WO2006075687A1 - パターン欠陥検査方法及び半導体装置の製造方法 - Google Patents
パターン欠陥検査方法及び半導体装置の製造方法 Download PDFInfo
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- WO2006075687A1 WO2006075687A1 PCT/JP2006/300349 JP2006300349W WO2006075687A1 WO 2006075687 A1 WO2006075687 A1 WO 2006075687A1 JP 2006300349 W JP2006300349 W JP 2006300349W WO 2006075687 A1 WO2006075687 A1 WO 2006075687A1
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- pattern
- inspection
- defect inspection
- defect
- reference pattern
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/7065—Defects, e.g. optical inspection of patterned layer for defects
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
Definitions
- the present invention relates to a pattern defect inspection method and a semiconductor device manufacturing method including the pattern defect inspection, and more particularly to a pattern defect inspection method for a reticle or a semiconductor wafer and a semiconductor device including the pattern defect inspection. This relates to the manufacturing method.
- a pattern defect inspection a method is used in which a pattern to be inspected, such as a reticle pattern or wafer pattern, is compared with a reference pattern drawn based on design data and the deviation is detected.
- a reticle pattern is formed of a chrome pattern force formed on a quartz substrate through a photolithographic process and a dry etching process.
- the pinholes of chrome produced during the etch process are often due to chrome deposits.
- Such a shift in pattern shape does not substantially act as a defect if it is small enough not to affect the operation of the semiconductor IC. Therefore, in pattern defect inspection, an allowable value for deviation from the reference pattern is preliminarily determined, and when the detected pattern deviation force exceeds the value, it is regarded as a defect. .
- the threshold value determines the inspection sensitivity in the pattern defect inspection. In order to increase the inspection sensitivity, the threshold value is set to a small value, and in order to decrease the inspection sensitivity, the threshold value is set to a large value.
- the threshold value is usually set to a value obtained by adding a predetermined margin (higher inspection sensitivity) so that the generated defect can be recognized without leaking. For this reason, even those that are not inherently defects are treated as defects, and a great deal of time is required to correct them in later processes. To do. It should be noted that defects that do not substantially act as defects among those detected as defects are called “pseudo defects”.
- the appropriate value of inspection sensitivity to be set also differs.
- the inspection sensitivity is often set to the same value for all reticles used for manufacturing the same semiconductor IC. In such a case, as described above, the place where the highest inspection sensitivity is required. It is necessary to match the inspection sensitivity. Therefore, there is a problem that the inspection sensitivity is set unnecessarily high at other points.
- Patent Document 1 Japanese Patent Laid-Open No. 2004-45066
- the inspection sensitivity can be set appropriately as in the above example. However, if the pattern shape becomes more complex and minute,
- the cause of the deviation from the reference pattern is, in addition to these factors, an excess or deficiency of exposure amount in a photolithographic process or an excess or deficiency of dry etching. There is a cause. Even in the case of these excesses and deficiencies, the reference pattern force shifts similarly. For example, when the chrome film is excessively etched, the pattern width is narrowed, which is detected as a pattern shift of the reference pattern force.
- the present invention has been made in view of the above problems, and is a pattern of a complicated shape formed on a reticle or a semiconductor wafer (these patterns are also called “actual patterns”). )),
- the purpose is to reduce the number of pseudo-defects and greatly reduce the time required for defect inspection.
- the present inventor has found that there is regularity in the occurrence of the deviation with respect to the deviation between the actual pattern and the reference pattern, and that the regularity is related to the shape of the reference pattern.
- the present invention has been made.
- the inspection sensitivity is adjusted according to the shape (complexity) of the reference pattern, so that the inspection sensitivity is set appropriately.
- the number of pseudo defects contained in pattern defects is greatly reduced.
- the pattern defect inspection method of the present invention is a pattern defect inspection in which an image of a pattern to be inspected is compared with an image of a reference pattern to inspect the defect of the pattern to be inspected. According to the method, the inspection sensitivity is adjusted according to the pattern shape in the reference pattern.
