WO2001045930A1 - Film multicouche et son procede de fabrication - Google Patents
Film multicouche et son procede de fabrication Download PDFInfo
- Publication number
- WO2001045930A1 WO2001045930A1 PCT/JP1999/007237 JP9907237W WO0145930A1 WO 2001045930 A1 WO2001045930 A1 WO 2001045930A1 JP 9907237 W JP9907237 W JP 9907237W WO 0145930 A1 WO0145930 A1 WO 0145930A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- film
- metal
- deposited
- resin layer
- multilayer film
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 20
- 150000001875 compounds Chemical class 0.000 claims abstract description 93
- 239000002184 metal Substances 0.000 claims abstract description 54
- 229910052751 metal Inorganic materials 0.000 claims abstract description 53
- 239000002952 polymeric resin Substances 0.000 claims abstract description 50
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 48
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 31
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 239000003990 capacitor Substances 0.000 claims abstract description 9
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229920000642 polymer Polymers 0.000 claims abstract description 7
- 239000005977 Ethylene Substances 0.000 claims abstract description 6
- -1 acrylyl group Chemical group 0.000 claims description 28
- 238000007740 vapor deposition Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 22
- 238000000151 deposition Methods 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 235000021122 unsaturated fatty acids Nutrition 0.000 claims description 14
- 239000003921 oil Substances 0.000 claims description 11
- 235000019198 oils Nutrition 0.000 claims description 11
- 239000002253 acid Substances 0.000 claims description 10
- 235000020661 alpha-linolenic acid Nutrition 0.000 claims description 8
- DTOSIQBPPRVQHS-PDBXOOCHSA-N alpha-linolenic acid Chemical compound CC\C=C/C\C=C/C\C=C/CCCCCCCC(O)=O DTOSIQBPPRVQHS-PDBXOOCHSA-N 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 8
- 229960004488 linolenic acid Drugs 0.000 claims description 8
- KQQKGWQCNNTQJW-UHFFFAOYSA-N linolenic acid Natural products CC=CCCC=CCC=CCCCCCCCC(O)=O KQQKGWQCNNTQJW-UHFFFAOYSA-N 0.000 claims description 8
- 239000003549 soybean oil Substances 0.000 claims description 8
- 235000012424 soybean oil Nutrition 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000001465 metallisation Methods 0.000 claims description 7
- 150000004670 unsaturated fatty acids Chemical class 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 6
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims description 5
- 229910052740 iodine Inorganic materials 0.000 claims description 5
- 239000011630 iodine Substances 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 238000004806 packaging method and process Methods 0.000 claims description 5
- 238000009832 plasma treatment Methods 0.000 claims description 5
- 230000000379 polymerizing effect Effects 0.000 claims description 5
- 150000003505 terpenes Chemical class 0.000 claims description 5
- 235000007586 terpenes Nutrition 0.000 claims description 5
- GLZPCOQZEFWAFX-UHFFFAOYSA-N Geraniol Chemical compound CC(C)=CCCC(C)=CCO GLZPCOQZEFWAFX-UHFFFAOYSA-N 0.000 claims description 4
- 125000004429 atom Chemical group 0.000 claims description 4
- UAHWPYUMFXYFJY-UHFFFAOYSA-N beta-myrcene Chemical compound CC(C)=CCCC(=C)C=C UAHWPYUMFXYFJY-UHFFFAOYSA-N 0.000 claims description 4
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 claims description 4
- CDOSHBSSFJOMGT-UHFFFAOYSA-N linalool Chemical compound CC(C)=CCCC(C)(O)C=C CDOSHBSSFJOMGT-UHFFFAOYSA-N 0.000 claims description 4
- 239000005445 natural material Substances 0.000 claims description 4
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 125000005456 glyceride group Chemical group 0.000 claims description 3
- 125000005641 methacryl group Chemical group 0.000 claims description 3
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 3
- 239000002383 tung oil Substances 0.000 claims description 3
- FQTLCLSUCSAZDY-UHFFFAOYSA-N (+) E(S) nerolidol Natural products CC(C)=CCCC(C)=CCCC(C)(O)C=C FQTLCLSUCSAZDY-UHFFFAOYSA-N 0.000 claims description 2
- 239000001490 (3R)-3,7-dimethylocta-1,6-dien-3-ol Substances 0.000 claims description 2
- CUXYLFPMQMFGPL-UHFFFAOYSA-N (9Z,11E,13E)-9,11,13-Octadecatrienoic acid Natural products CCCCC=CC=CC=CCCCCCCCC(O)=O CUXYLFPMQMFGPL-UHFFFAOYSA-N 0.000 claims description 2
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 claims description 2
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 claims description 2
- CDOSHBSSFJOMGT-JTQLQIEISA-N (R)-linalool Natural products CC(C)=CCC[C@@](C)(O)C=C CDOSHBSSFJOMGT-JTQLQIEISA-N 0.000 claims description 2
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 claims description 2
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 claims description 2
- WTEVQBCEXWBHNA-UHFFFAOYSA-N Citral Natural products CC(C)=CCCC(C)=CC=O WTEVQBCEXWBHNA-UHFFFAOYSA-N 0.000 claims description 2
- 239000005792 Geraniol Substances 0.000 claims description 2
- GLZPCOQZEFWAFX-YFHOEESVSA-N Geraniol Natural products CC(C)=CCC\C(C)=C/CO GLZPCOQZEFWAFX-YFHOEESVSA-N 0.000 claims description 2
- FQTLCLSUCSAZDY-ATGUSINASA-N Nerolidol Chemical compound CC(C)=CCC\C(C)=C\CC[C@](C)(O)C=C FQTLCLSUCSAZDY-ATGUSINASA-N 0.000 claims description 2
- 239000005642 Oleic acid Substances 0.000 claims description 2
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 claims description 2
- 235000019485 Safflower oil Nutrition 0.000 claims description 2
- CUXYLFPMQMFGPL-SUTYWZMXSA-N all-trans-octadeca-9,11,13-trienoic acid Chemical compound CCCC\C=C\C=C\C=C\CCCCCCCC(O)=O CUXYLFPMQMFGPL-SUTYWZMXSA-N 0.000 claims description 2
- VYBREYKSZAROCT-UHFFFAOYSA-N alpha-myrcene Natural products CC(=C)CCCC(=C)C=C VYBREYKSZAROCT-UHFFFAOYSA-N 0.000 claims description 2
- 239000004359 castor oil Substances 0.000 claims description 2
- 235000019438 castor oil Nutrition 0.000 claims description 2
- 229940043350 citral Drugs 0.000 claims description 2
- 239000003240 coconut oil Substances 0.000 claims description 2
- 235000019864 coconut oil Nutrition 0.000 claims description 2
