corrosive gas 21, so that the part 41 of the corrosion-resistant material protects the part 40 of the synthetic rubber from the corrosive gas 21, and The part 40 was able to maintain a vacuum (for example, refer patent document 1).
Japanese Patent Laid-Open No. 11-2328

しかし、図９に示した従来のシール材は断面が円形であるため、そのＯリングが相手部材20から圧縮荷重を受けた圧縮使用状態に於て、耐腐食性材料の部位41は装着溝及び相手部材20に密着する範囲が少なく、合成ゴムの部位40と耐腐食性材料の部位41との隣接部分では、耐腐食性材料の部位41は、合成ゴムを腐食ガス21から完全に保護することができず、長期的に合成ゴムの劣化を抑止して真空を維持することができない問題があった。
そこで、本発明は、真空保持性（密封性）と耐腐食ガス性を具備し、その真空保持性（密封性）と耐腐食ガス性を長期的に維持できる耐酸素ラジカルシール材を提供することを目的とする。 However, since the conventional sealing material shown in FIG. 9 has a circular cross section, the portion 41 of the corrosion-resistant material has a mounting groove and a portion of the O-ring in a compression use state in which a compression load is received from the counterpart member 20. In the adjacent part of the synthetic rubber part 40 and the corrosion-resistant material part 41, the corrosion-resistant material part 41 should completely protect the synthetic rubber from the corrosive gas 21. There was a problem that the vacuum could not be maintained by inhibiting the deterioration of the synthetic rubber over the long term.
Accordingly, the present invention provides an oxygen-resistant radical seal material that has vacuum retention (sealing performance) and corrosion gas resistance and can maintain the vacuum retention (sealing performance) and corrosion gas resistance for a long period of time. With the goal.

上記目的を達成するために、本発明に係る耐酸素ラジカルシール材は、開口部と、第１側壁面と、第２側壁面と、底壁面とを、有する環状の装着溝内に装着される環状のシール材であって、腐食ガス収納室側の第１側壁面に対向して配設される耐腐食用リングと、第２側壁面側に配設される弾性シール本体と、から成り、該耐腐食用リングは、第２側壁面側に開口する嵌込凹溝を有する横断面形状が略Ｃ字状であって、かつ、シリコーンゴム製であり、上記弾性シール本体は、横断面に於て第２側壁面側に膨出する円弧部と、上記嵌込凹溝に挿嵌される突部を有し、さらに、弾性シール本体には、上記底壁面側と、上記開口部に相対的に接近する相手部材側に、それぞれ膨出する突隆部を備え、装着未圧縮状態に於て、底壁面側の突隆部は、上記耐腐食用リングの底壁面側の端面より底壁面側へ突出し、相手部材側の突隆部は、耐腐食用リングの相手部材側の端面より相手部材側へ突出して形成された。 To achieve the above object, an oxygen-resistant radical sealing material according to the present invention is mounted in an annular mounting groove having an opening, a first side wall surface, a second side wall surface, and a bottom wall surface. An annular seal material comprising a corrosion-resistant ring disposed opposite to the first side wall surface on the corrosive gas storage chamber side, and an elastic seal body disposed on the second side wall surface side; The anti-corrosion ring has a substantially C-shaped cross section having a recessed groove opened on the second side wall surface side, and is made of silicone rubber. An arc portion that bulges toward the second side wall surface side, and a protrusion that is inserted into the fitting groove, and the elastic seal body is relatively opposite to the bottom wall surface side and the opening portion. the mating member side which to close, with a突隆portion bulging respectively, at a mounting uncompressed state,突隆portion of the bottom wall side, Serial corrosion edible ring bottom wall surface side of the projecting from the end surface to the bottom wall surface side of突隆portion of the mating member side, are formed to protrude from the end surface of the mating member side of corrosion edible ring to the other member side.

また、開口部と、第１側壁面と、第２側壁面と、底壁面とを、有する環状の装着溝内に装着される環状のシール材であって、腐食ガス収納室側の第１側壁面に対向して配設される耐腐食用リングと、第２側壁面側に配設される弾性シール本体と、から成り、該耐腐食用リングは、第２側壁面側に開口する嵌込凹溝を有する横断面形状が略Ｃ字状であって、かつ、シリコーンゴム製であり、上記弾性シール本体は、横断面に於て第２側壁面側に膨出する円弧部と、上記嵌込凹溝に挿嵌される突部を有し、さらに、弾性シール本体には、上記底壁面側と、上記開口部に相対的に接近する相手部材側に、それぞれ膨出する突隆部を備え、装着未圧縮状態に於て、上記耐腐食用リングの底壁面側の端面を平坦かつ底壁面と平行に配置すると共に、上記耐腐食用リングの相手部材側の端面を平坦かつ該相手部材と平行に配置し、上記底壁面側の突隆部は、上記底壁面側の端面より該底壁面側へ突出し、上記相手部材側の突隆部は、上記相手部材側の端面より該相手部材側へ突出して形成された。 Moreover, the opening, the first sidewall surface, and the side wall surface, a bottom wall, having an annular sealing member mounted on the ring-shaped mounting groove, a first corrosion gas storage chamber side The anti-corrosion ring disposed opposite to the side wall surface and the elastic seal main body disposed on the second side wall surface side, and the anti-corrosion ring is fitted to the second side wall surface side. The cross-sectional shape having the recessed groove is substantially C-shaped, and is made of silicone rubber. The elastic seal body includes an arc portion that bulges toward the second side wall surface in the cross-section, A protrusion having a protrusion inserted into the insertion groove, and a protrusion protruding to the elastic seal body on the bottom wall surface side and on the counterpart member side relatively approaching the opening. the provided, mounted at a uncompressed state, as well as parallel to the bottom wall surface side end surface flat and the bottom wall surface of the corrosion edible ring, the The end surface on the mating member side of the corrosion ring is arranged flat and parallel to the mating member, and the protruding portion on the bottom wall surface side projects from the end surface on the bottom wall surface side to the bottom wall surface side, The protruding portion is formed so as to protrude from the end surface on the counterpart member side toward the counterpart member side .

また、上記弾性シール本体はフッ素ゴム、エチレン−プロピレンゴム、ニトリルゴム、又は、水素添加ニトリルゴムから成っている。
また、上記嵌込凹溝の底面と、その底面に向かい合う上記突部の端面との間に隙間を設けた。
また、半導体製造装置用又は液晶パネルの表面処理装置に用いられるものである。 The elastic seal body is made of fluorine rubber, ethylene-propylene rubber, nitrile rubber, or hydrogenated nitrile rubber.
Moreover, the clearance gap was provided between the bottom face of the said insertion recessed groove, and the end surface of the said protrusion facing the bottom face.
Further, it is used for a semiconductor manufacturing apparatus or a liquid crystal panel surface treatment apparatus.