- a pattern defect inspection method of the present invention includes a storage unit. According to a pattern defect inspection method for inspecting a defect of the pattern to be inspected by comparing the image of the reference pattern with the image of the pattern to be inspected by the pattern defect inspection apparatus provided, and according to the pattern shape in the reference pattern Storing the inspection sensitivity association information in the storage unit in advance, and adjusting the inspection sensitivity of the pattern defect inspection apparatus based on the association information extracted from the storage unit. And
- the pattern defect inspection method of the present invention detects a pattern defect in a pattern to be inspected formed on a reticle or a semiconductor wafer by a pattern defect inspection apparatus.
- a pattern defect inspection method detects a pattern defect in a pattern to be inspected formed on a reticle or a semiconductor wafer by a pattern defect inspection apparatus.
- the pattern defect inspection method of the present invention includes an inspection target formed on a reticle or semiconductor wafer for each predetermined inspection region by a pattern defect inspection apparatus.
- a pattern defect inspection method for detecting a pattern defect in a pattern a reference pattern image based on design data is compared with an image of the pattern to be inspected.
- the threshold value when the number is equal to or greater than a predetermined value is set to a value larger than the threshold value when the number of corners in the inspection object is smaller than the predetermined value, and the extraction is performed. It is characterized by this.
- a method of manufacturing a semiconductor device of the present invention includes a semiconductor that forms a pattern on a wafer using a reticle that has been subjected to pattern defect inspection.
- the reticle pattern defect inspection is performed by comparing an image of a pattern to be inspected with an image of a reference pattern and inspecting a defect of the pattern to be inspected according to a pattern shape in the reference pattern. It is characterized by adjusting the inspection sensitivity.
- a method for manufacturing a semiconductor device is a method for manufacturing a semiconductor device in which a pattern is formed on a wafer using a reticle subjected to pattern defect inspection.
- the pattern defect inspection of the reticle is a method for inspecting a defect of the pattern to be inspected by comparing a reference pattern image and an image of the pattern to be inspected by a pattern defect inspection apparatus having a storage unit.
- the method for manufacturing a semiconductor device of the present invention inspects a defect in the inspection pattern by comparing an image of the inspection pattern with an image of a reference pattern.
- the inspection sensitivity is changed according to the complexity of the pattern. Compared to the conventional method, it is possible to set the inspection sensitivity more appropriately.
- the pattern defect inspection method of the present invention makes it possible to significantly reduce the number of pseudo defects, and is useful for improving inspection accuracy and shortening inspection time.
- FIG. 1 is a block diagram showing a pattern defect inspection apparatus according to an embodiment of the present invention.
- FIG. 2 is a diagram (part 1) illustrating a reticle pattern and a reference pattern according to Example 1 of the invention.
- FIG. 3 is a diagram (part 2) illustrating a reticle pattern and a reference pattern according to Example 1 of the invention.
- FIG. 4 is a diagram (No. 3) illustrating a reticle pattern and a reference pattern according to Example 2 of the invention.
- FIG. 5 is a diagram (No. 4) illustrating a reticle pattern and a reference pattern according to Embodiment 2 of the invention.
- FIG. 10 is a diagram (No. 5) illustrating a reticle pattern and a reference pattern according to Example 3 of the invention.
- FIG. 7 is a diagram (No. 6) illustrating a reticle pattern and a reference pattern according to Embodiment 3 of the present invention.
- FIG. 8 is a view (No. 7) showing a reticle pattern and a reference pattern according to Embodiment 4 of the invention.
- FIG. 9 is a view (No. 8) showing a reticle pattern and a reference pattern according to Embodiment 4 of the invention.
- FIG. 10 is an inspection flow according to Embodiment 5 of the present invention.
- FIG. 11 is an example of image data synthesis according to Embodiment 5 of the present invention.
