US20140272684A1 - Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor - Google Patents

Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor Download PDF

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Publication number
US20140272684A1
US20140272684A1 US14/139,415 US201314139415A US2014272684A1 US 20140272684 A1 US20140272684 A1 US 20140272684A1 US 201314139415 A US201314139415 A US 201314139415A US 2014272684 A1 US2014272684 A1 US 2014272684A1
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United States
Prior art keywords
wafer
processing systems
vacuum chamber
additional
mask blank
Prior art date
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Abandoned
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US14/139,415
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English (en)
Inventor
Ralf Hofmann
Cara Beasley
Majeed Foad
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Applied Materials Inc
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Applied Materials Inc
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Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US14/139,415 priority Critical patent/US20140272684A1/en
Priority to US14/139,371 priority patent/US9612521B2/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BEASLEY, Cara, HOFMANN, RALF, FOAD, MAJEED A.
Priority to TW103106805A priority patent/TWI623054B/zh
Priority to JP2016501751A priority patent/JP6625520B2/ja
Priority to SG10201707081YA priority patent/SG10201707081YA/en
Priority to KR1020217012331A priority patent/KR102401043B1/ko
Priority to CN201480013365.6A priority patent/CN105144343B/zh
Priority to SG11201506470UA priority patent/SG11201506470UA/en
Priority to PCT/US2014/025124 priority patent/WO2014165300A1/en
Priority to KR1020157027663A priority patent/KR102246809B1/ko
Publication of US20140272684A1 publication Critical patent/US20140272684A1/en
Priority to US15/400,482 priority patent/US10788744B2/en
Priority to US15/444,864 priority patent/US20170168383A1/en
Priority to JP2019141985A priority patent/JP2019219671A/ja
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32899—Multiple chambers, e.g. cluster tools
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3417—Arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3447—Collimators, shutters, apertures

Definitions

  • the present application contains subject matter related to a concurrently filed U.S. patent application by Cara Beasley, Ralf Hofmann, Majeed Foad, and Timothy Michaelson entitled “PLANARIZED EXTREME ULTRAVIOLET LITHOGRAPHY BLANK, AND MANUFACTURING AND LITHOGRAPHY SYSTEMS THEREFOR”.
  • the related application is assigned to Applied Materials, Inc. and is identified by docket number 017964USA/ATG/ATG/ESONG. The subject matter thereof is incorporated herein by reference thereto.
  • the present application contains subject matter related to a concurrently filed U.S. patent application by Ralf Hofmann and Kevin Moraes entitled “AMORPHOUS LAYER EXTREME ULTRAVIOLET LITHOGRAPHY BLANK, AND MANUFACTURING AND LITHOGRAPHY SYSTEMS THEREFOR”.
  • the related application is assigned to Applied Materials, Inc. and is identified by docket number 020388USA/ATG/ATG/ESONG. The subject matter thereof is incorporated herein by reference thereto.
  • the present application contains subject matter related to a concurrently filed U.S. patent application by Timothy Michaelson, Timothy W. Weidman, Barry Lee Chin, Majeed Foad, and Paul Deaton entitled “VAPOR DEPOSITION DEPOSITED PHOTORESIST, AND MANUFACTURING AND LITHOGRAPHY SYSTEMS THEREFOR”.
  • the related application is assigned to Applied Materials, Inc. and is identified by docket number 017922USA/ATG/ATG/ESONG. The subject matter thereof is incorporated herein by reference thereto.
  • the present application contains subject matter related to a concurrently filed U.S. patent application by Soumendra N. Barman, Cara Beasley, Abhijit Basu Mallick, Ralf Hofmann, and Nitin K. Ingle entitled “ULTRA-SMOOTH LAYER ULTRAVIOLET LITHOGRAPHY MIRRORS AND BLANKS, AND MANUFACTURING AND LITHOGRAPHY SYSTEMS THEREFOR”.
  • the related application is assigned to Applied Materials, Inc. and is identified by docket number 020600USA/ATG/ATG/ESONG. The subject matter thereof is incorporated herein by reference thereto.
  • the present invention relates generally to extreme ultraviolet lithography blanks, and manufacturing and lithography systems for such extreme ultraviolet lithography blanks
  • EUV Extreme ultraviolet lithography
  • soft x-ray projection lithography is a contender to replace deep ultraviolet lithography for the manufacture of 0.13 micron, and smaller, minimum feature size semiconductor devices.