- WTEVQBCEXWBHNA-JXMROGBWSA-N geranial Chemical compound CC(C)=CCC\C(C)=C\C=O WTEVQBCEXWBHNA-JXMROGBWSA-N 0.000 claims description 2
- 229940113087 geraniol Drugs 0.000 claims description 2
- ZEMPKEQAKRGZGQ-XOQCFJPHSA-N glycerol triricinoleate Natural products CCCCCC[C@@H](O)CC=CCCCCCCCC(=O)OC[C@@H](COC(=O)CCCCCCCC=CC[C@@H](O)CCCCCC)OC(=O)CCCCCCCC=CC[C@H](O)CCCCCC ZEMPKEQAKRGZGQ-XOQCFJPHSA-N 0.000 claims description 2
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 claims description 2
- 235000001510 limonene Nutrition 0.000 claims description 2
- 229940087305 limonene Drugs 0.000 claims description 2
- 229930007744 linalool Natural products 0.000 claims description 2
- 239000000944 linseed oil Substances 0.000 claims description 2
- 235000021388 linseed oil Nutrition 0.000 claims description 2
- WASNIKZYIWZQIP-AWEZNQCLSA-N nerolidol Natural products CC(=CCCC(=CCC[C@@H](O)C=C)C)C WASNIKZYIWZQIP-AWEZNQCLSA-N 0.000 claims description 2
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 claims description 2
- 229960002969 oleic acid Drugs 0.000 claims description 2
- 235000021313 oleic acid Nutrition 0.000 claims description 2
- 239000003346 palm kernel oil Substances 0.000 claims description 2
- 235000019865 palm kernel oil Nutrition 0.000 claims description 2
- WBHHMMIMDMUBKC-XLNAKTSKSA-N ricinelaidic acid Chemical compound CCCCCC[C@@H](O)C\C=C\CCCCCCCC(O)=O WBHHMMIMDMUBKC-XLNAKTSKSA-N 0.000 claims description 2
- 229960003656 ricinoleic acid Drugs 0.000 claims description 2
- FEUQNCSVHBHROZ-UHFFFAOYSA-N ricinoleic acid Natural products CCCCCCC(O[Si](C)(C)C)CC=CCCCCCCCC(=O)OC FEUQNCSVHBHROZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000003813 safflower oil Substances 0.000 claims description 2
- 235000005713 safflower oil Nutrition 0.000 claims description 2
- 239000003784 tall oil Substances 0.000 claims description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 229920006254 polymer film Polymers 0.000 claims 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 abstract description 9
- 125000005395 methacrylic acid group Chemical group 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 229920006280 packaging film Polymers 0.000 abstract description 3
- 239000012785 packaging film Substances 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 136
- 239000010410 layer Substances 0.000 description 47
- 230000004888 barrier function Effects 0.000 description 30
- 239000001301 oxygen Substances 0.000 description 22
- 229910052760 oxygen Inorganic materials 0.000 description 22
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 21
- 239000000178 monomer Substances 0.000 description 16
- 239000007921 spray Substances 0.000 description 14
- 238000010030 laminating Methods 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 239000004743 Polypropylene Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 6
- 229920001155 polypropylene Polymers 0.000 description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910001882 dioxygen Inorganic materials 0.000 description 5
- 238000004132 cross linking Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 150000002894 organic compounds Chemical class 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- OYHQOLUKZRVURQ-HZJYTTRNSA-N Linoleic acid Chemical compound CCCCC\C=C/C\C=C/CCCCCCCC(O)=O OYHQOLUKZRVURQ-HZJYTTRNSA-N 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 229920000092 linear low density polyethylene Polymers 0.000 description 3
- 239000004707 linear low-density polyethylene Substances 0.000 description 3
- 235000020778 linoleic acid Nutrition 0.000 description 3
- OYHQOLUKZRVURQ-IXWMQOLASA-N linoleic acid Natural products CCCCC\C=C/C\C=C\CCCCCCCC(O)=O OYHQOLUKZRVURQ-IXWMQOLASA-N 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012719 thermal polymerization Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 206010040880 Skin irritation Diseases 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 208000028659 discharge Diseases 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000003925 fat Substances 0.000 description 2
- 235000019197 fats Nutrition 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000011104 metalized film Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000036556 skin irritation Effects 0.000 description 2
- 231100000475 skin irritation Toxicity 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229920006378 biaxially oriented polypropylene Polymers 0.000 description 1
- 239000011127 biaxially oriented polypropylene Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229920001684 low density polyethylene Polymers 0.000 description 1
- 239000004702 low-density polyethylene Substances 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
- B05D5/067—Metallic effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
- B05D5/067—Metallic effect
- B05D5/068—Metallic effect achieved by multilayers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/308—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0008—Electrical discharge treatment, e.g. corona, plasma treatment; wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/042—Coating with two or more layers, where at least one layer of a composition contains a polymer binder
- C08J7/0423—Coating with two or more layers, where at least one layer of a composition contains a polymer binder with at least one layer of inorganic material and at least one layer of a composition containing a polymer binder
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/043—Improving the adhesiveness of the coatings per se, e.g. forming primers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/048—Forming gas barrier coatings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/12—Chemical modification
- C08J7/16—Chemical modification with polymerisable compounds
- C08J7/18—Chemical modification with polymerisable compounds using wave energy or particle radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/14—Organic dielectrics
- H01G4/18—Organic dielectrics of synthetic material, e.g. derivatives of cellulose
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
- B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
- B05D3/065—After-treatment
