WO2010035417A1 - 電気鋳造方法 - Google Patents
電気鋳造方法 Download PDFInfo
- Publication number
- WO2010035417A1 WO2010035417A1 PCT/JP2009/004522 JP2009004522W WO2010035417A1 WO 2010035417 A1 WO2010035417 A1 WO 2010035417A1 JP 2009004522 W JP2009004522 W JP 2009004522W WO 2010035417 A1 WO2010035417 A1 WO 2010035417A1
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- WIPO (PCT)
- Prior art keywords
- recess
- insulating layer
- metal
- cavity
- width
- Prior art date
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
- C25D5/022—Electroplating of selected surface areas using masking means
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/003—3D structures, e.g. superposed patterned layers
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/10—Moulds; Masks; Masterforms
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/20—Separation of the formed objects from the electrodes with no destruction of said electrodes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
- H05K3/205—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
Definitions
- the present invention relates to an electroforming method for molding a metal product.
- Electrocasting technology is known as a method for producing fine metal products that are difficult to manufacture by machining. This is a thick electroplating process in which a metal product is formed by plating a metal on a matrix and peeling the thick film plating (metal molded product) from the matrix. Electroplating with a thickness exceeding 20 ⁇ m is called electroforming.
- a photoresist is applied to the surface of a metal matrix, and this is patterned to form a resist film having an opening of a desired pattern, and then in the opening of the resist film, That is, a metal layer (thick film plating) is formed by electrodepositing a metal on the surface of the matrix that is not covered with the resist film. Thereafter, the metal layer is peeled off from the matrix to obtain a fine metal molded product having a desired shape.
- the step of electrodepositing metal on the surface of the matrix a part of the current blocked by the resist film flows into the electrodeposition part near the resist film and partially increases the amount of electrodeposition.
- the thickness of the film became uneven.
- the metal layer was raised at the edge portion in contact with the resist film on the surface of the metal layer (the surface opposite to the surface electrodeposited on the mold), and the thickness of the metal layer was partially increased.
- the metal layer is formed to be slightly thicker than the thickness of the resist film, and the thickness of the metal layer is made uniform by polishing and smoothing the surface of the metal layer. .
- the shape of the surface of the metal layer (the surface opposite to the surface electrodeposited on the mother die) is uncontrollable, and there are significant restrictions on the shape of the metal molded product that can be molded. there were.
- the present invention has been made in view of the above problems, and provides an electroforming method capable of controlling the shape of the surface of the metal layer opposite to the surface electrodeposited on the mother die. Is an issue.
- the first electroforming method includes forming an insulating layer on the upper surface of the conductive substrate, providing a recess in the insulating layer, and at least a bottom surface of the recess.
- the metal layer is grown in the recess so as to leave a space having a height of 2 mm.
- the second electroforming method includes forming an insulating layer on the upper surface of the conductive base material, providing a concave portion in the insulating layer, and forming the conductive group on at least a part of the bottom surface of the concave portion.
- An electrodeposition method comprising: an electrodeposition step, wherein, in the electrodeposition step, when the width of the recess is 200 ⁇ m or more and less than 300 ⁇ m, the height is 1 / 3.75 times or more the width of the recess.
- a metal layer is grown in the recess so as to leave a space.
- the third electroforming method according to the present invention comprises forming an insulating layer on the upper surface of the conductive substrate, providing a recess in the insulating layer, and forming the conductive group on at least a part of the bottom surface of the recess.
- a matrix forming step of exposing a material to form a matrix, and placing the matrix in an electrolytic cell and applying a voltage to electrodeposit metal on the exposed surface of the conductive substrate in the recess An electroforming method comprising an electrodeposition step, wherein, in the electrodeposition step, when the width of the recess is not less than 100 ⁇ m and less than 200 ⁇ m, a space having a height that is at least 1/4 times the width of the recess A metal layer is grown in the recess so as to remain.
- the fourth electroforming method according to the present invention is such that an insulating layer is formed on the upper surface of the conductive base material, a concave portion is provided in the insulating layer, and the conductive group is formed on at least a part of the bottom surface of the concave portion.
- a matrix forming step of exposing a material to form a matrix, and placing the matrix in an electrolytic cell and applying a voltage to electrodeposit metal on the exposed surface of the conductive substrate in the recess An electrodeposition process, wherein, in the electrodeposition process, when the width of the recess is less than 100 ⁇ m, a space having a height of 1/10 or more of the width of the recess is left. Then, a metal layer is grown in the recess.
- the conductive substrate is a substrate for depositing a metal layer by electroforming.
- the conductive substrate may have a flat surface, or may have irregularities or steps on the surface. Since it is used as an electrode at the time of electroforming, the conductive substrate must have conductivity, but it is not limited to the case where the entire conductive substrate is made of a conductive material.
- a conductive coating portion made of a conductive material may be provided on the entire surface of the core material made of a nonconductive material or a part of the surface.
- the insulating coat part which consists of insulating materials in a part of surface of the core material which consists of electrically conductive materials may be used.
- the insulating layer is a layer that electrically insulates the surface of the conductive base material during electroforming and suppresses metal electrodeposition, and a resist is generally used.
- the mother die is a master electrode made of a conductive base material and an insulating layer and having one or more concave portions for molding. Electrodeposition refers to depositing a metal deposit proportional to the amount of accumulated energization on one electrode (matrix) arranged in the electrolytic cell.
- the concave portion is a cavity formed by an insulating layer on the upper surface of the conductive base material, and has an inverted shape of a metal molded product to be manufactured.
- the width of the recess means an opening width measured at a height at which the growth of the metal layer is finally stopped at the position where the width is to be determined and in the cross section in the direction in which the width of the recess is the narrowest.
- the height of the space left in the recess means the vertical distance of the space from the uppermost end of the metal layer deposited in the recess to the upper surface of the insulating layer (upper surface opening of the recess).
- the vertical distance from the uppermost end of the metal layer to the upper surface of the insulating layer at the place where the height of the insulating layer is the lowest is referred to as the height of the space in the recess.
- the metal layer is grown without leaving a predetermined space above the metal layer without electroforming metal in the entire internal space of the recess.
- the insulating layer at the edge of the opening on the upper surface of the recess blocks the current that tries to flow obliquely into the metal layer that is already electrodeposited from the portion that does not face the recess of the counter electrode.