  • extreme ultraviolet light which is generally in the 5 to 40 nanometer wavelength range, is strongly absorbed in virtually all materials. For that reason, extreme ultraviolet systems work by reflection rather than by transmission of light.
  • the patterned actinic light is reflected onto a resist-coated semiconductor wafer.
  • the lens elements and mask blanks of extreme ultraviolet lithography systems are coated with reflective multilayer coatings of materials such as molybdenum and silicon. Reflection values of approximately 65% per lens element, or mask blank, have been obtained by using substrates that are coated with multilayer coatings that strongly reflect light essentially at a single wavelength within a extremely narrow ultraviolet bandpass; e.g., 12 to 14 nanometer bandpass for 13 nanometer ultraviolet light.
  • Opaque defects are typically caused by particles on top of the multilayer coatings or mask pattern which absorb light when it should be reflected.
  • Clear defects are typically caused by pinholes in the mask pattern on top of the multilayer coatings through which light is reflected when it should be absorbed.
  • phase defects are typically caused by scratches and surface variations beneath the multilayer coatings which cause transitions in the phase of the reflected light. These phase transitions result in light wave interference effects which distort or alter the pattern that is to be exposed in the resist on the surface of the semiconductor wafer. Because of the shorter wavelengths of radiation which must be used for sub-0.13 micron minimum feature size, scratches and surface variations which were insignificant before now become intolerable.
  • phase transitions can cause a phase defect at the surface of the semiconductor wafer and irreparably damage the semiconductor devices.
  • mask blanks for deep ultraviolet lithography have generally been of glass but silicon or ultra low thermal expansion materials have been proposed as alternatives for extreme ultraviolet lithography.
  • the surface of the mask blank is made as smooth as possible by such processes a chemical mechanical polishing, magneto-rheological finishing, or ion beam polishing.
  • the scratches that are left behind in such a process are sometimes referred to as “scratch-dig” marks, and their depth and width depend upon the size of the particles in the abrasive used to polish the mask blank.
  • scratch-dig marks are a significant problem because they will appear as phase defects.
  • the pattern masks used must be reflective mask instead of the transmissive masks used in current lithography.
  • the reflective mask is made up of a precise stack of alternating thin layers of molybdenum and silicon, which creates a Bragg refractor or mirror. Because of the nature of the multilayer stack and the small feature size, any imperfections in the surface of the substrate on which the multilayer stack is deposited will be magnified and impact the final product. Imperfections on the scale of a few nanometers can show up as printable defects on the finished mask and need to be eliminated from the surface of the mask blank before deposition of the multilayer stack.
  • Typical masks used in optical lithography consist of a glass blank and a patterned chrome layer that blocks light transmission.
  • the mask In contrast in EUV lithography, the mask consists of a reflective layer and a patterned absorber layer. This architectural change is necessary due to the high absorbance of EUV light in most materials.
  • the reflector layer is a stack of 80 or more alternating layers of molybdenum and silicon.
  • the precision for the layer thickness and smoothness of this stack is critical to achieve high reflectivity of the mask as well as line edge roughness, respectively.
  • This process flow does not meet the stringent defect specifications.
  • the main causes of defects are pits and bumps in the glass substrate left behind by the polishing process as well as the subsequent cleaning.
  • the ion beam deposition process further leaves particles embedded in and on top of the multilayer stack.
  • An embodiment of the present invention provides a processing system that includes: a vacuum chamber; a plurality of processing systems attached around the vacuum chamber; and a wafer handling system in the vacuum chamber for moving a wafer among the plurality of processing systems without exiting from a vacuum.
  • An embodiment of the present invention provides a physical vapor deposition system for manufacturing an extreme ultraviolet blank comprising: a target comprising molybdenum, molybdenum alloy, or a combination thereof.
  • FIG. 1 is a shown an integrated extreme ultraviolet (EUV) mask production system in accordance with an embodiment of the present invention.
  • EUV extreme ultraviolet
  • FIG. 2 is the first multi-cathode source in accordance with an embodiment of the present invention.
  • FIG. 3 is a cross-section of the first multi-cathode source in accordance with an embodiment of the present invention.
  • FIG. 4 is the cross-section of the first multi-cathode source in operation in accordance with an embodiment of the present invention.
  • FIG. 5 is a mask blank which is square in shape and has a multi-layer stack in accordance with an embodiment of the present invention.
