WO2005020275A3 - 縦型半導体装置 - Google Patents

縦型半導体装置 Download PDF

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Publication number
WO2005020275A3
WO2005020275A3 PCT/JP2004/011969 JP2004011969W WO2005020275A3 WO 2005020275 A3 WO2005020275 A3 WO 2005020275A3 JP 2004011969 W JP2004011969 W JP 2004011969W WO 2005020275 A3 WO2005020275 A3 WO 2005020275A3
Authority
WO
WIPO (PCT)
Prior art keywords
region
column
semiconductor device
vertical semiconductor
termination
Prior art date
Application number
PCT/JP2004/011969
Other languages
English (en)
French (fr)
Other versions
WO2005020275A2 (ja
Inventor
Shoichi Yamauchi
Hitoshi Yamaguchi
Takashi Suzuki
Kyoko Nakashima
Original Assignee
Denso Corp
Shoichi Yamauchi
Hitoshi Yamaguchi
Takashi Suzuki
Kyoko Nakashima
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp, Shoichi Yamauchi, Hitoshi Yamaguchi, Takashi Suzuki, Kyoko Nakashima filed Critical Denso Corp
Priority to US10/549,151 priority Critical patent/US7170119B2/en
Priority to CN2004800200356A priority patent/CN1823421B/zh
Priority to DE112004001163.9T priority patent/DE112004001163B4/de
Publication of WO2005020275A2 publication Critical patent/WO2005020275A2/ja
Publication of WO2005020275A3 publication Critical patent/WO2005020275A3/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7811—Vertical DMOS transistors, i.e. VDMOS transistors with an edge termination structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
    • H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
    • H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
    • H01L29/063—Reduced surface field [RESURF] pn-junction structures
    • H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
PCT/JP2004/011969 2003-08-20 2004-08-20 縦型半導体装置 WO2005020275A2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/549,151 US7170119B2 (en) 2003-08-20 2004-08-20 Vertical type semiconductor device
CN2004800200356A CN1823421B (zh) 2003-08-20 2004-08-20 垂直型半导体装置
DE112004001163.9T DE112004001163B4 (de) 2003-08-20 2004-08-20 Halbleiteranordnung eines vertikalen Typs

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003295946 2003-08-20
JP2003-295946 2003-08-20

Publications (2)

Publication Number Publication Date
WO2005020275A2 WO2005020275A2 (ja) 2005-03-03
WO2005020275A3 true WO2005020275A3 (ja) 2005-04-14

Family

ID=34213574

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2004/011969 WO2005020275A2 (ja) 2003-08-20 2004-08-20 縦型半導体装置

Country Status (5)