- the thickness of the electrodeposited metal does not vary. For this reason, the electroformed metal layer grows uniformly so that the distance from the portion where the base insulating layer is not formed is constant.
- the minimum value of the space to be left above the metal layer according to the width of the recess that is, the thickness of the metal layer relative to the thickness of the insulating layer. Since the maximum value is determined, the metal molded product can be efficiently molded with the minimum necessary insulating layer thickness (that is, member saving) determined by the width of the recess and the thickness of the metal molded product to be molded.
- the insulating layer may be formed on at least a part of a peripheral edge of the bottom surface of the recess in the mother die forming step. Since the metal layer grows so that the distance from the portion where the base insulating layer is not formed is constant, according to such an embodiment, the curved surface is formed on the insulating layer on the outer peripheral portion of the bottom surface. A metal layer can be formed. For example, this makes it possible to chamfer the edge of the metal molded product opposite to the mother die.
- a recess may be formed on the upper surface of the conductive substrate in a region overlapping the bottom surface of the recess. According to such an embodiment, since the bottom shape of the recess can be changed to various shapes by the depression of the conductive base material, it becomes possible to mold metal molded products having various shapes.
- the surface of the conductive substrate exposed on the bottom surface of the recess has an inclination angle with respect to a plane perpendicular to the voltage application direction. It may be a set mainly composed of surfaces that are 60 ° or less. In such an embodiment, the surface on which the matrix insulating layer is not formed is not inclined more than 60 ° from the surface perpendicular to the voltage application direction between the counter electrode and the inclined surface is It is possible to prevent the metal layer from growing unevenly by drawing current from the counter electrode obliquely. However, even if the surface has an inclination angle larger than 60 ° from the surface perpendicular to the voltage application direction, the metal layer is less likely to be nonuniform if the area is smaller than the entire area of the bottom surface of the recess.
- a step portion that enlarges an opening area of the concave portion may be formed on the side wall surface of the concave portion in the matrix forming step. Good. According to this embodiment, a part of the metal molded product can be protruded in a direction different from the voltage application direction.
- the voltage in the electrodeposition step, is stopped when an integrated amount of current flowing in the electrolytic cell reaches a predetermined value. You may do it. Since the total amount of the metal to be electrodeposited is proportional to the integrated energization amount of the supplied current, the thickness of the grown metal layer can be controlled without direct measurement.
- the means for solving the above-described problems in the present invention has a feature in which the above-described constituent elements are appropriately combined, and the present invention enables many variations by combining such constituent elements. .
- the current flows into the metal layer from the side, and the growth of the molded metal layer
- the thickness in the direction becomes uniform, and there is no need to finish the surface on the opposite side to the mother die.
- FIG. 1 is a cross-sectional view showing a mother die used in the electroforming method according to Embodiment 1 of the present invention.
- FIGS. 2A to 2J are schematic cross-sectional views showing a process of forming a metal molded product by the electroforming method of the first embodiment.
- FIG. 3 is a cross-sectional view showing a matrix placed in the electrolytic cell.
- FIG. 4A is a diagram showing a change in voltage applied between the electrodes of the electrolytic cell
- FIG. 4B is a diagram showing a change in current flowing in the electrolytic cell.
- FIG. 5A is a plan view showing the shape of a sample used to determine the relationship between the width of the cavity and the height of the head space.
- FIG. 5B is an enlarged view of a cross section of a portion A in FIG.
- FIG. 6 shows various samples prepared by changing the height H of the head space left on the metal layer and electrodepositing metal in the cavity, and the height H of the head space and the thickness of the thin line portion of the sample. It is a figure which shows the result of having investigated the relationship with dispersion
- FIG. 7 is a diagram showing the conditions when the variation in the thickness of the thin line portion is 1.01, with the abscissa indicating the cavity width W and the ordinate indicating the H / W ratio.
- FIG. 8 shows various samples prepared by changing the height H of the head space left on the metal layer and electrodepositing metal in the cavity, and the height H of the head space and the thickness of the thin line portion of the sample. It is a figure which shows the result of having investigated the relationship with dispersion
- FIG. 9 is a cross-sectional view showing a comparative example.
- FIGS. 10A to 10D are views for explaining a method for forming an insulating film using an electrodeposition resist.
- FIG. 11 is a plan view of a metal molded product produced using the matrix of the comparative example.
- FIG. 12 is a view showing a cross section of an insulating layer formed on a conductive substrate using a spray coater and a photolithography technique.
- FIG. 13A is a cross-sectional view showing a mother die according to Embodiment 2 of the present invention.
- FIG. 13B is a cross-sectional view showing another matrix of the second embodiment.
- FIG. 14 is a cross-sectional view showing still another mother die of the second embodiment.
- FIG. 15 is a cross-sectional view showing a cross section along the longitudinal direction of the mother die and the metal molded product according to Embodiment 3 of the present invention.
- FIG. 16 is a diagram showing the results of measuring the thickness variation of the metal layer by changing the inclination angle ⁇ of the inclined surface portion.
- FIG. 17 is a diagram showing how the metal layer grows when a recess having an inclined surface with an inclination angle of 60 ° or more is provided on the upper surface of the conductive substrate.
- FIG. 18 is a cross-sectional view for explaining that there is almost no influence on the growth of the metal layer even when the inclination angle is 60 ° or more in a part of the recess of the conductive substrate.
- FIG. 19 is a cross-sectional view showing a different example of the third embodiment.
- FIG. 20 is a perspective view showing the shape of a contact member for an electronic component formed according to the present invention.
- FIG. 21 is a diagram illustrating a mother die cavity and a metal layer growth process according to a fourth embodiment of the present invention.
- FIG. 22 is a cross-sectional view illustrating another example of the fourth embodiment.
- FIGS. 23A and 23B are cross-sectional views showing mother dies according to different embodiments of the present invention.
- FIGS. 26 (a) to 26 (d) are cross-sectional views showing mother dies according to different embodiments of the present invention.
- 27 (a) and 27 (b) are cross-sectional views showing mother dies according to different embodiments of the present invention.
- 28 (a) and 28 (b) are cross-sectional views showing mother dies according to different embodiments of the present invention.
- FIG. 1 is a cross-sectional view for explaining an electroforming method (hereinafter referred to as electroforming method) according to Embodiment 1 of the present invention, in which a mother die 11 and a metal electroformed using the mother die 11 are shown.