- B05D3/067—Curing or cross-linking the coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
- B05D3/145—After-treatment
- B05D3/147—Curing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B2038/0052—Other operations not otherwise provided for
- B32B2038/0092—Metallizing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/724—Permeability to gases, adsorption
- B32B2307/7242—Non-permeable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/08—Treatment by energy or chemical effects by wave energy or particle radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/08—Treatment by energy or chemical effects by wave energy or particle radiation
- B32B2310/0806—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation
- B32B2310/0831—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation using UV radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/08—Treatment by energy or chemical effects by wave energy or particle radiation
- B32B2310/0875—Treatment by energy or chemical effects by wave energy or particle radiation using particle radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/08—Treatment by energy or chemical effects by wave energy or particle radiation
- B32B2310/0875—Treatment by energy or chemical effects by wave energy or particle radiation using particle radiation
- B32B2310/0881—Treatment by energy or chemical effects by wave energy or particle radiation using particle radiation using ion-radiation, e.g. alpha-rays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/14—Corona, ionisation, electrical discharge, plasma treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2323/00—Polyalkenes
- B32B2323/04—Polyethylene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2439/00—Containers; Receptacles
- B32B2439/40—Closed containers
Definitions
- the present invention relates to a multilayer film used as a metal-deposited film for packaging having gas barrier properties, a metal-deposited film for capacitors, and the like.
- Metal such as aluminum or S i O x, A 1 2 ⁇ poly ethylene terephthalate evening acetate film of metal oxide such as x, deposited film formed by depositing such a polypropylene film is excellent in oxygen barrier property or water vapor barrier property It is widely used as a food packaging film.
- the disadvantages of these vapor-deposited films are that when the film is pulled, cracks occur in the metal-deposited film or metal oxide-deposited film, and the barrier performance is reduced. Since it is pulled while being bent in one lane, the problem is that the deposited film cracks and the gas barrier performance is reduced.
- a metal oxide vapor deposition film when printing on the metal oxide vapor deposition film, the metal oxide is chemically changed by the printing ink, and the barrier performance is also a serious problem.
- U.S. Pat. No. 5,440,446 discloses a method in which a metal-deposited film is provided on a sheet-like material, and an acryl monomer is vapor-deposited on the metal-deposited film.
- An acrylic polymer resin layer is provided in the same manner on a metal-deposited film for a capacitor provided with a polymer resin layer, and a sheet-like material, and then a metal-deposited film is provided.
- a metallized film for packaging provided with an acryl polymer resin layer has been proposed.
- US Pat. No. 4,842,893 and US Pat. No. 5,032,461 disclose acrylic (methacrylic) on a vapor-deposited metal film in a vapor deposition machine for vapor-depositing metal.
- the polymer resin layer formed from acrylic (methacrylic) acid ester has low adhesion to the metal deposition film below. Furthermore, in lamination with another film to be made into a bag, a melt-extruded olefin resin (for example, LLDPE) laminated as an adhesive on the polymer resin layer, or an adhesive force with the adhesive is weak, It easily peels off.
- a melt-extruded olefin resin for example, LLDPE
- a film in which a polymer resin layer formed from an acrylic (methacrylic) acid ester is laminated has a high coefficient of friction, and when laminating, the film is wrinkled and cannot be laminated.
- Acrylic (methacrylic) acid ester is thermally polymerized on the device for atomizing the monomer in the evaporator and adheres to the device, and the device does not move during long operation.
- the acrylic (methacrylic) acid ester is not atomized and is sent as droplets to the heated evaporator, so that thermal polymerization occurs in the evaporator and the inside of the evaporator is clogged with the polymer. .
- Acrylic acid, acrylic acid ester, methacrylic acid, and methacrylic acid ester monomer have a problem that they are difficult to handle due to strong skin irritation and odor. Disclosure of the invention
- An object of the present invention is to solve the above problems and provide a multilayer film which is excellent in quality and workability and can be stably produced.
- An object of the present invention is to provide a polymer resin layer on a substrate, a metal deposition film and / or a metal acid And an unsaturated compound having at least two ethylene bonds and / or acetylene bonds in the molecule, and having no acrylyl group and no methacrylic group, is polymerized. This is achieved by a multilayer film containing the polymer obtained in an amount of at least 80% by weight of the polymer resin layer. Further, an object of the present invention is to provide a method for depositing a polymer resin layer and a metal vapor deposition film and / or a metal oxide vapor deposition film on a substrate in a vacuum vapor deposition machine.
- FIG. 1, FIG. 2, and FIG. 3 are diagrams each showing a different configuration example of the multilayer film of the present invention.
- FIG. 4 is a schematic view showing one example of an apparatus for producing a multilayer film of the present invention.
- FIG. 5 is a schematic diagram of an example of an apparatus for atomizing an unsaturated compound by applying a voltage to the unsaturated compound in a step of depositing the unsaturated compound.
- FIG. 6 is a schematic view of an example of an apparatus for applying a voltage between a monomer evaporator and a substrate in a step of depositing an unsaturated compound in the form of a mist.
