WO2008123144A1 - 磁気センサ及びその感度測定方法 - Google Patents

磁気センサ及びその感度測定方法 Download PDF

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Publication number
WO2008123144A1
WO2008123144A1 PCT/JP2008/055282 JP2008055282W WO2008123144A1 WO 2008123144 A1 WO2008123144 A1 WO 2008123144A1 JP 2008055282 W JP2008055282 W JP 2008055282W WO 2008123144 A1 WO2008123144 A1 WO 2008123144A1
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WO
WIPO (PCT)
Prior art keywords
sensitivity
section
magnetic
magneto
field strength
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PCT/JP2008/055282
Other languages
English (en)
French (fr)
Inventor
Masaya Yamashita
Yo Yamagata
Original Assignee
Asahi Kasei Emd Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Asahi Kasei Emd Corporation filed Critical Asahi Kasei Emd Corporation
Priority to US12/532,518 priority Critical patent/US9116195B2/en
Priority to EP08722634.6A priority patent/EP2131205B1/en
Priority to JP2009509077A priority patent/JP5027217B2/ja
Priority to CN2008800095678A priority patent/CN101641609B/zh
Priority to KR1020097017514A priority patent/KR101124025B1/ko
Publication of WO2008123144A1 publication Critical patent/WO2008123144A1/ja
Priority to US14/798,620 priority patent/US20150316638A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

　本発明は、複数のホール素子が設けられた半導体基板上に磁性体を設けた、感度測定機能を有する磁気センサ及び感度測定装置並びにその方法に関する。感磁部（３１）による検出された磁束密度は、切換部（３２）によって各軸の磁界強度情報が抽出され、増幅部（３３）を介して、感度演算部（３４）に入力される。感度演算部（３４）は、感磁部（３１）からの各軸に関する磁界強度情報に基づいて感度を演算する。感度演算部は、感磁部（３１）からの磁束密度を各軸の磁気成分に分解する軸成分分解部（３４ａ）と、軸成分分解部（３４ａ）からの磁界強度の各軸成分を基準値と比較して感度を判定する感度判定部（３４ｂ）と、感度判定部（３４ｂ）からの感度情報に基づいて感度補正を行う感度補正部（３４ｃ）とを備えている。センサ診断部（３９）は、感度情報に基づいて磁気センサの感度良否を自己診断し、自己感度補正(調整)をする。
PCT/JP2008/055282 2007-03-23 2008-03-21 磁気センサ及びその感度測定方法 WO2008123144A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US12/532,518 US9116195B2 (en) 2007-03-23 2008-03-21 Magnetic sensor and sensitivity measuring method thereof
EP08722634.6A EP2131205B1 (en) 2007-03-23 2008-03-21 Magnetic sensor and its sensitivity measuring method
JP2009509077A JP5027217B2 (ja) 2007-03-23 2008-03-21 磁気センサ及びその感度測定方法
CN2008800095678A CN101641609B (zh) 2007-03-23 2008-03-21 磁传感器及其灵敏度测量方法
KR1020097017514A KR101124025B1 (ko) 2007-03-23 2008-03-21 자기 센서 및 그 감도 측정 방법
US14/798,620 US20150316638A1 (en) 2007-03-23 2015-07-14 Magnetic sensor and sensitivity measuring method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007077742 2007-03-23
JP2007-077742 2007-03-23

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/532,518 A-371-Of-International US9116195B2 (en) 2007-03-23 2008-03-21 Magnetic sensor and sensitivity measuring method thereof
US14/798,620 Continuation US20150316638A1 (en) 2007-03-23 2015-07-14 Magnetic sensor and sensitivity measuring method thereof

Publications (1)

Publication Number Publication Date
WO2008123144A1 true WO2008123144A1 (ja) 2008-10-16

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Family Applications (1)

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PCT/JP2008/055282 WO2008123144A1 (ja) 2007-03-23 2008-03-21 磁気センサ及びその感度測定方法

Country Status (6)

Country Link
US (2) US9116195B2 (ja)
EP (1) EP2131205B1 (ja)
JP (3) JP5027217B2 (ja)
KR (1) KR101124025B1 (ja)
CN (3) CN105589050B (ja)
WO (1) WO2008123144A1 (ja)

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JP2012220382A (ja) * 2011-04-11 2012-11-12 Toyohashi Univ Of Technology 磁性金属異物を検出する方法およびそのための装置
JP2013500469A (ja) * 2009-07-22 2013-01-07 アレグロ・マイクロシステムズ・インコーポレーテッド 磁界センサの診断動作モードを生成するための回路および方法
JP2015169517A (ja) * 2014-03-06 2015-09-28 旭化成エレクトロニクス株式会社 磁気検出装置、電流センサ及び磁気検出方法
JP2015194450A (ja) * 2014-03-31 2015-11-05 旭化成エレクトロニクス株式会社 ホール起電力信号処理装置、電流センサ及びホール起電力信号処理方法
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EP2131205A4 (en) 2013-08-28
CN103257325A (zh) 2013-08-21
JPWO2008123144A1 (ja) 2010-07-15
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CN101641609A (zh) 2010-02-03
EP2131205B1 (en) 2018-05-02
CN101641609B (zh) 2013-06-05
CN105589050A (zh) 2016-05-18
JP5616399B2 (ja) 2014-10-29
JP2012215579A (ja) 2012-11-08
US9116195B2 (en) 2015-08-25
US20100117638A1 (en) 2010-05-13
KR20090107546A (ko) 2009-10-13
US20150316638A1 (en) 2015-11-05
EP2131205A1 (en) 2009-12-09
KR101124025B1 (ko) 2012-03-27
JP6033801B2 (ja) 2016-11-30
JP2014098713A (ja) 2014-05-29
JP5027217B2 (ja) 2012-09-19

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