WO2006051745A1 - 小流量液体の温調方法及びそのシステム - Google Patents
小流量液体の温調方法及びそのシステム Download PDFInfo
- Publication number
- WO2006051745A1 WO2006051745A1 PCT/JP2005/020339 JP2005020339W WO2006051745A1 WO 2006051745 A1 WO2006051745 A1 WO 2006051745A1 JP 2005020339 W JP2005020339 W JP 2005020339W WO 2006051745 A1 WO2006051745 A1 WO 2006051745A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- liquid
- temperature
- flow rate
- path
- circulation path
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/72—Heating or cooling
- B29C45/73—Heating or cooling of the mould
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/08—Pipe-line systems for liquids or viscous products
- F17D1/14—Conveying liquids or viscous products by pumping
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/6416—With heating or cooling of the system
Definitions
- the present invention relates to a temperature control method and system for a small flow rate liquid suitable for use in semiconductor manufacturing related devices and the like, and in particular, a liquid temperature controlled with high accuracy as a micro flow or intermittent flow.
- the present invention relates to a temperature control method and a system for a small flow rate liquid when supplying.
- the liquid is The body must be supplied in the optical path as a micro flow or intermittent flow, and the force must be supplied in a state of high temperature control (eg, iZioo ° c) with high accuracy in order to suppress fluctuations in the refractive index. Therefore, it is difficult to apply the temperature control technique based on the above-described large flow rate to such a minute flow or intermittent flow high-precision temperature control.
- a state of high temperature control eg, iZioo ° c
- Patent Document 1 Japanese Unexamined Patent Publication No. 2003-86486
- the technical problem of the present invention is that a small stream suitable for use in a semiconductor manufacturing related apparatus or the like.
- An object of the present invention is to provide a temperature control method and system for temperature-controlling a quantity liquid with high accuracy.
- a more specific technical problem of the present invention is a temperature control method and system capable of producing a temperature-controlled liquid with high accuracy while maintaining a flow rate condition for supplying a small flow rate liquid as a micro flow or an intermittent flow. Is to provide.
- an object of the present invention is to provide a method and a system for controlling the temperature of a small flow rate liquid capable of eliminating the mixed impurities.
- the temperature control method for a small flow rate liquid basically pressurizes the liquid supplied through the supply path and introduces it into the circulation path. While circulating the circulation path by a pump, the temperature of the liquid is controlled by a temperature controller interposed in the circulation path, and the temperature-controlled liquid is discharged through the discharge path branched from the circulation path force. Then, it is characterized in that it is supplied to the external device through a discharge valve provided in the discharge path as a minute continuous flow or a minute intermittent flow having a flow rate smaller than at least 1Z2 of the flow rate in the circulation path.
- pure water containing ultrapure water or a high refractive index liquid is used as the liquid supplied through the supply path.
- the circulating fluid flow rate in the above-mentioned circulation path is preferably 2 to 20 times the discharge fluid flow rate in the discharge path, in order to stabilize the liquid temperature.
- the impurities in the liquid circulated by the impurity removing means provided in the circulation path Removed are present in the liquid supplied through the supply path, or there is a possibility that impurities are included in the circulation path.
- a temperature control system for a low flow rate liquid for solving the above-described problems includes a supply including a regulator connected to a liquid supply source and pressurizing the liquid supplied from the supply source.
- a circulation path that is connected to the supply path and that circulates the liquid pressurized by the regulator using a pump in the pressurized state, and circulates in the circulation path interposed in the circulation path
- a temperature controller that controls the temperature of the liquid
- a discharge path including a discharge valve for supplying the temperature-controlled liquid in the circulation path to the external device as a micro continuous flow or a micro intermittent flow having a flow rate smaller than 1Z2 of the flow rate in the circulation path.
- pure water containing ultrapure water or high refractive index liquid is used as the liquid supplied through the supply path. It is desirable to set the flow rate of the discharge path so that the circulating fluid flow rate in the above-mentioned circulation path is 2 to 20 times the discharge liquid flow rate of the discharge path.
- a filter for removing particles in the circulating liquid a vacuum deaeration device for removing gas in the liquid, an ultraviolet oxidation device having an organic oxidation function, and an ionized product It is possible to interpose any one of the ion exchangers for removing the quality, or any of them.
- the above temperature controller in the forward flow path directed from the connection point with the supply path in the circulation path to the branch point with the discharge path, can be interposed, and a tank for reducing fluctuations in liquid volume and temperature fluctuation can be interposed upstream from the temperature controller in the forward flow path.