- FIG. 12 is a specific example of setting the inspection sensitivity according to the fifth embodiment of the present invention in a grid shape.
- FIG. 13 is a specific example of a method for detecting a defect according to Embodiment 5 of the present invention.
- FIG. 14 is an example of inspection object setting in units of micro inspection areas according to Embodiment 5 of the present invention.
- FIG. 15 is an example of identifying a pseudo defect and a defect based on the number of copies according to Example 5 of the present invention.
- FIG. 16 is a specific example of the inspection sensitivity condition according to Example 5 of the present invention.
- FIG. 17 is a diagram showing the effect of setting the inspection sensitivity based on the inspection conditions.
- FIG. 1 is a block diagram showing a pattern defect inspection apparatus used for carrying out the present invention.
- the pattern defect device includes, for example, a reticle 1, an XY stage 2, an illumination light source 3, an objective lens 4, a half mirror 5, a CCD image sensor 6, an image acquisition unit 7, and a comparison.
- 8 includes an image processing unit 9, a stage control unit 10, a reference data generation unit 11, an inspection sensitivity setting unit 12, a defect determination unit 13, a defect storage unit 14, and the like.
- reticle 1 to be inspected is fixed to XY stage 2.
- the surface of the reticle 1 is divided into a plurality of inspection areas, and each inspection area is inspected.
- the XY stage 2 moves according to an instruction from the stage control unit 10 and scans the surface of the reticle 1 in the X direction and the Y direction for each inspection region.
- an illumination optical system including a reticle illumination light source 3, a half mirror 5, and an objective lens 4 and a CCD image sensor 6 are arranged, and light emitted from the reticle illumination light source 3 Is reflected by the half mirror 5, narrowed by the objective lens 4, and then enters the reticle 1. Then, the reflected light passes through the objective lens 4 and the half mirror 5 and is taken into the CCD image sensor 6 and sent to the image acquisition unit 7 as an image signal.
- the image acquisition unit 7 converts the image signal sent from the CCD image sensor 6 into a reticle pattern to be inspected, and inputs the converted reticle pattern to the comparison unit 8.
- the design data force corresponding to each inspection area of reticle 1 in the design data of the reticle pattern is taken into reference data generation unit 11 in synchronization with the scanning range of XY stage 2.
- the stage control unit 10 controls the XY stage 2 and sends information on the range of the XY stage 2 to the reference data generation unit 11.
- the reference data captured by the reference data generation unit 11 is sent to the image processing unit 9 and converted into a reference pattern.
- This reference pattern corresponds to the reticle pattern (actual pattern) previously generated by the image acquisition unit 7.
- the reference pattern generated by the image processing unit 9 in this way is input to the comparison unit 8.
- the comparison unit 8 compares the reticle pattern with the shape of the reference pattern. If there is a mismatch portion, the position coordinate and the pattern mismatch width are detected, and the mismatch information is sent to the defect determination unit 13.
- the mismatch information refers to information including the amount of mismatch (shift amount) with the coordinates at the location where the mismatch (pattern shift) occurs.
- the defect determination unit 13 determines whether or not the pattern mismatch width sent from the comparison unit 8 exceeds a predetermined threshold value. When the pattern mismatch width exceeds a predetermined threshold value, the mismatch location is determined as a defect, and the position coordinates of the defect location are stored in the defect storage unit 14.
- a predetermined threshold is set as a reference for determining whether or not the defect is present.
- the threshold value determines the inspection sensitivity in the pattern defect inspection, and is set for each inspection region by the inspection sensitivity setting unit 12. Thereafter, the set value (threshold value set for each inspection region) is notified to the defect determination unit 13.
- the inspection sensitivity is adjusted according to the complexity of the pattern shape.
- the number of corners of the pattern (hereinafter referred to as “the number of each part”) is used as an index indicating the complexity of the pattern shape, and this differs depending on whether or not the number of corners exceeds a predetermined number. Set the threshold.
