JP2012087855A - Composite seal material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a composite seal material that has properties such as vacuum seal performance, plasma resistance, and corrosion resistance gas performance, does not cause the deterioration of the vacuum seal performance for a long period of time, and does not generate metal particles even under a heavy load when used.SOLUTION: A first seal member has a seal body imparted with seal performance by pressure-contacting with the composite seal material when the composite seal material is made to pressure-contact with the seal body, and a first coupling part which is extended to the side of a second seal member from almost the center of the seal body in the axial direction. The second seal member has a spacer and a second coupling part which is extended to the side of the first seal member from both ends of the spacer in the axial direction, and also has connections in which the first seal member and the second seal member are integrated by making the second coupling part of the second seal member engaged with the first coupling part of the first seal member.

Description

  The present invention relates to a composite sealing material used in a vacuum or ultra-vacuum state, for example, a composite sealing material used in a semiconductor manufacturing apparatus such as a dry etching apparatus or a CVD apparatus.

  With the development of the electronics industry, the manufacturing technology of semiconductors, which are the materials for electronic components such as IC (integrated circuits) and LSI (large scale integrated circuits), has become particularly high-definition and thinner, such as personal computers. Along with this, significant progress has been made.

For this reason, the requirements for the members used in the semiconductor manufacturing apparatus are becoming stricter, and the requirements are various.
For example, a sealing material used in a semiconductor manufacturing apparatus such as a dry etching apparatus or a plasma CVD apparatus needs a vacuum sealing performance as a basic performance. In addition, depending on the equipment used and the location where the sealing material is mounted, it is required to have performance such as plasma resistance and corrosion gas resistance.

Conventionally, fluororubber which is not easily affected by fluid has been used as a seal member that is required to have such vacuum seal performance and plasma resistance, and further, corrosion gas resistance.
However, as the environment becomes harsh, fluororubbers have insufficient performance such as plasma resistance and corrosion gas resistance, and the vacuum sealing performance deteriorates. As a result, new seal members are required. It is coming.

For this reason, a sealing material 100 as shown in FIG. 21 is conventionally used as a sealing member that requires such vacuum sealing performance, plasma resistance, and corrosion gas resistance.
The sealing material 100 is an O-ring shaped first sealing member 102 made of, for example, fluororubber and a harder material, and has good plasma resistance and corrosion gas resistance, for example, made of fluororesin. And a flat plate-like second seal member 104.

  Then, for example, the second seal member 104 is disposed on the side of the side wall 108 on the side exposed to the etching gas or plasma in the seal groove 106, and the first seal is formed on the side of the other side wall 110 of the seal groove 106. The member 102 is arranged.

Thus, the second seal member 104 is configured to prevent intrusion of an etching gas or plasma and prevent the first seal member 102 from deteriorating.
In this case, as shown in FIG. 21, the thickness of the second seal member 104 is larger than the depth of the seal groove 106 (the height of the side wall 108). As a result, the second seal member 104 functions as a spacer member, so that the mating member 112 and the mounted member 114 on the seal groove 106 side come into contact with each other, and these metal members are formed by so-called “metal touch”. Is configured to prevent wear damage and generation of metal particles during use.

On the other hand, in patent document 1 (patent 4247625 gazette), the sealing material 200 as shown in FIG. 22 is used.
The sealing material 200 is an O-ring shaped first sealing member 202 made of, for example, fluororubber and a harder material, and has good plasma resistance and corrosion gas resistance, for example, made of fluororesin. And a flat plate-like second seal member 204.

A seal groove 208 having a depth shallower than the depth of the seal groove 206 is formed on the seal groove 206, for example, on the side exposed to the etching gas or plasma.
As a result, the first seal member 202 is mounted in the seal groove 206, and the second seal member 204 is mounted in the seal groove 208.

Japanese Patent No. 4247625 International Publication WO2009 / 038022 Design Registration No. 1349982 Design Registration No. 1349983

  However, in the conventional sealing material 100 as shown in FIG. 21, the seals differ in material (hardness) from the two shapes of the O-ring shaped first sealing member 102 and the flat plate shaped second sealing member 104. The members must be arranged in parallel in one seal groove 106.

  For this reason, the troublesome operation | work which arrange | positions these two sealing members 102 and 104 in the one sealing groove | channel 106 is required, and will require an effort. In addition, if these two seal members 102 and 104 are not arranged in an appropriate position and posture in the seal groove 106, the sealing performance may be deteriorated.

  On the other hand, in the sealing material 200 of Patent Document 1, two seal members having different materials (hardness) and two shapes, ie, a first seal member 202 having an O-ring shape and a second seal member 204 having a flat plate shape, are used. They must be placed in seal grooves 206 and 208, respectively.

For this reason, the troublesome operation | work which arrange | positions these two seal members 202 and 204 in the two seal grooves 206 and 208 is required, and it takes time and effort.
Further, the seal groove 206 and the seal groove 208 having a depth shallower than the depth of the seal groove 206 must be formed, and the processing of the seal groove is complicated and troublesome.

Furthermore, if these two seal members 202 and 204 are not disposed in proper positions and postures in the seal grooves 206 and 208, respectively, the sealing performance may be deteriorated.
Therefore, the applicant of the present invention is shown in FIG. 23 in Patent Document 2 (International Publication WO2009 / 038022), Patent Document 3 (Design Registration No. 1349982), and Patent Document 4 (Design Registration No. 1349983). Such a composite sealing material 300 is proposed.

