WO2010104107A1 - Ｘ線検査装置及びｘ線検査方法 - Google Patents

Ｘ線検査装置及びｘ線検査方法 Download PDF

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Publication number
WO2010104107A1
WO2010104107A1 PCT/JP2010/053985 JP2010053985W WO2010104107A1 WO 2010104107 A1 WO2010104107 A1 WO 2010104107A1 JP 2010053985 W JP2010053985 W JP 2010053985W WO 2010104107 A1 WO2010104107 A1 WO 2010104107A1
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WO
WIPO (PCT)
Prior art keywords
inspection
ray
inspected
inspection apparatus
imaging
Prior art date
Application number
PCT/JP2010/053985
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English (en)
French (fr)
Japanese (ja)
Inventor
香 太田
勝作 中田
淳 松田
健 岡村
公太 鈴木
快治 藤井
Original Assignee
ポニー工業株式会社
株式会社中部メディカル
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ポニー工業株式会社, 株式会社中部メディカル filed Critical ポニー工業株式会社
Priority to KR1020117020358A priority Critical patent/KR101278920B1/ko
Priority to JP2011503839A priority patent/JP5363559B2/ja
Priority to CN201080011306.7A priority patent/CN102348970B/zh
Publication of WO2010104107A1 publication Critical patent/WO2010104107A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays

Definitions

  • the present invention relates to an X-ray inspection apparatus and an X-ray inspection method. More specifically, an inspection unit including an X-ray generator that irradiates the inspection object with X-rays and an X-ray detector that detects X-rays transmitted through the inspection object with an imaging axis as a center, and the inspection object An X-ray inspection for inspecting the presence or absence of contaminants in the X-ray transmission imaging
  • the present invention relates to an apparatus and an X-ray inspection method.
  • Patent Documents 1 and 2 As the X-ray inspection apparatus as described above, for example, those described in Patent Documents 1 and 2 are known. These X-ray inspection apparatuses are disclosed in that X-rays are irradiated obliquely from below the container.
  • Patent Document 1 an X-ray transmission region of a container is divided into two parts by using two pairs of X-ray generators and X-ray detectors, so that a transmission image is substantially obtained from one direction, and foreign matter is detected. The identification of was not certain.
  • Patent Document 2 similarly irradiates X-rays from only one direction, it cannot be said that foreign matter is reliably identified.
  • the container to be inspected is filled with contents such as liquid, and the container is moved upright on the conveyor. Gravity acts in the vertical direction on the contents including the foreign matter, and the contents remain stationary inside the container.
  • contents may flow or scatter due to the vibration of the conveyor, and a separate measure must be taken so that foreign matter detection is not affected.
  • Patent Document 3 relates to a boiled egg inspection apparatus, in which X-ray irradiation means for irradiating X-rays at different angles with respect to the transport direction is arranged in front and rear in the transport direction. However, this apparatus inspects the deposits on the outer surface of the boiled egg, and no countermeasures against vibration of the contents are taken.
  • the present invention can suppress the vibration of contents while having a simple structure, and can perform X-ray transmission imaging rationally at different angles, thereby improving the detection accuracy of contaminants.
  • An object of the present invention is to provide an X-ray inspection apparatus and an X-ray inspection method that can be performed.
  • the X-ray inspection apparatus is characterized by an X-ray generator for irradiating an object to be inspected with X-rays and an X-ray transmitted through the object to be inspected around an imaging axis.
  • An inspection unit having an X-ray detector; and a transport mechanism for transporting the object to be inspected.
  • the object to be inspected is a powder or fluid sealed in a container.
  • the transport mechanism holds an upper part of the inspection object and restricts rotation of the inspection object, and the holding part around the rotation axis
  • a rotating table that is rotated in the horizontal direction, and the rotating object is conveyed along the arcuate conveying path by the rotation of the rotating table, and each of the inspection parts at two locations on the conveying path.
  • Two sets of inspection units are arranged correspondingly
  • the X-ray generator is disposed below the transport path, and the X-ray detector is disposed above the transport path.
  • the imaging axis is inclined with respect to the vertical direction, and the inspection unit is viewed in the vertical direction.
  • the inspection units are arranged such that the transmission direction of the imaging axis with respect to the object to be inspected is different in each inspection unit.
  • the inspection unit is arranged in the two inspection sections of the transportation path and the photographing axis is inclined in the vertical direction. X-ray transmission imaging is possible from these two directions.
