Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
  • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/70691—Handling of masks or workpieces
  • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
  • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
  • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
  • H01L21/6735—Closed carriers
  • H01L21/67353—Closed carriers specially adapted for a single substrate
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
  • H01L21/6735—Closed carriers
  • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
  • H01L21/6735—Closed carriers
  • H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
  • H01L21/6735—Closed carriers
  • H01L21/67376—Closed carriers characterised by sealing arrangements

Definitions

• the present invention relates to a pellicle storage container for transporting a pellicle comprising a pellicle film and a support frame that supports the pellicle film.
• a pellicle is generally a pellicle film made of a transparent polymer film such as nitrocellulose and having a thickness of about 10 microns, and a support having a thickness of about several millimeters for supporting the pellicle on one peripheral end surface.
• Frame An adhesive material with a release sheet for fixing the support frame to the photomask is provided on the peripheral end surface of the support frame opposite to the pellicle film. The adhesive material is provided with a uniform thickness so that there is no gap between the photomask and the support frame when the pellicle is placed on the photomask.
• the pellicle has been frequently used as a dust-proof means for a photomask used in a lithographic process in the manufacturing process of a liquid crystal display. Since the liquid crystal display has a larger area than the silicon wafer, the photomask is also enlarged. Along with this, the size of the pellicle membrane has been increasing, and a large pellicle membrane of 1000 mm x 1000 mm or more is also often used.
• the pellicle storage container mainly includes a tray on which the pellicle is placed and a lid that covers the tray.
• a method of fixing the tray and the lid for example, A method is known in which the outer peripheral portions of both are fixed by a fixing component (clip) that is sandwiched in a direction in which they are in close contact with each other (see Patent Document 1).
• Patent Document 1 Japanese Patent Laid-Open No. 7-142562 (paragraph number 0015, FIG. 1, etc.)
• an object of the present invention is to provide a pellicle storage container that can reduce wear powder generated by friction between a tray, a lid, and a clip.
• the present invention provides a pellicle storage container for transporting a pellicle comprising a pellicle film and a support frame that supports the pellicle film, and includes a tray and a cover serving as a lid thereof. And a closing member that closes the gap between the tray and the cover outside or inside the tray and the cover, and at least a contact portion of the closing member that contacts the tray or the cover is a pellicle storage container made of urethane elastomer. For this reason, the abrasion powder produced
• the closing member is a sealing member made of a urethane elastomer that is disposed inside the tray and the cover and is provided on at least one of the opposing surfaces of the tray and the cover. It is a storage container for pellicle.
• the seal member made of urethane elastomer is sandwiched between the tray and the cover, wear powder can be reduced, and the risk of foreign matter entering from the gap can be reduced.
• a pellicle storage container further includes a clip that clamps and fixes the tray and the cover. For this reason, even if the closing member does not have a role of firmly holding the tray and the cover, the clip is used to surround the tray and the cover. It is possible to reduce the risk of foreign matter entering from outside into the space. On the other hand, when the closing member has a role of firmly holding the tray and the cover, the intrusion of foreign matters can be more reliably reduced.
• Another invention of the present invention is a container for a pellicle manufactured using polyether polyol as the main polyol of urethane elastomer. For this reason, it is possible to reduce the possibility that a part or all of the blocking member is hydrolyzed by moisture in the air, and the pellicle storage container can be used for a long time.
• Another aspect of the present invention is a pellicle storage container for transporting a pellicle composed of a pellicle film and a support frame that supports the pellicle film, a tray, a cover serving as a lid thereof, A clip for holding and fixing the tray and the cover is provided, and the clip is used as a container for a pellicle that also serves as a urethane elastomer. For this reason, the abrasion powder produced
• the clip in each of the previous inventions is a pellicle storage container made of a urethane elastomer having a Shore hardness of A80 or higher. For this reason, the strength of the clip becomes higher and the clamping force can be maintained for a longer period.