- the molded product 12 is shown.
- the mother die 11 used in the first embodiment is obtained by laminating a thick insulating layer 14 on a flat upper surface of a conductive base material 13.
- the cavity 15 (concave portion) is formed.
- the insulating layer 14 does not remain on the bottom surface of the cavity 15, and the upper surface of the conductive substrate 13 is exposed on the entire bottom surface of the cavity 15.
- a metal molded product 12 is formed in the cavity 15 of the mother die 11 by electroforming.
- FIG. 1 is a cross section in a direction (short direction) perpendicular to the longitudinal direction of the cavity 15.
- FIG. 2 shows a process of molding the metal molded product 12 by electroforming
- FIGS. 2A to 2F show a process for forming the mother die 11 (matrix forming process).
- G) and (h) show a process (electrodeposition process) in which metal is electrodeposited in the cavity 15 to produce a metal molded product 12, and FIGS.
- the process (peeling process) which peels the goods 12 is shown.
- a plurality of cavities 15 are formed in the mother die 11 and a plurality of metal molded products 12 are produced at a time, but the case where one metal molded product 12 is produced will be described for convenience.
- FIG. 2A shows a metal conductive substrate 13 having a flat upper surface, and at least the upper surface is subjected to a treatment for easily peeling the electrodeposited metal molded product 12.
- a negative photoresist 16 is applied to the upper surface of the conductive substrate 13 by a spray coater or a spin coater to form a thick film having a uniform thickness.
- the region where the cavity 15 is formed is covered with a mask 17 and exposed to the photoresist 16 as shown in FIG.
- the photoresist 16 Since the exposed area of the photoresist 16 is insolubilized and does not dissolve during development, only the area covered with the mask 17 is dissolved and removed by development, and the cavity 15 is formed in the photoresist 16 as shown in FIG. It is formed. Finally, the photoresist 16 is post-baked to form an insulating layer 14 having a predetermined thickness on the upper surface of the conductive substrate 13 by the photoresist 16. The matrix 11 obtained in this way is shown in FIG.
- the mother die 11 is placed in the electrolytic cell 19, and a voltage is applied between the mother die 11 and the counter electrode 21 by the DC power source 20 to supply a current to the electrolyte ⁇ . Shed.
- metal ions in the electrolytic solution ⁇ are electrodeposited on the surface of the conductive base material 13 and the metal layer 18 is deposited.
- the insulating layer 14 cuts off the current, even if a voltage is applied between the mother die 11 and the counter electrode 21, no metal is directly electrodeposited on the insulating layer 14. Therefore, as shown in FIG. 2G, the metal layer 18 grows in the cavity 15 from the bottom surface in the voltage application direction.
- the thickness of the electrodeposited metal layer 18 is the accumulated current amount of current (that is, the accumulated time amount of the energized current, and is the area of the shaded area in FIG. 4B). It is managed by. This is because the amount of metal deposited per unit time is proportional to the current value, so that the volume of the metal layer 18 is determined by the accumulated current amount of current, and the thickness of the metal layer 18 can be known from the accumulated current amount of current.
- the current flowing between the counter electrode 21 and the mother die 11 is also As shown in FIG.4 (b), it increases gradually and in steps with the elapsed time from an energization start. Then, when it is detected that the metal layer 18 has reached the target thickness by monitoring the integrated energization amount of the energization current, the DC power source 20 is turned off to stop energization. As a result, as shown in FIG. 2 (h), the metal molded product 12 is molded in the cavity 15 by the metal layer 18 having a desired thickness.
- the height is 1 / 2.85 times the width of the cavity 15 or more.
- the metal layer 18 is grown so as to leave a space having a thickness (hereinafter referred to as a head space).
- the width of the cavity 15 is 200 ⁇ m or more and less than 300 ⁇ m, the metal layer 18 is grown so as to leave a head space having a height of 1 / 3.75 times or more of the width of the cavity 15.
- the metal layer 18 is grown so as to leave a head space having a height of 1/4 times or more the width of the cavity 15.
- the width of the cavity 15 is less than 100 ⁇ m, the metal layer 18 is grown so as to leave a head space having a height of 1/10 times or more the width of the recess.
- the metal layer The height H of the head space left above 18 is If 300 ⁇ m ⁇ W, H ⁇ W / 2.85 If 200 ⁇ m ⁇ W ⁇ 300 ⁇ m, H ⁇ W / 3.75 If 100 ⁇ m ⁇ W ⁇ 200 ⁇ m, H ⁇ W / 4 If W ⁇ 100 ⁇ m, H ⁇ W / 10
- the growth of the metal layer 18 is stopped so as to satisfy the above condition.
- the insulating layer 14 is peeled off by etching or the like as shown in FIG. 2 (i), and the metal molded product 12 is further removed from the conductive substrate 13 as shown in FIG. 2 (j). To obtain a metal molded product 12 in which the shape of the mother die 11 is transferred in reverse.
- the thick insulating layer 14 is formed so as to overlap the upper surface of the conductive substrate 13 as described above, and the cavity 15 is formed in the mother die 11 by opening the insulating layer 14. Therefore, it is possible to precisely manufacture the fine cavity 15 using a photolithography technique or the like, and therefore it is possible to manufacture a fine and precise metal molded product 12 by electroforming.
- the growth of the metal layer 18 is stopped so as to leave a head space having a predetermined height above the cavity 15 as described above.
- the distance H between the upper surface opening of the cavity 15 can be maintained, and among the metal ions flowing into the cavity 15 and precipitated, metal ions flowing obliquely into the cavity 15 at the periphery of the upper surface opening of the cavity 15 are
- the metal layer 18 is uniformly grown by passing a uniform current over the entire upper surface of the metal layer 18.
- the metal molded product 12 in which the metal layer 18 is grown has a surface facing the counter electrode on the side opposite to the conductive base material 13 having a certain distance from the upper surface of the conductive base material 13. 15 according to the shape.
- the head space height H left on the metal molded product 12 is If 300 ⁇ m ⁇ W, H ⁇ W / 2.85 If 200 ⁇ m ⁇ W ⁇ 300 ⁇ m, H ⁇ W / 3.75 If 100 ⁇ m ⁇ W ⁇ 200 ⁇ m, H ⁇ W / 4 If W ⁇ 100 ⁇ m, H ⁇ W / 10 (Hereinafter, these conditions are referred to as growth stop conditions).
