US20030048057A1 - Electron emitting device using carbon fiber; electron source; image display device; method of manufacturing the electron emitting device; method of manufacturing electron source using the electron emitting device; and method of manufacturing image display device - Google Patents

Electron emitting device using carbon fiber; electron source; image display device; method of manufacturing the electron emitting device; method of manufacturing electron source using the electron emitting device; and method of manufacturing image display device Download PDF

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US20030048057A1
US20030048057A1 US10/237,677 US23767702A US2003048057A1 US 20030048057 A1 US20030048057 A1 US 20030048057A1 US 23767702 A US23767702 A US 23767702A US 2003048057 A1 US2003048057 A1 US 2003048057A1
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electron emitting
emitting device
manufacturing
gas
electron
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Kazunari Oyama
Takeo Tsukamoto
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Canon Inc
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Assigned to CANON KABUSHIKI KAISHA reassignment CANON KABUSHIKI KAISHA ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OYAMA, KAZUNARI, TSUKAMOTO, TAKEO
Publication of US20030048057A1 publication Critical patent/US20030048057A1/en
Priority to US11/050,590 priority Critical patent/US7094123B2/en
Priority to US11/447,773 priority patent/US7258590B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3048—Distributed particle emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

Definitions

  • the present invention relates to an electron emitting device using carbon fiber, electron source, image display device, method of manufacturing the electron emitting device, method of manufacturing electron source using the electron emitting device, and method of manufacturing image display device.
  • the carbon nanotube is referred to as a fullerene having a cylindrical structure of a single layer or several layers of a graphite being wound, which is a new carbon material discovered in 1991 (refer to Nature, 354, (1991) 56).
  • the carbon nanotube has a cylindrically formed graphene.
  • the carbon nanotube having a single layer of a cylindrical graphene sheet is called a single-wall nanotube, and the one having multiple layers of the cylindrical graphene sheets is called a multi-wall nanotube.
  • the carbon nanotube is characterized by such a form featuring a high aspect ratio and chemically outstanding durability. Because of this, low-vacuum driving is practicable at a low voltage, and yet, utilization as a source material of a cold cathode durable for long-term service is anticipated.
  • the method of manufacturing the above-described carbon nanotube includes the following: an electrophoretic deposition, thermal CVD (chemical vapor deposition) method, plasma CVD method, arc discharge method, and laser vaporization method.
  • the thermal CVD method implements a synthesis method via chemical processes, a scale thereof can easily be expanded. Further, since this method utilizes hydrocarbon or the like as a raw material (synthesis gas), it is quite appropriate for mass production of the above carbon nanotube at a low cost.
  • an object of the present invention is to provide an electron emitting device featuring distinguished physical characteristics in the emission of electrons, higher durability, and capability to realize uniform emission of electrons within a surface. Further, the present invention also provides a method of manufacturing an electron emitting device, a method of manufacturing an electron source, a method of manufacturing en image display device, and a method of manufacturing carbon fibers.
  • an electron emitting device comprising a plurality of carbon fibers, wherein a mean diameter value of the plurality of carbon fibers is in a range from a minimum of 10 nm to a maximum of 100 nm, and a standard deviation of a diameter distribution is equal to or less than 30% of the mean diameter value, more preferably equal to or less than 15% thereof.
  • the present invention utilizes a bundle of carbon fibers (bunch of carbon fibers) as electron emitting members of an electron emitting device, thereby making it possible to realize such an electron emitting device featuring distinguished physical characteristics in the emission of electrons and high resistance against degradation, in which an individual carbon fiber has a mean diameter ranging from 10 nm to 100 nm, where standard deviation of a diameter distribution is rated to be equal to or less than 30% of the averaged diameter, preferably equal to or less than 15% thereof.
  • the present invention provides a method of manufacturing an electron emitting device comprising: disposing a substrate with a catalytic metal film inside a reaction vessel; introducing (feeding) hydrogen gas and hydrocarbon gas substantially simultaneously into the reaction vessel at a temperature close to a room temperature; raising the temperature inside the reaction vessel; and producing a plurality (bundle) of carbon fibers by way of keeping the temperature inside the reaction vessel to be substantially constant within a range from 400° C. to 600° C.