- the inspection sensitivity setting unit 12 sets a value of 20 nm for a pattern in which the number of corners of the reference pattern exceeds 5, and does not exceed the pattern! Set the threshold 5nm. Then, these set values are notified to the defect determination unit 13.
- FIG. 2A shows a reference pattern 21 included in one inspection region
- FIG. 2B shows a reticle pattern 22 which is an actual pattern corresponding to the reference pattern 21.
- the reference pattern 21 has seven corners in total at positions a to g surrounded by circles in the figure. In the coordinates where the reticle pattern 22 shown in Fig. 2 (b) is drawn, the reference pattern 21 drawn with a dotted line is ( Overlaid on the reticle pattern 22).
- the comparison unit 8 compares the reference pattern 21 and the reticle pattern 22 to detect a pattern mismatch width for each corner. For example, as shown in Fig. 2 (b), the pattern mismatch width detected at corner a is 15 nm.
- the defect determination unit 13 determines that the corner a is not a defect because the pattern mismatch width at the corner a does not exceed the threshold of 20 nm, and does not notify the defect storage unit 14 of the corner a. Similar determinations are made for the other corners from b to g.
- FIGS. 3 (a) and 3 (b) show a reference pattern 23 different from the reference pattern 21 shown in FIG.
- a reticle pattern 24 corresponding to the pattern 23 is shown.
- the reference pattern 23 drawn with a dotted line is (in this reticle pattern 24), in order to easily show the pattern deviation from the reference pattern 23.
- the pattern mismatch width detected at the corner a is also lOnm.
- the threshold value is set to 5 nm. Therefore, since the mismatch width between the reference pattern 23 and the reticle pattern 24 exceeds the threshold value 5 nm, the defect determination unit 13 determines that the corner a is a defect (although the maximum mismatch width is lOnm). The position coordinates are notified to the defect storage unit 14. The same processing is performed for the other corners b, c, and d.
- the reticle pattern 22 having a mismatch width of 20 nm is not a defect
- the reticle pattern 24 having a mismatch width lOnm is determined to be a defect.
- This is a result obtained in consideration of the difference in the shapes of the reticle patterns 22 and 24 according to the present invention, and more appropriate defect determination can be made as compared with the conventional case.
- the detection sensitivity adjustment as described above is normally performed for a predetermined specified area (or specified pattern).
- the area set as the lowest detection sensitivity threshold is determined not to be a defect. It is desirable to set a threshold value for the detection sensitivity so that 100% of defects are not present (ie, there is no defect extraction failure V).
- an angle at the pattern corner is used as an index indicating the complexity of the pattern shape instead of the number of pattern corners.
- the threshold value is different depending on whether the angle exceeds a predetermined value or not.
- the inspection sensitivity setting unit 12 sets a threshold value of 20 nm when the angle of the corner portion in the reference pattern does not exceed 90 degrees, and sets a threshold value of 5 nm smaller than this when it exceeds 90 degrees. Shall be notified.
- FIG. 4A shows a reference pattern 25 included in one inspection area
- FIG. 4B shows a reticle pattern 26 corresponding to the reference pattern 25.
- the reference pattern 25 is drawn with a dotted line over the reticle pattern 26 in order to make it easy to deviate between the reference pattern 25 and the reticle pattern 26! /!
- the angle at the corner a of the reference pattern 25 in the figure is 20 degrees, and since the angle does not exceed 90 degrees, 20 nm is set as the threshold value.
- the comparison unit 8 compares the reference pattern 25 and the reticle pattern 26 and detects the mismatch width.
- the pattern mismatch width at the corner a is 15 nm. Since the pattern mismatch width at the corner a does not exceed the threshold value 20 nm, the defect determination unit 13 determines that the corner a is not a defect and does not notify the defect storage unit 14 of the corner a.