- a heat exchanger whose temperature is controlled by a Peltier element controlled based on the output of a temperature detector provided downstream of the temperature controller is used.
- the discharge path is formed by double pipe heat exchange.
- a temperature control water circulation device for a double-pipe heat exchanger that controls the temperature of the circulating temperature adjusted water to the same temperature as that of the temperature controller is connected to the outer pipe, or the liquid flowing through the circulation path is connected to the outer pipe. Piping for flowing all or part of it can be connected.
- the liquid pressurized by the regulator is introduced into the circulation path through the supply path, and the pump is maintained while maintaining the pressurized state.
- the liquid that is circulated through the circulation path by the temperature is controlled in the temperature controller interposed in the circulation path, and the discharge valve of the discharge path branched from the circulation path.
- the flow rate is adjusted to be smaller than the flow rate in the circulation path! /, A minute continuous flow or a minute intermittent flow, and supplied to the external device.
- the liquid that has been pressurized and controlled in the above circulation path is constantly circulated in a stable and large amount, so that the liquid temperature is accurately maintained, and the liquid is kept in a micro continuous flow or micro intermittent state. Since the liquid is supplied to the external device in a flow, the liquid kept at the most accurate temperature can be supplied to the external device.
- the accurately temperature-controlled liquid is pressurized in the circulation path interposed between the supply path and the discharge path.
- the liquid whose temperature has been circulated is supplied to the external device by the discharge valve of the discharge path as a flow rate smaller than the flow rate in the circulation path! /, A minute continuous flow or a minute intermittent flow.
- FIG. 1 is a block configuration diagram showing a first embodiment of a temperature control system for a small flow rate liquid according to the present invention.
- FIG. 2 is a block diagram showing a modification of the first embodiment.
- FIG. 3 is a block configuration diagram showing a second embodiment in which the discharge passage in the first embodiment is formed by a double pipe heat exchanger.
- FIG. 4 is a block configuration diagram showing a third embodiment of a heat retention system different from the second embodiment, in which the discharge passage in the first embodiment is formed by a double tube heat exchanger.
- FIG. 5 is a block diagram showing a configuration example of a temperature controller used in the above embodiments.
- FIG. 1 shows a first embodiment having a basic form of a temperature control system according to the present invention. Below, the temperature adjustment method of the micro-volume liquid based on this invention is demonstrated with the structure.
- a regulator 2 for pressurizing the liquid supplied from the supply source 1 is provided in the supply path 3 connected to the supply source 1 of the liquid to be temperature controlled.
- the downstream end of the circuit is connected to a circulation path 5 for circulating the liquid pressurized by the regulator 2 by the pump 6 in the pressurized state.
- a tank 4 in the circulation path 5 is connected. Yes.
- the tank 4 is used to alleviate various disturbances described later that act on the circulation path 5.
- the directing force flows from the tank 4 which is a connection point of the supply path 3 and the circulation path 5 to a branch point of the discharge path 9 described later.
- a pump 6 for forming a circulation flow a temperature controller 7 for keeping the temperature of the circulating liquid constant, and a filter 8 for mainly removing impurities generated in the circulation path 5 are interposed.
- a discharge path 9 branched from the circulation path 5 is provided on the downstream side of the filter 8 in the circulation path 5, and the temperature-controlled liquid is supplied to the discharge path 9 as a minute continuous flow or a minute intermittent flow.
- Outlet 11 Force A discharge valve 10 is provided to supply external equipment.
- the forward flow path branched from the discharge path 9 is connected to the tank 4 by a subsequent reflux path, and the circulation path 5 is formed by the forward flow path and the reflux path.
- the regulator 2 pressurizes the liquid supplied through the supply path 3 and supplies the pressurized liquid to the circulation path 5 in a constant pressurized state. Maintains a pressurized state, prevents foaming of dissolved gas in the liquid, and maintains a constant discharge pressure when supplying to an external device, providing a stable flow rate even when intermittently discharged. So that you can maintain.
- the tank 4 is positioned upstream of the temperature controller 7 in the forward flow path, and the thermal capacity due to the liquid that fills the tank 4 is reduced to reduce thermal fluctuations due to liquid volume fluctuations and temperature fluctuations.
- the time constant of the filter for the thermal disturbance is determined in relation to the circulation flow rate in the circulation path 5.
- the pump 6 circulates the liquid and secures a discharge pressure to the outside for stable discharge.
- the impeller is magnetically levitated to prevent impurities from being released into the circulated liquid. It is desirable to use a special pump that does not generate dust that rotates in contact.