- the metal molded product 12 may have a plate shape such as a circular plate shape or a rectangular plate shape, or may have a shape that is long in one direction (for example, see FIG. 20), and is particularly manufactured according to the present invention.
- the shape of the metal molded product 12. Therefore, when the plate-shaped metal molded product 12 is produced, the above growth stop condition may be satisfied in the cross section in the narrowest direction of the cross section.
- the electrodeposition process may be managed so that the growth stop condition is satisfied in the cross section in the width direction (short direction).
- a metal molded product 12 having a shape elongated in one direction will be described as an example.
- FIG. 5A is a plan view showing the shape of the sample 22 used for determining the relationship between the width W of the cavity 15 and the height H of the head space.
- FIG. 5B is a cross-sectional view of a portion A in FIG.
- thin wire portions 24 (length: 4.5 mm) are arranged at regular intervals between strip-shaped hoop portions 23a, 23b, and 23c, and the thickness is set to 20 ⁇ m to 300 ⁇ m.
- the thin line portion 24 is long in one direction and has a three-dimensional shape like the molded product shown in FIG.
- the sample 22 is obtained by electrodepositing a metal in the cavity 15 using the mother die 11 having the cavity 15 in the inverted shape of the sample 22.
- samples in which the width W of the cavity 15 (width in the short direction), the height H of the head space, the width L of the insulating layer 14 and the like are changed are manufactured, and the region indicated by the broken line in FIG.
- the sample was cut for analysis, and the thickness of the thin line portion 24 was checked for uniformity.
- the width W of the cavity 15 is determined. It was found that no variation in thickness occurred in the thin line portion 24 regardless of (that is, the width of the thin line portion 24). Further, as the width W of the cavity 15 becomes smaller, the variation in the thickness of the thin line portion 24 becomes smaller. (These can be seen from FIG. 6.)
- the height H of the head space left on the metal layer 18 is changed, and metal is electrodeposited into the cavity 15 to produce various samples 22.
- variation in is measured.
- the mother die 11 those having a cavity width W of 100 ⁇ m, 200 ⁇ m, 300 ⁇ m, and 400 ⁇ m were used.
- the thickness variation of the thin wire portion 24 (metal molded product) is expressed by T2 / T1, where T1 is the thickness of the thinnest portion along the width direction of the thin wire portion 24 and T2 is the thickness of the thickest portion. It is.
- the thickness variation of the metal molded product by electroforming is desired to be 1% or less due to the recent refinement of parts. Therefore, in FIG. 6, when the condition for the thickness variation of the thin line portion 24 to be 1.01 or less is determined, when the cavity width W is 400 ⁇ m, the head space height H needs to be 140 ⁇ m or more. When the cavity width W is 300 ⁇ m, the head space height H needs to be 80 ⁇ m or more, and when the cavity width W is 200 ⁇ m, the head space height H needs to be 50 ⁇ m or more. When W is 100 ⁇ m, the head space height H needs to be 10 ⁇ m or more.
- FIG. 7 shows the cavity width W on the horizontal axis and the H / W ratio on the vertical axis.
- the headspace height H remaining on the metal layer 18 is changed, and metal is electrodeposited into the cavity 15 to produce various samples 22.
- variation in is measured.
- the mother die 11 one having a cavity width W of 300 ⁇ m was used, and the width L of the insulating layer 14 was changed to 100 ⁇ m, 200 ⁇ m, and 300 ⁇ m.
- the thickness variation of the thin line portion 24 will be the cavity width. There is almost no change from the case where W is 300 ⁇ m. That is, as in the case where the cavity width W is 300 ⁇ m, if the ratio H / W ⁇ 1, no variation in thickness occurs in the fine line portion 24, and the smaller the cavity width W, the smaller the variation in thickness of the fine line portion 24. .
- the insulating layer 14 can be formed so as to overlap the upper surface of the conductive substrate 13, the insulating layer 14 can be formed to a uniform thickness by a spray coater or a spin coater (preferably a spray coater). Since the sharply shaped cavity 15 can be formed, it is possible to produce a sharply shaped metal molded product 12.
- the insulating layer 14 can be formed with a uniform thickness even when the upper surface of the conductive substrate 13 is uneven as in the embodiment described later. This point will be described in comparison with a comparative example.
- FIG. 9 is a cross-sectional view showing a comparative example.
- the mother die 101 of this comparative example is one in which a cavity 105 is directly formed in a metal conductive base material 103 and an insulating coating 104 is formed on the surface of the conductive base material 103 except for the bottom surface of the cavity 105. .
- the mother mold 101 is placed in the electrolytic cell, and metal ions are electrodeposited on the bottom surface of the cavity 105 to grow the metal molded product 12.
- FIGS. 10A to 10D are views for explaining a method of forming the insulating film 104 using an electrodeposition resist.
- the conductive base material 103 on which the cavity 105 is formed is opposed to the counter electrode 106 in the electrodeposition resist solution ⁇ in the electrolytic bath 107. Placed in.
- the photosensitive agent 110 which is a component in the electrodeposition resist solution ⁇ , reacts with oxygen ions on the surface of the conductive base material 103 to react with the surface of the conductive base material 103. Solidify with.
- the surface of the conductive base material 103 is covered with the solidified product of the granular photosensitizer 110.
- the conductive substrate 103 is taken out from the electrolytic cell 107 and then pre-baked as shown in FIG.
- prebaking is performed at a temperature of about 80 ° C. to 100 ° C.
- the solvent of the photosensitive agent 110 volatilizes, and at the same time, the photosensitive agent 110 flows to fill a defective portion such as a hole in the photosensitive agent 110.
- FIG. 10 (d) when post-baking at a temperature of about 120 ° C. to 140 ° C. to promote the thermal polymerization reaction of the photosensitive agent 110, the photosensitive agent 110 further flows to form a smooth coating,
- the photosensitive agent 110 is baked and hardened on the surface of the conductive substrate 103 to form the insulating coating 104.
- the insulating coating 104 is removed from the bottom surface of the cavity 105 to expose the conductive base material 103, thereby forming the mother die 101.