  • FIG. 6 is the mask blank in a supported position on a carrier in accordance with an embodiment of the present invention.
  • FIG. 7 is the mask blank in a supported position on a carrier in accordance with an embodiment of the present invention.
  • FIG. 8 is the mask blank in a supported position on a carrier in accordance with an embodiment of the present invention.
  • FIG. 9 is the mask blank in a supported position on a carrier in accordance with an embodiment of the present invention.
  • FIG. 10 is the mask blank in a supported position on a carrier in accordance with an embodiment of the present invention.
  • FIG. 11 is the mask blank in a supported position on a carrier in accordance with an embodiment of the present invention.
  • FIG. 12 is a method for making the mask blank with ultra-low defects.
  • the term “horizontal” as used herein is defined as a plane parallel to the plane or surface of a mask blank, regardless of its orientation.
  • the term “vertical” refers to a direction perpendicular to the horizontal as just defined. Terms, such as “above”, “below”, “bottom”, “top”, “side” (as in “sidewall”), “higher”, “lower”, “upper”, “over”, and “under”, are defined with respect to the horizontal plane, as shown in the figures.
  • the term “on” indicates that there is direct contact between elements.
  • processing includes deposition of material or photoresist, patterning, exposure, development, etching, cleaning, and/or removal of the material or photoresist as required in forming a described structure.
  • Embodiments of the present invention use various established techniques for depositing silicon, silicon oxide, and related films of compatible thermal expansion coefficient by CVD, PVD, ALD, and flowable CVD to fill the pits and bury the defects. Once deposited, the films surface maybe smooth and flat enough for further multilayer stack deposition, or may then be smoothed further using a variety of established smoothing or polishing techniques, including CMP, annealing, or ion beam polishing.
  • the integrated EUV mask production system 100 is a processing system that processes wafers or blanks on a carrier and that includes a mask blank loading and carrier handling system 102 into which mask blanks 104 are loaded.
  • An airlock 106 provides access to a wafer handling vacuum chamber 108 .
  • the wafer handling vacuum chamber 108 contains two vacuum chambers, a first vacuum chamber 110 and a second vacuum chamber 112 .
  • Within the first vacuum chamber 110 is a first wafer handling system 114 and in the second vacuum chamber 112 is a second wafer handling system 116 .
  • the wafer handling vacuum chamber 108 has a plurality of ports around its periphery for attachment of various other systems.
  • the first vacuum chamber 110 has a degas system 118 , a first physical vapor deposition system 120 , a second physical vapor deposition system 122 , and a preclean system 124 .
  • the second vacuum chamber 112 has a first multi-cathode source 126 , a flowable chemical vapor deposition (FCVD) system 128 , a cure chamber 130 , and a second multi-cathode source 132 connected to it.
  • the FCVD system 128 can deposit a planarization layer on a substrate, a blank, or a wafer 136 and the cure chamber can cure the planarization layer.
  • the second multi-cathode source 132 can deposit a multi-layer stack of reflective material and other systems can deposit a capping layer. The planarization layer, the multi-layer stack, and the capping layer all become part of the wafer 136 .
  • the first wafer handling system 114 is capable of moving wafers, such as a wafer 134 , among the airlock 106 and to one or more of the various systems around the periphery of the first vacuum chamber 110 and through slit valves in a continuous vacuum.
  • the second wafer handling system 116 is capable of moving wafers, such as a wafer 136 , around the second vacuum chamber 112 while maintaining the wafers in a continuous vacuum.
  • the first wafer handling system 114 and the second wafer handling system 116 are capable of moving the wafer 136 selectively through one or all of the systems around the periphery of the first vacuum chamber 110 and the second vacuum chamber 114 to allow the various processes to be performed without having the wafer 136 exit from the vacuum until it is removed through the airlock 106 .
  • the first multi-cathode source 126 includes a base structure 200 with a cylindrical body portion 202 capped by a top adapter 204 .
  • the top adapter 204 has provisions for a number of cathode sources, such as cathode sources 206 , 208 , 210 , 212 , and 214 , position around the top adapter 204 .
  • the first multi-cathode source 126 has the base structure 200 , the cylindrical body portion 202 , and the top adapter 204 .
  • a rotating pedestal 300 upon which a wafer, such as the wafer 136 , can be secured.