本発明は、次のような著大な効果を奏する。
本発明に係る耐酸素ラジカルシール材によれば、耐腐食用リングは、腐食ガス収納室からの腐食ガスが弾性シール本体に接するのを抑止でき、弾性シール本体は、大気が腐食ガス側へ入り込むのを阻止できる。従って、弾性シール本体は、腐食ガスによって劣化しないので、真空保持性を長期的に維持でき、かつ、その劣化による弾性シール本体の発塵が起こらないので、製品に不純物や異物が付着することがなくなる。
さらに、耐腐食用リングはシリコーンゴム製であり、耐酸素ラジカル性を有するので、腐食ガスによる劣化を防止でき、弾性シール本体の真空保持性を長期的に維持することができる。この耐腐食用リングは、（耐プラズマ性と耐酸素ラジカル性を有する）高価なフッ素樹脂製のシール材に比べて安価に製造することができるので、特に、プラズマを除去した酸素ラジカル環境下で使用する場合に好適である。 The present invention has the following remarkable effects.
According to the oxygen-resistant radical seal material according to the present invention, the corrosion-resistant ring can prevent the corrosive gas from the corrosive gas storage chamber from coming into contact with the elastic seal main body, and the elastic seal main body allows the atmosphere to enter the corrosive gas side. Can be prevented. Therefore, since the elastic seal body is not deteriorated by corrosive gas, the vacuum retention can be maintained for a long period of time, and dust generation of the elastic seal body due to the deterioration does not occur. Disappear.
Further, since the corrosion-resistant ring is made of silicone rubber and has oxygen radical resistance, deterioration due to corrosive gas can be prevented, and the vacuum retention of the elastic seal body can be maintained for a long time. This corrosion-resistant ring can be manufactured at a lower cost than an expensive fluororesin sealing material (having plasma resistance and oxygen radical resistance), particularly in an oxygen radical environment from which plasma has been removed. It is suitable for use.

以下、実施の形態に示す図面に基づき本発明を詳説する。
本発明の耐酸素ラジカルシール材は、主に半導体の製造や液晶パネルの表面処理に用いられるプラズマエッチング装置に使用されるものである。
図10に示すように、上記プラズマエッチング装置には腐食ガス収納室Ｚが設けられ、腐食ガス収納室（反応管）Ｚ内に配設されたプラズマを除去するための内管（エッチトンネル）44では、Ｎ₂Ｏと希ガス、Ｎ₂とＯ₂と希ガス、又は、Ｏ₂と希ガスをプラズマ励起し、酸素励起活性種として酸素ラジカルを発生する。
つまり、プラズマと酸素ラジカルが混在するガスが、配管45ｂと配管45ａを通過して腐食ガス収納室Ｚ内に送り込まれる。腐食ガス収納室Ｚの内管（エッチトンネル）44でプラズマを除去し、酸素ラジカルにて半導体ウエハーの表面処理（エッチング等）を行う。表面処理後、内管44内の酸素ラジカルは、開閉扉46ａを開放し配管45ｃから排出され、一方、表面処理された半導体ウエハーは、別の開閉扉46ｂを開けて取り出される。
そして、本発明のシール材は、酸素ラジカルが発生する箇所、言い換えれば、プラズマが少なく酸素ラジカルが存在する箇所に配設されている。具体的には、例えば、図10に於て、酸素ラジカルを排出する配管45ｃと腐食ガス収納室Ｚとの連結部（開閉扉46ａの密閉部）Ｐや、半導体ウエハーを取り出す開閉扉46ｂの密閉部Ｑ等に配設され、プラズマが存在する配管45ａと腐食ガス収納室Ｚとの連結部Ｌや、配管45ａ，45ｂ同士の連結部Ｍ等への配設は、好適ではない。
なお、酸窒化処理はＮ₂又はＮ₂Ｏにて行い、希ガスとしては、クリプトン、ヘリウム、アルゴン、ネオン又はキセノンを用いる。また、プラズマ励起は、ＲＦ、マイクロ波又はＤＣプラズマにより行う。 Hereinafter, the present invention will be described in detail with reference to the drawings shown in the embodiments.
The oxygen-resistant radical sealing material of the present invention is mainly used in a plasma etching apparatus used for semiconductor manufacturing and liquid crystal panel surface treatment.
As shown in FIG. 10, the plasma etching apparatus is provided with a corrosive gas storage chamber Z, and an inner tube (etch tunnel) 44 for removing plasma disposed in the corrosive gas storage chamber (reaction tube) Z. Then, N ₂ O and rare gas, N ₂ and O ₂ and rare gas, or O ₂ and rare gas are plasma-excited to generate oxygen radicals as oxygen-excited active species.
That is, a gas in which plasma and oxygen radicals are mixed is sent into the corrosive gas storage chamber Z through the pipe 45b and the pipe 45a. The plasma is removed by the inner tube (etch tunnel) 44 of the corrosive gas storage chamber Z, and the surface treatment (etching or the like) of the semiconductor wafer is performed with oxygen radicals. After the surface treatment, oxygen radicals in the inner tube 44 are discharged from the pipe 45c by opening the door 46a, while the surface-treated semiconductor wafer is taken out by opening another door 46b.
And the sealing material of this invention is arrange | positioned in the location where oxygen radicals generate | occur | produce, ie, the location where there is little plasma and oxygen radicals exist. Specifically, for example, in FIG. 10, the connection part (sealing part of the opening / closing door 46a) P between the piping 45c for discharging oxygen radicals and the corrosive gas storage chamber Z, and the opening / closing door 46b for taking out the semiconductor wafer are sealed. Arrangement in the connecting part L between the pipe 45a where the plasma exists and the corrosive gas storage chamber Z, the connecting part M between the pipes 45a and 45b, etc. disposed in the part Q or the like is not suitable.
The oxynitriding treatment is performed with N ₂ or N ₂ O, and krypton, helium, argon, neon, or xenon is used as a rare gas. Plasma excitation is performed by RF, microwave, or DC plasma.