- the insulating coating 104 is formed by the electrodeposition resist as described above, the post-baked photosensitive agent 110 flows, and as a result, as shown in FIG. In the (corner portion), the conductive substrate 103 becomes thin, and in the inner edge portion (inner corner portion) in the cavity 105, the conductive substrate 103 tends to be thick. As a result, in the cavity covered with the insulating coating 104 compared to the cavity 105 (cavity before forming the insulating coating) formed by the conductive base material 103, the inner edge portion and the outer edge portion are rounded in the cross section in the short direction. It was difficult to obtain a metal molded product 12 having a sharp shape.
- FIG. 11 is a plan view of a photomicrograph of a metal molded article 12 produced using the mother die 101 produced as described above, and a part thereof is enlarged and shown.
- the inner edge portion and the outer edge portion are rounded in the cross section in the short direction, but in reality, the corner (side) of the three-dimensional cavity 105 is rounded. Even when viewed in a plane, the inner edge portion of the cavity 105 is rounded. Therefore, the metal molded product 12 molded in the cavity 105 is also rounded in a plan view as shown in FIG. As can be seen from FIG.
- the inner edge portion and the outer edge portion of the cavity 105 are rounded by the insulating coating 104, so that the conductive base material 103 is sharpened. Even if the cavity 105 having a simple shape is formed, it is difficult to transfer a sharp shape to the metal molded product 12, and the corners and corners are particularly rounded.
- FIG. 12 is a view showing a cross-sectional photograph of the insulating layer 14 formed on the conductive substrate 13 using a spray coater and a photolithography technique.
- the upper surface of the insulating layer 14 and the inside of the cavity 15 are hardened with a resin 111 in order to prevent the shape of the insulating layer 14 from collapsing when the mother die 11 is cut.
- a sharply shaped cavity 15 as shown in FIG. 12 can be formed.
- a sharply shaped metal molded product is obtained. 12 can be produced.
- the minimum height of the head space to be left above the metal layer 18 according to the width of the cavity 15 that is, the maximum value of the thickness of the metal layer relative to the thickness of the insulating layer. Therefore, the metal molded product can be efficiently molded with the minimum necessary insulating layer thickness (that is, a member-saving) determined by the width of the recess and the thickness of the metal molded product to be molded.
- the thickness of the insulating film 14 can be reduced, the edge shape of the insulating layer 14 can be easily improved in the photolithography process, and the electroforming accuracy of the metal molded product 12 is accordingly increased. Moreover, when the thickness of the insulating layer 14 can be reduced, the photoresist film formation time and the peeling time are shortened, and the production efficiency of the metal molded product 12 is improved. As a result, high quality and low cost of the metal molded product 12 can be achieved.
- FIG. 13A is a sectional view showing a mother die 31 according to Embodiment 2 of the present invention.
- a recess 32 having a desired shape is formed on the upper surface of the conductive substrate 13 in the cavity 15, and the recess 32 constitutes a part of the cavity 15. Therefore, by electrodepositing a metal in the cavity 15, it is possible to mold a metal molded product 12 having a higher degree of shape.
- the dent 32 is formed in a part of the bottom surface of the cavity 15, but the dent is formed in the entire bottom surface of the cavity 15 as in another embodiment shown in FIG. 32 may be formed.
- the depression 32 is formed on the upper surface of the conductive base material 13 over a wider range than the bottom surface of the cavity 15, and a part of the depression 32 is filled with the insulating layer 14. Yes.
- the head space height H is measured from the highest position of the metal molded product 12. .
- the head space height H measures the height to the top surface of the lowest portion of the insulating layer 14.
- the head space height H is a vertical distance from the highest position of the metal molded product 12 to the upper surface of the lowest portion of the insulating layer 14.
- the thickness variation is The thickness in the normal direction perpendicular to the inclined surface is evaluated.
- FIG. 15 is a cross-sectional view along the longitudinal direction of the mother die 41 and the metal molded product 12 according to the third embodiment of the present invention.
- the bottom surface shape of the cavity 15 will be described by taking the longitudinal direction as an example, but the same can be said for the bottom surface in the short side direction, and the case where both the long side and the short side are oblique also holds.
- electrodeposition is performed within the range described in the first embodiment in the short direction.
- electrodeposition is performed under the conditions described in the first embodiment, but in the longitudinal direction, electroforming is performed in accordance with the conditions described in the first embodiment.
- the cavity 15 formed in the mother die 41 has a different depth at the bottom surface, and each of the plane portions 42a, 42b, 42c facing the counter electrode (perpendicular to the voltage application direction), and each plane portion 42a, 42b and 42c are connected, and it consists of inclined surface parts 43a and 43b which incline with respect to a surface perpendicular to the voltage application direction.
- the metal layer 18 is equal in thickness to the flat surface portions 42a, 42b and 42c and the inclined surface portions 43a and 43b (the distance from the bottom surface becomes constant). Laminated and electrodeposited.
- the metal layer 18 has substantially the same thickness (the distance from the bottom surface of the cavity 15) at the corner portion formed by the flat surface portion 42a and the inclined surface portion 43a and the corner portion formed by the flat surface portion 42b and the inclined surface portion 43b. Is deposited and electrodeposited.
- the arrows shown in FIG. 15 are vectors indicating the growth direction of the metal layer 18.
- FIG. 15 shows a cross section in the longitudinal direction. However, if it is assumed that this is a cross section in the short direction, the thickness of the metal layer 18 at the inclined surface portion should be taken into account when calculating the thickness variation.
- the thickness of the metal layer 18 on each surface with the bottom surface being horizontal is measured, and the thickness T1 of the thinnest portion with respect to the thickness T1 of the thinnest portion is defined as the thickness variation T2 / T1.
- the bottom surface of the cavity 15 is a horizontal surface as in the first embodiment, or when the bottom surface of the cavity 15 is an inclined surface as in the second embodiment, the horizontal surface or the inclined surface
- the thickness in the normal direction is evaluated, when the horizontal plane and the inclined plane are mixed, the thickness is evaluated only by the thickness in the horizontal plane.
- FIG. 16 shows the result of measuring the thickness variation of the metal layer 18 by changing the inclination angle ⁇ of the inclined surface portions 43a and 43b (angle formed between the surfaces perpendicular to the voltage application direction).
- the inclination angle ⁇ of the inclined surface portions 43a and 43b is 60 ° or less, the thickness variation of the metal layer 18 is 1% or less, and there is no problem at all.