- FIGS. 5A and 5B show a reference pattern 27 different from the reference pattern 25 shown in FIG. 4 and a reticle pattern 28 corresponding to the reference pattern 27.
- a reference pattern 27 drawn with a dotted line is drawn in an overlapping manner (on the reticle pattern 28).
- the defect determination unit 13 determines that the corner portion a is a defect, and the position coordinate is determined. Notify the defect storage unit 14.
- the pattern mismatch width increases as the angle of the pattern corner decreases.
- the reason why such a phenomenon occurs is that, as the angle of the pattern corner becomes smaller, the pattern shape force S photolithography process and the etching process are more easily affected.
- the detected mismatch width does not necessarily mean that all of the detected mismatch widths act as defects. Therefore, the pseudo defects can be reduced by the inspection sensitivity setting shown in the present embodiment.
- the distance between adjacent corners in the reference pattern is used as an index indicating the complexity of the pattern, and different threshold values are set according to whether or not the distance exceeds a predetermined value. To do.
- the pattern defect inspection apparatus shown in FIG. 1 is also used in the pattern defect inspection of this embodiment.
- the inspection sensitivity setting unit 12 sets a threshold value 5 nm smaller than this when the distance between the corners in the reference pattern does not exceed 50 nm! /, Sometimes the threshold! /, And the value 20 nm. Then, the set values are notified to the defect determination unit 13.
- FIG. 6A shows a reference pattern 29 included in one inspection region
- FIG. 6B shows a reticle pattern 30 corresponding to the reference pattern 29.
- a reference pattern 29 drawn with a dotted line is drawn over the coordinates where the reticle pattern 30 is drawn (over the reticle pattern 30). If the distance between adjacent corners a and b in the reference pattern 29 is 30 nm, this does not exceed 50 nm, so 20 nm is set as the threshold value.
- the comparison unit 8 compares the reference pattern 29 and the reticle pattern 30 and detects the mismatch width. As shown in Fig. 6 (b), the pattern mismatch width at corner a is 15nm.
- the defect determination unit 13 determines that the corner a is not a defect because the pattern mismatch width at the corner a does not exceed 20 nm, and does not notify the defect storage unit 14 of the corner a.
- the defect storage unit 14 may be notified of the information “No defect exists”.
- FIGS. 7 (a) and 7 (b) correspond to reference pattern 31 different from FIG. 6 (a) and to this reference pattern 31.
- the reticle pattern 32 is shown.
- a reference pattern 31 drawn with a dotted line is drawn in an overlapping manner (on the reticle pattern 32) at the coordinates where the reticle pattern 32 in FIG. 7 (b) is drawn.
- the pattern mismatch width detected at corner a is lOnm. In this example, if the distance between the adjacent corners a and b of the reference pattern 31 is 70 ⁇ m, this exceeds 50 nm! /, So the threshold! / And the value 5 nm are set. Accordingly, the mismatch width of the reticle pattern 32 exceeds the threshold value 5 nm, and the defect determination unit 13 determines that the corner a is a defect, and notifies the defect storage unit 14 of the position coordinates.
- the pattern width in the reference pattern that is, the length in the direction perpendicular to the longitudinal direction of the pattern is used as an index indicating the complexity of the pattern, and this length exceeds a predetermined value.
- Different threshold values are set according to whether or not the force is strong.
- pattern defect inspection apparatus shown in FIG. 1 is also used in the pattern defect inspection of this embodiment.
- FIG. 8A shows a reference pattern 45 included in one inspection region
- FIG. 8B shows a reticle pattern 46 corresponding to the reference pattern 45.
- a reference pattern 45 drawn with a dotted line is drawn on the coordinates where the reticle pattern 46 is drawn so as to overlap (on the reticle pattern 46).
- the width of the reference pattern 45 is 30 nm.
- FIG. 9A shows a reference pattern 47 included in one inspection region
- FIG. 9B shows a reticle pattern 48 corresponding to the reference pattern 47.