図１・図２・図３に示す第１の実施形態に於て、23はシール取付部材であり、シール取付部材23は装着溝５を具備し、装着溝５は、開口部４と、相互にその開口部４に近づくにつれて接近する第１側壁面１・第２側壁面２と、底壁面３とを、有する環状の横断面台形の蟻溝である。本発明はその装着溝５内に装着される（全体が環状の）シール材30であり、第１側壁面１を内周側に配設し、第２側壁面２を外周側に配設している。なお、この環状には円形状、矩形状及びその他の形状も含まれる。20は開口部４に相対的に接近する相手部材である。
なお、シール取付部材23と相手部材20は、酸素ラジカルが発生する箇所、例えば、図10に於て、酸素ラジカルを排出する配管45ｃと腐食ガス収納室Ｚとの連結部（開閉扉46ａの密閉部）Ｐや、半導体ウエハーを取り出す開閉扉46ｂの密閉部Ｑ等に配設されている。 In the first embodiment shown in FIGS. 1, 2, and 3, reference numeral 23 denotes a seal mounting member. The seal mounting member 23 includes a mounting groove 5, and the mounting groove 5 is mutually connected to the opening 4. The first side wall surface 1 and the second side wall surface 2 and the bottom wall surface 3 approach each other as they approach the opening 4. The present invention is a seal material 30 mounted in the mounting groove 5 (entirely annular), the first side wall surface 1 is disposed on the inner peripheral side, and the second side wall surface 2 is disposed on the outer peripheral side. ing. This annular shape includes a circular shape, a rectangular shape, and other shapes. Reference numeral 20 denotes a mating member that is relatively close to the opening 4.
It should be noted that the seal mounting member 23 and the mating member 20 are connected to a portion where oxygen radicals are generated, for example, in FIG. 10, a connecting portion between the piping 45c for discharging oxygen radicals and the corrosive gas storage chamber Z (sealing of the open / close door 46a). Part) P, and a sealing part Q of the opening / closing door 46b for taking out the semiconductor wafer.

図１は、シール材30が装着溝５内に装着されているが、シール材30は相手部材20から圧縮荷重を受けていない状態──装着未圧縮状態──を示す。図２は、シール材30が装着溝５へ装着される前の状態──自由状態──を示す。また、図３は、シール材30が装着溝５内に装着されて、相手部材20から圧縮荷重を受けている状態──圧縮使用状態──を示す。なお、図１及び図３では、シール取付部材23と相手部材20は互いに平行に配置されている。 FIG. 1 shows a state in which the sealing material 30 is mounted in the mounting groove 5, but the sealing material 30 does not receive a compressive load from the counterpart member 20. FIG. 2 shows a state before the sealing material 30 is mounted in the mounting groove 5—a free state. FIG. 3 shows a state in which the sealing material 30 is mounted in the mounting groove 5 and receives a compressive load from the mating member 20—compressed use state. 1 and 3, the seal mounting member 23 and the mating member 20 are arranged in parallel to each other.

図１に示す装着未圧縮状態に於て、Ｚは反応性ガス（具体的には、四フッ化炭素、三フッ化炭素、六フッ化硫黄）やプラズマ状態にあるガス等が含まれる腐食ガスを収納する腐食ガス収納室であり、第１側壁面１は腐食ガス収納室Ｚ側に配置され、第２側壁面２は大気22側に配置されている。シール材30は、第１側壁面１側に（接近又は接触するように）配設される耐腐食用リング６と、第２側壁面２側に（接近又は接触するように）配設される弾性シール本体７と、から成り、言い換えると、耐腐食用リング６は内周側に配置され、弾性シール本体７は外周側に配置されている。また、耐腐食用リング６は、シリコーンゴム製である。弾性シール本体７は、公知のゴム材料であれば良く、具体的には、フッ素ゴム製、エチレン−プロピレンゴム製、ニトリルゴム製又は水素添加ニトリルゴム製等が適用でき、中でも、耐プラズマ性や耐腐食ガス性が優れている点で、フッ素ゴム製が好ましい。さらに、シール材30が化学的劣化（反応性ガスが弾性シール本体７に接触し、腐食劣化させること）の起こり易い箇所に装着される場合は、弾性シール本体７はフッ素ゴム製であることが好ましい。 In the uncompressed state shown in FIG. 1, Z is a corrosive gas containing a reactive gas (specifically, carbon tetrafluoride, carbon trifluoride, sulfur hexafluoride) or a gas in a plasma state. The first side wall surface 1 is disposed on the corrosive gas storage chamber Z side, and the second side wall surface 2 is disposed on the atmosphere 22 side. The sealing material 30 is disposed on the first side wall surface 1 side (so as to approach or contact) and the anticorrosion ring 6 and close to the second side wall surface 2 side (so as to approach or contact). In other words, the corrosion-resistant ring 6 is disposed on the inner peripheral side, and the elastic seal body 7 is disposed on the outer peripheral side. The corrosion-resistant ring 6 is made of silicone rubber. The elastic seal body 7 may be a known rubber material, and specifically, a fluororubber, an ethylene-propylene rubber, a nitrile rubber, or a hydrogenated nitrile rubber can be applied. In view of excellent corrosion gas resistance, fluororubber is preferable. Furthermore, when the sealing material 30 is attached to a place where chemical deterioration (reactive gas comes into contact with the elastic seal body 7 and causes corrosion deterioration) is likely to occur, the elastic seal body 7 may be made of fluoro rubber. preferable.

さらに、弾性シール本体７は、特に酸素プラズマ処理（酸素ラジカル状態）の環境下で用いる場合、以下に記す耐酸素プラズマ性に優れた（ア）又は（イ）の素材から成型されることが好ましい。
（ア）は、フッ化ビニリデン−六フッ化プロピレン共重合体、又は、及び、フッ化ビニリデン−六フッ化プロピレン−四フッ化エチレン共重合体 100重量部に対して、硫酸バリウム20〜100 重量部を配合して成る組成物をポリオール加硫した素材である。
（イ）は、フッ化ビニリデン−六フッ化プロピレン共重合体、又は、及び、フッ化ビニリデン−六フッ化プロピレン−四フッ化エチレン共重合体 100重量部に対して、さらに四フッ化エチレン樹脂 0.5〜30重量部を配合して成る素材である。 Furthermore, the elastic seal body 7 is preferably molded from the material (a) or (b) excellent in oxygen plasma resistance described below, particularly when used in an environment of oxygen plasma treatment (oxygen radical state). .
(A) is a vinylidene fluoride-hexafluoropropylene copolymer or a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene copolymer, 100 to 100 parts by weight of barium sulfate, 20 to 100 weights. This is a material obtained by vulcanizing a composition obtained by blending parts.
(I) is a vinylidene fluoride-hexafluoropropylene copolymer or a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene copolymer, and further a tetrafluoroethylene resin with respect to 100 parts by weight of the copolymer. It is a material formed by blending 0.5 to 30 parts by weight.

耐腐食用リング６は、第２側壁面２側──大気側──に開口する嵌込凹溝８を有し、その横断面は略Ｃ字状に形成されている。
弾性シール本体７は、横断面に於て第２側壁面２側に略半円状に膨出する円弧部９と、上記嵌込凹溝８に挿嵌される突部10を有し、かつ、弾性シール本体７の横断面はきのこ形（マッシュルーム形）に形成されている。きのこ傘に相当する円弧部９には、上記底壁面３側と相手部材20側に、それぞれ膨出する小さい突隆部（小突隆部）11，11を備えている。 The corrosion-resistant ring 6 has a fitting groove 8 that opens to the second side wall surface 2 side--atmosphere side--and has a substantially C-shaped cross section.
The elastic seal body 7 has an arcuate portion 9 that bulges in a substantially semicircular shape on the second side wall surface 2 side in the cross section, and a protrusion 10 that is inserted into the insertion groove 8. The cross section of the elastic seal body 7 is formed in a mushroom shape (mushroom shape). The arc portion 9 corresponding to a mushroom umbrella is provided with small bulge portions (small bulge portions) 11 and 11 that bulge on the bottom wall surface 3 side and the counterpart member 20 side, respectively.