- the temperature controller 7 having a configuration as schematically shown in FIG.
- This temperature controller 7 uses a Peltier element to adjust the temperature, and there are a plurality of heat exchangers on the heat exchange surface 30 in the heat exchanger 30 provided with a temperature adjusting liquid inlet 7a and a temperature adjusting liquid outlet 7b communicating with the circulation path 5.
- the other surface of the Peltier element 31 is joined, and the other surface of the Peltier element 31 is joined to the heat dissipation heat exchanger 32 through which the facility water flows from the facility water inlet 32a toward the outlet 32b.
- a temperature detector 36 for detecting the temperature of the temperature adjusting liquid is provided at the temperature adjusting liquid outlet 7b, and the output of the detector 36 is guided to the temperature controller 37.
- the temperature controller 37 determines the temperature based on the output of the temperature detector 36.
- the energization controller 35 is made to output a signal for controlling energization.
- the inner surface of the heat exchanger 30 can be entirely covered with fluorine resin if necessary.
- the temperature controller 7 adjusts the temperature of the circulating liquid detected by the temperature detector 36 so as to approach the set temperature set in the temperature controller 37 as much as possible.
- the filter 8 constituting the impurity removing means filters and removes impurities such as particles in the circulating liquid that obstructs light transmission.
- impurities such as particles in the circulating liquid that obstructs light transmission.
- an ultrafiltration membrane filter it is desirable to use an ultrafiltration membrane filter.
- the liquid such as ultrapure water supplied through the supply path 3 usually does not contain the impurity, but the liquid contains particles or circulates in the circulation path 5. This filter 8 is effective for removing impurities that contain secondary particles or the like during the ring.
- the discharge valve 10 provided in the discharge path 9 is a force for supplying the temperature-controlled liquid from the liquid outlet 11 to the external device as a minute continuous flow or a minute short flow.
- the amount of the temperature control liquid to be applied is set to be at least smaller than the flow rate 1Z2 in the circulation path 5. More specifically, when the flow rate to be discharged from the discharge valve 10 required in the external device is determined, the circulating fluid flow rate in the circulation path 5 is 2 to 20 of the discharge liquid flow rate discharged from the discharge path 9. Double, preferably 4 to: LO is set.
- the circulating fluid flow rate in the circulation path 5 should be 2 to 20 times the discharge fluid flow rate discharged from the discharge path 9 as described above. It is confirmed by experiments of the present inventors that this numerical range is appropriate.
- the force obtained under the condition of 1 to 0.5 ° C The ⁇ s is a value required by the specifications of the external device, and the ⁇ m is a value determined by the performance of the temperature controller 7. . Therefore, if those values are determined, the ratio GrZGs of the circulating fluid flow rate to the discharge fluid flow rate can be obtained based on the above equation.
- the discharge path 9 is branched from the circulation path 5, and is a flow path for discharging a necessary amount of ultrapure water according to the specifications of the external device.
- the discharge path 9 has a minimum length necessary for supplying the liquid to the external device, and it is necessary to suppress a temperature change while the liquid flows in the discharge path 9. Furthermore, the discharge valve 10 is installed as close as possible to the circulation path 5 so that a large amount of circulating fluid comes to the inlet of the discharge valve 10 to eliminate the influence of outside air temperature, etc. It is desirable to stabilize.
- liquid to be temperature-controlled in the above temperature control system here, pure water containing ultrapure water or a high refractive index liquid such as fluorine oil excellent in light transmittance is used. However, it is not limited to those liquids.
- the liquid temperature of the circulating flow is detected by a temperature detector 36 provided on the downstream side of the temperature controller 7, and the current controller 35 is controlled by the temperature controller 37 based on the output of the temperature detector 36.
- the temperature is adjusted to the set temperature by energization.
- the circulating liquid discharged from the circulation path 5 by supplying a liquid such as ultrapure water to the external device is supplemented by supplying the liquid from the supply source 1 to the tank 4.
- the tank 4 has a large heat capacity corresponding to the amount of liquid contained in the circulation path 5, and due to the effect of this heat capacity, the flow rate fluctuation and temperature fluctuation of the discharged liquid are alleviated in a short time, It can demonstrate an excellent temperature control function. However, even if a slight temperature fluctuation occurs in the circulating fluid, the temperature can be adjusted in a very short time by appropriately setting the capacity of the temperature controller 7 located downstream of the tank 4.
