WO2009063903A1 - マスクケース、搬送装置、露光装置、マスク搬送方法及びデバイス製造方法 - Google Patents

マスクケース、搬送装置、露光装置、マスク搬送方法及びデバイス製造方法 Download PDF

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Publication number
WO2009063903A1
WO2009063903A1 PCT/JP2008/070585 JP2008070585W WO2009063903A1 WO 2009063903 A1 WO2009063903 A1 WO 2009063903A1 JP 2008070585 W JP2008070585 W JP 2008070585W WO 2009063903 A1 WO2009063903 A1 WO 2009063903A1
Authority
WO
WIPO (PCT)
Prior art keywords
mask
transfer
case
device manufacturing
exposure apparatus
Prior art date
Application number
PCT/JP2008/070585
Other languages
English (en)
French (fr)
Inventor
Mikihito Mukai
Bungo Suita
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to CN200880108833.2A priority Critical patent/CN101809709B/zh
Priority to KR1020107004397A priority patent/KR101699983B1/ko
Priority to JP2009541152A priority patent/JP5316420B2/ja
Publication of WO2009063903A1 publication Critical patent/WO2009063903A1/ja
Priority to US12/780,691 priority patent/US20100220304A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Library & Information Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

マスクが収納されるマスクケースＣは、このマスクケースＣが載置される外部装置としての搬送車Ｖおよび搬送装置Ｈ１との接触部に、マスクの荷重に対応する強度を有した補強部材を備え、マスクを搬送する搬送車Ｖおよび搬送装置Ｈ１は、マスクが収納されたマスクケースＣの補強部材を支持すると共に、この補強部材との間に生じる摩擦を抑制するケース支持部としての複数のボールトランスファ４３，５２をそれぞれ備える。
PCT/JP2008/070585 2007-11-15 2008-11-12 マスクケース、搬送装置、露光装置、マスク搬送方法及びデバイス製造方法 WO2009063903A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN200880108833.2A CN101809709B (zh) 2007-11-15 2008-11-12 掩模盒、搬送装置、曝光装置、掩模搬送方法及器件制造方法
KR1020107004397A KR101699983B1 (ko) 2007-11-15 2008-11-12 마스크 케이스, 반송 장치, 노광 장치, 마스크 반송 방법 및 디바이스 제조 방법
JP2009541152A JP5316420B2 (ja) 2007-11-15 2008-11-12 マスクケース、搬送装置、搬送方法、露光装置及びデバイス製造方法
US12/780,691 US20100220304A1 (en) 2007-11-15 2010-05-14 Mask case, transport apparatus, exposure apparatus, mask transport method, and device production method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-296640 2007-11-15
JP2007296640 2007-11-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/780,691 Continuation US20100220304A1 (en) 2007-11-15 2010-05-14 Mask case, transport apparatus, exposure apparatus, mask transport method, and device production method

Publications (1)

Publication Number Publication Date
WO2009063903A1 true WO2009063903A1 (ja) 2009-05-22

Family

ID=40638752

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070585 WO2009063903A1 (ja) 2007-11-15 2008-11-12 マスクケース、搬送装置、露光装置、マスク搬送方法及びデバイス製造方法

Country Status (6)

Country Link
US (1) US20100220304A1 (ja)
JP (3) JP5316420B2 (ja)
KR (1) KR101699983B1 (ja)
CN (2) CN101809709B (ja)
TW (1) TWI522292B (ja)
WO (1) WO2009063903A1 (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417984B (zh) 2009-12-10 2013-12-01 Orbotech Lt Solar Llc 自動排序之多方向性直線型處理裝置
US8459276B2 (en) 2011-05-24 2013-06-11 Orbotech LT Solar, LLC. Broken wafer recovery system
US20130038852A1 (en) * 2011-08-09 2013-02-14 United Microelectronics Corporation Reticle removing apparatus and reticle removing method using the same
TWI604550B (zh) * 2012-04-13 2017-11-01 尼康股份有限公司 匣裝置、基板搬送裝置、基板處理裝置、及基板處理方法
CN104570591A (zh) * 2013-10-29 2015-04-29 中芯国际集成电路制造(上海)有限公司 光罩盒子外壳材料的固定方法
KR102242065B1 (ko) * 2015-01-26 2021-04-19 가부시키가이샤 니콘 마스크 케이스, 보관 장치 및 방법, 반송 장치 및 방법, 그리고 노광 장치
CN107043908B (zh) * 2017-04-24 2019-05-17 昆山国显光电有限公司 搬运装置及搬运装置的控制方法
JP6888529B2 (ja) * 2017-11-27 2021-06-16 株式会社ダイフク 搬送車
CN109852925B (zh) * 2017-11-30 2021-11-12 佳能特机株式会社 蒸镀装置
US20210109439A1 (en) * 2019-10-10 2021-04-15 Entegris, Inc. Reticle pod with window
KR20210081597A (ko) * 2019-12-24 2021-07-02 캐논 톡키 가부시키가이샤 성막 시스템　및 전자 디바이스 제조방법
KR102460392B1 (ko) * 2022-05-31 2022-10-31 주식회사 비엘에스 포토 마스크 보관 및 보호 케이스의 연속 자동화 제조 시스템
KR20240020774A (ko) 2022-08-09 2024-02-16 피승희 Co2레이저를 이용한 심부 온열 조사기