  • the inventive method is appropriate for implementing mass production at a low cost.
  • the inventive method utilizes palladium (Pd) or an alloy material containing Pd, in which the alloy material containing Pd further comprises at least such an ingredient selected from the group consisting of Fe, Co, and Ni.
  • Palladium (Pd) exerts significant catalytic function in the reaction to decompose hydrocarbon and can decompose hydrocarbon at a low temperature. Because of this, compared to the case of solely using Fe as a catalytic material, by utilizing palladium as the catalytic material to form the carbon fibers, it is possible to produce the bundle of carbon fibers (plurality of carbon fibers) at a still lower temperature.
  • ethylene gas or acetylene gas, or mixture of ethylene gas and acetylene gas, is utilized as hydrocarbon gas.
  • Any of the hydrocarbon gas group becomes a raw material (source gas) for composing carbon fibers, and yet, by using a gas which mixed the above hydrocarbon gas with hydrogen gas, it is possible to facilitate growth of the carbon fibers.
  • ethylene gas, acetylene gas, and hydrogen gas are respectively diluted with inert gas component.
  • available ethylene gas is diluted into a concentration below 2.7 vol % corresponding to the lower limit of the explosive range thereof.
  • available acetylene gas is also diluted into such concentration below 2.5 vol % corresponding to the lower limit of the explosive range thereof.
  • available hydrogen gas is also diluted into such concentration below 4 vol % corresponding to the lower limit of the explosive range thereof.
  • inert gas is fed into the reaction vessel in conjunction with hydrocarbon gas and hydrogen gas.
  • FIG. 1 presents a schematic cross-sectional view for showing a film comprising a number of carbon nanotubes
  • FIG. 2 presents a schematic cross-sectional view for showing a film comprising a number of graphite nanofibers
  • FIGS. 3A to 3 C schematically show serial processes for manufacturing electron emitting members in the electron emitting device according to the present invention
  • FIG. 4 presents a block diagram of an apparatus for producing electron emitting members in the electron emitting device according to the present invention
  • FIG. 5 presents a graphic chart for showing a diameter distribution of a bundle of graphite nanofibers
  • FIG. 6 presents a graphic chart for showing a diameter distribution of a bundle of graphite nanofibers produced in conformity with an embodiment of the method of manufacturing the electron emitting device according to the present invention
  • FIGS. 7A and 7B show a top view and a cross-sectional view of an electron emitting device of the present invention
  • FIG. 8 shows an example of a structure in the course of operating an electron emitting device of the present invention
  • FIG. 9 shows an example of another mode of an electron emitting device utilizing a number of carbon fibers of the present invention.
  • FIG. 10 shows an example of another mode of an electron emitting device utilizing a number of carbon fibers
  • FIG. 11 shows electron emitting characteristics of the electron emitting device of the present invention.
  • FIG. 12 presents a graphical chart for showing a diameter distribution of a bundle of graphite nanofibers produced in conformity with the method of manufacturing the electron emitting device of the present invention.
  • a carbon fiber is a fibrous material mainly containing carbon.
  • the term carbon fiber includes at least a “carbon nanotube”, “graphite nanofiber”, and “amorphous carbon fiber”.
  • FIGS. 1 and 2 respectively present schematic cross-sectional views of a film including a plurality of carbon fibers.
  • one of the illustrations shown to the left exemplifies a form of carbon fibers visible via an optical microscopic level (up to 1000 times)
  • the one shown in the center exemplifies a form of carbon fibers visible via a scanning electronic microscopic (SEM) level (up to 30000 times)
  • a form of carbon fibers visible via a transmission electronic microscopic (TEM) level (up to 1 million times) is exemplified in an illustration shown to the right.