  That is, as shown in FIG. 23, the composite sealing material 300 includes a first sealing member 302 made of rubber and a second sealing member made of synthetic resin harder than the first sealing member 302 made of rubber. 304.

  The first seal member 302 includes an annular seal body 306, and includes a convex portion 308 projecting from the seal body 306 toward the second seal member 304. Furthermore, a fitting portion 310 is further provided that protrudes further toward the second seal member 304 side from the intermediate portion of the convex portion 308 in the axial direction.

  On the other hand, the second seal member 304 is provided with a fitted recess 312 having a shape substantially complementary to the fitting portion 310 of the first seal member 302 in the middle portion in the axial direction, and both ends in the axial direction. A bent portion 314 is provided in the portion.

  Then, the convex portion 308 of the first seal member 302 is fitted into the fitted concave portion 312 of the second seal member 304, and the bent portion 314 of the second seal member 304 is fitted to the first seal member 302. The first seal member 302 and the second seal member 304 are connected and integrated in a state in which the first seal member 302 and the second seal member 304 are in contact with a step 316 formed between the seal body 306 and the projection 308. Has been.

  When the conventional composite sealing material 300 configured as described above is attached to the seal groove 318, the first seal member 302 made of rubber disposed on the side wall 320 on one side of the seal groove 318 provides a vacuum sealing property. Is secured. In addition, the second seal member 304 made of synthetic resin disposed on the side of the other side wall 322 of the seal groove 318 is not resistant to plasma or corrosion gas because the first seal member 302 cannot sufficiently exhibit it. Is ensured.

  However, in this conventional composite sealing material 300, the second seal member 304 brings the mating member 324 into contact with the mounted member 326 on the seal groove 318 side to some extent, and the metal touch is used to make these metal seals. It is possible to prevent the member from being worn and damaged and generating metal particles during use.

  However, since the radial width of the second sealing member 304 made of synthetic resin having plasma resistance and corrosion gas resistance is narrow, plasma resistance and unexpected gas resistance can be sufficiently exhibited due to unexpected wear and damage. If it disappears, etching gas and plasma will act on the 1st rubber-made sealing member 302, and a vacuum sealing property will fall.

  Further, since the radial width of the second seal member 304 is narrow, the second seal member 304 is deformed under a high load, and metal touch cannot be prevented. It is impossible to prevent wear damage or generation of metal particles during use.

    Further, when the mating member 324 is made of a material that is relatively easy to break, such as quartz, the mating member 324 may be broken when the mating member 324 and the mounted member 326 come into direct contact. Further, particles and metal impurities are generated from the contact portion, which may cause particle contamination and metal impurity contamination.

  In view of such a current situation, the present invention has performances such as vacuum sealing performance, plasma resistance, and corrosion gas resistance, and does not deteriorate the vacuum sealing performance over a long period of time. It is an object of the present invention to provide a composite sealing material that does not generate particles and is easy to manufacture and can be manufactured at low cost.

The present invention has been invented in order to achieve the problems and objects in the prior art as described above, and the composite sealing material of the present invention comprises:
A composite sealing material mounted in the sealing groove,
A first seal member positioned on one side wall of the seal groove when mounted in the seal groove;
A second seal member positioned on the other side wall of the seal groove when mounted in the seal groove;
The first seal member is made of an elastic member;
The second seal member is a composite seal member made of a material harder than the first seal member,
The first seal member is
When the composite sealing material is press-contacted, a seal main body portion that is press-contacted and imparts a sealing property; and
A first coupling portion extending from the substantially central portion in the axial direction of the seal body portion to the second seal member side;
The second seal member is
A spacer part;
A second coupling portion extending from the both ends in the axial direction of the spacer portion to the first seal member side;
The first seal member and the second seal member are integrated by fitting the second joint portion of the second seal member to the first joint portion of the first seal member. It comprises a part.

  By comprising in this way, when a composite sealing material is press-contacted, the seal main-body part of the 1st sealing member comprised from an elastic member is press-contacted, and a vacuum seal property is provided. Further, in the connecting portion in which the first seal member and the second seal member are integrated, the second coupling portion of the second seal member is pressed, and the spacer portion of the second seal member; When the mating member comes into contact, plasma sealing properties that can prevent the invasion of etching gas and plasma are imparted.

  Therefore, in this state, since the second seal member is made of a material harder than the first seal member, the second seal member side is made of, for example, a semiconductor such as a dry etching apparatus or a plasma CVD apparatus. By disposing on the chamber side which is a severe environment side such as corrosive gas or plasma in the manufacturing apparatus, pressure contact by the second joint portion of the second seal member, the spacer portion of the second seal member and the counterpart member By the contact, the seal main body portion, which is the pressure contact portion of the first seal member constituted by the elastic member, is protected from these corrosive gases, plasma, etc., and the vacuum sealability is not deteriorated. .

  In this case, since the second seal member made of a material harder than the first seal member is located on the severe environment side, the durability against corrosive gas and plasma is excellent. .

  Further, the pressure contact by the second coupling portion of the second seal member, and the contact between the counterpart member and the spacer portion having a width in the radial direction of the second seal member, The metal touch can surely prevent these metal members from being damaged by wear or generating metal particles during use.

