UA66913C2 - Tungsten carbide coatings (variants), a method for manufacture thereof and composite material (variants) - Google Patents

Tungsten carbide coatings (variants), a method for manufacture thereof and composite material (variants)

Info

Publication number
UA66913C2
UA66913C2 UA2001096234A UA2001096234A UA66913C2 UA 66913 C2 UA66913 C2 UA 66913C2 UA 2001096234 A UA2001096234 A UA 2001096234A UA 2001096234 A UA2001096234 A UA 2001096234A UA 66913 C2 UA66913 C2 UA 66913C2
Authority
UA
Ukraine
Prior art keywords
variants
tungsten
tungsten carbide
manufacture
composite material
Prior art date
Application number
UA2001096234A
Other languages
English (en)
Inventor
Yurii Viktorovych Lakhotkin
Volodymyr Petrovych Kuzmin
Original Assignee
Hardid Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hardid Ltd filed Critical Hardid Ltd
Publication of UA66913C2 publication Critical patent/UA66913C2/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Ceramic Products (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating By Spraying Or Casting (AREA)
UA2001096234A 1999-02-11 1999-02-11 Tungsten carbide coatings (variants), a method for manufacture thereof and composite material (variants) UA66913C2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/RU1999/000037 WO2000047796A1 (fr) 1999-02-11 1999-02-11 Revetements de carbure de tungstene et procede de production

Publications (1)

Publication Number Publication Date
UA66913C2 true UA66913C2 (en) 2004-06-15

Family

ID=20130326

Family Applications (1)

Application Number Title Priority Date Filing Date
UA2001096234A UA66913C2 (en) 1999-02-11 1999-02-11 Tungsten carbide coatings (variants), a method for manufacture thereof and composite material (variants)

Country Status (24)