- FIG. 2 shows a modified example in which an ultraviolet oxidation device 15, an ion exchange device 16, and a vacuum deaeration device 17 constituting impurity removal means are attached to the reflux path in the temperature control system of the first embodiment.
- the components common to the first embodiment in this modification are denoted by the same reference numerals as those in the first embodiment, and the description thereof is omitted.
- the ultraviolet oxidation device 15 provided in the circulation path 5 irradiates the circulation liquid with ultraviolet rays, mixes in the liquid supplied through the supply path 3, or is generated in the circulation path 5. It is used to decompose organic matter (microorganisms, etc.) in the soil. Depending on the type of organic substance, for example, a lens in an external device is soiled, and a device for processing a transistor deteriorates the characteristics of the transistor, so that the cause is eliminated.
- the ion exchange device 16 is removed by adsorbing or capturing an ionic substance that is included in the circulating fluid supplied to the external device, which adversely affects the operation of the external device.
- the vacuum degassing device 17 removes the gas dissolved or mixed in the circulating fluid by introducing it into the vacuum region and degassing it. Depending on the operation of the external device, bubbles may be removed. In order to adversely affect, it is provided to eliminate the cause.
- the ultraviolet oxidation device 15, the ion exchange device 16, and the vacuum degassing device 17 can be provided alone in the circulation path 5, or a plurality of them can be appropriately selected and provided together. Further, the filter 8 in this temperature control system, and the impurity removing means such as the ultraviolet ray oxidizer 15, the ion exchanger 16, and the vacuum deaerator 17 provided in addition thereto are: It can be installed at any position in the circulation path 5 in any order.
- the discharge path in the first embodiment is formed by a double-pipe heat exchanger, and the configuration common to the first embodiment is the same as that in the first embodiment. The description is omitted.
- the temperature control system of the second embodiment is used when the external device to which the temperature-controlled circulating fluid is supplied is away from the circulation path 5 and it is difficult to maintain the liquid temperature in the discharge path 9.
- the discharge path 9 is formed by a double-pipe heat exchanger 20 and the inside of the inner pipe is used as the discharge path 9, and both ends of the outer pipe 20a concentrically surrounding the inner pipe are heated. It is connected to a temperature-controlled water circulation device 21 for supplying conditioned heated water via a heated water circulation path 22.
- the temperature control water circulation device 21 adjusts the temperature of the above-mentioned warm water so that it becomes the same temperature as the circulating fluid temperature-controlled by the temperature controller 7, and doubles it through the warm water circulation path 22 using a pump (not shown). It is circulated in the outer tube 20a of the tubular heat exchanger 20, and if necessary, it is possible to use one having substantially the same configuration as the temperature controller 7 described above with reference to FIG.
- the external device that is the supply destination of the temperature-controlled circulating fluid is separated from the circulation path 5 and the liquid in the discharge path 9 Suitable for cases where it is difficult to maintain temperature.
- the discharge path in the first embodiment is formed by a double pipe heat exchanger.
- the temperature control of the circulation path 5 is performed.
- the temperature regulator 7 in the circuit 5 is connected to the double-pipe heat exchanger. It is also used for exchanger 20.
- the circulating fluid in the circulation path 5 is supplied to the double-pipe heat exchanger 20, so that the reflux path in the circulation path 5 is also branched.
- a branch pipe 25 is connected to one end of the outer pipe 20a of the double-pipe heat exchanger 20, and the other end of the outer pipe 20a is connected to the circulation path 5 by a reflux pipe 26.
- the branch pipe 25 is connected downstream from the branch point.
- a first valve 27 is provided in the middle of the branch pipe 25, and a second valve 28 is provided between the branch point of the branch pipe 25 and the connection point of the return pipe 26 in the circulation path 5. Yes.
- the temperature-controlled circulating liquid is supplied into the outer tube 20a of the double-pipe heat exchanger 20, the inner surface of the flow path is covered with fluorine resin. It is desirable.