• the hardness is adjusted by changing the ratio of polyol to chain extender.
• a container for a pellet in which the clip in each of the preceding inventions is made of a urethane elastomer manufactured using polyester polyol as a main polyol. I have to. For this reason, it is possible to make the tip capable of maintaining the holding force for a longer period. Elastomers manufactured mainly using polyether polyols are less susceptible to hydrolysis than elastomers manufactured mainly using polyesters. This is because the ester bond is easily hydrolyzed. Therefore, the possibility that the clip is hydrolyzed by moisture in the air can be reduced, and the pellicle storage container can be used for a long time.
• a closing member (a member in a broad sense including a clip and a seal member) that closes the gap between the tray and the cover constituting the pellicle storage container according to the present invention is a rubber-like elastic body having a urethane bond.
• the chemical formula of urethane elastomer is generally represented by one (0_R, -OCO-NH-R-NHCO)-. In this chemical formula, R ′ is usually a polyether or polyester.
• Urethane elastomers produced using polyethers such as polyether polyols as polyols are urethanes produced using polyether urethane elastomers and polyesters such as polyester polyols as polyols.
• the elastomer is called a polyester urethane elastomer.
• urethane elastomers produced using hydroxy-terminated polybutadiene and partially / completely hydrogenated derivatives, poly-strength prolatatone polyols, polycarbonate polyols, etc. as polyols other than polyethers and polyesters are also in accordance with the present invention. It can be used as a material for a closing member used in a pellicle storage container.
• the material of the tray and the cover constituting the pellicle storage container according to the present invention includes acrylonitrile. Butadiene. Styrene resin (consisting of three types of monomers, acrylonitrile, butadiene and styrene. In addition to “ABS resin”, polyester resin such as polyethylene terephthalate resin, polyolefin resin such as polyethylene and polypropylene, polystyrene resin, etc. can be used. It is more preferable to use it. However, the above-mentioned resin is only an example, and other resin materials may be adopted.
• a urethane elastomer is produced by polymerizing a polyol or chain extender terminated with a H group and a diisocyanate having an NCO group, and is formed by polymerization of a polyol and a diisocyanate (OCN_R_NC ⁇ ).
• polymer chains have the property that similar structures are likely to gather, and thus the above two types of segments exist in an aggregated state.
• the pellicle storage container including the closing member is purely cleaned to prevent adhesion of dust, fine particles, and the like to the pellicle.
• the material of the closing member contains an ester bond The more it is, the more it hydrolyzes and it can withstand long-term use.
• the urethane elastomer manufactured mainly using polyether polyol is not limited to the above-mentioned polyether-based urethane elastomer. If the polyether polyol is mainly used, the urethane elastomer is manufactured including polyester polyol. It is interpreted in a broad sense to include a urethane elastomer.
• the pellicle storage container according to the present invention is preferably manufactured by vacuum forming.
• vacuum molding refers to molding by placing a softened resin in a mold and making the space between that resin and the mold vacuum, and then sucking the resin into the mold. Regardless of the method used to supply the resin to the mold, it does not matter. Therefore, sheet-shaped resin can be placed in the mold, or molten resin can be discharged into the mold.
• Examples of vacuum forming include a straight method using a female die, a drape method using a male die, an air slip method in which a resin sheet is inflated into a hemisphere, and a male die is molded therein, and a male used in an air slip method.
• Examples include reverse draw using a female mold instead of a mold, and an auxiliary plug method in which a resin sheet clamped on a female mold is pushed down into a female mold with a plug, and the resin sheet is pre-tensioned and vacuumed. It is not limited to. In addition to vacuum forming, it can also be manufactured by pressure forming by applying gas pressure in the mold direction from the resin side, or by pressure forming by combining both the pressure forming and the vacuum forming. Also, molding methods other than vacuum forming, pressure forming, and pressure forming can be adopted.
• a pellicle storage container that can reduce wear powder generated by friction between the tray and the lid and the closing member.