  In addition, even if a creep phenomenon occurs due to a long-time pressing on the second joint portion of the second seal member, the first joint composed of the elastic member is provided between the second joint portions of the second seal member. The first coupling portion of the seal member is located.

  Thereby, by the repulsive force of the 1st coupling part of the 1st seal member, the 2nd coupling part of the 2nd seal member is always pushed and expanded by the 1st coupling part of the 1st seal member, The plasma sealability can be maintained, preventing invasion of corrosive gas, plasma, etc. over a long period of time, and the entire first seal member composed of the elastic member is protected from these corrosive gas, plasma, etc. That is, the vacuum sealability is not lowered.

The composite sealing material of the present invention is characterized in that a groove is formed between the spacer portion and the second coupling portion of the second sealing member.
As described above, the groove portion is formed between the spacer portion of the second seal member and the second coupling portion, so that when the composite sealing material is pressed, the second coupling portion is located inside, that is, It is easy to bend toward the first coupling portion side of the first seal member, and it is easy to return to the original position.

  As a result, due to the repulsive force of the first joint portion of the first seal member formed of the elastic member, the second joint portion of the second seal member is caused by the first joint portion of the first seal member. It is always spread and can prevent the invasion of corrosive gas, plasma, etc. over a long period of time, and can maintain the plasma sealing property. It will be protected from plasma and the like, and the vacuum sealability will not deteriorate.

  Further, a groove is formed between the spacer portion of the second seal member and the second coupling portion, so that the second coupling portion of the second seal member and the seal body of the first seal member The compressive load at the time of press-contact of the portion can be further reduced, and a high vacuum sealability can be ensured with a low compressive load.

  Further, since the groove is formed between the spacer portion of the second seal member and the second coupling portion, the followability is improved even when the clearance fluctuates, and a high vacuum and plasma seal are always provided. Sex can be secured.

The composite sealing material of the present invention is
The relationship between the groove height H of the seal groove and the axial thickness T1 of the spacer portion of the second seal member is:
Seal groove height H <Spacer portion axial thickness T1
It is characterized by being.

  Thus, if the relationship of the groove height H <the thickness T1 of the spacer portion in the axial direction is satisfied, the spacer portion of the second seal member protrudes from the seal groove. The spacer part reliably prevents contact with the mounted member on the seal groove side, and the metal touch ensures that these metal members are worn and damaged and that metal particles are generated during use. Can be prevented.

The composite sealing material of the present invention is
The relationship between the axial thickness T1 of the spacer portion of the second seal member and the axial thickness T2 of the connecting portion is:
Thickness T1 in the axial direction of the spacer portion ≦ Thickness T2 in the axial direction of the connecting portion
It is characterized by being.

  Thus, if there is a relationship of the axial thickness T1 of the spacer portion ≦ the axial thickness T2 of the connecting portion, the connecting portion, that is, the second sealing member made of a material harder than the first sealing member. Since the second coupling portion is first pressed, the plasma sealability can be maintained, preventing the invasion of corrosive gas, plasma, etc., and the entire first seal member constituted by the elastic member is It will be protected from these corrosive gases, plasma, etc., and the vacuum sealability will not deteriorate.

  When the load is further applied, the mating member comes into contact with the spacer portion, so that the mating member and the mounted member on the seal groove side are reliably prevented from contacting with the metal touch. These metal members can be surely prevented from being damaged by wear or generation of metal particles during use.

  Moreover, when the mating member comes into contact with the spacer portion of the second seal member made of a material harder than the first seal member, the plasma seal prevents the invasion of corrosive gas, plasma, etc. in the spacer portion. Therefore, the entire first seal member composed of the elastic member is protected from these corrosive gases, plasma, etc., and the vacuum sealability is not lowered.

The composite sealing material of the present invention is
The relationship between the axial thickness T2 of the connecting portion and the axial thickness T3 of the seal body portion of the first seal member is:
Axial thickness T2 of connecting portion ≦ Axial thickness T3 of seal body
The composite seal member according to claim 4, wherein

  Thus, if there is a relationship of the axial thickness T2 of the connecting portion ≦ the axial thickness T3 of the seal body portion, the seal body portion of the first seal member is first pressed, and then the connecting portion, that is, Since the second joint portion of the second seal member made of a material harder than the first seal member is pressure-contacted, the vacuum seal property is surely exhibited in the seal body portion of the first seal member, The plasma sealing property that prevents the invasion of corrosive gas, plasma, etc. can be maintained.

  In this case, it is preferable that the axial thickness T2 of the connecting portion is equal to the axial thickness T3 of the seal body portion, and the connecting portion, that is, the second coupling portion of the second seal member is always in the relationship. Since it is pressure-contacted, it is possible to maintain the plasma sealing property that prevents the invasion of corrosive gas, plasma, etc., and the entire first seal member composed of the elastic member is made of these corrosive gas, plasma, etc. It will be protected more reliably and the vacuum sealability will not be reduced.