- the substrate of the present invention is not particularly limited as long as it can deposit a metal or a metal oxide.
- Polyester such as polyethylene, polypropylene, polyethylene terephthalate, or polyethylene naphthalate, polyamide, polystyrene,
- a film made of polypropylene or polyester is preferably used.
- the substrate surface may be subjected to surface treatment such as corona discharge treatment, flame treatment, plasma treatment or the like, or a resin coating layer or a resin layer formed by melt extrusion for improving the adhesiveness. Among them, plasma treatment is most preferable.
- the material of the metal deposition film of the present invention is not particularly limited, but may be a metal such as Al, Cu, Sn, In, Zn, or a mixture or alloy of two or more metals. it can.
- a material of the metal oxide deposited film is not particularly limited, S i O x, A 1 2 0 I n O x, the compounds of the S N_ ⁇ x metal oxides such as, two or more metal oxides or A mixture or the like can be used.
- the oxide deposited film of the present invention includes an incomplete oxide deposited film.
- the thickness of the vapor-deposited film can be appropriately adjusted according to the required characteristics of the film.
- the thickness of the metal vapor-deposited film is preferably from 0.01 to 1 / m from the viewpoint of barrier properties, conductivity, and flexibility of the vapor-deposited film.
- the thickness of the metal oxide film deposited film is preferably from 0.06 ⁇ 11 to 0.5 in view of barrier properties, insulation voltage resistance and flexibility.
- the structure of the multilayer film of the present invention may be, as shown in FIG. 1, a base material (1) a polymer resin layer (2) a metal-deposited film and a Z or metal oxide-deposited film (3), or Base material as shown in Fig. 2 (1) Metal-deposited film and metal or metal oxide-deposited film (3) Polymer resin layer (2), or these are laminated in multiple layers as shown in Fig. 3. Configuration can be taken.
- a configuration in which a base metal-deposited film and a Z or metal oxide-deposited film Z polymer resin layers are laminated in this order is preferable.
- the base material Z, the high molecular weight resin layer Z, the metal deposited film or the metal oxide deposited film is laminated in this order is preferable.
- the base material polymer resin layer and the metal deposited film are used for the purpose of preventing corrosion of the metal deposited film due to moisture permeating the base material or improving self-healing properties in the deposited film for capacitors.
- a configuration in which metal oxide films are stacked in this order is preferable.
- a configuration in which a base material / a metal-deposited film and / or a metal oxide-deposited film and a polymer resin layer are laminated in this order is preferable. Further, by providing tens to thousands of layers of a metal deposited film and / or a metal oxide deposited film / polymer resin, a small multilayer capacitor can be manufactured.
- the surface of the polymer resin layer is subjected to plasma treatment to further improve the adhesion. Wear.
- the configuration of the present invention is not limited to these, and a metal vapor deposition film, a metal oxide vapor deposition film, and a polymer resin layer may be laminated on the substrate in any order and in any number of layers.
- the thickness of the polymer resin layer of the present invention is preferably from 0.02 to 1 m. If it is less than 0.02 X m, the effect of quality improvement is small. If it exceeds 1 m, the metal vapor deposition film becomes sticky, and the dielectric loss tangent becomes high due to interface polarization in the capacitor vapor deposition film. A more preferred thickness is from 0.05 to 111 / 0.5 / im.
- the polymer resin layer of the present invention comprises a polymer obtained by polymerizing an unsaturated compound having at least two or more ethylene bonds and / or acetylene bonds in a molecule and having no acrylyl group and no methyl acryl group. It is necessary to contain at least 80% by weight of the polymer resin layer. Such an unsaturated compound is not easily polymerized and hardened by heat in a vacuum and is less likely to be clogged in an evaporator, as compared with an acrylic compound or a methacrylic compound. Furthermore, since it has the property of easily polymerizing and / or cross-linking by energy rays, a multilayer film can be stably manufactured. '
- the unsaturated compound at least one compound selected from unsaturated fatty acids, unsaturated fatty acid esters, and terpenes having an unsaturated bond has good thermal stability and good polymerization and / or good energy. It is preferable for crosslinking. Among them, unsaturated fatty acids, unsaturated fatty acid esters, and terpenes having unsaturated bonds separated from natural substances are more preferable because they cause less skin irritation and undesirable odor. Above all, drying oils and semi-drying oils are preferable because they are polymerized and / or cross-linked by an energy beam to polymerize. Particularly, an unsaturated compound having an iodine value of 100 or more is preferable in view of quality, workability, and productivity.
- separation from natural substances means not only oil extraction or extraction from natural substances, but also a reaction such as hydrolysis using the extracted or extracted substances, or oil extraction or extraction. It also includes the separation of some of its components from a substance or the mixing of two or more of them.
- examples of the unsaturated fatty acid, unsaturated fatty acid ester, and terpene having an unsaturated bond in the present invention include natural fats and oils containing these and hydrolyzates of substances extracted from natural fats and oils.
- castor oil castor oil, coconut oil, soybean oil, linseed oil, palm kernel oil, safflower oil, tung oil, tall oil, oleic acid, linoleic acid, linolenic acid, ricinoleic acid, eleostearic acid, trilinoleic acid
- lyseride glyceride trilinolenate, citral, mitronellal, mitronellol, nerolidol, geraniol, myrcene, linalool, and limonene can be particularly preferably mentioned.
- 20% by weight or less of another radically polymerizable organic monomer may be added to the unsaturated compound.
- the probability of thermal polymerization is low even when an organic monomer having an acryloyl group such as pentaerythritol triacrylate is added, and there is little problem in production.