また、底壁面３側の突隆部11は、耐腐食用リング６の底壁面３側の端面12より底壁面３側へ突出し、相手部材20側の突隆部11は、耐腐食用リング６の相手部材20側の端面13より相手部材20側へ突出して形成されている。なお、耐腐食用リング６の変形とクリープを抑制するために、端面12，13は平坦に形成されると共に、底壁面３側の端面12は底壁面３と平行に配置され、相手部材20側の端面13は相手部材20と平行に配置されている。また、端面12と端面13は互いに平行である。この突隆部11は低く小さい丸山形である。 Further, the protruding portion 11 on the bottom wall surface 3 side protrudes from the end surface 12 on the bottom wall surface 3 side of the corrosion-resistant ring 6 toward the bottom wall surface 3 side, and the protruding portion 11 on the counterpart member 20 side is protruded from the corrosion-resistant ring 6. It is formed so as to protrude from the end face 13 on the mating member 20 side to the mating member 20 side. In order to suppress deformation and creep of the corrosion-resistant ring 6, the end surfaces 12 and 13 are formed flat, and the end surface 12 on the bottom wall surface 3 side is arranged in parallel with the bottom wall surface 3, so that the mating member 20 side This end face 13 is arranged in parallel with the mating member 20. Further, the end face 12 and the end face 13 are parallel to each other. This ridge 11 is a low and small round mountain shape.

次に、図２に示す自由状態に於て、耐腐食用リング６の内周側へ膨出する凸曲面の横断面は円弧状に形成され、嵌込凹溝８の底面17は横断面円弧状の凹曲面である。
円弧部９は、外周側へ膨出する横断面弧状の大弧状部15と、突隆部11，11の表面を形成する横断面弧状の小弧状部16，16を有する。さらに、突部10は、横断面が略矩形に形成されている。 Next, in the free state shown in FIG. 2, the cross section of the convex curved surface that bulges to the inner peripheral side of the anticorrosion ring 6 is formed in an arc shape, and the bottom surface 17 of the fitting groove 8 is a circular cross section. It is an arc-shaped concave curved surface.
The arc portion 9 includes a large arc-shaped portion 15 having an arc-shaped cross section that bulges toward the outer peripheral side, and small arc-shaped portions 16 and 16 having an arc-shaped cross-section forming the surfaces of the protruding portions 11 and 11. Further, the protrusion 10 has a substantially rectangular cross section.

また、嵌込凹溝８の底面17と、その底面17に向かい合う突部10の端面との間に隙間14を設けている。この隙間14は、圧縮変形時（装着未圧縮状態から圧縮使用状態へ変化する時）の弾性シール本体７の体積移動を調整できるために設けている。嵌込凹溝８に挿嵌された突部10が外れにくくするために、突部10の幅寸法Ｄ₂は嵌込凹溝８の幅寸法Ｄ₁より若干大きく設定してもよく、また、嵌込凹溝８の幅寸法Ｄ₁を外周側に向かって徐々に小さく設定し、突部10の幅寸法Ｄ₂を内周側に向かって徐々に大きくなるように設定しても自由である。 Further, a gap 14 is provided between the bottom surface 17 of the fitting groove 8 and the end surface of the projection 10 facing the bottom surface 17. The gap 14 is provided so as to adjust the volume movement of the elastic seal body 7 during compression deformation (when changing from an uncompressed state to a compressed use state). In order to make it difficult for the protrusion 10 inserted in the insertion groove 8 to come off, the width dimension D ₂ of the protrusion 10 may be set slightly larger than the width dimension D ₁ of the insertion groove 8. It is also possible to set the width dimension D ₁ of the recessed groove 8 to be gradually smaller toward the outer peripheral side and the width dimension D ₂ of the protrusion 10 to be gradually increased toward the inner peripheral side. .

図４と図５に示す第２の実施の形態に於て、図４は装着未圧縮状態を示し、図５は分解した自由状態を示す。環状の装着溝５の第１側壁面１は外周側に配設され、第２側壁面２は内周側に配設されている。従って、耐腐食用リング６は外周側に配設され、弾性シール本体７は内周側に配設されている。なお、図４と図５に於て、図１・図２と同一の符号は図１・図２と同様の構成であるので、説明を省略する。 In the second embodiment shown in FIGS. 4 and 5, FIG. 4 shows the uncompressed state of attachment, and FIG. 5 shows the disassembled free state. The first side wall surface 1 of the annular mounting groove 5 is disposed on the outer peripheral side, and the second side wall surface 2 is disposed on the inner peripheral side. Accordingly, the corrosion-resistant ring 6 is disposed on the outer peripheral side, and the elastic seal body 7 is disposed on the inner peripheral side. 4 and FIG. 5, the same reference numerals as those in FIG. 1 and FIG. 2 have the same configurations as those in FIG. 1 and FIG.

図６と図７に示す第３の実施の形態に於て、図６は装着未圧縮状態を示し、図７は圧縮使用状態を示す。環状の装着溝５の第１側壁面１と第２側壁面２は、底壁面３に直交して形成されている。すなわち、装着溝５は横断面矩形であり、全ての位置での溝幅寸法が同一に形成されている。また、第１側壁面１は内周側に配設され、第２側壁面２は外周側に配設されている。従って、耐腐食用リング６は内周側に配設され、弾性シール本体７は外周側に配設されている。なお、図６と図７に於て、図１・図３と同一の符号は図１・図３と同様の構成であるので、説明を省略する。 In the third embodiment shown in FIGS. 6 and 7, FIG. 6 shows an uncompressed state of attachment, and FIG. 7 shows a state of compression use. The first side wall surface 1 and the second side wall surface 2 of the annular mounting groove 5 are formed orthogonal to the bottom wall surface 3. That is, the mounting groove 5 has a rectangular cross section, and the groove width dimension at all positions is the same. Moreover, the 1st side wall surface 1 is arrange | positioned by the inner peripheral side, and the 2nd side wall surface 2 is arrange | positioned by the outer peripheral side. Therefore, the corrosion-resistant ring 6 is disposed on the inner peripheral side, and the elastic seal body 7 is disposed on the outer peripheral side. 6 and FIG. 7, the same reference numerals as those in FIG. 1 and FIG. 3 have the same configurations as those in FIG. 1 and FIG.