  According to the composite sealing material of the present invention, since the second sealing member is made of a material harder than the first sealing member, the second sealing member side is, for example, a dry etching apparatus or plasma CVD. By disposing on the chamber side which is a harsh environment side such as corrosive gas and plasma in a semiconductor manufacturing apparatus such as an apparatus, the pressure contact by the second coupling portion of the second seal member, the spacer portion of the second seal member, Due to the contact with the mating member, the seal body, which is the pressure contact portion of the first seal member made of an elastic member, is protected from these corrosive gases, plasma, etc., and the vacuum sealability is reduced. There is nothing to do.

  In this case, since the second seal member made of a material harder than the first seal member is located on the severe environment side, the durability against corrosive gas and plasma is excellent. .

  Further, the pressure contact by the second coupling portion of the second seal member, and the contact between the counterpart member and the spacer portion having a width in the radial direction of the second seal member, The metal touch can surely prevent these metal members from being damaged by wear or generating metal particles during use.

  In addition, even if a creep phenomenon occurs due to a long-time pressing on the second joint portion of the second seal member, the first joint composed of the elastic member is provided between the second joint portions of the second seal member. The first coupling portion of the seal member is located.

  Thereby, by the repulsive force of the 1st coupling part of the 1st seal member, the 2nd coupling part of the 2nd seal member is always pushed and expanded by the 1st coupling part of the 1st seal member, The plasma sealability can be maintained, preventing invasion of corrosive gas, plasma, etc. over a long period of time, and the entire first seal member composed of the elastic member is protected from these corrosive gas, plasma, etc. That is, the vacuum sealability is not lowered.

FIG. 1 is a front view of the composite sealing material of the present invention. FIG. 2 is a right side view of the composite sealing material of the present invention. FIG. 3 is a plan view of the composite sealing material of the present invention. FIG. 4 is a cross-sectional view of the composite sealing material of the present invention taken along line AA in FIG. FIG. 5 is a partially enlarged cross-sectional view showing a state in which the composite sealing material of the present invention is mounted in the seal groove. FIG. 6 is a partially enlarged cross-sectional view of the first sealing member of the composite sealing material of the present invention. FIG. 7 is a partially enlarged cross-sectional view of the second sealing member of the composite sealing material of the present invention. FIG. 8 is a front view of the first sealing member of the composite sealing material of the present invention. FIG. 9 is a right side view of the first sealing member of the composite sealing material of the present invention. FIG. 10 is a plan view of the first sealing member of the composite sealing material of the present invention. 11 is a cross-sectional view of the first sealing member of the composite sealing material of the present invention taken along line BB in FIG. FIG. 12 is a front view of the second sealing member of the composite sealing material of the present invention. FIG. 13 is a right side view of the second sealing member of the composite sealing material of the present invention. FIG. 14 is a plan view of a second sealing member of the composite sealing material of the present invention. FIG. 15 is a cross-sectional view of the second sealing member of the composite sealing material of the present invention taken along the line CC in FIG. FIG. 16 is a partially enlarged cross-sectional view showing a state where a composite sealing material of another embodiment of the present invention is mounted in a seal groove. FIG. 17 is a plan view of a composite sealing material according to another embodiment of the present invention. FIG. 18 is a plan view of a composite sealing material according to another embodiment of the present invention. FIG. 19 is a cross-sectional view taken along the line AA of FIG. 18 of a composite sealing material according to another embodiment of the present invention. FIG. 20 is a partially enlarged cross-sectional view similar to FIG. 5 showing a state where the composite sealing material of another embodiment of the present invention is mounted in the seal groove. FIG. 21 is a partially enlarged sectional view showing a state in which a conventional composite sealing material is mounted in a sealing groove. FIG. 22 is a partially enlarged cross-sectional view showing a state in which a conventional composite sealing material is mounted in a seal groove. FIG. 23 is a partially enlarged cross-sectional view showing a state in which a conventional composite sealing material is mounted in a seal groove.

Hereinafter, embodiments (examples) of the present invention will be described in more detail with reference to the drawings.
1 is a front view of the composite sealing material of the present invention, FIG. 2 is a right side view of the composite sealing material of the present invention, FIG. 3 is a plan view of the composite sealing material of the present invention, and FIG. 3 is a cross-sectional view of the composite sealing material taken along line AA in FIG. 3, and FIG. 5 is a partially enlarged cross-sectional view showing a state where the composite sealing material of the present invention is mounted in the seal groove.

  1 to 5, reference numeral 10 denotes the composite sealing material of the present invention as a whole, and this composite sealing material 10 is substantially annular (in the case of this embodiment, circular) and is shown in FIG. As described above, the seal groove 12 is mounted in a substantially annular shape and a rectangular cross section.

The seal groove 12 is used in a semiconductor manufacturing apparatus such as a dry etching apparatus or a plasma CVD apparatus.
As shown in FIG. 5, when the composite sealing material 10 is mounted in such a sealing groove 12, the side of one side wall 14 of the sealing groove 12, that is, a corrosive gas or plasma in a semiconductor manufacturing apparatus. The first seal member 16 is provided on the opposite side (for example, the atmosphere side) from the severe environment side.

  Further, when the composite sealing material 10 is attached to the seal groove 12, the second side wall 18 side of the seal groove 12, that is, the second side located on a severe environment side such as corrosive gas or plasma in the semiconductor manufacturing apparatus. A seal member 20 is provided.