  • a covering ring 302 Above the rotating pedestal 300 is a covering ring 302 with an intermediate ring 304 above the covering ring 302 .
  • a conical shield 306 is above the intermediate ring 304 and is surrounded by a conical adapter 308 .
  • a deposition area 310 for depositing material by physical vapor deposition (PVD) on the wafer 136 is surrounded by a rotating shield 312 to which a shroud 314 is affixed.
  • a shroud 314 Above the shroud 314 is one of a number of targets, such as a target 316 , the source of the deposition material, and a cathode 318 .
  • a number of individual shrouds 314 are each attached to an individual source and remain stationary as the rotating shield 312 rotates.
  • FIG. 4 therein is shown the cross-section of the first multi-cathode source 126 in operation in accordance with an embodiment of the present invention.
  • the cross-section of the first multi-cathode source 126 shows an off-angled conical deposition pattern 400 with the rotating pedestal 300 shown moved into position for a material deposition on a wafer 402 from the target 316 .
  • the rotating pedestal 300 with the wafer 136 is moved up into position where it is in view of the opening in the shroud 314 of FIG. 3 .
  • the rotating shield 312 is then rotated among the various cathodes until the appropriate cathode 318 and target 316 are positioned to deposit material at an angle on the wafer 136 on the rotating pedestal 300 .
  • the wafer 136 By rotating the pedestal 300 , the wafer 136 will receive a uniform deposition of target material on its surface.
  • FIG. 5 therein is shown a mask blank 500 which is square in shape and has a multi-layer stack 502 in accordance with an embodiment of the present invention.
  • FIG. 6 therein is shown the mask blank 500 in a supported position on a carrier 600 in accordance with an embodiment of the present invention.
  • the mask blank 500 has the multi-layer stack 502 facing up and is supported on the carrier 600 on support pins 602 and is held in place laterally by retaining pins 604 .
  • a wedge-shaped support 606 can also be used at the bottom edge of the mask blank 500 .
  • FIG. 7 therein is shown the mask blank 500 in a supported position on a carrier 700 in accordance with an embodiment of the present invention.
  • the mask blank 500 has the multi-layer stack 502 facing up and is supported on the carrier 700 on support pins 702 and is held in place laterally by retaining pins 704 .
  • a wedge-shaped support 706 can also be used at the bottom edge of the mask blank 500 .
  • FIG. 8 therein is shown the mask blank 500 in a supported position on a carrier 800 in accordance with an embodiment of the present invention.
  • the mask blank 500 has the multi-layer stack 502 facing up and is supported on the carrier 800 on support pins 802 and is held in place laterally by retaining pins 804 .
  • the carrier 800 is slightly thicker than the thickness of the support pins 802 and the thickness of the mask blank 500 .
  • An edge exclusion cover mask 806 covers the edges of the mask blank 500 to prevent deposition of material in the edge areas of the multi-layer stack 502 .
  • a wedge-shaped support 808 can also be used at the bottom edge of the mask blank 500 .
  • FIG. 9 therein is shown the mask blank 500 in a supported position on a carrier 900 in accordance with an embodiment of the present invention.
  • the mask blank 500 has the multi-layer stack 502 facing down and is supported on the carrier 900 on support pins 902 and is held in place laterally by retaining pins 904 .
  • the bottom side of the carrier 900 has an opening 906 to allow for deposition from below.
  • FIG. 10 therein is shown the mask blank 500 in a supported position on a carrier 1000 in accordance with an embodiment of the present invention.
  • the mask blank 500 has the multi-layer stack 502 facing down and is supported on the carrier 1000 on support pins 1002 and is held in place laterally by retaining pins 1004 .
  • the bottom side of the carrier 1000 has an opening 1006 to allow for deposition from below.
  • FIG. 11 therein is shown the mask blank 500 in a supported position on a carrier 1100 in accordance with an embodiment of the present invention.
  • the mask blank 500 has the multi-layer stack 502 facing down and is supported on the carrier 1100 on support pins 1102 and is held in place laterally by retaining pins 1104 .
  • the bottom side of the carrier has an opening 1106 to allow for deposition from below.
  • the method 1200 begins with a mask blank being supplied to a vacuum in the EUV mask production system 100 of FIG. 1 .
  • the mask blank is degassed and precleaned in a step 1202 .
  • the planarization occurs in a step 1204 .
  • the planarization layer is deposited by CVD and is cured in a step 1206 .