- a reference pattern 47 drawn with a dotted line is drawn over the coordinates where the reticle pattern 48 is drawn (over the reticle pattern 48).
- the reference pattern The width at 47 is lOOnm.
- the inspection sensitivity setting unit 12 sets a threshold of 20 nm when the width of the reference pattern does not exceed 50 nm, and sets a threshold of 5 nm when the width of the reference pattern exceeds 50 nm. To do. Then, these setting values are notified to the defect determination unit 13.
- the force mismatch determination unit 13 has a pattern mismatch width of 15 nm at the corner a, and the pattern mismatch width at the corner a does not exceed 20 nm. Therefore, it is determined that the corner a is not a defect. Then, the information about the corner a is not notified to the defect storage unit 14.
- the pattern mismatch width at corner a is lOnm.
- defect determination unit 13 determines that the pattern mismatch width at corner a has a threshold value of 5 nm. Since it exceeds, corner a is determined to be a defect. Then, the defect storage unit 14 is notified of the mismatch information about the corner a.
- the mutual interference of the patterns is increased as in the third embodiment, and the pattern mismatch width is increased.
- the corners detected as pattern mismatches as described above are mostly pseudo defects (even if the mismatch width is large), and the probability that they are relatively defective. Becomes smaller. Therefore, by setting the inspection sensitivity low (that is, the inspection sensitivity is set low), it becomes possible to reduce the pseudo defects.
- FIG. 1 the block diagram of the pattern defect apparatus shown in FIG. 1 is used for explanation.
- FIG. 10 is a diagram showing an inspection flow according to the present embodiment.
- FIG. 10 there are three main flows up to the “image data composition (step S 131)” described in the center of the figure, so these flows will be described first.
- the flow on the left side of Fig. 10 shows the procedure for obtaining the inspection data.
- the image data 105 of the inspection data is acquired by the processing of conversion (1) and data conversion (2).
- the reference data generation unit 11 extracts only the part necessary for the inspection from the design data 101 and performs format conversion for the inspection apparatus to create the inspection design data 103. (Step S102). Then, the converted inspection design data 103 is sent to the image processing unit 9. Subsequently, the design data for inspection 103 is converted into the format of the image data 105 in the layer processing unit 9 (step S104). Then, the inspection data 105 in the converted image data format is sent to the comparison unit 8. An example of the inspection data 105 is shown in FIG.
- the flow on the right side of FIG. 10 shows a procedure for acquiring image data of an actual pattern (reticle pattern) formed on the reticle.
- reticle 1 is set on stage 2 of the inspection apparatus (step S121).
- step S 12 the inspection conditions are set for the inspection sensitivity setting unit 12 and the like.
- the stage 2 is moved so that a reticle pattern scanning operation (reticle scanning) is possible (step S124), and the shape of the reticle pattern is acquired. Load into part 7 (step S125).
- the captured image signal of the reticle pattern shape is converted into a reticle pattern 126 which is image data for inspection by the image acquisition unit 7 and sent to the comparison unit 8.
- An example of the reticle pattern 126 is shown in FIG.
- the comparison unit 8 compares the image data 105 of the inspection data with the image data 126 of the reticle pattern.
- the comparison unit 8 determines whether or not the reticle 1 is correctly set on the stage 2, and if it is set correctly, the image data 105 of the inspection data and the reticle pattern are set. The image data 126 is compared in detail.
- Step S130 it is confirmed whether the image data 105 and the image data 126 have the same power. If they do not match, the process returns to step 124, and the reticle pattern scanning operation is performed again. At this time, the operation of setting stage 2 reticle 1 (step S121) may be repeated.
- the image data 105 and the image data 126 are compared and sent to the force defect determination unit 13.
- the result sent to the defect determination unit 13 is, for example, information (mismatch information) such as the coordinates and the width of the mismatch at a location where there is a pattern mismatch.
