WO2002082524A1 - Dispositif de traitement thermique - Google Patents
Dispositif de traitement thermique Download PDFInfo
- Publication number
- WO2002082524A1 WO2002082524A1 PCT/JP2002/002710 JP0202710W WO02082524A1 WO 2002082524 A1 WO2002082524 A1 WO 2002082524A1 JP 0202710 W JP0202710 W JP 0202710W WO 02082524 A1 WO02082524 A1 WO 02082524A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- heat treatment
- treatment apparatus
- thermocouple
- layer
- film
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 21
- 239000010703 silicon Substances 0.000 claims abstract description 21
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 20
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims description 62
- 238000012545 processing Methods 0.000 claims description 56
- 229910052751 metal Inorganic materials 0.000 claims description 46
- 239000002184 metal Substances 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 20
- 230000001681 protective effect Effects 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- 238000010292 electrical insulation Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 13
- 230000001052 transient effect Effects 0.000 abstract description 8
- 230000004044 response Effects 0.000 abstract description 7
- 229910000629 Rh alloy Inorganic materials 0.000 abstract description 6
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 abstract description 6
- 230000003449 preventive effect Effects 0.000 abstract 2
- 235000012431 wafers Nutrition 0.000 description 59
- 239000004065 semiconductor Substances 0.000 description 41
- 238000000034 method Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 238000002310 reflectometry Methods 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/04—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/20—Compensating for effects of temperature changes other than those to be measured, e.g. changes in ambient temperature
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/473,248 US7141765B2 (en) | 2001-03-30 | 2002-03-20 | Heat treating device |
DE60219903T DE60219903T2 (de) | 2001-03-30 | 2002-03-20 | Wärmebehandlungseinrichtung |
EP02705408A EP1376667B1 (en) | 2001-03-30 | 2002-03-20 | Heat treating device |
KR10-2003-7011125A KR20030078936A (ko) | 2001-03-30 | 2002-03-20 | 열처리 장치 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001-100032 | 2001-03-30 | ||
JP2001100032A JP4210041B2 (ja) | 2001-03-30 | 2001-03-30 | 熱処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002082524A1 true WO2002082524A1 (fr) | 2002-10-17 |
Family
ID=18953512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/002710 WO2002082524A1 (fr) | 2001-03-30 | 2002-03-20 | Dispositif de traitement thermique |
Country Status (8)
Country | Link |
---|---|
US (1) | US7141765B2 (ja) |
EP (1) | EP1376667B1 (ja) |
JP (1) | JP4210041B2 (ja) |
KR (1) | KR20030078936A (ja) |
CN (1) | CN1257537C (ja) |
DE (1) | DE60219903T2 (ja) |
TW (1) | TWI248129B (ja) |
WO (1) | WO2002082524A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4270991B2 (ja) | 2002-10-11 | 2009-06-03 | 株式会社リコー | 情報記録装置、情報記録方法、情報記録用プログラム、情報記録用プログラムを記憶する記憶媒体、及び情報記録システム |
JP3802889B2 (ja) * | 2003-07-01 | 2006-07-26 | 東京エレクトロン株式会社 | 熱処理装置及びその校正方法 |
JP5647502B2 (ja) * | 2010-02-23 | 2014-12-24 | 株式会社日立国際電気 | 熱処理装置、半導体装置の製造方法及び基板処理方法。 |
JP5451793B2 (ja) * | 2012-02-10 | 2014-03-26 | 東京エレクトロン株式会社 | 温度センサ及び熱処理装置 |
GB201303189D0 (en) * | 2013-02-22 | 2013-04-10 | Weston Aerospace Ltd | Method of producing a thermocouple having a tailored thermoelectric response |
CA2841756C (en) | 2013-02-22 | 2023-09-19 | Weston Aerospace Limited | Method of producing a thermocouple having a tailored thermoelectric response |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121431U (ja) * | 1987-01-30 | 1988-08-05 | ||