  • SEM scanning electronic microscopic
  • TEM transmission electronic microscopic
  • the carbon fiber in which the graphenes form a cylindrical shape as shown in FIG. 1 is called a “carbon nanotube” (the fiber in which the graphenes forms a multiple-cylinder structure is called a “multi-wall nanotube”).
  • the threshold voltage for electron emission is lowest.
  • FIG. 2 schematically exemplifies the “graphite nanofiber”.
  • Such carbon fiber comprising the laminate of graphenes (stacked graphens).
  • the “graphite nanofiber” comprise the fibrous material including graphenes laminated(stacked) in the longitudinal direction of the fiberous material (i.e., axial direction of fiber).
  • the “graphite nanofiber” comprise the fibrous material, in which the graphenes are arranged in non-parallel to the axis of the fiber. Even when the graphenes are substantially orthogonal to the axial direction of the fibers, this case is also included in the “graphite nanofiber” of the present invention.
  • graphite comprises plurality of stacked or layered carbon planes. Each carbon plane comprises a repeated hexagon having a carbon atom at each vertex thereof and having a covalent bond along each side thereof. The covalent bond is caused by sp2 hybrid orbitals of carbon atoms. Ideally, the distance (interval) between the neighboring carbon planes is maintained at 3.354 ⁇ .
  • One sheet of the carbon plane is called “graphene” or “graphene sheet”.
  • the “graphite nanofiber” include extremely fine projections on its surface (i.e., on its side surface). Therefor an electric field is easily concentrated at the suraface of the graphite nanofiber, and thus, it is conceived that electrons can easily be emitted from the fiber. Furthermore, the graphenes included in the fiber are extend from the center axis of carbon fiber in the direction of external circumference (surface) of the fiber, it is conceived that electrons can easily be emitted. On the other hand, generally, the side surface of the “carbon nanotube” is chemically inert.
  • the “carbon nanotube” has quite smooth side surface (projections are not exist on the side surface of the “carbon nanotube”). Thus, it is conceived that the threshold voltage required for the electron emission from the side of the “carbon nanotube” is higher than that of the “graphite nanofiber”. Because of this, application of the “graphite nanofiber” to the electron-emitting device (emitter) is more preferable than application of the “carbon nanotube” to the electron-emitting device (emitter).
  • an electron emitting device For example, by utilizing the film comprising a plurality of the graphite nanofibers as an emitter, and then, by preparing an electrode (such as a gate electrode) for controlling emission of electrons from this emitter, an electron emitting device can be formed. Furthermore, by way of disposing a light emitting member capable of emitting light via irradiation of electrons on the orbit of emitted electrons, it is possible to form a light emitting device such as a lamp.
  • an electrode such as a gate electrode
  • anode electrode including the light-emitting member such as a phosphor, and disposing a plurality of electron-emitting devices utilizing the films each comprising a plurality of the above graphite nanofibers, it is also possible to compose an image display device such as a display unit.
  • an image display device such as a display unit.
  • the inventive electron emitting device, light emitting device, or the image display device according to the present invention unlike a conventional electron emitting device, it is possible for the inventive devices to stably emit electrons without necessarily preserving the interior space at extremely high vacuum. Further, since the inventive electron emitting device according to the present invention stably emits electrons in presence of a low electric field, the invention can very easily manufacture highly reliable devices described above.
  • the electron emitting device comprises a cathode electrode and a plurality of carbon fibers which are individually electrically connected to the cathode electrode.
  • a mean diameter of the individual carbon fibers ranges from 10 nm to 100 nm.
  • a standard deviation of a diameter distribution is equal to or less than 30% of the averaged diameter, preferably equal to or less than 15%.
  • a glass substrate “PD200” available from Asahi Glass Co., Ltd., having a softening point of 830° C. and a distortion point of 570° C., maybe utilized for example. It should be understood however that the substrate is not limited to the glass substrate exemplified above.
  • the graphite nanofibers for implementing the present invention are capable of growing themselves at a temperature of 500° C. or lower, no deformation occurs in the PD200 via exposure to a higher temperature.