- the inclination angle ⁇ of the inclined surface parts 43a and 43b exceeds 60 °, the thickness variation of the metal layer 18 occurs.
- the variation in thickness of the metal layer 18 tends to be larger in the upper plane portion 42a and the lower plane portion 42c than in the middle plane portion 42b.
- FIG. 17 is a diagram showing how the metal layer 18 grows when a recess 32 having an inclined surface with an inclination angle of 60 ° or more is provided on the upper surface of the conductive substrate 13.
- the inclination angle exceeds 60 °, the current becomes non-uniform and it becomes difficult to control the thickness of the metal layer 18.
- FIG. 17 is a diagram showing how the metal layer 18 grows when a recess 32 having an inclined surface with an inclination angle of 60 ° or more is provided on the upper surface of the conductive substrate 13.
- the metal layer 18 has an inflection point at the inflection point as shown by an arrow in FIG. Since it grows so as to have a uniform thickness as the center, the inflection point portion on the upper surface of the metal layer 18 corresponding to the inflection point portion of the conductive substrate 13 becomes gently rounded.
- the upper surface of the metal layer 18 is bent in the same manner as the upper surface of the conductive base material 13. Rounded and rounded.
- the design of the metal molded product 12 is made constant by providing a change in depth on the bottom surface so that the inclination angle ⁇ of the inclined surface portions 43a and 43b is approximately 60 ° or less. It can also be bent in the voltage application direction while maintaining. In other words, the bottom surface of the cavity 15 does not necessarily face the counter electrode.
- the insulating layer 14 Since the height of the insulating layer 14 does not have to be uniform, as shown in FIG. 19, the insulating layer 14 has a lower height in the longitudinal direction than the highest position on the upper surface of the metal layer 18. It does not matter. However, even in the case as shown in FIG. 19, the condition as in the first embodiment is satisfied for the insulating layer 14 when viewed in the cross section in the short direction with respect to the metal molded product 12.
- FIG. 20 shows the shape of a contact member for an electronic component formed according to the present invention.
- a metal part having such a shape can be formed only by electroforming without requiring any finishing process.
- FIG. 21 shows the cavity 15 of the mother die 51 and the growth process of the metal layer 18 according to the fourth embodiment of the present invention.
- the arrows in FIG. 21 are vectors indicating the growth direction and growth amount of the metal layer 18.
- a stepped portion 52 is formed in the middle of the side wall surface of the cavity 15, so that the sectional area of the cavity 15 is enlarged from the middle, and the opening area of the cavity 15 is made larger than the bottom surface.
- the insulating layer 14 extends so as to cover a part of the peripheral edge on the bottom surface of the cavity 15. An extending portion of the insulating layer 14 on the bottom surface is indicated by an insulating layer 14a.
- metal is electrodeposited on a region of the bottom surface of the cavity 15 that is not covered with the insulating layer 14 a, thereby forming a metal layer 18.
- the metal layer 18 grows so that the distance from the portion of the bottom surface not covered with the insulating layer 14a becomes constant and covers the insulating layer 14a.
- the metal layer 18 when the metal layer 18 is grown by passing an electric current, the metal layer 18 protrudes and grows on the stepped portion 52. At this time, the metal layer 18 grows so that the distance from the edge of the stepped portion 52 is constant in a portion that is behind the stepped portion 52 when viewed from the bottom surface that is not covered with the insulating layer 14a.
- the metal molded product 12 is cast into a shape projecting above the stepped portion 52. Further, by covering the peripheral edge of the bottom surface of the cavity 15 with the insulating layer 14a, the metal molded product 12 can be chamfered at the upper portion thereof. That is, by using this modification, it is possible to form a metal part in which a rounded chamfer is added to the surface of the shape obtained by reversing and transferring the shape of the mother die 11.
- FIG. 22 is a cross-sectional view showing another example in which an insulating layer 14 a is provided on the bottom surface of the cavity 15.
- This matrix 61 has this.
- the insulating layer 14 extends along both sides or the outer peripheral edge of the bottom surface of the cavity 15 so as to cover a part of the bottom surface, thereby forming the bottom insulating layer 14a.
- the metal layer 18 grows so that the distance from the portion of the bottom surface not covered with the insulating layer 14a is constant and overlies the insulating layer 14a. By doing so, the outer peripheral part of the upper surface of the metal molded product 12 is formed in a curved shape.
- the variation in the thickness of the metal layer 18 is caused by the conductive Evaluation is made in a region where the thickness in the vertical direction of the metal layer 18 on the region where the conductive substrate 13 is exposed is substantially uniform.
- FIG. 23 (a) shows a case in which a mother die 71 having insulating layers 14 tapered on both side surfaces so that the width is narrowed upward is used.
- a matrix 72 shown in FIG. 23B has a depression 32 on the upper surface of the conductive base material 13, the insulating layer 14 on one side wall surface is outside the depression 32, and the other insulating layer 14 has the depression 32. It has entered inside.
- the insulating layer 14 has a two-layer structure of insulating layers 91a and 91b, and an insulating layer 91b having a wide opening width is overlaid on an insulating layer 91a having a small opening width.
- a matrix 74 shown in FIG. 24B has a two-layered insulating layer 14 in which an insulating layer 91b having a wider opening width is stacked on an insulating layer 91a having a tapered cross section that is narrowed upward. Is.
- a mother die 75 shown in FIG. 24C has a V-shaped groove 32 formed on the bottom surface of the cavity 15, and an insulating layer 91b having a wide opening width is stacked on the insulating layer 91a having a small opening width.
- 14 has a two-layer structure.
- a matrix 76 shown in FIG. 24D is based on the matrix 72 in FIG. 23B, and the insulating layer 14 is divided into two layers, an insulating layer 91a having a narrow opening width and an insulating layer 91b having a wide opening width. It is a configuration.
- a matrix 77 shown in FIG. 25A uses a conductive base material 13 in which the surface of a core material 92a made of a nonconductive material (insulating material) is covered with a conductive coating portion 92b made of a conductive material. .
- 25 (b) to (d) also have a conductive substrate 13 in which the surface of a core material 92a made of a nonconductive material (insulating material) is covered with a conductive coat portion 92b made of a conductive material. Furthermore, the tapered insulating layer 14 is used in the base material 78 of FIG. 25B, and the conductive material having the depression 32 is used in the bases 79 and 80 of FIGS. 25C and 25D. The base material 13 is used.