  In this embodiment, as shown in FIGS. 3 and 4, one side wall 14 side of the seal groove 12 is positioned on the outer peripheral side, and the first seal member 16 is positioned on the outer peripheral side, and the seal groove The other side wall 18 side of 12 is positioned on the inner peripheral side, and the second seal member 20 is positioned on the inner peripheral side.

  As shown in FIGS. 5 and 6, the first seal member 16 includes a seal main body portion 22 that is pressed into contact with the composite seal member 10 to provide vacuum sealability. Further, the first seal member 16 extends from the substantially central portion of the seal main body portion 22 in the axial direction toward the second seal member 20, and moreover than the axial length of the seal main body portion 22. Moreover, the 1st coupling | bond part 24 with the short length of an axial direction is formed. In this case, the axial direction means the vertical direction in FIG. 5, that is, the direction of the counterpart member 34 from the bottom of the seal groove 12 (the same applies to the following).

  As shown in FIG. 5, the first coupling portion 24 has an axial direction from the base end portion 24 a on the seal body portion 22 side to the tip end portion 24 b on the second seal member 20 side. The tapered inclined surfaces 24c and 24c are formed so that the length of each increases gradually.

  On the other hand, as shown in FIG. 5 and FIG. 7, the second seal member 20 includes a spacer portion 26 having a substantially rectangular cross section. A pair of second coupling portions 28, 28 extending on the seal member 16 side is formed.

The second coupling portion 28 is formed to have a shape that is substantially complementary to the first coupling portion 24 of the first seal member 16.
That is, the second coupling portion 28 has an axial length that gradually decreases from the proximal end portion 28a on the spacer portion 26 side to the distal end portion 28b on the first seal member 16 side. Inner tapered inclined surfaces 28c, 28c are formed.

  Further, as shown in FIG. 5, the second coupling portion 28 has a length in the axial direction from the proximal end portion 28a on the spacer portion 26 side to the distal end portion 28b on the first seal member 16 side. The outer tapered inclined surfaces 28d and 28d are formed so that the length gradually increases.

  Then, when the first seal member 16 and the second seal member 20 are integrated, a gentle curved surface shape is formed from the outer tapered inclined surfaces 28d, 28d to the seal main body portion 22 of the first seal member 16. It is comprised so that.

  Then, by fitting the second coupling portion 28 of the second seal member 20 into the first coupling portion 24 of the first seal member 16, as shown in FIG. A connecting portion 32 in which 16 and the second seal member 20 are integrated is formed.

  That is, the tapered inclined surfaces 24c and 24c of the first coupling portion 24 of the first seal member 16 and the inner tapered inclined surfaces 28c and 28c of the second coupling portion 28 of the second seal member 20 are engaged. Thus, the first seal member 16 and the second seal member 20 are integrated.

  In this case, as a method for joining and integrating the first seal member 16 and the second seal member 20, only fitting may be used, but known joining methods such as welding, welding, adhesion, and integral molding are adopted. Although it is possible and is not particularly limited, it is desirable that the composite sealing material 10 be produced by joining and integrating with an adhesive, preferably a heat-resistant adhesive.

In this case, the first seal member 16 is made of an elastic member, and the second seal member 20 is made of a material harder than the first seal member 16.
In this case, it is desirable that the first seal member 16 is made of rubber which is an elastic member. In this case, either natural rubber or synthetic rubber can be used as the rubber.

  In this way, the first seal member 16 is made of rubber which is an elastic member, so that the elastic force of the rubber is used. When the composite sealing material 10 is press-contacted, the seal main body portion 22 of the first seal member 16 of the first seal member 16 can be press-contacted by the mating member 34 to provide high vacuum sealability.

In this case, it is more desirable that the rubber constituting the first seal member 16 is made of fluororubber.
Such fluororubbers include binary systems such as vinylidene fluoride / hexafluoropropylene copolymer, vinylidene fluoride / trifluorochloroethylene copolymer, vinylidene fluoride / pentafluoropropylene copolymer, etc. Vinylidene fluoride rubber, vinylidene fluoride / tetrafluoroethylene / hexafluoropropylene copolymer, vinylidene fluoride / tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, vinylidene fluoride / tetrafluoroethylene / propylene copolymer A ternary vinylidene fluoride rubber such as a polymer, a tetrafluoroethylene / propylene copolymer, a tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, a thermoplastic fluororubber, or the like can be used.

  Thus, since the rubber which comprises the 1st sealing member 16 is comprised from the fluoro rubber, even if the 1st sealing member 16 contacts corrosive gas and plasma by any chance, corrosive gas, Durability to plasma and the like is good, and the vacuum sealability does not deteriorate.

  On the other hand, it is desirable that the second seal member 20 is made of a synthetic resin, and preferably a fluororesin, a polyimide resin, a polyamideimide resin, a polyetherimide resin, a polyamideimide resin, a polyphenylene sulfide resin, or a polybenzimidazole. It is desirable to comprise one or more synthetic resins selected from resins and polyether ketone resins.

  Thus, since the 2nd sealing member 20 is comprised from such a synthetic resin which is a material harder than the 1st sealing member 16, durability to corrosive gas, plasma, etc. is good, In addition, the entire first seal member 16 composed of an elastic member is protected from these corrosive gases, plasma, etc., and the sealing performance is not deteriorated.