• FIG. 1 is an exploded perspective view of a pellicle storage container according to an embodiment of the present invention.
• FIG. 2 is a perspective view showing a state where a clip is attached to the pellicle storage container shown in FIG. 1.
• FIG. 3 is a cross-sectional view taken along line AA in a state where a clip is attached to the pellicle storage container shown in FIG.
• FIG. 4 is a cross-sectional view of the pellicle stored in the pellicle storage container shown in FIG. 3 when cut along a line similar to the A_A line shown in FIG.
• FIG. 5 shows a state where the pellicle shown in Fig. 4 is stored in the pellicle storage container shown in Fig. 3.
• FIG. 5 shows a state where the pellicle shown in Fig. 4 is stored in the pellicle storage container shown in Fig. 3.
• FIG. 6 is a view showing an example of a pellicle storage container having a form different from the form shown in FIGS. 1 to 5, and a cross-sectional view taken along the line AA shown in FIG.
• FIG. 7 An enlarged perspective view of a clip used in the pellicle storage container shown in FIG.
• FIG. 8 A cross-sectional view of the pellicle storage container according to the second embodiment of the present invention, taken along the line AA shown in FIG.
• FIG. 9 is an enlarged perspective view of a closing member (composite clip) used in the pellicle storage container shown in FIG.
• FIG. 10 Shown is a situation where a cover member and a cover end of a pellicle storage container according to a third embodiment of the present invention are covered with a closing member (cover sheet) and fixed from above with a clip. It is a partial expansion perspective view.
• FIG. 11 is a cross-sectional view of the portion shown in FIG. 10 when the pellicle storage container according to the third embodiment of the present invention is cut along a line similar to the line AA shown in FIG.
• FIG. 12 A situation in which a closing member (seal member) is arranged on the contact surface between the cover and the tray of the pellicle storage container according to the fourth embodiment of the present invention, and the ends of the cover and the tray are fixed with clips.
• FIG. 13 is a cross-sectional view of the portion shown in FIG. 12 when the pellicle storage container according to the fourth embodiment of the present invention is cut along a line similar to the line AA shown in FIG.
• FIG. 1 is an exploded perspective view of a pellicle storage container according to the first embodiment of the present invention.
• FIG. 2 is a perspective view showing a state where a clip is attached to the pellicle storage container shown in FIG.
• the pellicle storage container 1 includes a tray 3 and a cover 2 that is a cover thereof.
• the cover 2 and the tray 3 have a structure that can be joined so as to overlap each other on the outer periphery of each other.
• a clip 4 is attached to both the outer peripheral portions of the cover 2 and the tray 3 for sandwiching and fixing the outer peripheral portion.
• the cover 2 and the tray 3 are both rectangular. Since it is a concave body, four clips 4 are prepared so that they can be attached to the four sides where the cover 2 and the tray 3 are in close contact. However, instead of attaching one clip 4 on each side, it is not necessary to attach multiple clips to each side, change the number of attachments for each side, or attach clips to some sides. .
• the clip 4 has a concave shape in which a portion sandwiching both outer peripheral portions of the cover 2 and the tray 3 is recessed.
• Clip 4 is a molded product of urethane elastomer produced by polymerizing polyether polyol and chain extender and diisocyanate.
• the cover 2 and the tray 3 It is theoretically possible to manufacture the cover 2 and the tray 3 with a urethane elastomer or a material having a lower hardness.
• the material for the container for the pellicle is not a material with a hardness higher than the hardness of urethane elastomer, it will be practical. Therefore, the clip 4 is always a lower hardness material than the cover 2 and the tray 3. As a result, there is almost no risk of the cover 2 and the tray 3 being scraped by friction with the clip 4.
• the urethane elastomer is difficult to be scraped even if friction occurs between the cover 2 and the tray 3 having higher hardness. Therefore, the risk of contamination of the pellicle is reduced because there is almost no risk of the wear powder of the clip 4 entering the container 1 for the pellicle.