  • each inspection unit is arranged so that the transmission direction of the imaging axis is different in each inspection unit, X-ray transmission imaging can be performed from different directions of the object to be inspected. Therefore, it is possible to magnify and observe the vicinity of the bottom of the object to be inspected from two or more directions in a state where the contaminant is almost stationary, so that the presence or absence of the contaminant can be inspected with high accuracy. can do.
  • the two imaging axes are substantially parallel to each other and oriented in the same direction, and the inspection parts are arranged in a phase separated from the rotation axis by approximately 90 °.
  • the holding portions are arranged with a difference of approximately 45 ° in the circumferential direction, and the imaging axis is inclined by approximately 45 ° with respect to the vertical direction. Since the object to be inspected does not rotate and only revolves on the rotary table, the contents inside the container hardly move during transportation, and almost the entire periphery of the object to be inspected by different transmission images from two directions. can do. In addition, it can be transported at a pitch of approximately 45 ° and can be inspected quickly and efficiently.
  • the X-ray generator may be a small focus X-ray generator. An enlarged image of the object to be inspected can be obtained, and the contamination detection performance can be further improved.
  • the X-ray detector may be an II device (image intensifier), and its detection surface may be made of Be material. Even if the transmitted X-ray intensity is weak due to the Be material, contaminants can be detected.
  • the transport mechanism may be movable up and down. Corresponding to the height dimension of the object to be inspected, the position near the bottom surface can be adjusted within the irradiation range without the X-ray being blocked by the shielding object, and it is possible to deal with containers of various dimensions.
  • the transport mechanism may further include an elevating mechanism that raises and holds the object to be inspected to the holding part before inspection, and lowers and discharges the object to be inspected from the holding part after inspection. .
  • the transport mechanism further includes a rotary transport jig having a plurality of recesses before and after the elevating mechanism, and rotates the rotary transport jig in synchronization with the rotation of the rotary table.
  • the object to be inspected may be moved between the holding unit and the lifting mechanism using the lifting mechanism.
  • the object to be inspected is a vial having a cylindrical portion in which a medicine is enclosed.
  • the X-ray inspection method according to the present invention is characterized in that in the X-ray inspection method using the X-ray inspection apparatus according to any one of the above-described features, the transport mechanism includes the object to be covered.
  • a holding unit that holds an upper part of the inspection object and restricts rotation of the inspection object; and a rotary table that rotates the holding part in a horizontal direction around a rotation axis.
  • the body is transported along an arc-shaped transport path, and two sets of the inspection units are arranged in correspondence with the two inspection sections of the transport path, and the X-ray generator is connected to the transport path.
  • the X-ray detector is disposed above the conveyance path, the imaging axis is inclined with respect to the vertical direction, and the imaging with respect to the object to be inspected as viewed in the vertical direction in each inspection unit.
  • the transmission direction of the shaft is The way the different directions in ⁇ lies in the place of each test unit.
  • a standard sample in which a standard foreign object is fixed to the object to be inspected with a silicon adhesive may be prepared in advance. Thereby, the detection accuracy of the contamination of the object to be inspected can be verified in advance.
  • the X-ray inspection apparatus and the X-ray inspection method according to the present invention it is possible to perform X-ray transmission imaging rationally at different angles while suppressing vibration of contents while having a simple structure. It has become possible to improve the detection accuracy of contaminants.
  • FIG. 1 is a front view of an X-ray inspection apparatus according to the present invention. It is a crushing figure which shows a to-be-inspected object. It is a principal part front view in a test
  • FIG. 2 a vial bottle in which a medicine is enclosed in a container 101 is used as the contents to be inspected 100.
  • the container 101 has a cylindrical shape, and a lyophilizing agent, powder, liquid, and the like are enclosed as the drug 102, for example.
  • Gravitational force acts on the foreign matter mixed in the contents 102 in the vertical direction, and is normally stably positioned near the bottom surface 103 of the container. Therefore, the X-ray irradiation from above the container 101 cannot enlarge and confirm the vicinity of the bottom surface 103, and may overlook the foreign matters B1 and B2.
  • the distance transmitted through the thick portion 101a is increased by the incident angle of the X-ray, and the X-ray is attenuated, so that it is likely to become a blind spot, and the foreign matter B2 may be overlooked.