- the multilayer film of the present invention has good adhesiveness between the polymer resin layer and the metal-deposited film or the metal oxide-deposited film, and when laminating another resin, the laminated resin or the adhesive for laminating is used. It has good adhesion to the metal, has a low coefficient of friction, and can be laminated without causing wrinkles on the metallized film. Furthermore, despite the fact that a polymer resin layer with a thickness of 1 m or less is extremely thin compared to the conventional laminated film, the degree of crosslinking of the polymer resin layer is high, so that even if the film is pulled, the metal is stretched. There is no crack in the deposited film or metal oxide film, and the barrier performance of the deposited metal film does not decrease.
- the multilayer film of the present invention is suitable for a packaging film or a capacitor film.
- the multilayer film of the present invention is characterized in that at the time of depositing a polymer resin layer and a metal deposited film and Z or metal oxide on a substrate in a vacuum deposition machine, at least two or more ethylene bonds and Z Alternatively, an unsaturated compound having an acetylene bond and no acrylyl group or methacryl group is deposited, and then the unsaturated compound is irradiated with an energy ray to form the polymer resin layer.
- An example of a method for producing the present multilayer film will be specifically described with reference to FIG. 4, which is a schematic view of an example of an apparatus for producing the present multilayer film.
- the substrate (1) is unwound from the unwinding roll (5), and then the surface of the substrate is subjected to plasma surface treatment by the plasma processing apparatus (6).
- the metal and Z or metal oxide evaporated from the metal evaporation source (8) are deposited on the surface-treated substrate.
- the unsaturated compound evaporated from the monomer evaporator (9) is deposited on the deposited film, the unsaturated compound deposited layer is irradiated with energy rays using an energy ray irradiation device (10).
- a polymer resin layer composed of a polymer and / or cross-linked product of the unsaturated compound is formed, and is wound around a take-up roll (11).
- a take-up roll (11)
- (1 2) is a vacuum partition plate for unwinding the base material, making a difference in the degree of vacuum between the take-up tank and the evaporation source tank, and (1 3) is to check that the evaporated metal particles adhere to the entire area of the vacuum tank. It is a protection plate to prevent it.
- the method of depositing the unsaturated compound is not particularly limited, but the unsaturated compound is evaporated by atomizing the unsaturated compound and colliding with a heated container wall to form a metal or metal oxide on the substrate or A method of vapor deposition on a vapor deposition film is preferable. Since the unsaturated compound used in the present invention hardly undergoes thermal polymerization even in a vacuum, a nebulizing apparatus using an ultrasonic vibrator as described in US Pat. No. 4,696,719 is employed. It is also possible.
- a more preferable method is to atomize the unsaturated compound by applying an electric power thereto, introduce the mixture into the evaporator, and impinge the heated inner wall of the evaporator to evaporate the mist-like unsaturated compound.
- This is a method of vapor deposition on a material.
- it is preferable to perform the charging by bringing the unsaturated compound into contact with the charging electrode to which a voltage is applied.
- FIG. 5 a schematic diagram (FIG. 5) of an example of an apparatus for performing the method.
- This device consists of an evaporator (15) with a vacuum wall (14) and an opening (16). And an unsaturated compound delivery pipe (17), a metering pump (18), an on-off valve (19: and), a spray pipe (20), an electrode (21), and a power supply (22).
- the (A) side of the vacuum wall ( ⁇ 4) is held in vacuum, and the base material 1 runs on the cooling drum (7), and the (B) side is exposed to the atmosphere. It has been exposed.
- Unsaturated compounds are degassed and the specified amount is opened and closed by a metering pump (18) that can hold a vacuum from the stored organic compound supply tank (not shown) through the unsaturated compound delivery pipe (17). After passing through (19), it is sent to the spray tube (20).
- Spray tube
- the electrode (21) is inserted in (20). Unsaturated compounds are charged by the electrodes (21), become electrostatically atomized, and become a mist.
- Unsaturated compounds are deposited on the surface of (1) to form a thin film.
- the spray tube (20) is electrically and thermally insulated from the organic compound delivery tube (17) and the evaporator (15), and has an electrode (2 1) inside that applies a voltage to the unsaturated compound. ) Is incorporated.
- the electrode (2 1) is electrically insulated from the spray tube (20), and is a bare metal inside the spray tube (20), but is coated with an insulating coating outside to form a power source (2 2). And voltage and current are supplied from the power supply (22).
- the voltage and current supplied from the power source (22) may be any of direct current, alternating current, and alternating current with superimposed direct current. However, since unsaturated compounds are generally dielectric, alternating current with superimposed direct current is preferred. .
- the polarity of the voltage applied to the electrode (2 1) may be either positive or negative with respect to the evaporator (15). The voltage depends on the degree of vacuum and the distance between the electrode (2 1) and the evaporator (15). The peak voltage is preferably about 100 V to 10 KV. If the voltage is less than 100 V, the amount of static electricity that the unsaturated compound carries is small, and it is difficult to form fine mist. If the voltage exceeds 100 KV, arc discharge occurs between the electrode (21) and the evaporator (15). And the spraying of unsaturated compounds becomes unstable. A more preferred voltage is from 300 V to 6 KV.
- the spray tube can be electrically insulated from other equipment such as the unsaturated compound delivery tube, evaporator, and vacuum wall, and the unsaturated compound can be charged by supplying a voltage directly from the power supply to the spray tube.
- the voltage applied to the spray tube is preferably from 100 V to 1 KV. If it is less than 100 V, the organic compound is not easily atomized, and if it exceeds 1 KV, arc discharge easily occurs between the evaporator and the tip of the spray tube. A more preferred voltage is from 300 V to 600 V.
- the atmosphere in which the present invention is carried out is not necessarily limited to a vacuum, and may be the air.