  • An electroconductive film such as a film of titanium nitride, for feeding electrons to the carbon fibers is disposed on the above-described substrate. Utilization of nitride restrain oxidation of titanium at a high temperature, thereby it is possible to restrain degradation of electrical conductivity of the cathode electrode.
  • a catalytic material to expedite growth of the carbon fibers is formed on the cathode electrode that is formed on the substrate.
  • the thin film containing a palladium alloy or containing a palladium itself is formed.
  • Sputtering or other conventional film forming method can be applied to the forming method of the film according to this invention.
  • the catalytic material is not limited to palladium.
  • FIG. 3A schematically exemplifies a thin film 102 of titanium nitride formed on a glass substrate 101 .
  • the electrically conductive thin film (i.e., a cathode electrode) 102 comprising titanium nitride is formed on the glass substrate 101 .
  • another thin film 103 comprising palladium thin film as a catalytic material is formed on the cathode electrode 102 .
  • FIGS. 3A to 3 C schematically designates part of the processes for producing the electron emitting device of the present invention.
  • FIG. 4 shows an apparatus for producing a carbon fiber material comprising a reaction vessel 505 and a gas-feeding system.
  • the temperature inside the reaction vessel 505 is properly controlled within a range from a room temperature to 1200° C. by means of a heater 506 , a water cooling device (not shown), a thermocouple type thermometer (not shown), and a temperature controller (not shown).
  • the system for feeding gas components into the reaction vessel 505 comprises the following: a cylinder 500 for storing compressed acetylene gas (i.e., hydrocarbon gas) diluted with nitrogen gas into 1 vol % of concentration; a cylinder 501 for storing compressed ethylene gas (i.e., hydrocarbon gas) diluted with nitrogen gas into 1 vol % of concentration; a cylinder 502 for storing compressed hydrogen gas diluted with nitrogen gas into 2 vol % of concentration; a cylinder 503 for storing compressed pure nitrogen gas; and a gas flow meter 504 for properly controlling flow rate of the above-described gas components.
  • the system for exhausting inside the reaction vessel 505 comprises a turbo-molecular pump 507 and a rotary pump 500 .
  • a substrate superficially formed with a metallic palladium thin film is disposed inside the reaction vessel 505 .
  • the thin film 103 comprising the catalytic material While raising temperature, as shown in FIG. 3B, the thin film 103 comprising the catalytic material will be converted into particles with a diameter of several nm to 100 nm and will be distributed, in the particle state, on the substrate.
  • FIG. 5 represents a graphic chart for designating the diameter distribution of the bundle of the graphite nanofibers analyzed via observation of a sample with an electron microscope.
  • the standard deviation is estimated at 14.35 nm and the mean diameter is estimated at 42.79 nm.
  • the standard deviation against the mean diameter value was analyzed to be approximately 34%.
  • FIG. 6 represents a graphical chart for designating the diameter distribution of the bundle of the graphite nanofibers produced in accordance with a an embodiment implementing the method of manufacturing the electron emitting device according to the present invention.
  • the standard deviation is estimated at 3.01 nm and the mean diameter is estimated at 11.75 nm.
  • the mean diameter value is quite small, and yet, the width of the distribution is extremely narrow, where the standard deviation against the mean diameter value was analyzed to be approximately 26%.
  • the reaction vessel 505 is cooled to the room temperature and then the whole serial processes are completed. After completing the whole serial processes, as shown in FIG. 3C, a carbon fiber material 105 comprising a bundle of the graphite nanofibers each having a controlled diameter and controlled diameter distribution is obtained on the substrate.
  • the above-described manufacturing method is also applicable to the carbon nanotubes.
  • the temperature for thermally decomposing hydrocarbon it is necessary to arrange the temperature for thermally decomposing hydrocarbon to be higher than the temperature applied to the formation of the graphite nanofibers
  • the carbon nanotubes can be prepared by way of implementing those serial processes identical to the case of growing the graphite nanofibers.
  • the ink (or a paste) is applied on the cathode electrode arranged on the substrate.