• urethane elastomers In order to investigate the wear resistance of urethane elastomers, a wear test was conducted using a friction-reducing taper type H18 friction wheel of four types of materials: urethane elastomers, olefin elastomers, soft chlorinated bulls and natural rubber. . As a result, the wear loss of the above materials was 30 to 60 mg, about 340 mg, about 485 mg and 280 mg, respectively. As a result, it was found that urethane elastomer is a material with extremely high wear resistance.
• the polyether polyol which is the raw material of the clip 4 used in the pellicle storage container 1 according to the first embodiment, has a higher weight ratio than the chain extender that is the same raw material.
• the Shore hardness of the urethane elastomer can be changed. Increase the weight ratio of polyether polyol The higher the proportion of soft segments in the urethane elastomer, the lower the Shore hardness.
• the Shore 4 hardness of the clip 4 is about A90.
• the Shore hardness is not limited to A90. If the Shore hardness is A80 or higher, the strength of clip 4 is higher and the clamping force can be maintained for a longer period.
• the cover 2 and the tray 3 are manufactured by a vacuum forming method using an ABS resin having a base plate thickness of about 3 mm as a raw material and using a vacuum forming die.
• a resin other than ABS resin may be used.
• the thickness of the base plate is not limited to 3 mm, and a plate-like resin thinner than 3 mm or more than 3 mm may be molded. That is, the size of the pellicle storage container 1 is not particularly limited.
• FIG. 3 is a cross-sectional view taken along line AA in a state where the clip 4 is attached to the pellicle storage container 1 shown in FIG.
• the cover 2 is a concave body having an opening on the side facing the tray 3.
• the cover 2 includes a flat cover top surface 20, a side surface 21 formed in a cylindrical shape so as to spread from the cover top surface 20 in the opening direction, and a horizontal surface 22 extending horizontally outward from the side surface 21.
• a side surface 23 formed in a cylindrical shape so as to spread from the horizontal plane 22 in the opening direction, a horizontal plane 24 extending horizontally outwardly from the side plane 23 force, and a vertical extending from the horizontal plane 24 substantially vertically upward.
• a surface 25 and a horizontal surface 26 extending horizontally outward from the vertical surface 25 are provided.
• the tray 3 is a concave body that forms a hill and has an opening on the side facing the cover 2.
• the tray 3 has a planar bottom surface 30 that is larger than the opening area of the side surface 21, a slope 31 that is inclined downward from the tray bottom surface 30 to the periphery of the tray 2, and a horizontal outward direction from the slope 31.
• a horizontal plane 32 extending to the vertical plane, a vertical plane 33 extending substantially vertically upward from the horizontal plane 32, and a horizontal plane 34 extending horizontally outward from the vertical plane 33.
• the horizontal surface 22 and the tray bottom surface 30 of the cover 2 have overlapping portions that face each other in the vertical direction, and a pellicle support frame, which will be described later, is sandwiched between these portions.
• the crank-shaped portion composed of the horizontal plane 24, the vertical plane 25 and the horizontal plane 26 of the cover 2 is the horizontal plane of the tray 3.
• the shape is almost the same as the crank-shaped portion composed of the surface 32, the vertical surface 33, and the horizontal surface 34, and the lower surface of the crank-shaped portion on the cover 2 side can be in close contact with the upper surface of the crank-shaped portion on the tray 3 side.
• the horizontal surface 26 of the cover 2 and the horizontal surface 34 of the tray 3 are sandwiched and fixed by the clip 4 described above.
• FIG. 4 is a cross-sectional view of the pellicle 5 stored in the pellicle storage container 1 shown in FIG. 3 taken along the line A_A shown in FIG.
• Pericunore 5 has a structure in which a pellicle film 6 made of a material such as nitrocellulose and having a thickness of 10 microns or less is stretched and attached to one end surface (upper surface in FIG. 4) of a square frame-shaped support frame 7. have.