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05190644A (ja) * 1992-01-09 1993-07-30 Nikon Corp プレートキャリアの搬送車
JPH11307610A (ja) * 1998-04-22 1999-11-05 Nikon Corp 基板搬送装置及び露光装置
WO1999060625A1 (fr) * 1998-05-20 1999-11-25 Nikon Corporation Procede et appareil pour le transport de plaquettes, systeme d'exposition, micro dispositif et banque de reticules
JPH11354624A (ja) * 1998-06-09 1999-12-24 Shin Etsu Polymer Co Ltd 基板収納容器
JP2002362737A (ja) * 2001-06-07 2002-12-18 Semiconductor Leading Edge Technologies Inc マスク搬送装置、マスク搬送システム及びマスク搬送方法
JP2005243770A (ja) * 2004-02-25 2005-09-08 Nikon Corp 露光装置
JP2006184414A (ja) * 2004-12-27 2006-07-13 Dainippon Printing Co Ltd 大型フォトマスク用ケース及びケース交換装置
JP2006301142A (ja) * 2005-04-19 2006-11-02 Clean Surface Gijutsu:Kk 基板ケース
JP2006347424A (ja) * 2005-06-17 2006-12-28 Nsk Ltd 搬送台車

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JPH061372B2 (ja) * 1984-05-23 1994-01-05 株式会社ニコン 基板の収納ケース、及び該収納ケースの装着装置
JPS63178974A (ja) * 1987-01-07 1988-07-23 日本電気株式会社 レチクル保護ケ−ス
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JPH1165094A (ja) * 1997-08-22 1999-03-05 Nikon Corp 収納ケース、露光装置及びデバイス製造装置
JP2787097B2 (ja) * 1997-11-17 1998-08-13 株式会社ニコン レチクルケース、レチクルストッカ、及び搬送システム並びに搬送方法
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JP2004119566A (ja) * 2002-09-25 2004-04-15 Toppan Printing Co Ltd マスクケース
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JP2007141925A (ja) * 2005-11-15 2007-06-07 Nikon Corp マスク収容容器、露光装置
TWI417649B (zh) * 2005-12-28 2013-12-01 尼康股份有限公司 十字標記運送裝置、曝光裝置、十字標記運送方法以及十字標記的處理方法
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Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05190644A (ja) * 1992-01-09 1993-07-30 Nikon Corp プレートキャリアの搬送車
JPH11307610A (ja) * 1998-04-22 1999-11-05 Nikon Corp 基板搬送装置及び露光装置
WO1999060625A1 (fr) * 1998-05-20 1999-11-25 Nikon Corporation Procede et appareil pour le transport de plaquettes, systeme d'exposition, micro dispositif et banque de reticules
JPH11354624A (ja) * 1998-06-09 1999-12-24 Shin Etsu Polymer Co Ltd 基板収納容器
JP2002362737A (ja) * 2001-06-07 2002-12-18 Semiconductor Leading Edge Technologies Inc マスク搬送装置、マスク搬送システム及びマスク搬送方法
JP2005243770A (ja) * 2004-02-25 2005-09-08 Nikon Corp 露光装置
JP2006184414A (ja) * 2004-12-27 2006-07-13 Dainippon Printing Co Ltd 大型フォトマスク用ケース及びケース交換装置
JP2006301142A (ja) * 2005-04-19 2006-11-02 Clean Surface Gijutsu:Kk 基板ケース
JP2006347424A (ja) * 2005-06-17 2006-12-28 Nsk Ltd 搬送台車

Also Published As

Publication number Publication date
CN104008987B (zh) 2018-01-30
CN101809709A (zh) 2010-08-18
CN104008987A (zh) 2014-08-27
JPWO2009063903A1 (ja) 2011-03-31
JP5316420B2 (ja) 2013-10-16
JP2013242583A (ja) 2013-12-05
KR20100085901A (ko) 2010-07-29
TWI522292B (zh) 2016-02-21
CN101809709B (zh) 2014-04-30
TW200938458A (en) 2009-09-16
JP2015163967A (ja) 2015-09-10
US20100220304A1 (en) 2010-09-02
KR101699983B1 (ko) 2017-01-26

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