  In this case, the fluororesin includes polytetrafluoroethylene (PTFE) resin, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA) resin, tetrafluoroethylene-hexafluoropropylene copolymer (FEP) resin, tetrafluoro Ethylene-ethylene copolymer (ETFE) resin, polyvinylidene fluoride (PVDF) resin, polychlorotrifluoroethylene (PCTFE) resin, chlorotrifluoroethylene-ethylene copolymer (ECTFE) resin, polyvinyl fluoride (PVF) Among them, PTFE is preferable in view of heat resistance, corrosion resistance gas, plasma resistance, and the like.

  By comprising in this way, when the composite sealing material 10 is press-contacted, the seal main-body part 22 of the 1st seal member 16 comprised from an elastic member is press-contacted, and a vacuum seal property is provided. In addition, in the connecting portion 32 in which the first seal member 16 and the second seal member 20 are integrated, the second coupling portion 28 of the second seal member 20 is brought into pressure contact, and plasma sealability is imparted. Will be. Furthermore, the plasma sealability is imparted when the spacer portion 26 of the second seal member and the mating member 34 come into contact with each other.

  Therefore, in this state, since the second seal member 20 is made of a material harder than the first seal member 16, the second seal member 20 side is, for example, a dry etching apparatus or plasma CVD. By disposing on the chamber side which is a severe environment side such as corrosive gas and plasma in a semiconductor manufacturing apparatus such as an apparatus, the pressure contact by the second coupling portion 28 of the second seal member 20, The contact between the spacer portion 26 and the mating member 34 protects the seal body portion 22, which is the pressure contact portion of the first seal member 16 made of an elastic member, from these corrosive gases and plasma. Thus, the vacuum sealability is not lowered.

  Further, in this case, since the second seal member 20 made of a material harder than the first seal member 16 is located on the severe environment side, durability against corrosive gas, plasma, and the like. Excellent.

  Further, due to the pressure contact by the second coupling portion 28 of the second seal member 20 and the contact between the spacer portion 26 having a width in the radial direction of the second seal member 20 and the counterpart member 34, the counterpart member 34 and the seal groove are provided. The metal member touches the 12-side mounted member 36 and wears and damages these metal members, and generation of metal particles during use can be reliably prevented.

  In addition, even if a creep phenomenon occurs due to long-time pressing on the second coupling portion 28 of the second seal member 20, an elastic member is formed between the second coupling portions 28 of the second seal member 20. The first coupling part 24 of the first seal member 16 is located.

  As a result, as shown by an arrow D in FIG. 5, the second coupling portion 28 of the second seal member 20 is caused to rebound by the repulsive force of the first coupling portion 24 of the first seal member 16. The first coupling portion 24 of the seal member 16 is always pushed and spread to prevent the invasion of corrosive gas, plasma, etc. over a long period of time. The entire seal member 16 is protected from these corrosive gases, plasma, etc., and the vacuum sealability does not deteriorate.

  Furthermore, in the composite sealing material 10 of the present invention, as shown in FIG. 5, the second coupling portion 28 of the second sealing member 20 is connected to the spacer portion 26 of the second sealing member 20 and the second coupling portion 28. A groove portion 30 is formed between the portion 28, that is, on the base end portion 28 a side on the spacer portion 26 side.

  As described above, since the groove portion 30 is formed between the spacer portion 26 and the second coupling portion 28 of the second seal member 20, the second coupling portion 28 is pressed when the composite sealing material 10 is pressed. However, it is easy to bend inward, that is, toward the first coupling portion 24 of the first seal member 16 as indicated by an arrow E, and return to the original position as indicated by an arrow D. It becomes easy.

  As a result, as indicated by the arrow D, the second coupling portion 28 of the second seal member is moved by the repulsive force of the first coupling portion 24 of the first seal member 16 made of an elastic member. The first sealing portion 16 of the first sealing member 16 is always spread by the first coupling portion 24, can prevent the invasion of corrosive gas, plasma, etc. over a long period of time, can maintain the plasma sealing property, and is formed of an elastic member. The entire seal member 16 is protected from these corrosive gases, plasma, etc., and the vacuum sealability does not deteriorate.

  Further, since the groove portion 30 is formed between the spacer portion 26 of the second seal member 20 and the second coupling portion 28, the second coupling portion 28 of the second seal member 20 and the first coupling portion 28 are formed. The compression load at the time of the pressure contact of the seal body portion 22 of the seal member 16 can be further reduced, and a high vacuum sealability can be ensured with a low compression load.

  Further, since the groove portion 30 is formed between the spacer portion 26 and the second coupling portion 28 of the second seal member 20, even when the clearance fluctuates, the followability becomes better and is always high. Vacuum and plasma sealability can be secured.

  In this case, the shape of the groove part 30 is not particularly limited as long as it exhibits such an action, and as in this embodiment, a trapezoidal shape, a triangular shape, a circular shape, a curved surface shape, and the like can be appropriately changed. It is.

  In this case, the groove 30 is an outer taper of the second coupling portion 28 of the second seal member from the end face of the spacer portion 26 of the second seal member 20 as shown by a dotted line in FIG. It means that there is a portion recessed inward in the axial direction from the extended line reaching the inclined surface 28d.

  Further, as the dimension of the groove, the deeper the better from the ease of deformation and the followability (that is, the joint surface between the spacer portion 26 and the second coupling portion 28 of the second seal member 20 is small). However, it is desirable to keep the depth to some extent because it may cause processing difficulty and cracks (separation).