• the height of the support frame 7 is about 5 mm.
• the material and thickness of the pellicle film 5 and the height of the support frame 7 are not limited to the above.
• an adhesive material 8 is provided on the peripheral end surface (bottom surface) of the support frame 7 opposite to the pellicle film 6.
• a thin release sheet (not shown) is usually attached to the surface of the adhesive material 8.
• FIG. 5 is a diagram showing a state in which the pellicle 5 shown in FIG. 4 is stored in the pellicle storage container 1 shown in FIG.
• the pericinole 5 is stored in the pellicle storage container 1 with the bottom surface of the support frame 7 placed on the tray bottom surface 30 and the top surface of the support frame 7 in contact with the horizontal surface 22 of the cover 2. Is done. In this way, since the carrier frame 7 is transported with the height direction of the support frame 7 held between the cover 2 and the tray 3, the risk that the pellicle 5 moves in the pellicle storage container 1 is reduced.
• a clip having a form other than the above-described clip 4 may be employed.
• a clip that sandwiches the vertical plane 25 of the cover 2 and the vertical plane 33 of the tray 3 a clip that sandwiches the horizontal plane 2 of the cover 2 4 and the horizontal plane 32 of the tray 3, the horizontal plane 26 of the cover 2 and the horizontal plane 32 of the tray 3
• a clip that holds the cover top or the cover top surface 20 and the tray bottom surface 30 may be used.
• one linear clip 4 and a clip obtained by integrating the three linear clips 4 may be employed.
• cover In a state where 2 and tray 3 are joined a clip that holds only four corners of each other may be employed.
• the number and shape of the clips are not limited as long as the clips are members that fix the cover 2 and the tray 3 in the direction in which they are in close contact.
• FIG. 6 is a view showing an example of a pellicle storage container 1 having a form different from the forms shown in FIGS.
• FIG. 6 is a cross-sectional view taken along the same line as the AA line shown in FIG.
• FIG. 6 clip 4 is shown in white for easy viewing.
• FIG. 7 is an enlarged perspective view of the clip 4 used in the pellicle storage container 1 shown in FIG.
• the pellicle storage container 1 shown in FIG. 6 is in contact with the vertical surface 25 of the cover 2 to cover the horizontal surface 32 of the tray 3.
• a clip 4 that holds the cover 2 and the tray 3 is provided.
• the clip 4 is different from the clip 4 shown in FIG. 2 in that the sides of the cover 2 and the tray 3 are relatively short and long and are held at a plurality of positions at predetermined intervals. I'll have you.
• the clip 4 shown in FIG. 7 includes a flat plate 41, a flat plate 42 slightly bent from the flat plate 41, and a flat plate 43 having a flat plate 42 force bent substantially at a right angle in the same direction as the flat plate 42 is bent.
• the curved portions of the flat plate 41 and the flat plate 42 have a convex portion 44 that protrudes inward, and the flat plate 43 has a convex portion 45 that protrudes in a direction substantially parallel to the flat plate 42.
• a flat plate 46 extending substantially perpendicular to the flat plate 41 is provided on the inner side of the flat plate 41 (the side on which the convex portion 44 is provided).
• the flat plate 46 is provided with a flat plate 47 extending slightly inward from parallel to the flat plate 41.
• the flat plate 47 has substantially the same length as the flat plate 41, and has a convex portion 48 at the tip thereof so as to face the convex portion 44.
• the clip 4 that can hold the cover 2 and the tray 3 in a relatively large area
• the holding force of the pellicle storage container 1 can be increased.
• the length of clip 4 Since the length of each side of the pellicle storage container 1 is partially sandwiched, the clip 4 can be reduced in size.
• FIG. 8 shows a cross-sectional view of the pellicle storage container 1 according to the second embodiment, taken along the line AA shown in FIG.
• FIG. 9 is an enlarged perspective view of a composite clip 50 which is an example of a closing member used in the pellicle storage container 1 shown in FIG.