  • the solvent and another organic matter included in the ink is vaporized and the fibers are connected to the cathode electrode through the electrically conductive bonding agent.
  • FIGS. 7A, 7B, and 8 an example of the inventive electron emitting device utilizing a number of carbon fibers as electron emitting members produced by applying the above method is described below.
  • FIGS. 7A and 7B present a plan view and a cross-sectional view of the electron emitting device of the present invention; in which FIG. 7A schematically shows an example of the constitution of the inventive electron emitting device.
  • FIG. 7B presents a cross-sectional view of the above electron emitting device taken along the line A-A shown in FIG. 7A.
  • the reference numeral 201 shown in FIGS. 7A and 7B denotes an insulating substrate, 202 denotes a gate electrode, 203 denotes a cathode electrode, 207 denotes a carbon fiber material for composing an emitter, and 205 denotes a film of titanium nitride for constituting an electrically conductive material on which the carbon fiber material grows up via catalytic particles.
  • the substrate 201 quart glass of which the surface is sufficiently rinsed, glass of which the content of impurities such as Na is reduced and which is partially substituted by Korthe like, alaminate formed by laminating SiO 2 onto a substrate such as a soda lime glass or silicon substrate by sputtering or the like, and an insulating substrate made of alumina or ceramics are available.
  • the gate electrode 202 and the cathode electrode 203 are electro-conductive, and are formed by printing, generally-used vacuum film-forming techniques such as vapor deposition and sputtering, and photolithography.
  • Materials for the gate electrode 202 and the cathode electrode 203 are appropriately selected from, e.g., carbon, metals, metal nitrides, metal carbides, metal borides, semiconductors, and semiconductor metal compounds.
  • the thickness of the above-described electrodes is set to be within the range of from several tenth nanometers to several tenth micrometers.
  • refractory materials that is, carbon, metals, metal nitrides, and metal carbides are employed.
  • the plane including part of the surface of the electron emitting members 207 and being substantially parallel with the surface of the substrate 201 is disposed between the plane including part of the surface of the gate electrode 202 and being substantially parallel with the surface of the substrate 201 and an anode electrode 411 .
  • a tip portion 413 of the electron emitting members 207 is disposed at a height (s) at which the emitted electrons are substantially prevented from scattering at the gate electrode 202 , where the height (s) is defined by the distance between a plane including part of the surface of the gate electrode 202 and being substantially parallel with the surface of the substrate 201 and a plane including the surface of the electron emitting members 207 and being substantially parallel with the surface of the substrate 201 .
  • the above-described height (s) is dependent upon the ratio of the vertical directional electric field with the horizontal directional electric field, where the ratio is defined by “the vertical directional electric field “/”the horizontal directional electric field”.
  • the greater the ratio thereof the smaller the value of the height (s). In other words, the smaller the ratio, the higher the height (s) being required.
  • the height (s) is defined within a range from 10 nm to 10 ⁇ m.
  • horizontal directional electric field may be defined as “an electric field existing in the direction being substantially parallel with the surface of the substrate 201 ”. Alternatively, this may also be defined as “an electric field existing in the direction in which the gate electrode 202 oppositely faces the cathode electrode 203 ”.
  • vertical directional electric field may be defined as “an electric field existing in the direction substantially orthogonal to the surface of the substrate 201 ”. Alternatively, this may also be defined as “an electric field existing in the direction in which the substrate 201 oppositely faces the anode electrode 411 ”.
  • the present invention further provides the electron emitting device as shown in FIG. 9.
  • the insulating layer is disposed on a part of the gate electrode (the insulating layer overlaps a part of the gate electrode), and the cathode electrode and the film comprising a plurality of carbon fibers electrically connected to the cathode electrode are respectively disposed on the insulating layer.
  • implementation modes of the electron emitting device according to the present invention are not limited to those shown in FIGS. 7A, 7B, and 9 .