Country Link
US (1) US6800383B1 (xx)
EP (1) EP1158070B1 (xx)
JP (1) JP4456279B2 (xx)
KR (1) KR100603554B1 (xx)
CN (1) CN1150347C (xx)
AT (1) ATE408035T1 (xx)
AU (1) AU747585B2 (xx)
BR (1) BR9917267B1 (xx)
CA (1) CA2366500C (xx)
CZ (1) CZ300250B6 (xx)
DE (1) DE69939554D1 (xx)
EA (1) EA003063B1 (xx)
EE (1) EE200100421A (xx)
ES (1) ES2315012T3 (xx)
HK (1) HK1041908B (xx)
IS (1) IS6046A (xx)
MX (1) MXPA01008146A (xx)
NO (1) NO331513B1 (xx)
PL (1) PL190391B1 (xx)
SI (1) SI1158070T1 (xx)
SK (1) SK286721B6 (xx)
TR (1) TR200102340T2 (xx)
UA (1) UA66913C2 (xx)
WO (1) WO2000047796A1 (xx)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475276B1 (en) 1999-10-15 2002-11-05 Asm Microchemistry Oy Production of elemental thin films using a boron-containing reducing agent
US7419903B2 (en) 2000-03-07 2008-09-02 Asm International N.V. Thin films
DE60045745D1 (de) 2000-03-15 2011-04-28 Hardide Ltd Klebende verbundbeschichtung für diamant und diamant enthaltende werkstoffe und verfahren zur herstellung dieser beschichtung
US6827796B2 (en) 2000-11-02 2004-12-07 Composite Tool Company, Inc. High strength alloys and methods for making same
DE10063717C1 (de) 2000-12-20 2002-02-21 Infineon Technologies Ag Verfahren zur Abscheidung dünner Schichten durch Chemical Vapor Deposition
US9139906B2 (en) 2001-03-06 2015-09-22 Asm America, Inc. Doping with ALD technology
WO2003025243A2 (en) 2001-09-14 2003-03-27 Asm International N.V. Metal nitride deposition by ald using gettering reactant
GB0207375D0 (en) 2002-03-28 2002-05-08 Hardide Ltd Cutting tool with hard coating
WO2005017963A2 (en) 2003-08-04 2005-02-24 Asm America, Inc. Surface preparation prior to deposition on germanium
US7405143B2 (en) 2004-03-25 2008-07-29 Asm International N.V. Method for fabricating a seed layer
GB0422608D0 (en) * 2004-10-12 2004-11-10 Hardide Ltd Alloyed tungsten produced by chemical vapour deposition
EP1851794A1 (en) 2005-02-22 2007-11-07 ASM America, Inc. Plasma pre-treating surfaces for atomic layer deposition
KR100664042B1 (ko) 2005-10-11 2007-01-03 엘지전자 주식회사 조리 기구
US8993055B2 (en) 2005-10-27 2015-03-31 Asm International N.V. Enhanced thin film deposition
EP1785506A1 (en) 2005-11-09 2007-05-16 Centre de compétence de l'Ind. Techn. (CRIF) - Kenniscentrum van de Tech. Ind. (WICM) Protective coating for casting moulds
US20100211180A1 (en) * 2006-03-21 2010-08-19 Jet Engineering, Inc. Tetrahedral Amorphous Carbon Coated Medical Devices
DE102006023396B4 (de) * 2006-05-17 2009-04-16 Man B&W Diesel A/S Verschleißschutzbeschichtung sowie Verwendung und Verfahren zur Herstellung einer solchen
US8202335B2 (en) * 2006-10-10 2012-06-19 Us Synthetic Corporation Superabrasive elements, methods of manufacturing, and drill bits including same
US8268409B2 (en) * 2006-10-25 2012-09-18 Asm America, Inc. Plasma-enhanced deposition of metal carbide films
US7611751B2 (en) * 2006-11-01 2009-11-03 Asm America, Inc. Vapor deposition of metal carbide films
US7598170B2 (en) * 2007-01-26 2009-10-06 Asm America, Inc. Plasma-enhanced ALD of tantalum nitride films
US7595270B2 (en) * 2007-01-26 2009-09-29 Asm America, Inc. Passivated stoichiometric metal nitride films
US7713874B2 (en) 2007-05-02 2010-05-11 Asm America, Inc. Periodic plasma annealing in an ALD-type process
US8196682B2 (en) * 2007-07-13 2012-06-12 Baker Hughes Incorporated Earth boring bit with wear resistant bearing and seal
US8080324B2 (en) * 2007-12-03 2011-12-20 Kobe Steel, Ltd. Hard coating excellent in sliding property and method for forming same
JP5551681B2 (ja) 2008-04-16 2014-07-16 エーエスエム アメリカ インコーポレイテッド アルミニウム炭化水素化合物を使用する金属炭化物膜の原子層堆積