  • the distance transmitted through the thick portion 101a is increased depending on the incident angle of the X-rays, and the X-rays are attenuated. Therefore, in the present invention, as described below, the transmission of vibration to the vial 100 is minimized, and X-ray transmission imaging is performed from different angles obliquely below to suppress the generation of blind spots and improve detection accuracy. Yes.
  • an X-ray inspection apparatus 1 includes an inspection apparatus 2 that irradiates and inspects an object to be inspected 100, and controls that control image processing, driving of the X-ray inspection apparatus 1, and the like.
  • the apparatus 3 is provided.
  • the inspection apparatus 2 is connected with a carry-in unit 4 for carrying in the inspection object 100 and a carry-out part 5 for carrying out the inspection object 100 after inspection, and the inspection object 100 is conveyed from the right side to the left side in the drawing.
  • a touch panel as the operation unit 35 and a monitor as the output unit 36 are provided on the upper surface of the control device 3.
  • the detection apparatus 2 includes two sets of inspection units each including a transport mechanism 10 that rotates and transports an object to be inspected 100, an X-ray generator 21, and an X-ray detector 22. 20a and 20b are covered with a housing 6 for preventing X-ray leakage. A window 6 a through which the inside of the inspection device 2 can be confirmed is provided on the front surface of the housing 6.
  • the control device 3 includes an X-ray control unit 31 that controls X-rays, an image processing unit 32 that processes X-ray transmission images, and a drive control unit that controls driving of the transport mechanism 10 and the like. 33.
  • the image processing unit 32 appropriately performs image processing on the input photographed image and determines the presence or absence of the contaminant B.
  • the captured image is stored in the storage unit 34 together with data such as the inspection date and time, the determination result, and the product name.
  • the drive control unit 33 controls, for example, the height, rotation speed, and the like of the rotary table 11 by a signal from a touch panel, a sensor, or the like as the operation unit 35.
  • the captured image is displayed on a monitor as the output unit 36.
  • the transport mechanism 10 generally includes a rotary table 11 that transports the vial 100 and a holding unit 12 that holds the upper portion 106 of the vial 100.
  • the turntable 11 is fixed to the housing 6 via the support frame 13 and is connected to the motor 14.
  • the conveyance path C is provided with inspection portions P1 and P2 that perform X-ray transmission imaging so as to have a phase separated by approximately 90 ° (including 90 °, the same applies hereinafter) with respect to the rotation axis.
  • the turntable 11 rotates counterclockwise at a pitch of approximately 45 °.
  • the rotary table 11 is connected to a first lifting cylinder 16 provided on the support frame 13 and can be moved up and down in the vertical direction.
  • the first lifting cylinder 16 can appropriately adjust the conveyance height according to the height dimension of the vial 100. As a result, X-rays can be irradiated near the bottom surface 103 of the vial 100 without being blocked by the shielding object, and the vial 100 having various heights can be inspected.
  • the holding unit 12 is fixed to the rotary table 11 so as to be approximately 45 ° (including 45 °, the same applies hereinafter) along the circumferential direction thereof, and holds the upper portion 106 of the upright vial 100. . Since the upper portion 106 of the vial bottle 100 is sandwiched, there is no shielding object in the vicinity of the bottom surface 103, and it is possible to obtain a clear photographed image by suppressing attenuation of X-rays by the shielding object.
  • the holding portion 12 is opened by pressing the opening / closing cylinder 18.
  • the open / close cylinder 18 is fixed to the upper part of the delivery parts S1 and S2 of the vial 100 between the carry-in part 4 and the carry-out part 5 and the rotary table 11, and the holding part 12 is opened only at the delivery parts S1 and S2.
  • the holding unit 12 continues to hold the upper portion 106 of the vial 100, so that the vial 100 is conveyed while maintaining its posture without rotating. Therefore, the drug 102 hardly flows or scatters during the revolving conveyance, and the foreign matter B is also stabilized inside the container 101.
  • the holding portion 12 is formed with a recess 12a, which absorbs and holds the deviation of the transport position at the delivery portion S1 of the vial 100.
  • a second elevating cylinder 19 that elevates and lowers the vial 100 in the vertical direction is provided below the delivery units S1 and S2.
  • the second elevating cylinder 19 constitutes an elevating mechanism that moves the vial 100 between the rotary table 11 and the carry-in unit 4 and the carry-out unit 5 and delivers the vial 100 in the delivery units S1 and S2. .
  • the X-ray generators 21a and 21b of the inspection units 20a and 20b are transported so that the imaging axes X1 and X2 are substantially parallel and in the same direction and inclined by approximately 45 ° with respect to the vertical direction V.