また、第１側壁面１と第２側壁面２が底壁面３に直交して形成される環状の装着溝５に於て、耐腐食用リング６を外周側に配設し、弾性シール本体７を内周側に配設した（第１側壁面１を外周側に配設し、第２側壁面２を内周側に配設した）シール材を本発明の第４の実施形態としてもよい（図示省略）。 Further, in an annular mounting groove 5 in which the first side wall surface 1 and the second side wall surface 2 are formed perpendicular to the bottom wall surface 3, a corrosion-resistant ring 6 is disposed on the outer peripheral side, and an elastic seal body 7 is provided. A sealing material that is disposed on the inner peripheral side (the first side wall surface 1 is disposed on the outer peripheral side and the second side wall surface 2 is disposed on the inner peripheral side) may be used as the fourth embodiment of the present invention. (Not shown).

本発明の耐酸素ラジカルシール材は設計変更自由であり、弾性シール本体７は、突隆部11，11として、自由状態に於て、先端に平坦部を有する横断面矩形に形成して、底壁面３及び相手部材20側へ上記平坦部が圧接するようにしてもよい（図示省略）。また、自由状態に於て、耐腐食用リング６の外周面を円弧状に形成してもよく、嵌込凹溝８を拡大開口状に形成しても自由である（図示省略）。 The oxygen-resistant radical seal material of the present invention is freely changeable in design, and the elastic seal body 7 is formed as a protruding portion 11, 11 in a free state with a rectangular cross section having a flat portion at the tip. You may make it the said flat part press-contact to the wall surface 3 and the other party member 20 side (illustration omitted). Further, in the free state, the outer peripheral surface of the corrosion-resistant ring 6 may be formed in an arc shape, and the fitting groove 8 may be formed in an enlarged opening shape (not shown).

また、耐腐食用リング６の横断面形状としては、図示のものの他に嵌込凹溝８が深いＵ字に近いものであったり、逆に、浅いキャップ状（円弧状）に近いものでもよい。（これらを全て略Ｃ字状と呼ぶ。）また、突隆部11の横断面形状を三角山形状としたり、図例では単数であるが、これを２個以上としてもよい。 Further, as the cross-sectional shape of the corrosion-resistant ring 6, in addition to the illustrated one, the insertion groove 8 may be close to a deep U-shape, or conversely close to a shallow cap shape (arc shape). . (These are all referred to as a substantially C-shape.) Further, the cross-sectional shape of the protruding portion 11 is a triangular mountain shape, or is singular in the illustrated example, but it may be two or more.

図８は比較例を示し、この図８に於て、図６に示す装着溝５と同様の装着溝５に、シール材が装着されており、そのシール材は、第１側壁面１側に開口する嵌込凹溝80を有すると共に、第２側壁面２側に配設される弾性シール本体70と、その嵌込凹溝80に挿嵌される突部100 を有すると共に、第１側壁面１側に配設される樹脂製耐腐食用リング60と、から成るものである。さらに、弾性シール本体70には、底壁面３側と相手部材20側に、それぞれ膨出する突隆部110 ，110 を備え、耐腐食用リング60はシリコーンゴム製であり、弾性シール本体70はフッ素ゴム製である。
この図８に示すシール材は、相手部材20から圧縮荷重を受けて圧縮された場合、耐腐食用リング60を充分に弾性変形できないので（耐腐食用リング60を変形させてしまうと形状が戻らないので）、腐食ガス収納室Ｚから腐食ガス21（弾性シール本体70を劣化させる要因）が弾性シール本体70側へ流れ易く、弾性シール本体70の劣化（腐食）を長期的に防止できず、シール材30の製品寿命が短い。
これに対し、図１に示す本発明では、耐腐食用リング６の底壁面３側の突出端部32と相手部材20側の突出端部33の厚さ寸法Ａは、突出端部32，33を形成できる程度の厚さ寸法であればよく、具体的には、 0.1mm〜1.5mm に設定し、弾性シール本体７と複合化された構造であるので、相手部材20からの圧縮荷重で弾性変形し易くしており、詳細には、弾性変形した弾性シール本体７の体積移動を隙間14で調整できるようにしているので、耐腐食用リング６は相手部材20の極微小の凹凸にも沿って弾性変形して、腐食ガス収納室Ｚから弾性シール本体７側へ腐食ガス21が流れるのを防ぐことが可能となっている。このように、耐腐食用リング６の突出端部32，33の厚さ寸法Ａが十分に小さいので弾性変形しやすく、しかも、弾性シール本体７の突部10が耐腐食用リング６の嵌込凹溝８内に挿嵌されているため、シール材30が圧縮荷重を受けた場合、突出端部32，33は突部10と共に圧縮され弾性変形して、（複合構造として）シール性を一層発揮することができる。 FIG. 8 shows a comparative example. In FIG. 8, a sealing material is mounted in the mounting groove 5 similar to the mounting groove 5 shown in FIG. 6, and the sealing material is placed on the first side wall surface 1 side. While having the fitting groove 80 opened, it has the elastic seal main body 70 arrange | positioned by the 2nd side wall surface 2 side, and the protrusion 100 inserted by the fitting groove 80, and the 1st side wall surface And a resin corrosion-resistant ring 60 disposed on one side. Further, the elastic seal body 70 is provided with bulging protrusions 110 and 110 on the bottom wall surface 3 side and the mating member 20 side, respectively, and the corrosion-resistant ring 60 is made of silicone rubber. Made of fluororubber.
The seal material shown in FIG. 8 cannot sufficiently elastically deform the corrosion-resistant ring 60 when compressed by receiving a compressive load from the mating member 20 (if the corrosion-resistant ring 60 is deformed, the shape is restored. Therefore, the corrosive gas 21 (a factor that deteriorates the elastic seal body 70) easily flows from the corrosive gas storage chamber Z to the elastic seal body 70 side, and the deterioration (corrosion) of the elastic seal body 70 cannot be prevented for a long time. The product life of the sealing material 30 is short.
On the other hand, in the present invention shown in FIG. 1, the thickness dimension A of the protruding end portion 32 on the bottom wall surface 3 side of the corrosion-resistant ring 6 and the protruding end portion 33 on the counterpart member 20 side is the protruding end portions 32 and 33. As long as it has a thickness dimension that can be formed, specifically, it is set to 0.1 mm to 1.5 mm, and the structure is combined with the elastic seal main body 7, so that it is elastic by the compressive load from the mating member 20. In particular, since the volume movement of the elastically deformed elastic seal body 7 can be adjusted by the gap 14, the anticorrosion ring 6 follows the minute unevenness of the mating member 20. Thus, it is possible to prevent the corrosive gas 21 from flowing from the corrosive gas storage chamber Z to the elastic seal body 7 side due to elastic deformation. Thus, since the thickness dimension A of the projecting ends 32 and 33 of the corrosion-resistant ring 6 is sufficiently small, it is easily elastically deformed, and the protrusion 10 of the elastic seal body 7 is fitted into the corrosion-resistant ring 6. When the sealing material 30 receives a compressive load, the protruding end portions 32 and 33 are compressed together with the protruding portion 10 and elastically deformed when the sealing material 30 receives a compressive load. It can be demonstrated.