- the average free path of the unsaturated compound evaporated in the vacuum is longer, and the uniform and thin film is formed on the substrate surface. It is more preferable because a vapor deposition film layer can be formed.
- the temperature of the evaporator only needs to be such that all surfaces of the inner wall are heated to a temperature at which the vapor pressure of the unsaturated compound becomes higher than the pressure in the evaporator.
- the unsaturated compound adheres to the inner wall of the device or parts inside the device other than the base material due to diffusion of the evaporated unsaturated compound into the device or re-evaporation of the unsaturated compound attached to the base material. As a result, a film may be formed and the inside of the equipment may be contaminated. Unsaturated compounds adhering to the equipment may hinder the stable movement of the drive train in the equipment, and in severe cases may stop the movement. In addition, cleaning takes longer, which can cause problems such as reduced productivity.
- a preferred method of solving this problem is to evaporate the unsaturated compound by atomizing the unsaturated compound and impinging it against the wall of the heating vessel, and through the opening of the heating vessel, deposit a metal deposition film and Z or metal oxide.
- This device consists of a vacuum wall (14), an evaporator (15) having an opening (16), an unsaturated compound delivery pipe (17), a metering pump (18), and a shut-off valve (1). 9), a spray tube (20) with a built-in ultrasonic oscillator, conducting wires (23) and (28) for applying a voltage, a power supply (24), and a base material (1) And a metal roll (27) for applying a voltage to the metal.
- the openings have numerous micropores or a network structure
- a metal electrode plate (2 6) having an opening, an insulating plate (25) for electrically insulating the electrode plate and the evaporator (15), and a narrow opening provided in the evaporator (15). Mouth and mouth.
- the electrode plate (26) and the metal roll (27) are connected to the power supply (24) by conductors (23) and (28), respectively, and the electrode plate (26) and the metal roll (27) are connected. Voltage is applied between and.
- the (A) side of the vacuum wall ( 14 ) is kept in a vacuum, and the substrate (1) runs on the cooling drum (7).
- a voltage is applied to the metal deposition film on the base material (1) from the power supply (11) by contacting the metal roll (14).
- the side (B) is exposed to the atmosphere.
- Unsaturated compounds are degassed, and the specified amount is opened and closed by a fixed-quantity pump (18) that can hold a vacuum from the stored unsaturated compound supply tank (not shown) through the unsaturated compound delivery pipe (17). It is sent to the spray pipe (20) through the valve (19).
- An ultrasonic vibrator is built into the spray tube (20). Unsaturated compounds that touch the vibrator (horn) in the spray tube are atomized by the ultrasonic vibration of the vibrator and kept at a high temperature. It is sprayed onto the inner wall of the held evaporator (15) (the ultrasonic power supply and the ultrasonic vibration generator are not shown in Fig. 6; the details of the ultrasonic vibrator are not shown).
- the sprayed unsaturated compound collides with the heated inner wall of the evaporator (15), evaporates at the same time, and is discharged into the inner space of the evaporator through the opening (16) at the tip of the evaporator.
- the electrode plate (26) at the opening and the substrate (1) since a voltage is applied between the electrode plate (26) at the opening and the substrate (1), the vapor is charged, and further, the voltage between the opening (16) and the substrate (1) is increased. It is guided by an electric field and adheres to the surface of the substrate (1) by electrostatic force. Since the substrate (1) is cooled by the cooling drum (7), the unsaturated compound attached to the substrate (1) easily aggregates,
- a thin film of the unsaturated compound is formed on the surface of (1).
- the unsaturated compound attached to the substrate is attached to the substrate by electrostatic force, the probability that the attached organic compound is re-evaporated is low.
- the voltage can be applied directly to the evaporator (15). In this case, it is preferable to provide a large number of fine holes at the opening of the evaporator (15), or to form a mesh structure.
- the voltage and current supplied from the power supply (24) are DC, AC, and AC superimposed. It may be any of the currents, but generally, the unsaturated compound is dielectric, so that an alternating current with a superimposed direct current is preferred.
- the voltage depends on the degree of vacuum and the distance between the base material (1) and the evaporator (15), the peak voltage is preferably about 50 V to 10 KV. When the voltage is less than 50 V, the amount of charge of the unsaturated compound vapor is small, and the unsaturated compound vapor is easily diffused into the space inside the evaporator other than the base material.
- a more preferred voltage is from 100 V to 3 KV.
- the energy beam referred to in the present invention refers to ultraviolet rays, electron beams, ion particles, ⁇ rays,
- the energy ray is one or more energy rays selected from the group consisting of an ion such as an ultraviolet ray, an ionized atom and an ionized molecule, an excited atom, and an excited molecule. Since these energy rays exist in a plasma using a gas composed of molecules containing oxygen atoms or a mixed gas with another gas, it is also preferable to use a plasma of a gas containing oxygen atoms as the energy rays. Normally, ions in the plasma and excited gas particles cannot penetrate deep into the unsaturated compound layer, but in the present invention, since the unsaturated compound layer is thin, the entire unsaturated compound layer can be polymerized and / or crosslinked.
- oxygen acts as a radical scavenger and inhibits polymerization, but the unsaturated compound of the present invention can be polymerized and crosslinked by oxygen. Therefore, oxygen gas plasma can be a more suitable energy line.
- a mixed gas of Ar gas and oxygen (oxygen gas concentration: 30 mol%) was supplied to the inside of the box-shaped anode electrode of the energy ray irradiation device.
- a force source electrode is installed insulated from the anode electrode.
- a high voltage of 110 KV was applied to the cathode electrode to generate a glow discharge in the box-shaped anode electrode, thereby forming a plasma.
- linoleic acid was polymerized to obtain a polymer resin layer having a thickness of 0.06; xm.