  • FIG. 10 such an arrangement is also practicable in which an insulating layer with an aperture and a gate electrode with an aperture are disposed on a cathode electrode, and an bundle of carbon fibers is disposed such that the carbon fibers can electrically be connected to a part of the cathode electrode exposed inside the apertures.
  • FIGS. 8 and 9 an implementation mode in which tip portions of carbon fibers are arranged so as to be closer to the anode electrode than to the gate electrode is more preferable.
  • the above-described high efficiency in the emission of electrons can be expressed in terms of “current (Ie) flowing through the anode electrode/current (If) flowing between the cathode electrode and the gate electrode”.
  • FIG. 8 exemplifies a configuration employed when operating the electron emitting device according to the present invention.
  • an anode electrode 410 was provided at a height position H being several millimeters above a substrate surface, and then the anode electrode 410 was applied with a voltage Va ranging from 1 KV to 15 KV by a high-voltage power source.
  • the anode 410 includes a phosphor film covered with an electrically conductive film.
  • Electron-emitting characteristics of the electron emitting device for example, deviation of the emission current Ie with respect to the driving voltage Vf, are greatly dependent on the physical shape of an electron emitting material, i.e., physical shapes of carbon fibers.
  • an electron emitting material i.e., physical shapes of carbon fibers.
  • inventors of the present invention discovered that diameter distribution of carbon fibers gravely affects electron emission characteristics. Insofar as diameters of individual carbon fibers are uniform, stable electron emission characteristics are obtained, and thus electrons are emitted within the surface of carbon fibers with high uniformity. Conversely, if the diameter distribution is broadly spread, the electron emitting characteristics are subject to variation within a short period of time, and degradation occurs with passage of time. In addition, uneven emission of electrons often occurs within the emitting surface thereof.
  • any measuring method may be utilized. For example, there is such a method in which an image of a bundle of carbon fibers is photographed by a scanning-type electronic microscope (which image is hereinafter referred to as the “SEM image”), and then, based on the photographed image, actual diameters of individual carbon fibers are measured. In this case, a plan-view SEM image of individual carbon fibers is photographed by applying such a magnification that would allow observation of each of the carbon fibers and accurate measurement of individual diameters thereof in order to collect statistical data related thereto.
  • SEM image scanning-type electronic microscope
  • plan-view SEM image refers to an SEM image photographed from a direction substantially perpendicular to the surface of a substrate with a plurality (bundle) of carbon fibers (a film comprising a plurality of carbon fibers).
  • magnifications ranging from 100 thousands times to 500 thousands times for example.
  • the above SEM image is split into plural, substantially uniform regions.
  • its diameter is measured, thereby obtaining “x ( 1 ), x ( 2 ), . . . x (p)”.
  • diameters of the p-pieces of carbon fibers are assumed to be “x (p+1), x (p+2), . . . x (p+q)”.
  • diameters of carbon fibers are measured in all the split regions to obtain diameter values of individual carbon fibers present in the film comprising a plurality of carbon fibers as “x ( 1 ), x ( 2 ), . . . x (n)”.
  • a mean value between the maximum diameter and the minimum diameter that the carbon fiber takes within the photographed SFM image is determined to be the actual diameter value thereof.
  • axes of individual fibers are substantially straight in many cases. Even in a bundle of carbon fibers, individual carbon fibers are oriented in the substantially identical direction.
  • a cross-sectional SEM image may be utilized. In this case, such a film comprising plural carbon fibers is cut into a plurality of samples so that individual cross-sections thereof will be in parallel with each other. It is desired that the individually cut samples will have as narrow width as possible. Next, a cross sectional SEM image is photographed with respect to each of the individual samples.
  • evaluation processes are executed with respect to the individual SEM images in order to evaluate, on a strange line extending perpendicular to the oriented direction of individual carbon fibers, width of projections (bright regions) and recesses (dark regions) of gradations, and actual number of the projections (bright regions) and recesses (dark regions).
  • the electron emitting device of the present invention can be applied to an image display device.
  • a thin film of titanium nitride was formed on a substrate PD200 (a product of Asahi Glass Co., Ltd., Tokyo, Japan) by applying an ion-beam sputtering process.