上述した本発明のシール材30の使用方法（作用）について説明する。
図２に於て、嵌込凹溝８に突部10を挿嵌することで、耐腐食用リング６と弾性シール本体７を組み合わせ、自由状態にあるシール材30を形成する。
次に、図１に示すように、嵌込凹溝８の底面17と、底面17に向かい合う突部10の端面とが、接近又は接触するように、シール材30を圧縮しながら、蟻溝形の装着溝５にシール材30を装着し、装着未圧縮状態とする。 The use method (action) of the sealing material 30 of the present invention described above will be described.
In FIG. 2, by inserting the protrusion 10 into the insertion groove 8, the anticorrosion ring 6 and the elastic seal body 7 are combined to form a seal material 30 in a free state.
Next, as shown in FIG. 1, the dovetail groove shape is formed while compressing the sealing material 30 so that the bottom surface 17 of the insertion groove 8 and the end surface of the projection 10 facing the bottom surface 17 approach or contact each other. The sealing material 30 is mounted in the mounting groove 5 to make the mounting uncompressed state.

そして、シール取付部材23と相手部材20とを相対的に接近させると、シール材30は圧縮荷重を受け図３に示すように圧縮使用状態になる。この場合、耐腐食用リング６の底壁面３側の端面12は底壁面３と密着し、相手部材20側の端面13は相手部材20と密着し、腐食ガス収納室Ｚからの腐食ガス21が、弾性シール本体７側へ流れるのを防ぐ。さらに、耐腐食用リング６は第１側壁面１とも密着し、端面12側へ腐食ガス21が流れるのを防ぐ。
また、弾性シール本体７の突隆部11，11は、圧縮荷重により圧縮され潰され、弾性シール本体７は、底壁面３と相手部材20に高い面圧にて密着し、大気22が腐食ガス21側（真空側）へ入り込むのを阻止する。さらに、弾性シール本体７は第２側壁面２とも密着する。 When the seal mounting member 23 and the mating member 20 are brought relatively close to each other, the sealing material 30 receives a compressive load and enters a compressed use state as shown in FIG. In this case, the end surface 12 on the bottom wall surface 3 side of the corrosion-resistant ring 6 is in close contact with the bottom wall surface 3, the end surface 13 on the mating member 20 side is in close contact with the mating member 20, and the corrosive gas 21 from the corrosive gas storage chamber Z is generated. This prevents the elastic seal body 7 from flowing. Further, the corrosion-resistant ring 6 is in close contact with the first side wall surface 1 and prevents the corrosive gas 21 from flowing to the end surface 12 side.
The protruding portions 11 and 11 of the elastic seal body 7 are compressed and crushed by the compressive load, and the elastic seal body 7 is in close contact with the bottom wall surface 3 and the mating member 20 at a high surface pressure, and the atmosphere 22 is corrosive gas. Prevent entry into the 21 side (vacuum side). Further, the elastic seal body 7 is in close contact with the second side wall surface 2.

以上のように、本発明の耐酸素ラジカルシール材は、開口部４と、第１側壁面１と、第２側壁面２と、底壁面３とを、有する環状の装着溝５内に装着される環状のシール材であって、腐食ガス収納室Ｚ側の第１側壁面１に対向して配設される耐腐食用リング６と、第２側壁面２側に配設される弾性シール本体７と、から成り、耐腐食用リング６は、第２側壁面２側に開口する嵌込凹溝８を有する横断面形状が略Ｃ字状であって、かつ、シリコーンゴム製であり、弾性シール本体７は、横断面に於て第２側壁面２側に膨出する円弧部９と、嵌込凹溝８に挿嵌される突部10を有し、さらに、弾性シール本体７には、底壁面３側と、開口部４に相対的に接近する相手部材20側に、それぞれ膨出する突隆部11，11を備えたので、耐腐食用リング６は、腐食ガス21が弾性シール本体７側へ流れるのを抑止でき、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。従って、弾性シール本体７は腐食ガス21によって劣化しないので、真空保持性を長期的に維持でき、かつ、その劣化による弾性シール本体７の発塵が起こらないので、製品に不純物が付着することがなくなる。
また、耐腐食用リング６は横断面形状が略Ｃ字状であるので、圧縮弾性変形し易く、シール取付部材23と相手部材20との間隔の増減にも対応可能であり、安定姿勢を保ちつつ、腐食ガス21が弾性シール本体７に接触することを防ぎ得る。
さらに、耐腐食用リング６はシリコーンゴム製であり、耐酸素ラジカル性を有するので、腐食ガス21による劣化を防止でき、弾性シール本体７の真空保持性を長期的に維持することができる。この耐腐食用リング６は、（耐プラズマ性と耐酸素ラジカル性を有する）高価なフッ素樹脂製のシール材に比べて安価に製造することができるので、特に、プラズマを除去した酸素ラジカル環境下で使用する場合に好適である。 As described above, the oxygen-resistant radical seal material of the present invention is mounted in the annular mounting groove 5 having the opening 4, the first side wall surface 1, the second side wall surface 2, and the bottom wall surface 3. The ring-shaped sealing material is an anticorrosion ring 6 disposed opposite to the first side wall surface 1 on the corrosive gas storage chamber Z side, and an elastic seal body disposed on the second side wall surface 2 side. 7, the corrosion-resistant ring 6 is substantially C-shaped in cross section having a fitting groove 8 opened on the second side wall surface 2 side, is made of silicone rubber, and is elastic. The seal body 7 has an arcuate portion 9 bulging toward the second side wall surface 2 in the cross section, and a protrusion 10 inserted into the fitting groove 8. Since the bulging portions 11 and 11 that bulge are provided on the bottom wall surface 3 side and the counterpart member 20 side that is relatively close to the opening 4, the corrosion-resistant ring 6 is corroded. Gas 21 can be suppressed from flowing into the elastic sealing body 7 side, the elastic sealing body 7 can prevent the air 22 entering the corrosive gas 21 side (vacuum side). Therefore, since the elastic seal body 7 is not deteriorated by the corrosive gas 21, the vacuum retention can be maintained for a long time, and the dust generation of the elastic seal body 7 due to the deterioration does not occur, so that impurities may adhere to the product. Disappear.
Further, since the cross-sectional shape of the corrosion-resistant ring 6 is substantially C-shaped, it is easily compressed and elastically deformed, and can cope with an increase or decrease in the distance between the seal mounting member 23 and the mating member 20, and maintains a stable posture. However, the corrosive gas 21 can be prevented from coming into contact with the elastic seal body 7.
Furthermore, since the corrosion-resistant ring 6 is made of silicone rubber and has oxygen radical resistance, deterioration due to the corrosive gas 21 can be prevented, and the vacuum retention of the elastic seal body 7 can be maintained for a long time. The corrosion-resistant ring 6 can be manufactured at a lower cost than an expensive fluororesin sealing material (having plasma resistance and oxygen radical resistance), and therefore, particularly in an oxygen radical environment from which plasma has been removed. It is suitable when used in.