- This operation was performed continuously at a deposition rate of 500 m / min using a film roll having a length of 2100 m. Vapor deposition was stable for about 45 minutes, and a multilayer film almost equivalent to the entire length of the film roll was obtained.
- LLDPE resin linear low-density polyethylene
- CPP film unstretched polypropylene film
- Laminating processability, adhesiveness of the laminated film, oxygen barrier property, and oxygen barrier property of the film after being stretched by 6% with a tensile tester were examined.
- the film's manufacturability, laminating properties, and adhesiveness were all good, and the oxygen barrier property (initial value) was as high as 3.0 ml / ni 2 'day.
- the oxygen barrier property after 6% stretching was 3.0 ml / m 2 'day, and the durability was good.
- the methods for measuring and evaluating the laminating properties, adhesiveness and oxygen barrier properties are as follows.
- the multilayer film and the CPP film were laminated by LLD PE melt-extruded at a temperature of 290 ° C. using a T die.
- the structure is as follows: base film / metal-deposited film polymer resin layer L LDPE resin / CPP film.
- the laminated film was cut to a width of 15 mm, and the adhesive force between the base film and the CPP film was measured by the T-peel method. Adhesion is 1.18 N (120 gf) The case where there was the above was regarded as good adhesive strength.
- OX-TRAN 2/20 manufactured by M0C0N-Oxygen Transmission Analysis System was used, and the oxygen permeability of the multilayer film was measured at 22.8 under the condition of 0% RH.
- the oxygen permeability after stretching the multilayer film by 6% or 10% using a tensile tester was measured, and the change in oxygen barrier property when the film was stretched was examined.
- a multilayer film was prepared and evaluated in the same manner as in Example 1 except that tetraethylene dalicol diacrylate was used instead of linolenic acid as an unsaturated compound.
- Ten minutes after the start of the vapor deposition the movement of the ultrasonic transducer stopped, so the vapor deposition was stopped. Opening the vacuum evaporator and examining the monomer evaporator revealed that polymer had accumulated inside the monomer evaporator.
- the oxygen barrier properties were as good as the initial value of 1.5 inl / m 2 'day and 1.5 ml / m 2 ' day after 6% stretching.
- a multilayer film was prepared and evaluated in the same manner as in Example 1 except that the deposition of the unsaturated compound was not performed.
- the manufacturability, laminating property and adhesiveness were good, and the oxygen barrier property was relatively good at the initial value of 7.5 ml / m 2 'day, but the oxygen barrier property after 6% stretching was 30%. It deteriorated greatly with ml / m 2 'day.
- Thickness 1 2; biaxially oriented polyester film having a surface treatment was performed for m (Toray Industries Co., Ltd.: trade name: "Lumiror one"), in a vacuum deposition machine, which was evacuated to 5 X 1 0- 3 P a, Al A minimum was vapor-deposited so that the absorbance was OD 2.3.
- soybean oil (iodine value: 13) atomized by an ultrasonic vibrator in a monomer evaporator heated to 300 ° C. 4) was supplied, and the evaporated soybean oil was evaporated on the aluminum evaporated film through a slit provided in the monomer evaporator.
- the amount of soybean oil supplied to the ultrasonic vibrator was controlled such that the thickness of the deposited soybean oil layer was 0.06 m.
- a mixed gas of Ar gas and oxygen gas (oxygen gas concentration: 30 mol%) was supplied into the box-shaped ground electrode of the energy beam irradiation device.
- a high voltage application electrode is provided insulated from the ground electrode.
- a high-frequency voltage having a peak voltage of 600 V was applied to the high-voltage application electrode to generate a glow discharge in the box-shaped ground electrode, thereby forming a plasma.
- a part of the plasma is led out through a slit provided in the ground electrode, and is irradiated on a soybean oil layer on the aluminum vapor-deposited film, thereby polymerizing the soybean oil to form a polymer resin having a thickness of 0.06 m. Layer obtained. This operation was performed continuously at a deposition rate of 500 m / in using a film roll having a length of 2100 m.
- the multilayer film produced in this way has good manufacturability and laminating processability, and has good adhesiveness and oxygen barrier properties (initial: 0.2 ml / m 2 'day, after 6% stretching: 0.2 ml) / m 2 -day) was also good.
- Example 2 Using the same polypropylene film as used in Example 1 as a substrate, using a C 0 2 mixed gas consisting of A r of the surface of the Fi Lum with deposition machine (CO 2 gas content 6 0 mo 1%) Plasma treatment. Then, aluminum was vapor-deposited on the surface of the plasma-treated film in the same manner as in Example 1 (OD: 2.4), and then, using amadi oil (iodine value: 1822) as an unsaturated compound, the film thickness was reduced to 0. A 1 m polymer resin layer was provided. The obtained multilayer film was evaluated in the same manner as in Example 1.
- Example 3 On a polypropylene film plasma-treated in the same manner as in Example 3, a mixture of tung oil (iodine value: 170) and linoleic acid (linoleic acid content: 35% by weight) was used as an unsaturated compound. A polymer resin layer with a thickness of 0.08 as in 1 Was provided. Next, a metal oxide film of aluminum oxide having a thickness of 0.01 was deposited on the polymer resin layer. The resulting multilayer film laminate processability is good in adhesiveness both oxygen barrier initial value, 5 together after 6% stretch. 0 ml / in 2 'indicates day and good barriers properties, and transparent Was also excellent. Industrial applicability
- the present invention it is possible to provide a multilayer film which can be manufactured stably and is excellent in quality such as laminating processability and gas barrier properties. .
- the multilayer film of the present invention can be used as a metal-deposited film for packaging having gas barrier properties, a metal-deposited film for capacitors, and the like.