- the defect determination unit 13 synthesizes the inspection data image data 105 and the reticle pattern image data 126 and compares them in detail (step S 131).
- the central flow in FIG. 10 shows a procedure for acquiring inspection sensitivity data.
- the inspection sensitivity setting unit 13 obtains the inspection design data 103 sent from the reference data generation unit 11. Then, the inspection sensitivity setting unit 13 extracts the specific area 210 based on the acquired inspection data 103 (step 112).
- the process of extracting the information of the specific area 210 is performed by the following method, for example.
- a specific area corresponding to the shape of the pattern is determined. In other words, it associates which range should be a specific area according to the characteristics of the noturn shape.
- information on the associated specific area 210 is stored in advance in a storage unit (not shown) that can be stored.
- the process of extracting the specific area 210 may be performed by an operator without using a storage unit provided in the system as described above.
- the operator confirms the pattern shape of the design data 103 for inspection, and (the operator It is also possible to create information on the specific area 210 desired by the operator and input the information on the specific area 210 created by the operator into the inspection apparatus.
- inspection sensitivity data 114 is created from the obtained information on the specific area 210 (step 113). Specifically, “threshold” that determines inspection sensitivity is set for specific areas and other areas. Then, inspection sensitivity data 114 in which different inspection sensitivities are set for each area is completed.
- the processing for setting the inspection sensitivity 114 is performed by the following method, for example.
- the information related to the “threshold value” is stored in a storable storage unit (not shown).
- the inspection sensitivity data 114 is created, the pattern shape characteristics obtained from the inspection design data 103 are sent to the storage unit. Then, information on the “threshold value” corresponding to the feature of the pattern shape is obtained from the storage unit.
- the processing for creating the inspection sensitivity data 114 may be performed by an operator without using a storage unit provided in the system as described above.
- the operator confirms the pattern shape of the design data 103 for inspection, the operator creates the inspection sensitivity data 114 desired by the operator, and the information of the inspection sensitivity data 114 created by the operator (the operator). You can also input it to the inspection device!
- the inspection sensitivity data 114 generated in this way by the inspection sensitivity setting unit 12 is sent to the defect determination unit 13.
- the defect determination unit 13 combines the three types of image data created in the flows (1) to (3) to determine the defect (step S131).
- FIG. 11 (d) only one defect 220 is detected as a defect.
- a portion where a pattern deviation occurs in the specific area 210 indicated by a thick dotted line is not detected as a defect.
- the frames 200 in FIGS. 11 (a) to 11 (d) represent the minimum area for the inspection and all have the same area. )
- FIG. 12 shows a specific example in which the inspection sensitivity is set in a grid shape.
- the circled areas (corner portions 1 to 14) indicate all corner portions of the inspection data 105.
- the area defined by the thick dotted squares is the specific area 210.
- a grit 250 indicated by a thin dotted line in the figure represents a minute inspection area when performing an inspection.
- the inspection sensitivity is usually set for each of the small divided areas.
- FIG. 13 shows a specific example of a method for detecting defects.
- Fig. 13 (e) is a superposition of inspection data and reticle pattern, and there are 8 locations (271 to 278) force with thick dotted circles between inspection data 105 and reticle pattern 126. Thus, there is a pattern deviation.
- FIG. 13 (f) shows inspection sensitivity data.
- the thick dotted line frame is the specific area 220.
- a threshold value is set so as to be lower than the inspection sensitivity than the area outside the specific area 220.
- FIG. 13 (d) is a diagram in which the data in FIG. 13 (e) and FIG. 13 (f) are superimposed. As a result of such overlapping, only one location (272) is detected as a defect.
- FIG. 14 is a diagram showing an example of inspection object setting in units of minute inspection areas.
- FIG. 15 is a diagram showing an example of identifying a pseudo defect and a defect based on the number of corners.