  • the path C it is fixed to the housing 6.
  • the photographing axes X1 and X2 intersect at different positions on the arcuate conveyance path C, and these intersecting positions become inspection portions P1 and P2.
  • a small-focus X-ray generator having a focal size of 0.1 mm is used for the X-ray generators 21a and 21b.
  • a blur called penumbra is generated in proportion to the size of the focal point. This penumbra is caused by the difference in the position of the intersection of the X-ray detection surface of the line segment connecting the both ends of the focal point and one end of the surface to be inspected, resulting in a blurred photographed image.
  • the X-ray detectors 22a and 22b are fixed to the housing 6 via the fixing plate 25 so as to face the X-ray generators 21a and 21b above the conveyance path C.
  • the detection surfaces 24a and 24b of the X-ray detectors 22a and 22b are substantially orthogonal to the imaging axes X1 and X2.
  • the X-ray detectors 22a and 22b use II devices, and the detection surfaces 24a and 24b are made of Be material. By using the Be material, low-energy X-rays can be detected, and a high-contrast image can be obtained.
  • the X-ray detectors 22a and 22b are connected to a CCD camera having, for example, 1.45 million pixels, and a clear transmission image can be obtained from the detected transmission X-rays. Therefore, for example, the contaminant B such as metal or glass can be recognized more clearly, and the inspection accuracy can be improved.
  • the generated captured image is output to the image processing unit 32 as digital data.
  • the carry-in unit 4 includes a carry-in conveyor 41 that carries the vials 100 into the inspection apparatus 2 in an upright state, and a rotary conveyance jig 42 that rotates and conveys the loaded vials 100 to the delivery unit S1. It has.
  • the carry-in conveyor 41 is provided with a width adjustment guide 43 that adjusts the width of the conveyor, and can be appropriately adjusted according to the width (diameter) dimension of the vial 100.
  • Rotating conveyance jig 42 is formed with eight concave portions 42a that support vial 100 by 45 °, and is rotated clockwise at approximately 45 ° pitch by motor 42b.
  • the rotary conveyance jig 42 can be exchanged, and the vial bottle 100 having various dimensions can be inspected by replacing the rotary conveyance jig 42 with the rotation conveyance jig 42 of the concave portion 42 a corresponding to the width dimension of the vial bottle 100.
  • a first sensor 44 for detecting the entrance of the vial 100 is provided in the vicinity of the entrance of the rotary conveyance jig 42, and a second sensor 45 for detecting the bottom surface 103 of the vial 100 is provided in the vicinity of the delivery section S ⁇ b> 1.
  • the unloading unit 5 includes an unloading conveyor 51 that unloads the vials 100 in an upright state, and a rotary conveyance jig 52 that rotates and conveys the vials 100 after inspection from the delivery unit S2 to the unloading conveyor 51.
  • the carry-out conveyor 51 includes a carry-out unit 53 that carries out a good product that does not contain the contaminant B, and a stock unit 54 that stocks the missing product in which the contaminant B has been detected. 53 and the stock part 54.
  • the arm 55 is driven based on the determination result of the image processing unit 32 to prevent the shortage from entering the carry-out unit 53.
  • a third sensor 57 for detecting the bottom surface 103 of the vial 100 is provided in the vicinity of the delivery unit S2
  • a fourth sensor 58 for detecting the removal of the vial 100 is provided in the vicinity of the arm 55.
  • the carry-out conveyor 51, the carry-out unit 53, and the stock unit 54 are provided with the same width adjustment guide 56 as described above.
  • the rotary transport jig 52 has substantially the same shape as the rotary transport jig 42, and rotates clockwise at a pitch of about 45 °.
  • the rotary table 11 and the rotary conveyance jigs 42 and 52 are formed with the holding portion 12 for holding the vial 100 and the concave portions 42a and 52a being different from each other by about 45 °. Therefore, it is possible to inspect efficiently by rotating the rotary table 11 and the rotary conveying jigs 42 and 52 in synchronization with each other at a pitch of about 45 °.
  • the clearance CL on the discharge side is larger than the vial 100 on the discharge side recess 42a than the supply side recess 42a.
  • the positional relationship between the imaging axes X1 and X2 and the vial 100 will be described in more detail with reference to FIGS.
  • the X-ray generators 21 a and 21 b are positioned below the conveyance path C, and the imaging axes X1 and X2 are inclined by approximately 45 ° with respect to the vertical direction V.