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Thermal Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB998163198A CN1229219C (zh) | 1999-12-22 | 1999-12-22 | 多层膜及其制造方法 |
DE69935456T DE69935456T2 (de) | 1999-12-22 | 1999-12-22 | Mehrschichtiger film und verfahren zu dessen herstellung |
EP99961333A EP1155818B1 (en) | 1999-12-22 | 1999-12-22 | Multilayered film and process for producing the same |
CA002365039A CA2365039A1 (en) | 1999-12-22 | 1999-12-22 | Multilayer film and process for producing the same |
PCT/JP1999/007237 WO2001045930A1 (fr) | 1999-12-22 | 1999-12-22 | Film multicouche et son procede de fabrication |
KR1020017008358A KR100646613B1 (ko) | 1999-12-22 | 1999-12-22 | 다층필름 및 그 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP1999/007237 WO2001045930A1 (fr) | 1999-12-22 | 1999-12-22 | Film multicouche et son procede de fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2001045930A1 true WO2001045930A1 (fr) | 2001-06-28 |
Family
ID=14237659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1999/007237 WO2001045930A1 (fr) | 1999-12-22 | 1999-12-22 | Film multicouche et son procede de fabrication |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1155818B1 (ja) |
KR (1) | KR100646613B1 (ja) |
CN (1) | CN1229219C (ja) |
CA (1) | CA2365039A1 (ja) |
DE (1) | DE69935456T2 (ja) |
WO (1) | WO2001045930A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100846037B1 (ko) * | 2001-11-07 | 2008-07-11 | 혼하이 프리시젼 인더스트리 컴퍼니 리미티드 | 전자장비용 덮개 구조물 및 그의 제조방법 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4055543B2 (ja) * | 2002-02-22 | 2008-03-05 | ソニー株式会社 | レジスト材料及び微細加工方法 |
EP1354640A1 (de) | 2002-04-19 | 2003-10-22 | Dürr Systems GmbH | Verfahren und Vorrichtung zum Härten einer Beschichtung |
US6811815B2 (en) | 2002-06-14 | 2004-11-02 | Avery Dennison Corporation | Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films |
CN100387424C (zh) * | 2002-09-10 | 2008-05-14 | 李丹之 | 防水隔热阻燃复合膜 |
US8120890B2 (en) | 2008-07-25 | 2012-02-21 | General Electric Company | High temperature film capacitor |
ATE520475T1 (de) * | 2008-09-26 | 2011-09-15 | Camvac Ltd | Strahlungsgehärtete beschichtungen |
CN101941323A (zh) * | 2010-06-01 | 2011-01-12 | 陈尚文 | 一种多层高分子原料合成卷材的制造工艺 |
EP2714397B1 (en) | 2011-05-31 | 2015-09-23 | Valsem Industries SAS | Compound film for industrial packaging applications |
CN112867288B (zh) * | 2021-01-05 | 2021-08-17 | 江苏特丽亮镀膜科技有限公司 | 一种acf导电胶膜结构及其热压方法、热压组件 |
KR102635063B1 (ko) * | 2023-10-27 | 2024-02-13 | 성문전자주식회사 | 내환경 특성을 강화한 인버터용 커패시터 필름 제조방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61258333A (ja) * | 1985-05-13 | 1986-11-15 | Fuji Photo Film Co Ltd | 磁気記録媒体の製造方法 |
JPH0734220A (ja) * | 1993-07-13 | 1995-02-03 | Dainippon Printing Co Ltd | 蒸着膜の形成方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4842893A (en) * | 1983-12-19 | 1989-06-27 | Spectrum Control, Inc. | High speed process for coating substrates |
US4490774A (en) * | 1983-12-19 | 1984-12-25 | General Electric Company | Capacitors containing polyfunctional acrylate polymers as dielectrics |
US6083628A (en) * | 1994-11-04 | 2000-07-04 | Sigma Laboratories Of Arizona, Inc. | Hybrid polymer film |
JP2000094578A (ja) * | 1998-06-25 | 2000-04-04 | Toray Ind Inc | 金属蒸着フイルムとその製造方法、およびそれを用いた製品 |
-
1999
- 1999-12-22 EP EP99961333A patent/EP1155818B1/en not_active Expired - Lifetime
- 1999-12-22 KR KR1020017008358A patent/KR100646613B1/ko not_active IP Right Cessation
- 1999-12-22 WO PCT/JP1999/007237 patent/WO2001045930A1/ja active IP Right Grant
- 1999-12-22 DE DE69935456T patent/DE69935456T2/de not_active Expired - Fee Related
- 1999-12-22 CA CA002365039A patent/CA2365039A1/en not_active Abandoned
- 1999-12-22 CN CNB998163198A patent/CN1229219C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61258333A (ja) * | 1985-05-13 | 1986-11-15 | Fuji Photo Film Co Ltd | 磁気記録媒体の製造方法 |
JPH0734220A (ja) * | 1993-07-13 | 1995-02-03 | Dainippon Printing Co Ltd | 蒸着膜の形成方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1155818A4 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100846037B1 (ko) * | 2001-11-07 | 2008-07-11 | 혼하이 프리시젼 인더스트리 컴퍼니 리미티드 | 전자장비용 덮개 구조물 및 그의 제조방법 |
Also Published As
Publication number | Publication date |
---|---|
CA2365039A1 (en) | 2001-06-28 |
DE69935456D1 (de) | 2007-04-19 |
CN1337902A (zh) | 2002-02-27 |
DE69935456T2 (de) | 2007-06-14 |
KR20010108060A (ko) | 2001-12-07 |
EP1155818B1 (en) | 2007-03-07 |
CN1229219C (zh) | 2005-11-30 |
EP1155818A1 (en) | 2001-11-21 |
KR100646613B1 (ko) | 2006-11-17 |
EP1155818A4 (en) | 2002-06-12 |
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