Country Link
US (1) US7170119B2 (ja)
KR (1) KR100726383B1 (ja)
CN (1) CN1823421B (ja)
DE (1) DE112004001163B4 (ja)
WO (1) WO2005020275A2 (ja)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7638841B2 (en) 2003-05-20 2009-12-29 Fairchild Semiconductor Corporation Power semiconductor devices and methods of manufacture
JP4773716B2 (ja) 2004-03-31 2011-09-14 株式会社デンソー 半導体基板の製造方法
JP4825424B2 (ja) * 2005-01-18 2011-11-30 株式会社東芝 電力用半導体装置
JP4840738B2 (ja) * 2005-03-15 2011-12-21 株式会社デンソー 半導体装置とその製造方法
JP5074671B2 (ja) 2005-04-28 2012-11-14 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US7285469B2 (en) 2005-09-02 2007-10-23 Intersil Americas Bipolar method and structure having improved BVCEO/RCS trade-off made with depletable collector columns
US7687851B2 (en) * 2005-11-23 2010-03-30 M-Mos Semiconductor Sdn. Bhd. High density trench MOSFET with reduced on-resistance
US20080017897A1 (en) * 2006-01-30 2008-01-24 Kabushiki Kaisha Toshiba Semiconductor device and method of manufacturing same
US7595542B2 (en) * 2006-03-13 2009-09-29 Fairchild Semiconductor Corporation Periphery design for charge balance power devices
US7592668B2 (en) * 2006-03-30 2009-09-22 Fairchild Semiconductor Corporation Charge balance techniques for power devices
KR101279574B1 (ko) * 2006-11-15 2013-06-27 페어차일드코리아반도체 주식회사 고전압 반도체 소자 및 그 제조 방법
WO2009039441A1 (en) * 2007-09-21 2009-03-26 Fairchild Semiconductor Corporation Superjunction structures for power devices and methods of manufacture
JP4748149B2 (ja) * 2007-12-24 2011-08-17 株式会社デンソー 半導体装置
US20120273916A1 (en) 2011-04-27 2012-11-01 Yedinak Joseph A Superjunction Structures for Power Devices and Methods of Manufacture
US8304829B2 (en) 2008-12-08 2012-11-06 Fairchild Semiconductor Corporation Trench-based power semiconductor devices with increased breakdown voltage characteristics
US8174067B2 (en) 2008-12-08 2012-05-08 Fairchild Semiconductor Corporation Trench-based power semiconductor devices with increased breakdown voltage characteristics
US8227855B2 (en) * 2009-02-09 2012-07-24 Fairchild Semiconductor Corporation Semiconductor devices with stable and controlled avalanche characteristics and methods of fabricating the same
US8148749B2 (en) * 2009-02-19 2012-04-03 Fairchild Semiconductor Corporation Trench-shielded semiconductor device
US8049276B2 (en) 2009-06-12 2011-11-01 Fairchild Semiconductor Corporation Reduced process sensitivity of electrode-semiconductor rectifiers
US8575695B2 (en) * 2009-11-30 2013-11-05 Alpha And Omega Semiconductor Incorporated Lateral super junction device with high substrate-drain breakdown and built-in avalanche clamp diode
CN102157377B (zh) * 2010-02-11 2012-10-03 上海华虹Nec电子有限公司 超结vdmos器件及其制造方法
US8629020B2 (en) 2010-10-25 2014-01-14 Electronics & Telecommunications Research Institute Semiconductor device and method of fabricating the same
JP5719167B2 (ja) * 2010-12-28 2015-05-13 ルネサスエレクトロニクス株式会社 半導体装置
US8836028B2 (en) 2011-04-27 2014-09-16 Fairchild Semiconductor Corporation Superjunction structures for power devices and methods of manufacture
US8673700B2 (en) 2011-04-27 2014-03-18 Fairchild Semiconductor Corporation Superjunction structures for power devices and methods of manufacture
US8786010B2 (en) 2011-04-27 2014-07-22 Fairchild Semiconductor Corporation Superjunction structures for power devices and methods of manufacture
US8772868B2 (en) 2011-04-27 2014-07-08 Fairchild Semiconductor Corporation Superjunction structures for power devices and methods of manufacture
WO2013035655A1 (ja) * 2011-09-09 2013-03-14 株式会社村田製作所 モジュール基板
WO2013103514A1 (en) 2012-01-04 2013-07-11 The Trustees Of The Stevens Institute Of Technology Clay-containing thin films as carriers of absorbed molecules
JP6560142B2 (ja) * 2016-02-26 2019-08-14 トヨタ自動車株式会社 スイッチング素子
JP6560141B2 (ja) * 2016-02-26 2019-08-14 トヨタ自動車株式会社 スイッチング素子
US20170338302A1 (en) * 2016-05-23 2017-11-23 Infineon Technologies Ag Power Semiconductor Device with Charge Balance Design
US10002920B1 (en) * 2016-12-14 2018-06-19 General Electric Company System and method for edge termination of super-junction (SJ) devices
CN107302023A (zh) * 2017-07-13 2017-10-27 深圳市金誉半导体有限公司 超结型沟槽功率mosfet器件及其制备方法
CN109713038A (zh) * 2017-10-26 2019-05-03 深圳尚阳通科技有限公司 一种超级结器件及制造方法
CN111341829B (zh) * 2018-12-18 2022-08-30 深圳尚阳通科技有限公司 超结结构及其制造方法
CN111755504B (zh) * 2020-07-13 2024-02-23 电子科技大学 一种横向变掺杂终端结构及设计方法和制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001135819A (ja) * 1999-08-23 2001-05-18 Fuji Electric Co Ltd 超接合半導体素子
JP2002184985A (ja) * 2000-12-18 2002-06-28 Toyota Central Res & Dev Lab Inc 半導体装置
JP2002280555A (ja) * 2001-03-15 2002-09-27 Fuji Electric Co Ltd 半導体装置
JP2003224273A (ja) * 2002-01-30 2003-08-08 Fuji Electric Co Ltd 半導体装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4765012B2 (ja) 2000-02-09 2011-09-07 富士電機株式会社 半導体装置及びその製造方法
EP1267415A3 (en) 2001-06-11 2009-04-15 Kabushiki Kaisha Toshiba Power semiconductor device having resurf layer
JP3973395B2 (ja) * 2001-10-16 2007-09-12 株式会社豊田中央研究所 半導体装置とその製造方法
CN1181559C (zh) * 2001-11-21 2004-12-22 同济大学 一种半导体器件
US7135718B2 (en) 2002-02-20 2006-11-14 Shindengen Electric Manufacturing Co., Ltd. Diode device and transistor device
JP3908572B2 (ja) 2002-03-18 2007-04-25 株式会社東芝 半導体素子
JP3925319B2 (ja) 2002-06-14 2007-06-06 富士電機デバイステクノロジー株式会社 半導体素子

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001135819A (ja) * 1999-08-23 2001-05-18 Fuji Electric Co Ltd 超接合半導体素子
JP2002184985A (ja) * 2000-12-18 2002-06-28 Toyota Central Res & Dev Lab Inc 半導体装置
JP2002280555A (ja) * 2001-03-15 2002-09-27 Fuji Electric Co Ltd 半導体装置
JP2003224273A (ja) * 2002-01-30 2003-08-08 Fuji Electric Co Ltd 半導体装置

Also Published As

Publication number Publication date
DE112004001163T5 (de) 2006-07-06
US7170119B2 (en) 2007-01-30
CN1823421B (zh) 2010-04-28
DE112004001163B4 (de) 2017-12-28
CN1823421A (zh) 2006-08-23
KR20060014044A (ko) 2006-02-14
WO2005020275A2 (ja) 2005-03-03
KR100726383B1 (ko) 2007-06-08
US20060170037A1 (en) 2006-08-03

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