また、開口部４と、相互に開口部４側に近づくにつれて接近する第１側壁面１・第２側壁面２と、底壁面３とを、有する環状の蟻溝形の装着溝５内に装着される環状のシール材であって、腐食ガス収納室Ｚ側の第１側壁面１に対向して配設される耐腐食用リング６と、第２側壁面２側に配設される弾性シール本体７と、から成り、耐腐食用リング６は、第２側壁面２側に開口する嵌込凹溝８を有する横断面形状が略Ｃ字状であって、かつ、シリコーンゴム製であり、弾性シール本体７は、横断面に於て第２側壁面２側に膨出する円弧部９と、嵌込凹溝８に挿嵌される突部10を有し、さらに、弾性シール本体７には、底壁面３側と、開口部４に相対的に接近する相手部材20側に、それぞれ膨出する突隆部11，11を備えたので、耐腐食用リング６は、腐食ガス21が弾性シール本体７側に接触するのを抑止でき、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。従って、弾性シール本体７は腐食ガス21によって劣化しないので、真空保持性を長期的に維持でき、かつ、その劣化による弾性シール本体７の発塵が起こらないので、製品に不純物が付着することがなくなる。
さらに、耐腐食用リング６はシリコーンゴム製であり、耐酸素ラジカル性を有するので、腐食ガス21による劣化を防止でき、弾性シール本体７の真空保持性を長期的に維持することができる。この耐腐食用リング６は、（耐プラズマ性と耐酸素ラジカル性を有する）高価なフッ素樹脂製のシール材に比べて安価に製造することができるので、特に、プラズマを除去した酸素ラジカル環境下で使用する場合に好適である。 Moreover, it mounts in the cyclic | annular dovetail-shaped mounting groove 5 which has the opening part 4, the 1st side wall surface 1 and the 2nd side wall surface 2, and the bottom wall surface 3 which approach as the opening part 4 side mutually approaches. The ring-shaped sealing material is an anti-corrosion ring 6 disposed opposite to the first side wall surface 1 on the corrosive gas storage chamber Z side, and an elastic seal disposed on the second side wall surface 2 side. The corrosion-resistant ring 6 has a substantially C-shaped cross section having a fitting groove 8 opened to the second side wall surface 2 side, and is made of silicone rubber. The elastic seal body 7 has a circular arc portion 9 bulging toward the second side wall surface 2 in the cross section, and a protrusion 10 inserted into the insertion groove 8. Is provided with protruding bulges 11 and 11 on the bottom wall surface 3 side and the counterpart member 20 side relatively close to the opening 4, respectively. Corrosive gas 21 can be suppressed from contacting the elastic seal body 7 side, the elastic sealing body 7 can prevent the air 22 entering the corrosive gas 21 side (vacuum side). Therefore, since the elastic seal body 7 is not deteriorated by the corrosive gas 21, the vacuum retention can be maintained for a long time, and the dust generation of the elastic seal body 7 due to the deterioration does not occur, so that impurities may adhere to the product. Disappear.
Furthermore, since the corrosion-resistant ring 6 is made of silicone rubber and has oxygen radical resistance, deterioration due to the corrosive gas 21 can be prevented, and the vacuum retention of the elastic seal body 7 can be maintained for a long time. The corrosion-resistant ring 6 can be manufactured at a lower cost than an expensive fluororesin sealing material (having plasma resistance and oxygen radical resistance), and therefore, particularly in an oxygen radical environment from which plasma has been removed. It is suitable when used in.

また、弾性シール本体７はフッ素ゴム、エチレン−プロピレンゴム、ニトリルゴム、又は、水素添加ニトリルゴムから成るので、弾性シール本体７は、真空維持力（弾発力）を長期的に維持できる。このことにより、弾性シール本体７の劣化による発塵が起こらないので、製品に不純物が付着することがなくなる。 Further, since the elastic seal body 7 is made of fluorine rubber, ethylene-propylene rubber, nitrile rubber, or hydrogenated nitrile rubber, the elastic seal body 7 can maintain a vacuum maintaining force (elastic force) for a long time. As a result, dust generation due to deterioration of the elastic seal body 7 does not occur, so that impurities do not adhere to the product.

また、装着未圧縮状態に於て、底壁面３側の突隆部11は、耐腐食用リング６の底壁面３側の端面12より底壁面３側へ突出し、相手部材20側の突隆部11は、耐腐食用リング６の相手部材20側の端面13より相手部材20側へ突出して形成されたので、圧縮使用状態に於て、突隆部11，11が圧縮荷重により圧縮され潰されることにより、弾性シール本体７は底壁面３と相手部材20に高い面圧にて密着できる。これにより、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。 Further, in the uncompressed state, the protruding portion 11 on the bottom wall surface 3 side protrudes from the end surface 12 on the bottom wall surface 3 side of the corrosion-resistant ring 6 toward the bottom wall surface 3 side, and the protruding portion on the counterpart member 20 side. 11 is formed so as to protrude from the end face 13 on the mating member 20 side of the anticorrosion ring 6 to the mating member 20 side, so that the ridges 11 and 11 are compressed and crushed by the compressive load in the compression use state. Thus, the elastic seal body 7 can be in close contact with the bottom wall surface 3 and the mating member 20 with a high surface pressure. Thereby, the elastic seal body 7 can prevent the atmosphere 22 from entering the corrosive gas 21 side (vacuum side).

また、嵌込凹溝８の底面17と、その底面17に向かい合う突部10の端面との間に隙間14を設けたので、装着溝５が蟻溝形の場合や、装着溝５の溝幅寸法がシール材30の幅寸法より小さく設定されている場合であっても、その装着溝５にシール材30を容易に装着できる。このような装着溝５にシール材30を装着することで、シール材30は装着溝５から外れにくく、かつ、耐腐食用リング６は、腐食ガス21が弾性シール本体７側に接触するのをさらに抑止でき、弾性シール本体７のシール性を一層向上させることができる。また、相手部材20からの圧縮荷重で弾性変形した弾性シール本体７の体積移動を隙間14で調整できるようにしているので、弾性シール本体７が十分に変形して、腐食ガス収納室Ｚから弾性シール本体７側へ腐食ガス21が流れるのを防ぐこと、気密性を保持することが可能となっている。 Further, since the gap 14 is provided between the bottom surface 17 of the fitting groove 8 and the end surface of the protrusion 10 facing the bottom surface 17, the mounting groove 5 has a dovetail shape or the width of the mounting groove 5. Even when the dimension is set smaller than the width dimension of the sealing material 30, the sealing material 30 can be easily mounted in the mounting groove 5. By mounting the sealing material 30 in such a mounting groove 5, the sealing material 30 is not easily detached from the mounting groove 5, and the corrosion-resistant ring 6 prevents the corrosive gas 21 from contacting the elastic seal body 7 side. Further, the sealing performance of the elastic seal body 7 can be further improved. Further, since the volume movement of the elastic seal body 7 elastically deformed by the compressive load from the mating member 20 can be adjusted by the gap 14, the elastic seal body 7 is sufficiently deformed to be elastic from the corrosive gas storage chamber Z. It is possible to prevent the corrosive gas 21 from flowing to the seal body 7 side and to maintain airtightness.