  • the above-described substrate was disposed on a uniformly heated region inside a reaction vessel 505 is shown in FIG. 4.
  • the reaction vessel 505 is evacuated until a pressure of 10 ⁇ 6 ⁇ 1.333 ⁇ 10 2 Pa is reached, by applying a turbo-molecular pump 507 and a rotary pump 508 .
  • a cylinder 502 stores compressed hydrogen gas diluted with nitrogen gas into 2 vol % of concentration.
  • the diluted hydrogen gas was fed from the cylinder 502 into the reaction vessel 505 via a gas flow meter 504 at room temperature and at a flow rate of 0.17 liter per minute.
  • ethylene gas diluted with nitrogen gas into 1 vol % of concentration was fed from the cylinder 501 into the reaction vessel 505 via the gas flow meter 505 at room temperature and at a flow rate of 0.34 liter per minute.
  • the internal temperature was cooled down to room temperature in approximately 20 minutes of cooling, by applying a water cooling device set in the neighborhood of the reaction vessel 505 . Temperature at the uniformly heating region inside the reaction vessel 505 was measured with an R-thermocouple.
  • the upper surface of the substrate PD200 visually turned into black. It was found through observation with a scanning type electronic microscope that a fibrous material was formed on the substrate. After analyzing Raman spectrum and X-ray photo-electronic spectrum, it was confirmed that the above-described fibrous material was carbon.
  • FIG. 6 is a graphic chart indicating the result of evaluating the diameter distribution of graphite nanofibers through analysis of the plan-view SEM photographic image of a bundle of the graphite nanofibers produced by executing the above-described serial processes.
  • FIG. 11 is a graphic chart indicating the relationship between applied voltages and, the characteristics of emitted current, in the inventive electron emitting device comprising a bundle of graphite nanofibers as electron emitting members.
  • the bundle of graphite nanofibers was grown on a cathode electrode over an area of several square millimeters, a gap of several hundreds of microns was provided between an anode electrode and the cathode electrode.
  • the relationship between the anode voltage Va and the emitted current Ie was measured.
  • Intensity of electric field Fa obtained through division of the anode voltage Va by the gap between the anode electrode and the cathode electrode is indicated along the horizontal axis.
  • current density Je obtained through division of the emitted current Ie by the area of the electron emitting portion is indicated along the vertical axis.
  • a plot indicated as “the diameter distribution is narrow” shown in FIG. 11 corresponds to a chart that represents the electron emitting characteristics of the inventive electron emitting device.
  • the inventive electron emitting device proved to exhibit satisfactory characteristics such as a smooth rise-up property, with an electric-filed intensity of 6V/ ⁇ m or slightly below as its threshold value.
  • the inventive electron emitting device was driven with a constant anode voltage Va, there was only a negligible decrease in the emitted current Ie.
  • an electron emitting device comprising a bundle of graphite nanofibers as electron emitting members can provide an excellent electron emitting device which exhibits a low anode voltage at the electron emitting threshold value, quick rise of emitted current, and little degradation during long-term driving.
  • a substrate was prepared for depositing a bundle of graphite nanofibers thereon. Next, the substrate was set inside a reaction vessel, and the interior space of the reaction vessel was evacuated.
  • Example 1 As in Example 1, an alloy material comprising 90 parts of cobalt and 10 parts of palladium was used as catalytic metal.
  • a cylinder 502 stores compressed hydrogen gas diluted with nitrogen gas into 2 vol % of concentration.
  • the diluted hydrogen gas was fed into a reaction vessel 505 from the cylinder 502 via a gas flow meter 504 at a flow rate of 0.17 liter per minute.
  • the interior temperature of the reaction vessel 505 was raised, at 300° C., ethylene gas diluted with nitrogen gas into 1 vol % of concentration was fed into the reaction vessel 505 from another cylinder 501 via the gas flow meter 504 at a flow rate of 0.34 liter per minute.