For example, as shown in FIG. 5, the depth Y of the groove 30 is desirably equal to or less than the seal height M / 3.
In this embodiment, the groove portion 30 is formed between the spacer portion 26 and the second coupling portion 28 of the second seal member 20, but as shown in FIG. 16, such a groove portion 30 is provided. It is also possible not to have it. That is, in this case, in FIG. 16, the shaft extends more than the extension line from the end surface of the spacer portion 26 of the second seal member 20 to the outer tapered inclined surface 28d of the second coupling portion 28 of the second seal member. This means that there is no recessed portion on the inner side in the direction, and there is no groove 30.

Further, in the composite sealing material 10 of the present invention, as shown in FIG. 5, the relationship between the groove height H of the seal groove 12 and the axial thickness T1 of the spacer portion 26 of the second seal member 20 is
The height H of the seal groove 12 <the thickness T1 of the spacer portion 26 in the axial direction
It is desirable that

  As described above, if the relationship of the height H of the seal groove 12 <the thickness T1 of the spacer portion 26 in the axial direction is satisfied, the spacer portion 26 of the second seal member 20 protrudes from the seal groove 12 and Therefore, the contact between the mating member 34 and the mounted member 36 on the seal groove 12 side is reliably prevented by the spacer portion 26, and these metal members are worn and damaged by the metal touch, or in use. Generation of metal particles can be reliably prevented.

Moreover, in the composite sealing material 10 of this invention, as shown in FIG. 5, the relationship between the axial thickness T1 of the spacer portion 26 of the second sealing member 20 and the axial thickness T2 of the connecting portion 32 is as follows. ,
Thickness T1 in the axial direction of the spacer portion 26 ≦ Thickness T2 in the axial direction of the connecting portion 32
It is desirable that

  As described above, if the relationship between the axial thickness T1 of the spacer portion 26 and the axial thickness T2 of the connecting portion 32 is satisfied, the connecting portion 32, that is, the first seal member 16 made of a material harder than the first seal member 16 is used. Since the second joint portion 28 of the second seal member 20 is pressed first, the plasma sealability can be maintained, which prevents the invasion of corrosive gas, plasma, etc., and is made of an elastic member. The entire seal member 16 is protected from these corrosive gases, plasma, etc., and the vacuum sealability is not lowered.

  When the load is further applied, the mating member 34 abuts against the spacer portion 26, so that the mating member 34 and the mounted member 36 on the seal groove side are reliably prevented by the spacer portion 26. In addition, the metal touch can reliably prevent these metal members from being damaged by wear or generation of metal particles during use.

  In addition, when the mating member 34 comes into contact with the spacer portion 26 of the second seal member 20 made of a material harder than the first seal member 16, the spacer portion 26 also enters corrosive gas, plasma, and the like. The entire first sealing member 16 made of an elastic member is protected from these corrosive gases, plasma, etc., and the vacuum sealing property can be maintained. There is no decline.

Further, in the composite sealing material 10 of the present invention, as shown in FIG. 5, the relationship between the axial thickness T2 of the connecting portion 32 and the axial thickness T3 of the seal main body portion 22 of the first seal member 16. But,
Thickness T2 in the axial direction of the connecting portion 32 ≦ Thickness T3 in the axial direction of the seal body 22
It is desirable that

  As described above, if the relationship of the axial thickness T2 of the connecting portion 32 ≦ the axial thickness T3 of the seal main body portion 22 is satisfied, the seal main body portion 22 of the first seal member 16 is first pressed and then connected. Since the second coupling portion 28 of the second seal member 20 made of a material harder than the portion 32, that is, the first seal member 16 is pressed into contact, the seal body of the first seal member 16 is surely It is possible to maintain the plasma sealing property that exhibits the vacuum sealing property in the portion 22 and prevents the invasion of corrosive gas, plasma, and the like.

  In this case, it is preferable that the axial thickness T2 of the connecting portion 32 is equal to the axial thickness T3 of the seal main body portion 22, and the connecting portion 32, that is, the second seal member 20 is always the second. Since the joint portion 28 is pressed against each other, it is possible to maintain the plasma sealing property that prevents the invasion of corrosive gas, plasma, and the like. It will be protected more reliably from corrosive gas, plasma, etc., and the vacuum sealability will not be lowered.

  In this embodiment, as shown in FIGS. 3 and 4, one side wall 14 side of the seal groove 12 is positioned on the outer peripheral side, and the first seal member 16 is positioned on the outer peripheral side, and the seal groove 12 is configured such that the other side wall 18 side is positioned on the inner peripheral side and the second seal member 20 is positioned on the inner peripheral side. Conversely, on the outer peripheral side of the seal groove 12, In an environment where corrosion resistance and plasma resistance are required, the first seal member 16 can be positioned on the inner peripheral side, and the second seal member 20 can be positioned on the outer peripheral side. is there.

  In this embodiment, as shown in FIG. 5, the composite sealing material 10 is mounted in the sealing groove 12 having a substantially annular shape and a rectangular cross section. However, the shape of the sealing groove is not limited at all. However, although not shown in the drawings, a seal groove having a special shape, that is, a seal groove having a shape in which the width on the bottom side of the seal groove is wider than the width on the opening side of the seal groove, The present invention can also be applied to a so-called “single groove” having a shape in which only one side wall is inclined and the opening is widened.