また、半導体製造装置用又は液晶パネルの表面処理装置に用いられるので、反応性ガス雰囲気下、酸素ガス雰囲気下、又は、反応性ガスと酸素ガスの混合気体雰囲気下に於て、耐腐食用リング６は、腐食ガス21が弾性シール本体７側に接触するのを抑止でき、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。 Also, because it is used for semiconductor manufacturing equipment or liquid crystal panel surface treatment equipment, it is a corrosion-resistant ring in a reactive gas atmosphere, an oxygen gas atmosphere, or a mixed gas atmosphere of reactive gas and oxygen gas. 6 can prevent the corrosive gas 21 from coming into contact with the elastic seal body 7, and the elastic seal body 7 can prevent the atmosphere 22 from entering the corrosive gas 21 (vacuum side).

本発明の第１の実施の形態を示す装着未圧縮状態の要部拡大断面図である。It is a principal part expanded sectional view of the mounting uncompressed state which shows the 1st Embodiment of this invention. 自由状態を示す要部拡大断面図である。It is a principal part expanded sectional view which shows a free state. 圧縮使用状態を示す要部拡大断面図である。It is a principal part expanded sectional view which shows a compression use state. 第２の実施の形態を示す装着未圧縮状態の要部拡大断面図である。It is a principal part expanded sectional view of the mounting uncompressed state which shows 2nd Embodiment. 自由状態を示す要部拡大断面図である。It is a principal part expanded sectional view which shows a free state. 第３の実施の形態を示す装着未圧縮状態の要部拡大断面図である。It is a principal part expanded sectional view of the mounting uncompressed state which shows 3rd Embodiment. 圧縮使用状態を示す要部拡大断面図である。It is a principal part expanded sectional view which shows a compression use state. 比較例を示す要部拡大断面図である。It is a principal part expanded sectional view which shows a comparative example. 従来のシール材を示す断面図である。It is sectional drawing which shows the conventional sealing material. 説明用の概略図である。It is a schematic diagram for explanation.

Explanation of symbols

１第１側壁面
２第２側壁面
３底壁面
４開口部
５装着溝
６耐腐食用リング
７弾性シール本体
８嵌込凹溝
９円弧部
10 突部
11 突隆部
12 端面
13 端面
14 隙間
17 底面
20 相手部材
Ｚ腐食ガス収納室 DESCRIPTION OF SYMBOLS 1 1st side wall surface 2 2nd side wall surface 3 Bottom wall surface 4 Opening part 5 Mounting groove 6 Corrosion-resistant ring 7 Elastic seal body 8 Insertion recessed groove 9 Arc part
10 protrusion
11 Ridge
12 End face
13 End face
14 Clearance
17 Bottom
20 Counterpart Z Corrosion gas storage room

Claims

An annular seal member mounted in an annular mounting groove (5) having an opening (4), a first side wall surface (1), a second side wall surface (2), and a bottom wall surface (3). Because
Corrosion-resistant ring (6) disposed opposite the first side wall surface (1) on the side of the corrosive gas storage chamber (Z), and an elastic seal body (located on the second side wall surface (2) side) 7)
The corrosion-resistant ring (6) is substantially C-shaped in cross section having a fitting groove (8) opened on the second side wall surface (2) side, and is made of silicone rubber.
The elastic seal body (7) includes a circular arc portion (9) that bulges toward the second side wall surface (2) in the cross section, and a protrusion (10 that is inserted into the insertion groove (8)). )
Furthermore, the elastic seal body (7) has a ridge (11) that bulges toward the bottom wall surface (3) side and to the counterpart member (20) side that is relatively close to the opening (4). equipped with a (11),
In the uncompressed state, the protruding portion (11) on the bottom wall surface (3) side is closer to the bottom wall surface (3) side than the end surface (12) on the bottom wall surface (3) side of the corrosion-resistant ring (6). The protrusion (11) on the mating member (20) side is formed to project from the end surface (13) on the mating member (20) side of the anticorrosion ring (6) to the mating member (20) side . An oxygen-resistant radical seal material.

Opening (4), first side wall surface (1), second side wall surface (2), a bottom wall (3) and a, a ring-shaped mounting groove (5) of the annular mounted within the seal Material,
Corrosion-resistant ring (6) disposed opposite the first side wall surface (1) on the side of the corrosive gas storage chamber (Z), and an elastic seal body (located on the second side wall surface (2) side) 7)
The corrosion-resistant ring (6) is substantially C-shaped in cross section having a fitting groove (8) opened on the second side wall surface (2) side, and is made of silicone rubber.
The elastic seal body (7) includes a circular arc portion (9) that bulges toward the second side wall surface (2) in the cross section, and a protrusion (10 that is inserted into the insertion groove (8)). )
Furthermore, the elastic seal body (7) has a ridge (11) that bulges toward the bottom wall surface (3) side and to the counterpart member (20) side that is relatively close to the opening (4). equipped with a (11),
In an uncompressed state, the end face (12) on the bottom wall (3) side of the corrosion-resistant ring (6) is arranged flat and parallel to the bottom wall (3), and the corrosion-resistant ring (6 The end surface (13) on the side of the mating member (20) is flat and parallel to the mating member (20), and the ridge (11) on the side of the bottom wall surface (3) It protrudes from the end surface (12) on the side toward the bottom wall surface (3), and the protruding portion (11) on the side of the mating member (20) has the mating member ( 20) An oxygen-resistant radical sealing material characterized by protruding toward the side .

The oxygen-resistant radical seal material according to claim 1 or 2, wherein the elastic seal body (7) is made of fluorine rubber, ethylene-propylene rubber, nitrile rubber, or hydrogenated nitrile rubber.

The clearance gap (14) was provided between the bottom face (17) of the said insertion recessed groove (8), and the end surface of the said protrusion (10) facing the bottom face (17) . Oxygen-resistant radical seal material.

It claims 1 to 4 oxygen proof radical seal material according used in the surface treatment apparatus for a semiconductor manufacturing apparatus or a liquid crystal panel.