- the insulating layer 14 has a two-layer structure of insulating layers 91a and 91b, and insulation having a wide opening width is formed on the insulating layer 91a having a small opening width.
- the layer 91b is stacked, and the conductive base material 13 is used in which the surface of a core material 92a made of a nonconductive material (insulating material) is covered with a conductive coating portion 92b made of a conductive material.
- a mother die 85 shown in FIG. 27A has a recess 32 formed on the upper surface of the conductive substrate 13, and the insulating layer 14 is formed so as to enter a part of the recess 32, and an insulating layer is formed on the bottom surface of the cavity 15. 14a is extended.
- the mother die 86 of FIG. 27B further has the insulating layer 14 having a two-layer structure of insulating layers 91a and 91b.
- 28 (a) and 28 (b) further include a conductive group in which the surface of a core material 92a made of a nonconductive material (insulating material) is covered with a conductive coat portion 92b made of a conductive material. The material 13 is used.
- the headspace height H and cavity width W are defined as follows. Is done.
- the head space height is the height of the upper surface opening of the cavity 15 from the highest position of the produced metal molded article 12 (that is, the height at which the upper surface of the insulating layer 14 is positioned). Vertical plane).
- the cavity width W is the width of the cavity 15 at a height at which the upper surface of the metal molded product 12 is located.
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Abstract
Description
図1は、本発明の実施形態1による電気鋳造方法(以下、電鋳法という。)を説明するための断面図であって、母型11とその母型11を用いて電気鋳造された金属成型品12を示す。
300μm≦W なら、 H≧W/2.85
200μm≦W<300μm なら、 H≧W/3.75
100μm≦W<200μm なら、 H≧W/4
W<100μm なら、 H≧W/10
を満たすように、金属層18の成長を停止させる。
また、本発明の電鋳方法では、上記のようにキャビティ15の上部に所定の高さのヘッドスペースを残すようにして金属層18の成長を停止しているので、金属層18の上面とキャビティ15の上面開口との間にある距離Hを保つことができ、キャビティ15内に流れ込んで析出する金属イオンのうち、キャビティ15の上面開口周縁部でキャビティ15内へ斜めに流れ込む金属イオンをキャビティ15の上面開口の縁の絶縁層14によって遮断し、金属層18の上面全体に均一な電流を流して、金属層18を均一に成長させる。このため、金属層18が成長してなる金属成型品12は、導電性基材13と反対側の対向電極に対向する面が、導電性基材13の上面から一定の距離を有し、キャビティ15に倣った形状となる。
300μm≦W なら、 H≧W/2.85
200μm≦W<300μm なら、 H≧W/3.75
100μm≦W<200μm なら、 H≧W/4
W<100μm なら、 H≧W/10
と定めた根拠を説明する(以下、これらの条件を成長停止条件と呼ぶ。)。
H/W≧140/400=1/2.85
とする必要がある。また、キャビティ幅Wが200μm以上300μm未満の場合には、キャビティ幅Wに対するヘッドスペース高さHの比を
H/W≧80/300=1/3.75
とする必要がある。また、キャビティ幅Wが100μm以上200μm未満の場合には、キャビティ幅Wに対するヘッドスペース高さHの比を
H/W≧50/200=1/4
とする必要がある。また、キャビティ幅Wが100μm未満の場合には、キャビティ幅Wに対するヘッドスペース高さHの比を
H/W≧10/100=1/10
とする必要がある。
300μm≦W のとき、 H/W≧1/2.85
200μm≦W<300μm のとき、 H/W≧1/3.75
100μm≦W<200μm のとき、 H/W≧1/4
W<100μm のとき、 H/W≧1/10
であれば、細線部24の厚みばらつきを1%程度に小さくできる。特に、極端に絶縁層幅Lが大きくなったとしても、ヘッドスペース高さHとキャビティ幅Wの比H/Wが1/2.85以上であれば、細線部24の厚みばらつきを小さくできる。
本発明では、導電性基材13の上面に重ねるように絶縁層14を形成しているので、スプレーコーターやスピンコーター(好ましくは、スプレーコーター)によって絶縁層14を均一な厚みに形成でき、またシャープな形状のキャビティ15を形成することができるため、シャープな形状の金属成型品12を作製することが可能になる。特に、スプレーコーターによれば、後述の実施形態のように導電性基材13の上面に凹凸がある場合にも、均一な厚みに絶縁層14を形成することができる。この点を比較例と対比しながら説明する。
また、本発明の電気鋳造方法にあっては、キャビティ15の幅に応じて金属層18の上部に残すべきヘッドスペースの最小高さ(つまり、絶縁層のある厚みに対する金属層の厚みの最大値)を定めているので、凹部の幅と成型したい金属成形品の厚みによって決まる必要最小量の絶縁層厚み(つまり省部材)で効率良く金属成型品を成型することができる。
図13(a)は本発明の実施形態2による母型31を示す断面図である。この母型31では、キャビティ15内において導電性基材13の上面に所望の形状の窪み32を形成してあり、この窪み32がキャビティ15の一部を構成している。よって、このキャビティ15内に金属を電着させることにより、より高度な形状の金属成型品12を成型することができる。
図15は本発明の実施形態3による母型41と金属成型品12の長手方向に沿った断面図である。本実施形態では、キャビティ15の底面形状について、長手方向を例にして説明をするが、これは短手方向の底面でも同様のことが言え、長手および短手が両方とも斜めの場合も成立する。ただし、どの場合においても、あくまで短手方向は実施形態1で述べた範囲内で電着を行っている。本実施形態においては、短手方向の断面においては、実施形態1において説明したような条件で電着を行っているが、さらに長手方向においても実施形態1で述べたような条件に従って電鋳を行うことにより、実施形態1のように上段の平面部42aと下段の平面部42cで比較した場合、1%以内の厚みばらつきに入らないまでもかなりの高精度に厚みばらつきを小さくすることができる。この母型41に形成されたキャビティ15は、その底面の深さが異なり、それぞれ対向電極に正対(電圧印加方向に垂直)する3つの平面部42a,42b,42cと、各平面部42a,42b,42cを接続し、電圧印加方向に垂直な面に対して傾斜する傾斜面部43a,43bとからなる。