  • the multi-layer deposition is performed by PVD in a step 1208 and the capping layer is applied in a step 1210 .
  • the degassing, precleaning, planarization, multi-layer deposition, and capping layer application is all performed in the EUV mask production system 100 without removing the mask blank from the vacuum.
  • the integrated EUV mask production system 100 of FIG. 1 can be used to make any type of lithographic blank, such as mask blanks and mirror blanks, as well as masks for a lithographic semiconductor manufacturing process.
  • Embodiments of the present invention provide an integrated tool concept for depositing the layer structure required on a EUV mask blank. These include smoothing layers to planarize defects on the glass blank (pits, scratches and particles in the few to tens of nm size range), the molybdenum and silicon multilayer stack deposition for the Bragg reflector, as well as the ruthenium capping layer (used to protect the molybdenum/silicon stack from oxidation).
  • the substrate is placed on a carrier so that handling of the mask blank is minimized through multiple process steps. This will reduce the chance of handling-related particles on the substrate.
  • the use of a cluster tool also allows the integration of dry cleaning processes to improve substrate cleanliness and thus adhesion of the layer stack without breaking vacuum.
  • the mask blank After loading the substrate into the integrated extreme ultraviolet (EUV) mask production system, the mask blank is first coated with a planarizing layer in a flowable CVD process, such as in the AMAT Eterna films, to fill pits and scratches on the substrate surface, as well as planarize any remaining small particles.
  • EUV extreme ultraviolet
  • the substrate is moved to the deposition chamber for the multi-layer deposition.
  • the chamber integrates multiple targets so that the entire stack can be deposited in one chamber without the need to transfer the substrate.
  • the resulting system is straightforward, cost-effective, uncomplicated, highly versatile, and can be surprisingly and unobviously implemented by adapting known technologies, and are thus readily suited for efficiently and economically manufacturing EUV mask blanks.
  • Embodiments of the invention provide an atomically flat, low defect, smooth surface for an EUV mask blank. However, embodiments of the invention could also be used to manufacture other types of blanks, such as for mirrors. Over a glass substrate, embodiments of the invention can be used to form an EUV mirror. Further, embodiments of the invention can be applied to other atomically flat, low defect, smooth surface structures used in UV, DUV, e-beam, visible, infrared, ion-beam, x-ray, and other types of semiconductor lithography. Embodiments of the invention can also be to form various size structures that can range from wafer-scale to device level and even to larger area displays and solar applications.
  • Another important aspect of the present invention is that it valuably supports and services the historical trend of reducing costs, simplifying systems, and increasing performance.

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US14/139,415 US20140272684A1 (en) 2013-03-12 2013-12-23 Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
US14/139,371 US9612521B2 (en) 2013-03-12 2013-12-23 Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
TW103106805A TWI623054B (zh) 2013-03-12 2014-02-27 極限紫外線微影遮罩坯料製造系統及用於該製造系統之操作方法
KR1020157027663A KR102246809B1 (ko) 2013-03-12 2014-03-12 극자외선 리소그래피 마스크 블랭크 제조 시스템 및 그를 위한 작동 방법
CN201480013365.6A CN105144343B (zh) 2013-03-12 2014-03-12 极紫外线光刻掩模坯料制造系统及用于该制造系统的操作方法
SG10201707081YA SG10201707081YA (en) 2013-03-12 2014-03-12 Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
KR1020217012331A KR102401043B1 (ko) 2013-03-12 2014-03-12 극자외선 리소그래피 마스크 블랭크 제조 시스템 및 그를 위한 작동 방법
JP2016501751A JP6625520B2 (ja) 2013-03-12 2014-03-12 極端紫外線リソグラフィマスクブランク製造システムとそのための操作方法
SG11201506470UA SG11201506470UA (en) 2013-03-12 2014-03-12 Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
PCT/US2014/025124 WO2014165300A1 (en) 2013-03-12 2014-03-12 Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
US15/400,482 US10788744B2 (en) 2013-03-12 2017-01-06 Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
US15/444,864 US20170168383A1 (en) 2013-03-12 2017-02-28 Amorphous Layer Extreme Ultraviolet Lithography Blank, And Manufacturing And Lithography Systems Therefor
JP2019141985A JP2019219671A (ja) 2013-03-12 2019-08-01 極端紫外線リソグラフィマスクブランク製造システムとそのための操作方法

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