• the composite clip 50 shown in FIGS. 8 and 9 has the same shape as the clip 4 shown in FIGS. 6 and 7. However, the composite clip 50 and the clip 4 are different in the following points.
• Clip 4 consists of a urethane elastomer only.
• the composite clip 50 is made of a metal or resin and a urethane elastomer.
• the main body 51 which is a skeleton part of the composite tape 50 is made of metal or resin
• the contact portion 52 which is pressed against the cover 2 and the tray 3 is made of a urethane elastomer. ing.
• the composite clip 50 may have a urethane elastomer sheet attached to the entire inner surface of the main body 51, and only the contact portion between the sheet and the cover 2 and the tray 3 may be projected.
• the main body 51 and the contact portion 52 may be joined by any method such as adhesion, welding, or fitting.
• the composite clip 50 employs a contact portion 52 made of a urethane elastomer only in a contact portion that holds the cover 2 and the tray 3 together. Even in such a configuration, the generation of wear powder can be reduced as in the case of the pellicle storage container 1 according to the first embodiment. It is possible to increase the holding force of the composite clip 50 by making the main body 51 made of metal or resin.
• FIG. 10 shows a state in which a cover sheet 60 as an example of a closing member is covered on the end of the cover 2 and the end of the tray 3 of the pellicle storage container 1, and the clip 61 is fixed from above.
• FIG. FIG. 11 shows a pellicle storage container 1 according to the third embodiment as shown in FIG.
• FIG. 11 is a cross-sectional view of the portion shown in FIG. 10 when cut along the same line as the A_A line shown in FIG. In FIG. 11, the cover sheet 60 is shown in white for ease of viewing.
• the ends of the cover 2 and the tray 3 are covered with a cover sheet 60 made of urethane elastomer, and a clip 61 is attached from the outside.
• the structure is adopted.
• the cover sheet 60 made of urethane elastomer is used in the portion in direct contact with the cover 2 and the tray 3, the effect of reducing the generation of wear powder can be obtained. It is also possible to increase the force for fixing the cover 2 and the tray 3 by making the clip 61 made of metal or resin.
• FIG. 12 shows a situation in which a sealing member 70 as an example of a closing member is arranged on the contact surface between the cover 2 and the tray 3 of the pellicle storage container 1 and the ends of the cover 2 and the tray 3 are fixed by the clip 4.
• FIG. The structure of clip 4 is the same as that of clip 4 shown in FIG.
• FIG. 13 is a cross-sectional view of the portion shown in FIG. 12 when the pellicle storage container 1 according to the fourth embodiment is cut along a line similar to the AA line shown in FIG. In FIG. 13, the seal member 70 is shown in white for ease of viewing.
• the pellicle storage container 1 includes a seal member 70 made of urethane elastomer interposed in the gap between the cover 2 and the tray 3.
• the inner surface of the cover 2 and the inner surface of the tray 3 are stacked so that the seal member 70 is sandwiched therebetween.
• the contact area between the cover 2 and the seal member 70 can be reduced by bonding the seal member 70 to be fixed to the tray 3 and forming irregularities on the contact surface of the seal member 70 with the cover 2. As a result, abrasion powder from the seal member 70 and the cover 2 can be reduced.
• the sealing member 70 may be bonded to the cover 2 to form irregularities on the contact surface of the sealing member 70 with the tray 3. Also, seal member 70 is covered 2 or tray 3 It is also possible to hold the seal member 70 between the cover 2 and the tray 3 that are not fixed to the clip, and fix the clip 4 with the clip 4. In addition, the seal member 70 may be interposed between the horizontal surfaces of the cover 2 and the tray 3 in a portion rising upward from the horizontal surface. Further, the form in which the unevenness is formed on the surface of the seal member 70 is not an essential form.
• the present invention can be used in industries that manufacture or use storage containers for transporting pellicles.

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• 2006
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