TWI899310B - 工件支承裝置、工件處理裝置、工件搬運裝置、工件支承方法及工件處理方法 - Google Patents

工件支承裝置、工件處理裝置、工件搬運裝置、工件支承方法及工件處理方法

Info

Publication number
TWI899310B
TWI899310B TW110130411A TW110130411A TWI899310B TW I899310 B TWI899310 B TW I899310B TW 110130411 A TW110130411 A TW 110130411A TW 110130411 A TW110130411 A TW 110130411A TW I899310 B TWI899310 B TW I899310B
Authority
TW
Taiwan
Prior art keywords
workpiece
liquid
gas
bernoulli
suction cup
Prior art date
Application number
TW110130411A
Other languages
English (en)
Chinese (zh)
Other versions
TW202213593A (zh
Inventor
柏木誠
伊沢真於
Original Assignee
日商荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商荏原製作所股份有限公司 filed Critical 日商荏原製作所股份有限公司
Publication of TW202213593A publication Critical patent/TW202213593A/zh
Application granted granted Critical
Publication of TWI899310B publication Critical patent/TWI899310B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/18—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/18—Accessories
    • B24B21/20—Accessories for controlling or adjusting the tracking or the tension of the grinding belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0412—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
TW110130411A 2020-08-28 2021-08-18 工件支承裝置、工件處理裝置、工件搬運裝置、工件支承方法及工件處理方法 TWI899310B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-144540 2020-08-28
JP2020144540A JP7592434B2 (ja) 2020-08-28 2020-08-28 ワークピース支持装置およびワークピース支持方法

Publications (2)

Publication Number Publication Date
TW202213593A TW202213593A (zh) 2022-04-01
TWI899310B true TWI899310B (zh) 2025-10-01

Family

ID=77398420

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110130411A TWI899310B (zh) 2020-08-28 2021-08-18 工件支承裝置、工件處理裝置、工件搬運裝置、工件支承方法及工件處理方法

Country Status (6)

Country Link
US (1) US11804398B2 (https=)
EP (1) EP3961683B1 (https=)
JP (1) JP7592434B2 (https=)
KR (1) KR20220029400A (https=)
CN (1) CN114102370A (https=)
TW (1) TWI899310B (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025173591A1 (ja) * 2024-02-16 2025-08-21 東京エレクトロン株式会社 基板処理装置、及び基板処理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030180471A1 (en) * 2002-03-19 2003-09-25 Tokyo Electron Limited Process liquid supply mechanism and process liquid supply method
US20130048607A1 (en) * 2011-08-22 2013-02-28 Lam Research Ag Method and device for wet treatment of plate-like articles

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JPS6343428U (https=) * 1986-09-05 1988-03-23
JPS6384026A (ja) * 1986-09-29 1988-04-14 Hitachi Ltd 半導体基板のベ−キング装置
JPH08330398A (ja) * 1995-05-30 1996-12-13 Sony Corp ウエハ処理方法および装置
JP4018958B2 (ja) * 2001-10-30 2007-12-05 大日本スクリーン製造株式会社 基板処理装置
JP4299111B2 (ja) * 2003-11-18 2009-07-22 株式会社ディスコ 研削装置
JP4359885B2 (ja) * 2004-05-27 2009-11-11 信越半導体株式会社 ベルヌーイチャック
JP2007067054A (ja) * 2005-08-30 2007-03-15 Fluoro Mechanic Kk ベルヌーイチャック
JP2007214529A (ja) * 2006-01-13 2007-08-23 Fluoro Mechanic Kk ベルヌーイチャック
KR100820190B1 (ko) * 2006-11-21 2008-04-07 (주)이노맥스 스핀 척 장치
KR100885180B1 (ko) * 2006-12-27 2009-02-23 세메스 주식회사 기판 지지유닛, 그리고 상기 기판 지지유닛을 구비하는기판처리장치 및 방법
JP2009032744A (ja) * 2007-07-24 2009-02-12 Fluoro Mechanic Kk ベルヌーイチャック
JP5012651B2 (ja) * 2008-05-14 2012-08-29 東京エレクトロン株式会社 塗布装置、塗布方法、塗布、現像装置及び記憶媒体
JP2010082489A (ja) * 2008-09-29 2010-04-15 Seiko Epson Corp フラッシング受容装置およびこれを備えた液滴吐出装置
DE102010022333B4 (de) * 2010-06-01 2013-11-14 Festo Ag & Co. Kg Bernoulli-Sauggreifer
JP2013089892A (ja) * 2011-10-21 2013-05-13 Ihi Corp チャック装置
JP2014003237A (ja) * 2012-06-20 2014-01-09 Tokyo Electron Ltd 剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体
JP6317106B2 (ja) * 2013-12-27 2018-04-25 芝浦メカトロニクス株式会社 基板保持装置及び基板保持方法
TWI556878B (zh) * 2014-02-26 2016-11-11 辛耘企業股份有限公司 流體加速裝置
JP6568773B2 (ja) * 2015-11-10 2019-08-28 東京エレクトロン株式会社 基板搬送装置及び剥離システム
JP2017112255A (ja) * 2015-12-17 2017-06-22 株式会社ディスコ 搬送装置
US10770335B2 (en) * 2016-07-06 2020-09-08 Acm Research (Shanghai) Inc. Substrate supporting apparatus
JP6902872B2 (ja) * 2017-01-10 2021-07-14 東京エレクトロン株式会社 基板処理システムおよび基板処理方法
JP6908496B2 (ja) * 2017-10-25 2021-07-28 株式会社荏原製作所 研磨装置
CN118343498A (zh) * 2018-03-01 2024-07-16 杭州孚亚科技有限公司 吸紧装置
JP7394534B2 (ja) * 2019-03-26 2023-12-08 株式会社東京精密 ウエハ搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030180471A1 (en) * 2002-03-19 2003-09-25 Tokyo Electron Limited Process liquid supply mechanism and process liquid supply method
US20130048607A1 (en) * 2011-08-22 2013-02-28 Lam Research Ag Method and device for wet treatment of plate-like articles

Also Published As

Publication number Publication date
US11804398B2 (en) 2023-10-31
JP7592434B2 (ja) 2024-12-02
EP3961683B1 (en) 2023-07-26
JP2022039487A (ja) 2022-03-10
CN114102370A (zh) 2022-03-01
TW202213593A (zh) 2022-04-01
EP3961683A1 (en) 2022-03-02
US20220068695A1 (en) 2022-03-03
KR20220029400A (ko) 2022-03-08

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