  • the X-ray generators 21 a and 21 b With the arrangement of the X-ray generators 21 a and 21 b, X-rays can be irradiated from the direction of approximately 45 ° obliquely downward with respect to the bottom surface 103 of the vial bottle 100.
  • the bottom surface 103 of the vial bottle 100 can be enlarged, and the foreign matter B that has a high possibility of being stably positioned in the vicinity of the bottom surface 103 can be accurately detected.
  • the imaging axes X1 and X2 are inclined by approximately 45 ° with respect to the vertical direction V, X-rays can be irradiated so as to be substantially orthogonal to the bottom corner 104. Therefore, the X-ray transmission distance in the thick portion 101a can be shortened, unnecessary attenuation of the X-ray can be suppressed, and the detection accuracy in the bottom corner portion 104 can be improved.
  • the transmission directions D1 of the imaging axes X1 and X2 are substantially parallel to each other and the same direction.
  • the inspection parts P1 and P2 are arranged in a phase separated from the rotation shaft 15 of the turntable 11 by approximately 90 °. Since the vial 100 is conveyed only by revolution by rotation of the rotary table 11 without rotating, the reference axis D0 of the vial 100 when viewed in the vertical direction in each inspection unit P1, P2 is revolved in the inspection units P1, P2. The direction is the same as the radius.
  • the phase angle A1 between the reference axis D0 and the irradiation direction D1 of the imaging axis X1 is 45 ° clockwise.
  • the phase angle A2 between the reference axis D0 and the irradiation direction D1 of the imaging axis X2 is 45 ° counterclockwise.
  • the phase angle A1 is + 45 ° and the phase angle A2 is ⁇ 45 °. That is, the phase angles A1 and A2 in the inspection parts P1 and P2 are different, and in this embodiment, the difference between the phase angles A1 and A2 is 90 °.
  • phase angles A1, A2 in the inspection parts P1, P2 different by 90 °, it becomes a photographed image from the two directions where the overlap is minimized, so that substantially the entire circumference inspection can be performed.
  • the detection performance of the contaminant B is improved.
  • the holding portions 12 are arranged so as to be different from each other by 45 ° in the circumferential direction of the rotary table, it is possible to inspect efficiently by rotating at a 45 ° pitch.
  • a standard sample for validation is prepared in advance. This standard sample is obtained by fixing standard foreign substances having different materials and dimensions to the bottom surface 103, the bottom corner portion 104, and the wall surface 105 of the vial 100 to be inspected. The standard foreign matter is fixed by a silicon adhesive that has little influence on the transmission photographed image. The detection performance is verified using these standard samples.
  • the second sensor 45 detects the vial 100 transported from the rotary transport jig 42 to the delivery unit S1.
  • the drive control unit 33 drives the open / close cylinder 18 and the second elevating cylinder 19 by the signal from the second sensor 45, and holds the vial 100 by the holding unit 12.
  • the motor 14 is driven and the turntable 11 is rotated counterclockwise by about 45 ° and conveyed to the first inspection unit P1.
  • the rotary conveyance jigs 42 and 52 also rotate in synchronization.
  • the first inspection unit P1 X-rays are irradiated and a first transmission image is generated.
  • the first transmission image is output to the image processing unit 32, and the image processing unit 32 determines the presence or absence of the contaminant B.
  • the first transmission image is stored in the storage unit 34 together with the determination result, and is displayed on the output unit 36.
  • the drive control section 33 drives the open / close cylinder 18 and the second lifting cylinder 19 in the same manner as the delivery section S1, and the holding state of the vial 100 is changed.
  • the vial bottle 100 is delivered to the rotary conveyance jig 52. These steps are performed simultaneously at each location in synchronization with the rotation of the rotary table 11 at a pitch of approximately 45 °.
  • the vial 100 that has reached the carry-out conveyor 51 from the rotary conveyance jig 52 is detected by the fourth sensor 58. Then, the drive control unit 33 drives the arm 55 based on the signal of the fourth sensor 58 and the determination result of the image processing unit 32, and when the vial 100 is a missing item mixed with the foreign matter B, the vial 100 is guided to the stock section 54.
  • the inspection units 20a and 20b are arranged so that the phase angle A1 is + 45 °, the phase angle A2 is ⁇ 45 °, and the difference between the phase angles A1 and A2 is 90 °.