図21は、本発明の実施形態4による母型51のキャビティ15と、金属層18の成長過程とを示す。図21における矢印は、金属層18の成長する方向と成長量を示すベクトルである。このキャビティ15は、キャビティ15の側壁面の中程に、段差部52を形成することで、キャビティ15の断面積を途中から拡大して、キャビティ15の開口面積を底面よりも大きくしている。また、絶縁層14がキャビティ15の底面上の周縁部の一部を覆うように延伸している。底面における絶縁層14の延伸部分を絶縁層14aで示す。
以下においては、種々の形状の母型71~88を示す。
12 金属成型品
13 導電性基材
14、14a 絶縁層
15 キャビティ
18 金属層
19 電解槽
21 対向電極
32 窪み
42a,42b,42c 平面部
43a,43b 傾斜面部
52 段差部
Claims (9)
- 導電性基材の上面に重ねて絶縁層を形成し、前記絶縁層に凹部を設けると共に前記凹部の底面の少なくとも一部で前記導電性基材を露出させて母型を形成する母型形成工程と、
前記母型を電解槽内に配置して電圧を印加し、前記凹部内における前記導電性基材の露出面に金属を電着する電着工程とを備えた電気鋳造方法であって、
前記電着工程において、前記凹部の幅が300μm以上の場合に、前記凹部の幅の1/2.85倍以上の高さを有する空間を残すようにして前記凹部内に金属層を成長させることを特徴とする電気鋳造方法。 - 導電性基材の上面に重ねて絶縁層を形成し、前記絶縁層に凹部を設けると共に前記凹部の底面の少なくとも一部で前記導電性基材を露出させて母型を形成する母型形成工程と、
前記母型を電解槽内に配置して電圧を印加し、前記凹部内における前記導電性基材の露出面に金属を電着する電着工程とを備えた電気鋳造方法であって、
前記電着工程において、前記凹部の幅が200μm以上300μm未満の場合に、前記凹部の幅の1/3.75倍以上の高さを有する空間を残すようにして前記凹部内に金属層を成長させることを特徴とする電気鋳造方法。 - 導電性基材の上面に重ねて絶縁層を形成し、前記絶縁層に凹部を設けると共に前記凹部の底面の少なくとも一部で前記導電性基材を露出させて母型を形成する母型形成工程と、
前記母型を電解槽内に配置して電圧を印加し、前記凹部内における前記導電性基材の露出面に金属を電着する電着工程とを備えた電気鋳造方法であって、
前記電着工程において、前記凹部の幅が100μm以上200μm未満の場合に、前記凹部の幅の1/4倍以上の高さを有する空間を残すようにして前記凹部内に金属層を成長させることを特徴とする電気鋳造方法。 - 導電性基材の上面に重ねて絶縁層を形成し、前記絶縁層に凹部を設けると共に前記凹部の底面の少なくとも一部で前記導電性基材を露出させて母型を形成する母型形成工程と、
前記母型を電解槽内に配置して電圧を印加し、前記凹部内における前記導電性基材の露出面に金属を電着する電着工程とを備えた電気鋳造方法であって、
前記電着工程において、前記凹部の幅が100μm未満の場合に、前記凹部の幅の1/10倍以上の高さを有する空間を残すようにして前記凹部内に金属層を成長させることを特徴とする電気鋳造方法。 - 前記母型形成工程において、前記凹部の底面の周縁部の少なくとも一部分に前記絶縁層を形成することを特徴とする、請求項1から4のいずれか1項に記載の電気鋳造方法。
- 前記凹部の底面に重なる領域で、前記導電性基材の上面に窪みを形成していることを特徴とする、請求項1から4のいずれか1項に記載の電気鋳造方法。
- 前記凹部の底面に露出している前記導電性基材の表面は、電圧印加方向に垂直な面に対する傾斜角度が60°以下となる面を主として構成された集合であることを特徴とする、請求項1から4のいずれか1項に記載の電気鋳造方法。
- 前記母型形成工程において、前記凹部の側壁面に前記凹部の開口面積を拡大する段差部を形成したことを特徴とする、請求項1から4のいずれか1項に記載の電気鋳造方法。
- 前記電着工程において、前記電解槽内に流れた電流の積算通電量が所定値に達したときに前記電圧を停止することを特徴とする、請求項1から4のいずれか1項に記載の電気鋳造方法。
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JP6529516B2 (ja) * | 2014-12-12 | 2019-06-12 | シチズン時計株式会社 | 電鋳部品の製造方法 |
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EP3168057A1 (fr) * | 2015-11-11 | 2017-05-17 | Nivarox-FAR S.A. | Procede de fabrication d'une piece metallique avec au moins un motif a illusion d'optique |
US10213144B2 (en) | 2016-01-25 | 2019-02-26 | International Business Machines Corporation | Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity |
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JP6936955B2 (ja) * | 2016-09-30 | 2021-09-22 | 日立金属株式会社 | 金属箔製造用陰極ドラムおよび金属箔の製造方法 |
US10161898B2 (en) * | 2017-01-30 | 2018-12-25 | International Business Machines Corporation | Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity |
US10548530B2 (en) | 2017-03-01 | 2020-02-04 | International Business Machines Corporation | Biosensor calibration structure containing different sensing surface area |
WO2018208074A1 (ko) * | 2017-05-10 | 2018-11-15 | 성낙훈 | 수직성장 전주가공물과 그 제작 방법 |
CN107447243B (zh) * | 2017-06-19 | 2023-07-14 | 中南大学 | 一种用于金属微弧氧化单向表面改性的装置 |
KR102558919B1 (ko) | 2021-05-28 | 2023-07-24 | 주식회사 이랜텍 | 전주도금을 이용한 캐패시터형 센서 제조방법 |
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EP2336393B1 (en) | 2019-02-20 |
EP2336393A4 (en) | 2016-01-27 |
EP2336393A1 (en) | 2011-06-22 |
CN102149855B (zh) | 2012-10-03 |
US9085828B2 (en) | 2015-07-21 |
TWI428475B (zh) | 2014-03-01 |
JP5470791B2 (ja) | 2014-04-16 |
KR101254888B1 (ko) | 2013-04-15 |
US20110233063A1 (en) | 2011-09-29 |
JP2010084158A (ja) | 2010-04-15 |
CN102149855A (zh) | 2011-08-10 |
TW201022479A (en) | 2010-06-16 |
KR20110039489A (ko) | 2011-04-18 |
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