US7666474B2 (en) 2008-05-07 2010-02-23 Asm America, Inc. Plasma-enhanced pulsed deposition of metal carbide films
JP5353310B2 (ja) * 2009-03-05 2013-11-27 株式会社不二越 バナジウム含有被膜およびバナジウム含有被膜を被覆した金型または切削工具
US8383200B2 (en) 2009-05-27 2013-02-26 GM Global Technology Operations LLC High hardness nanocomposite coatings on cemented carbide
US8592711B2 (en) * 2009-10-01 2013-11-26 George H. Lambert Apparatus and method of electronically impregnating a wear-resistant cutting edge
JP5809152B2 (ja) 2009-10-20 2015-11-10 エーエスエム インターナショナル エヌ．ヴェー．Ａｓｍ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｎ．Ｖ． 誘電体膜をパッシベーションする方法
CN102234755B (zh) * 2010-04-23 2013-03-27 南京梅山冶金发展有限公司 一种覆有非晶态碳化钨涂层的新型冷轧活套辊
JP2011051890A (ja) * 2010-10-18 2011-03-17 Hardide Ltd ダイアモンド用およびダイアモンド含有材料用の接着性複合被膜および前記被膜の製造方法
GB201020098D0 (en) 2010-11-26 2011-01-12 Head Phillip Rotating impacting tool
EP2756153A4 (en) 2011-09-16 2015-08-05 Baker Hughes Inc METHOD FOR FIXING A POLYCRYSTALLINE DIAMOND PRESSURE ON A SUBSTRATE AND CUTTING ELEMENTS MOLDED IN THIS METHOD
US9314985B2 (en) 2011-09-27 2016-04-19 Kennametal Inc. Coated pelletizing extrusion dies and method for making the same
CN102560411A (zh) * 2012-01-10 2012-07-11 北京工业大学 一种钛合金表面抗烧蚀涂层的制备方法
US9309895B2 (en) 2012-06-18 2016-04-12 Kennametal Inc. Closed impeller with a coated vane
US20130337221A1 (en) 2012-06-18 2013-12-19 Kennametal Inc. Coated member for movement relative to a surface and method for making the coated member
BR102012024729B1 (pt) 2012-09-27 2020-05-19 Mahle Int Gmbh anel de controle de óleo de três peças para motores de combustão interna, elemento expansor e elemento anelar
US20140113453A1 (en) * 2012-10-24 2014-04-24 Lam Research Corporation Tungsten carbide coated metal component of a plasma reactor chamber and method of coating
BR102012028060A2 (pt) * 2012-10-31 2014-06-24 Mahle Metal Leve Sa Válvula para motores de combustão interna
US9412602B2 (en) 2013-03-13 2016-08-09 Asm Ip Holding B.V. Deposition of smooth metal nitride films
US8846550B1 (en) 2013-03-14 2014-09-30 Asm Ip Holding B.V. Silane or borane treatment of metal thin films
US8841182B1 (en) 2013-03-14 2014-09-23 Asm Ip Holding B.V. Silane and borane treatments for titanium carbide films
GB2509790B (en) * 2013-03-27 2015-02-25 Hardide Plc Superabrasive material with protective adhesive coating and method for producing said coating
CN103451527A (zh) * 2013-09-25 2013-12-18 常熟市金马模具有限公司 一种耐高温模具
US9840765B2 (en) 2013-10-16 2017-12-12 General Electric Company Systems and method of coating an interior surface of an object
US9111734B2 (en) 2013-10-31 2015-08-18 General Electric Company Systems and method of coating an interior surface of an object
US9394609B2 (en) 2014-02-13 2016-07-19 Asm Ip Holding B.V. Atomic layer deposition of aluminum fluoride thin films
US10643925B2 (en) 2014-04-17 2020-05-05 Asm Ip Holding B.V. Fluorine-containing conductive films
US10002936B2 (en) 2014-10-23 2018-06-19 Asm Ip Holding B.V. Titanium aluminum and tantalum aluminum thin films
US9875890B2 (en) * 2015-03-24 2018-01-23 Lam Research Corporation Deposition of metal dielectric film for hardmasks
US9941425B2 (en) 2015-10-16 2018-04-10 Asm Ip Holdings B.V. Photoactive devices and materials
US9786491B2 (en) 2015-11-12 2017-10-10 Asm Ip Holding B.V. Formation of SiOCN thin films
US9786492B2 (en) 2015-11-12 2017-10-10 Asm Ip Holding B.V. Formation of SiOCN thin films
TWI720106B (zh) * 2016-01-16 2021-03-01 美商應用材料股份有限公司 Pecvd含鎢硬遮罩膜及製造方法
KR102378021B1 (ko) 2016-05-06 2022-03-23 에이에스엠 아이피 홀딩 비.브이. SiOC 박막의 형성