  • the phase angles A1 and A2 are not limited to ⁇ 45 °.
  • the phase angle A1 may be 0 ° and the phase angle A2 may be + 90 ° or ⁇ 90 °.
  • the phase angle difference is not limited to 90 ° and can be set as appropriate. However, the difference in phase angle of 90 ° can minimize the overlapping portion in the captured images of the inspection units P1 and P2, and thus the above embodiment is excellent in terms of detection performance.
  • the inspection unit 20a is configured by the X-ray generator 21a and the X-ray detector 22a, and the inspection unit 20b is configured similarly.
  • the inspection unit 20 is not limited to the above-described mode.
  • the X-ray generator 21 that irradiates X-rays at a wide angle is used to detect the X-rays by the X-ray detectors 22a and 22b.
  • 20b may be configured.
  • the present invention is not limited to the case where two sets of inspection units 20a and 20b are used, and X-ray transmission imaging may be performed from a plurality of directions using three or more sets of inspection units.
  • the photographing axes X1 and X2 are inclined by approximately 45 ° with respect to the vertical direction.
  • the angle is not limited to approximately 45 degrees as long as the foreign object B2 near the bottom corner 104 can be detected.
  • the X-ray detectors 22a and 22b are arranged so that the imaging axes X1 and X2 are orthogonal to each other at the center of the detection surfaces 24a and 24b.
  • the detection surfaces 24a and 24b may be inclined with respect to the imaging axes X1 and X2, for example.
  • the photographing axes X1 and X2 may be shifted from the centers of the detection surfaces 24a and 24b.
  • the X-ray detectors 22a and 22b may be arranged on the transmission path of the part that is the subject of imaging.
  • the two imaging axes X1 and X2 are oriented in parallel and in the same direction. However, it does not need to be oriented in parallel, and is not particularly limited as long as it is easy to arrange the inspection unit 20 and can be reasonably inspected.
  • the two imaging axes X1 and X2 may be arranged so as to intersect each other when viewed from the side.
  • the holding part 12 is arranged with a difference of about 45 ° in the circumferential direction, and the inspection parts P1, P2 are arranged at a phase separated by 90 ° with respect to the rotating shaft 15, and rotated at a pitch of about 45 °. It was. However, a plurality of holding units 12 may be arranged at appropriate intervals. However, the above embodiment is excellent from the viewpoint of detection performance and inspection efficiency.
  • a cylindrical vial has been described as an example of the inspection object 100.
  • it is not limited to a cylindrical vial, and may be, for example, a rectangular tube.
  • the present invention can be used as a foreign substance inspection of a vial filled with a medicine. Further, the present invention is not limited to the inspection of foreign substances in vials, and can also be used for the inspection of foreign substances in containers such as beverages and foods.
  • the material of the container is not limited to glass, and a material that can transmit X-rays, such as metal and PET, can be used as appropriate.

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  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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PCT/JP2010/053985 2009-03-13 2010-03-10 Ｘ線検査装置及びｘ線検査方法 WO2010104107A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020117020358A KR101278920B1 (ko) 2009-03-13 2010-03-10 Ｘ선 검사장치 및 ｘ선 검사방법
JP2011503839A JP5363559B2 (ja) 2009-03-13 2010-03-10 Ｘ線検査装置及びｘ線検査方法
CN201080011306.7A CN102348970B (zh) 2009-03-13 2010-03-10 X射线检查装置和x射线检查方法

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JP2009062113 2009-03-13
JP2009-062113 2009-03-13

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JP2014055835A (ja) * 2012-09-12 2014-03-27 Shibuya Kogyo Co Ltd 物品分類装置
JP2015519577A (ja) * 2012-06-13 2015-07-09 ヴィルコ・アーゲー 容器および／または容器の内容物の欠陥のｘ線検出
CN106353345A (zh) * 2016-08-12 2017-01-25 朱宪增 放射科用放射反应观察装置
WO2017043123A1 (ja) * 2015-09-10 2017-03-16 株式会社日立ハイテクサイエンス Ｘ線検査方法及びｘ線検査装置

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KR101950158B1 (ko) * 2013-10-02 2019-02-19 야마하 파인 테크 가부시키가이샤 밀봉 팩 제품의 검사 장치 및 검사 방법
DE102014006835A1 (de) * 2014-05-13 2015-11-19 Kocher-Plastik Maschinenbau Gmbh Prüfvorrichtung zum Überprüfen von Behältererzeugnissen
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