  Further, in this embodiment, the composite sealing material 10 has a substantially circular shape as shown in FIG. 3. However, for example, as shown in FIG. The shape is not particularly limited as long as it matches the shape of the seal groove.

  18 is a plan view of a composite sealing material according to another embodiment of the present invention, FIG. 19 is a cross-sectional view taken along line AA of FIG. 18 of the composite sealing material according to another embodiment of the present invention, and FIG. FIG. 6 is a partially enlarged cross-sectional view similar to FIG. 5 showing a state where a composite sealing material of another embodiment of the present invention is mounted in a seal groove.

The composite sealing material 10 of this embodiment has basically the same configuration as shown in FIGS. 1 to 5, and the same components are denoted by the same reference numerals and detailed description thereof is omitted. To do.
In the composite sealing material 10 of this embodiment, as shown in FIG. 20, the groove portion 30 formed between the spacer portion 26 and the second coupling portion 28 of the second sealing member 20 has a substantially obtuse triangular shape. It is.

  In this case, in FIG. 20, the groove 30 is formed by an outer tapered inclined surface 28 d of the second coupling portion 28 of the second seal member and a tapered inclined surface 26 b of the spacer portion 26 of the second seal member 20. Is formed.

  Accordingly, a gentle surface is formed from the axial end surface 26 a of the spacer portion 26 of the second seal member 20 to the groove portion 30 and the outer tapered inclined surface 28 d of the second coupling portion 28. .

  With this configuration, the second seal member 20 can be easily molded, and there is no risk of cracking (separation) in terms of strength, and a product that is also attractive in terms of merchandise is provided. can do.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to this. For example, in the above embodiment, the present invention is applied to a semiconductor device such as a dry etching apparatus or a plasma CVD apparatus. As described above, the composite sealing material of the present invention can be used for the sealing portion of other devices used under other severe conditions, and various modifications can be made without departing from the object of the present invention. It is.

  The present invention relates to a composite sealing material used in a vacuum or ultra-vacuum state. In particular, the present invention is applied to a semiconductor manufacturing apparatus such as a dry etching apparatus or a CVD apparatus, and has vacuum sealing performance, plasma resistance, and corrosion gas resistance. The composite sealing material is capable of being manufactured easily and at low cost without causing deterioration of the vacuum sealing performance over a long period of time, without generating metal particles even under heavy loads during use.

DESCRIPTION OF SYMBOLS 10 Composite sealing material 12 Seal groove 14 Side wall 16 1st seal member 18 Side wall 20 2nd seal member 22 Seal main-body part 24 1st coupling | bond part 24a Base end part 24b Tip part 24c Taper inclined surface 26 Spacer part 26a End surface 26b Tapered inclined surface 28 Second coupling portion 28a Base end portion 28b Tip portion 28c Inner tapered inclined surface 28d Outer tapered inclined surface 30 Groove portion 32 Connecting portion 34 Partner member 36 Mounted member 100 Sealing material 102 First seal member 104 Second Seal member 106 Seal groove 108 Side wall 110 Side wall 112 Mating member 114 Mounted member 200 Seal material 202 First seal member 204 Second seal member 206 Seal groove 208 Seal groove 300 Composite seal material 302 First seal member 304 First Two seal members 306 Seal body 308 Convex portion 30 Annular projection 308 projection portion 308 sealing groove 310 fitting portion 312 to be fitted recess 314 bent portion 316 stepped portion 318 sealing groove 320 side walls 322 sidewall 324 mating member 326 the mounting member

Claims (5)

A composite sealing material mounted in the sealing groove,
A first seal member positioned on one side wall of the seal groove when mounted in the seal groove;
A second seal member positioned on the other side wall of the seal groove when mounted in the seal groove;
The first seal member is made of an elastic member;
The second seal member is a composite seal member made of a material harder than the first seal member,
The first seal member is
When the composite sealing material is press-contacted, a seal main body portion that is press-contacted and imparts a sealing property; and
A first coupling portion extending from the substantially central portion in the axial direction of the seal body portion to the second seal member side;
The second seal member is
A spacer part;
A second coupling portion extending from the both ends in the axial direction of the spacer portion to the first seal member side;
The first seal member and the second seal member are integrated by fitting the second joint portion of the second seal member to the first joint portion of the first seal member. A composite seal member comprising a portion.   2. The composite seal member according to claim 1, wherein a groove portion is formed between the spacer portion and the second coupling portion of the second seal member. The relationship between the groove height H of the seal groove and the axial thickness T1 of the spacer portion of the second seal member is:
Seal groove height H <Spacer portion axial thickness T1
The composite seal member according to claim 1, wherein The relationship between the axial thickness T1 of the spacer portion of the second seal member and the axial thickness T2 of the connecting portion is:
Thickness T1 in the axial direction of the spacer portion ≦ Thickness T2 in the axial direction of the connecting portion
The composite seal member according to claim 3, wherein The relationship between the axial thickness T2 of the connecting portion and the axial thickness T3 of the seal body portion of the first seal member is:
Axial thickness T2 of connecting portion ≦ Axial thickness T3 of seal body
The composite seal member according to claim 4, wherein