US10186420B2 (en) 2016-11-29 2019-01-22 Asm Ip Holding B.V. Formation of silicon-containing thin films
US10847529B2 (en) 2017-04-13 2020-11-24 Asm Ip Holding B.V. Substrate processing method and device manufactured by the same
US10504901B2 (en) 2017-04-26 2019-12-10 Asm Ip Holding B.V. Substrate processing method and device manufactured using the same
US11158500B2 (en) 2017-05-05 2021-10-26 Asm Ip Holding B.V. Plasma enhanced deposition processes for controlled formation of oxygen containing thin films
CN107104338A (zh) * 2017-05-19 2017-08-29 北京中航路通科技有限公司 一种接地装置使用的摩擦盘
CN107130227B (zh) * 2017-07-06 2019-08-06 北京理工大学 一种超细纳米晶碳化钨涂层及其制备方法
GB2568063B (en) * 2017-11-02 2019-10-30 Hardide Plc Water droplet erosion resistant coatings for turbine blades and other components
US10991573B2 (en) 2017-12-04 2021-04-27 Asm Ip Holding B.V. Uniform deposition of SiOC on dielectric and metal surfaces
WO2019181742A1 (ja) * 2018-03-19 2019-09-26 住友電気工業株式会社 表面被覆切削工具
JP6798627B2 (ja) * 2018-03-19 2020-12-09 住友電気工業株式会社 表面被覆切削工具
JP6798626B2 (ja) * 2018-03-19 2020-12-09 住友電気工業株式会社 表面被覆切削工具
CN110878410A (zh) * 2018-09-06 2020-03-13 深圳精匠云创科技有限公司 3d玻璃硬质合金模具及其制作方法
US10994379B2 (en) 2019-01-04 2021-05-04 George H. Lambert Laser deposition process for a self sharpening knife cutting edge
CN110735126B (zh) * 2019-10-24 2021-09-14 江苏亿阀股份有限公司 一种在钢基体上制备碳化钨过渡层-硅掺杂金刚石复合涂层的方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2962388A (en) * 1954-03-12 1960-11-29 Metallgesellschaft Ag Process for the production of titanium carbide coatings
US3368914A (en) * 1964-08-05 1968-02-13 Texas Instruments Inc Process for adherently depositing a metal carbide on a metal substrate
US3389977A (en) * 1964-08-05 1968-06-25 Texas Instruments Inc Tungsten carbide coated article of manufacture
GB1326769A (en) * 1970-10-08 1973-08-15 Fulmer Res Inst Ltd Formulation of tungsten and molybdenum carbides
JPS54152281A (en) * 1978-05-22 1979-11-30 Mitsubishi Metal Corp Surface-coated tool component and manufacturing method
JPS5939242B2 (ja) * 1978-07-31 1984-09-21 三菱マテリアル株式会社 表面被覆工具部品
JPS6184375A (ja) * 1984-09-29 1986-04-28 Toho Kinzoku Kk 化学蒸着法
JPS61157681A (ja) * 1984-12-28 1986-07-17 Toho Kinzoku Kk 化学蒸着法
GB8521406D0 (en) * 1985-08-28 1985-10-02 Atomic Energy Authority Uk Coatings
US4874642A (en) * 1987-09-03 1989-10-17 Air Products And Chemicals, Inc. Method for depositing a hard, fine-grained, non-columnar alloy of tungsten and carbon on a substrate
US4945640A (en) * 1987-09-03 1990-08-07 Diwakar Garg Wear resistant coating for sharp-edged tools and the like
US4910091A (en) * 1987-09-03 1990-03-20 Air Products And Chemicals, Inc. High hardness fine grained tungsten-carbon alloys
US5006371A (en) * 1988-02-08 1991-04-09 Air Products And Chemicals, Inc. Low temperature chemical vapor deposition method for forming tungsten and tungsten carbide
JPH0643243B2 (ja) * 1988-03-10 1994-06-08 セントラル硝子株式会社 タングステンカーバイトの製造方法
JP2537276B2 (ja) * 1988-09-30 1996-09-25 セントラル硝子株式会社 耐摩耗性アルミニウム材料およびその製造法
US5145739A (en) * 1990-07-12 1992-09-08 Sarin Vinod K Abrasion resistant coated articles
JPH04254585A (ja) * 1991-02-04 1992-09-09 Central Glass Co Ltd タングステンカーバイト膜の形成方法
GB9223300D0 (en) 1992-11-06 1992-12-23 Courtaulds Coatings Holdings Powder coating compositions and their use
JPH06173009A (ja) * 1992-12-04 1994-06-21 Sumitomo Electric Ind Ltd 耐摩耗性に優れた被覆超硬合金及びその製造方法
RU2106429C1 (ru) * 1997-03-28 1998-03-10 Вячеслав Алексеевич Рыженков Способ нанесения многослойного износостойкого покрытия на изделия из железных и титановых сплавов

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