  • a cylinder 502 stores compressed hydrogen gas diluted with nitrogen gas into 2 vol % of concentration. While the interior temperature of a reaction vessel 505 was raised, at 300° C., the diluted hydrogen gas was fed into a reaction vessel 505 from the cylinder 502 via a gas flow meter 504 at a flow rate of 0.17 liter per minute. In addition, while the interior temperature of the reaction vessel was raised, at 300° C., ethylene gas diluted with nitrogen gas into 1 vol % of concentration was fed into the reaction vessel 505 from another cylinder 501 via the gas flow meter 504 at a flow rate of 0.34 liter per minute.
  • a cylinder 502 stores compressed hydrogen gas diluted with nitrogen gas into 2 vol % of concentration. While the interior temperature of a reaction vessel 505 was raised, at 300° C., the diluted hydrogen gas was fed into the reaction vessel 505 from the cylinder 502 via a gas flow meter 504 at a flow rate of 0.17 liter per minute. In addition, while the interior temperature of the reaction vessel 505 was raised, at 600° C., ethylene gas diluted with nitrogen gas into 1 vol % of concentration was fed into the reaction vessel 505 from the cylinder 501 via the gas flow meter 504 at a flow rate of 0.34 liter per minute.
  • FIG. 5 exemplifies diameter distribution in the bundle of graphite nanofibers produced through the method described in comparative example 3.
  • the mean diameter value was 42.79 nm, whereas the value of the standard deviation was 14.35 nm. This means that the standard deviation becomes approximately 34% against the mean diameter value.
  • the plot indicated as “diameter distribution is broad” shown in FIG. 11 represents the result of evaluating electron emission characteristics of the bundle of graphite nanofibers produced in the above-described comparative example 3 , in the same manner as in Example 1.
  • the value of current density Je noticeably varies within a range in which intensity of applied electric field is from 5V to 7V/ ⁇ m. This is due to a phenomenon in which an electron emitting point alternately appears and disappears in accordance with the rise of the intensity of electric field. Once disappeared, the electron emitting point never reappears.
  • the electron emitting device has a threshold value of approximately 7V/ ⁇ m. In correspondence with the rise of the intensity Fa of electric field, the current density Je rose while varying somewhat. Further, current Ie emitted while driving the electron emitting device under a constant anode voltage Va decreased apparently more quickly along with passage of time as compared to the case of Example 1. It was further noted that electron emitting points within the emitting surface were unevenly distributed.
  • the substrate was disposed inside a reaction vessel, and then the interior portion of the reaction vessel was evacuated.
  • FIG. 12 presents an analytical chart indicating diameter distribution of an bundle of graphite nanofibers produced by applying the method of manufacturing the inventive electron emitting device.
  • the measured result was compared against the case of the bundle of graphite nanofibers produced in Example 1.
  • the electron emitting device according to Example 2 proved to be free from degradation even with long-term driving, and uniform electron emission was observed within the emitting surface. There fore, the electron emitting device according to Example 2 is judged to have satisfactory electron emitting characteristics.
  • the present invention has made it possible to manufacture an electron emitting device which exhibits satisfactory electron emitting characteristics and suffers from little degradation.
  • the present invention has made it possible to produce the above-described electron emitting device at a temperature below softening point and distortion point of glass, it is possible to utilize a glass material as a substrate.

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US10/237,677 2001-09-10 2002-09-10 Electron emitting device using carbon fiber; electron source; image display device; method of manufacturing the electron emitting device; method of manufacturing electron source using the electron emitting device; and method of manufacturing image display device Abandoned US20030048057A1 (en)

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US7258590B2 (en) 2007-08-21
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EP1291889A3 (en) 2004-02-04
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US7094123B2 (en) 2006-08-22
JP2003157756A (ja) 2003-05-30
CN1405823A (zh) 2003-03-26
EP1291889B1 (en) 2010-11-24
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US20050153619A1 (en) 2005-07-14
KR20030022720A (ko) 2003-03-17
CN1240095C (zh) 2006-02-01

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