- this figure shows an example in which pseudo defects and defects exist side by side on the same pattern for convenience.
- Shape A and shape B in the reticle pattern are formed in substantially the same pattern shape. However, when this embodiment is applied, shape B of the reticle pattern is recognized as a defect, and shape A is recognized as a pseudo defect. It becomes possible.
- FIG. 16 is a diagram showing a specific example of the inspection sensitivity condition. As shown in the figure, for example, for inspection sensitivity conditions, a plurality of conditions 1 to 5 (or more) are set simultaneously. In this way, it is also possible to perform defect inspection by setting inspection sensitivity conditions in combination.
- the defect determination unit 13 (in the inspection flow of FIG. 10), based on the comparison result from the comparison unit 8 and the inspection sensitivity data from the inspection sensitivity setting unit 12, It is determined whether or not there is a pattern defect (step S132).
- step S133 information on the pattern defect is sent to the defect storage unit 14, and the information is stored in the defect storage unit 14 (step S133).
- the information on the pattern defect includes coordinates on the reticle or semiconductor wafer.
- step S134 it is determined whether or not the reticle inspection is continued. For example, if there is still an area that needs to be inspected, the process returns to the scanning operation (step S124) to continue the inspection for reticle pattern capture.
- Step SI 35 If there is no area that needs to be inspected, the reticle defect inspection is terminated (see Step SI 35).
- the confirmation process and the repair process described above can be performed using, for example, a focused ion beam (FIB) device.
- the focused ion beam device is a device that irradiates the material after focusing the ion beam extracted from the gallium ion source to 5-: LOnm.
- the pattern repairing process for example, the pattern of the defective part is repaired by irradiating the ion beam while spraying a gas as a raw material onto the pattern defective part of the reticle.
- FIG. Fig. 17 shows the effect of setting the inspection sensitivity based on the inspection conditions.
- the sensitivity is set low for the above seven areas (1 to 7).
- the number that is recognized as a defect is zero. Therefore, in this case, the number of detected defects is equal to the actual number of defects.
- the same defect inspection can be performed on the pattern formed on the force semiconductor wafer described by taking the reticle pattern as an example.
- It can be used for defect inspection of a pattern formed on a semiconductor wafer or for pattern defect inspection of a reticle used for pattern formation of a semiconductor IC.
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JP2006552973A JP4644210B2 (ja) | 2005-01-14 | 2006-01-13 | パターン欠陥検査方法 |
US11/777,630 US7953269B2 (en) | 2005-01-14 | 2007-07-13 | Method for inspecting pattern defect occured on patterns formed on a substrate |
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JP2005-008158 | 2005-01-14 | ||
JP2005008158 | 2005-01-14 |
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US11/777,630 Continuation US7953269B2 (en) | 2005-01-14 | 2007-07-13 | Method for inspecting pattern defect occured on patterns formed on a substrate |
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PCT/JP2006/300349 WO2006075687A1 (ja) | 2005-01-14 | 2006-01-13 | パターン欠陥検査方法及び半導体装置の製造方法 |
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Cited By (4)
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JP2008047664A (ja) * | 2006-08-14 | 2008-02-28 | Hitachi High-Technologies Corp | パターン検査装置及び半導体検査システム |
JP2008268560A (ja) * | 2007-04-20 | 2008-11-06 | Hitachi High-Technologies Corp | ホットスポット絞り込み装置、ホットスポット絞り込み方法、ホットスポット絞り込みプログラム、ホットスポット検査装置、および、ホットスポット検査方法 |
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JP4644210B2 (ja) * | 2005-01-14 | 2011-03-02 | 富士通セミコンダクター株式会社 | パターン欠陥検査方法 |
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Also Published As
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JP4644210B2 (ja) | 2011-03-02 |
US20070258636A1 (en) | 2007-11-08 |
US7953269B2 (en) | 2011-05-31 |
JPWO2006075687A1 (ja) | 2008-06-12 |
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