JPH06229837A (ja) * | 1993-02-08 | 1994-08-19 | Sumitomo Electric Ind Ltd | 被覆熱電対の製造方法および被覆熱電対用線材の製造方法 |
JPH11224130A (ja) * | 1998-02-06 | 1999-08-17 | Bridgestone Corp | 温度の調節方法 |
JP2000077346A (ja) * | 1998-08-26 | 2000-03-14 | Tokyo Electron Ltd | 熱処理装置 |
JP2000088667A (ja) * | 1998-09-16 | 2000-03-31 | Isuzu Ceramics Res Inst Co Ltd | 繊維補強型熱電対 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US567689A (en) * | 1896-09-15 | Sash-fastener | ||
DK170450B1 (da) * | 1986-12-12 | 1995-09-04 | Matsushita Electric Ind Co Ltd | Termisk følesystem |
US5106786A (en) * | 1989-10-23 | 1992-04-21 | At&T Bell Laboratories | Thin coatings for use in semiconductor integrated circuits and processes as antireflection coatings consisting of tungsten silicide |
JPH0824193B2 (ja) * | 1990-10-16 | 1996-03-06 | 工業技術院長 | 平板型光弁駆動用半導体装置の製造方法 |
JP3024661B2 (ja) * | 1990-11-09 | 2000-03-21 | セイコーエプソン株式会社 | アクティブマトリクス基板及びその製造方法 |
JPH07181085A (ja) | 1993-12-24 | 1995-07-18 | Sumitomo Electric Ind Ltd | 測温接点が絶縁被覆された熱電対及びその製造方法 |
JP3307181B2 (ja) * | 1995-07-31 | 2002-07-24 | ソニー株式会社 | 透過型表示装置 |
US5917563A (en) * | 1995-10-16 | 1999-06-29 | Sharp Kabushiki Kaisha | Liquid crystal display device having an insulation film made of organic material between an additional capacity and a bus line |
KR100268926B1 (ko) * | 1996-12-31 | 2000-10-16 | 김영환 | 반도체소자의 배선 형성방법 |
US5889302A (en) * | 1997-04-21 | 1999-03-30 | Advanced Micro Devices, Inc. | Multilayer floating gate field effect transistor structure for use in integrated circuit devices |
JP4312851B2 (ja) * | 1998-04-27 | 2009-08-12 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
JP3702096B2 (ja) * | 1998-06-08 | 2005-10-05 | 三洋電機株式会社 | 薄膜トランジスタ及び表示装置 |
JP3141860B2 (ja) * | 1998-10-28 | 2001-03-07 | ソニー株式会社 | 液晶表示装置の製造方法 |
EP1031873A3 (en) * | 1999-02-23 | 2005-02-23 | Sel Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and fabrication method thereof |
JP4700156B2 (ja) * | 1999-09-27 | 2011-06-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP2002319679A (ja) * | 2001-04-20 | 2002-10-31 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
-
2001
- 2001-03-30 JP JP2001100032A patent/JP4210041B2/ja not_active Expired - Fee Related
-
2002
- 2002-03-20 WO PCT/JP2002/002710 patent/WO2002082524A1/ja active IP Right Grant
- 2002-03-20 EP EP02705408A patent/EP1376667B1/en not_active Expired - Fee Related
- 2002-03-20 KR KR10-2003-7011125A patent/KR20030078936A/ko not_active Application Discontinuation
- 2002-03-20 DE DE60219903T patent/DE60219903T2/de not_active Expired - Lifetime
- 2002-03-20 US US10/473,248 patent/US7141765B2/en not_active Expired - Fee Related
- 2002-03-20 CN CNB028057686A patent/CN1257537C/zh not_active Expired - Fee Related
- 2002-03-27 TW TW091106048A patent/TWI248129B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121431U (ja) * | 1987-01-30 | 1988-08-05 | ||
JPH06229837A (ja) * | 1993-02-08 | 1994-08-19 | Sumitomo Electric Ind Ltd | 被覆熱電対の製造方法および被覆熱電対用線材の製造方法 |
JPH11224130A (ja) * | 1998-02-06 | 1999-08-17 | Bridgestone Corp | 温度の調節方法 |
JP2000077346A (ja) * | 1998-08-26 | 2000-03-14 | Tokyo Electron Ltd | 熱処理装置 |
JP2000088667A (ja) * | 1998-09-16 | 2000-03-31 | Isuzu Ceramics Res Inst Co Ltd | 繊維補強型熱電対 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1376667A4 * |
Also Published As
Publication number | Publication date |
---|---|
CN1494738A (zh) | 2004-05-05 |
JP4210041B2 (ja) | 2009-01-14 |
EP1376667A4 (en) | 2005-01-12 |
US7141765B2 (en) | 2006-11-28 |
CN1257537C (zh) | 2006-05-24 |
EP1376667B1 (en) | 2007-05-02 |
DE60219903D1 (de) | 2007-06-14 |
TWI248129B (en) | 2006-01-21 |
JP2002299335A (ja) | 2002-10-11 |
EP1376667A1 (en) | 2004-01-02 |
DE60219903T2 (de) | 2008-01-17 |
US20040115585A1 (en) | 2004-06-17 |
KR20030078936A (ko) | 2003-10-08 |
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