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Manufacturing & Machinery (AREA)
- Public Health (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Water Supply & Treatment (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Physical Water Treatments (AREA)
- Pipeline Systems (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Flow Control (AREA)
- Control Of Temperature (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/719,347 US7896254B2 (en) | 2004-11-15 | 2005-11-07 | Temperature regulation method and system for low flow rate liquid |
EP05805550.0A EP1814145A4 (en) | 2004-11-15 | 2005-11-07 | TEMPERATURE CONTROL METHOD AND SYSTEM FOR A LIQUID FLOW FLOW RATE |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004330796A JP4326461B2 (ja) | 2004-11-15 | 2004-11-15 | 小流量液体の温調システム |
JP2004-330796 | 2004-11-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006051745A1 true WO2006051745A1 (ja) | 2006-05-18 |
Family
ID=36336425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/020339 WO2006051745A1 (ja) | 2004-11-15 | 2005-11-07 | 小流量液体の温調方法及びそのシステム |
Country Status (7)
Country | Link |
---|---|
US (1) | US7896254B2 (ja) |
EP (1) | EP1814145A4 (ja) |
JP (1) | JP4326461B2 (ja) |
KR (1) | KR100884292B1 (ja) |
CN (1) | CN100552880C (ja) |
TW (1) | TWI267717B (ja) |
WO (1) | WO2006051745A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006222165A (ja) * | 2005-02-08 | 2006-08-24 | Canon Inc | 露光装置 |
US8018573B2 (en) * | 2005-02-22 | 2011-09-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP4661322B2 (ja) * | 2005-04-22 | 2011-03-30 | 株式会社ニコン | 露光装置、デバイスの製造方法及び液体供給方法 |
JP2009152497A (ja) * | 2007-12-21 | 2009-07-09 | Nikon Corp | 液浸システム、露光装置、露光方法及びデバイス製造方法 |
JP5496771B2 (ja) * | 2010-05-13 | 2014-05-21 | 株式会社Kelk | 温度制御装置を用いた温度制御方法 |
DE102010025211A1 (de) * | 2010-06-23 | 2011-12-29 | Pure Engineering Gmbh & Co. Kg | Kontrollsystem mit wenigstens einer Temperaturmesseinrichtung |
JP5791069B2 (ja) * | 2011-03-02 | 2015-10-07 | 国立大学法人三重大学 | 流量計測システム |
US20130255784A1 (en) * | 2012-03-30 | 2013-10-03 | Applied Materials, Inc. | Gas delivery systems and methods of use thereof |
CN103792790B (zh) * | 2012-10-30 | 2016-09-14 | 沈阳芯源微电子设备有限公司 | 光刻胶与显影液的恒温控制系统 |
CN103176369B (zh) * | 2013-03-13 | 2016-03-02 | 华中科技大学 | 用于浸没式光刻的浸液温控装置 |
JP6020416B2 (ja) * | 2013-11-01 | 2016-11-02 | 東京エレクトロン株式会社 | 処理液供給装置及び処理液供給方法 |
CN108074837B (zh) * | 2016-11-15 | 2019-11-12 | 沈阳芯源微电子设备股份有限公司 | 一种半导体工艺水保温系统 |
CN113196199B (zh) | 2019-01-10 | 2023-09-22 | 株式会社Kelk | 温度控制系统以及温度控制方法 |
JP7166972B2 (ja) * | 2019-03-26 | 2022-11-08 | Ckd株式会社 | 温度調整用流量制御ユニット |
WO2021205199A1 (en) * | 2020-04-06 | 2021-10-14 | Edwards Korea Limited | Pipe arrangement |
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2004
- 2004-11-15 JP JP2004330796A patent/JP4326461B2/ja not_active Expired - Fee Related
-
2005
- 2005-11-01 TW TW94138285A patent/TWI267717B/zh not_active IP Right Cessation
- 2005-11-07 US US11/719,347 patent/US7896254B2/en not_active Expired - Fee Related
- 2005-11-07 CN CNB2005800389466A patent/CN100552880C/zh not_active Expired - Fee Related
- 2005-11-07 WO PCT/JP2005/020339 patent/WO2006051745A1/ja active Application Filing
- 2005-11-07 KR KR1020077013536A patent/KR100884292B1/ko not_active IP Right Cessation
- 2005-11-07 EP EP05805550.0A patent/EP1814145A4/en not_active Withdrawn
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Title |
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Also Published As
Publication number | Publication date |
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KR100884292B1 (ko) | 2009-02-18 |
CN100552880C (zh) | 2009-10-21 |
EP1814145A1 (en) | 2007-08-01 |
TW200619890A (en) | 2006-06-16 |
JP4326461B2 (ja) | 2009-09-09 |
TWI267717B (en) | 2006-12-01 |
US7896254B2 (en) | 2011-03-01 |
CN101076876A (zh) | 2007-11-21 |
US20090145489A1 (en) | 2009-06-11 |
JP2006140410A (ja) | 2006-06-01 |
EP1814145A4 (en) | 2013-11-06 |
KR20070090925A (ko) | 2007-09-06 |
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