TWI830840B - 接合方法及接合體 - Google Patents
接合方法及接合體 Download PDFInfo
- Publication number
- TWI830840B TWI830840B TW108146597A TW108146597A TWI830840B TW I830840 B TWI830840 B TW I830840B TW 108146597 A TW108146597 A TW 108146597A TW 108146597 A TW108146597 A TW 108146597A TW I830840 B TWI830840 B TW I830840B
- Authority
- TW
- Taiwan
- Prior art keywords
- main body
- bonding
- cover
- joining
- flow path
- Prior art date
Links
- 238000005304 joining Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000009792 diffusion process Methods 0.000 claims abstract description 33
- 229910001094 6061 aluminium alloy Inorganic materials 0.000 claims description 7
- 230000003746 surface roughness Effects 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 13
- 229910052782 aluminium Inorganic materials 0.000 abstract description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 13
- 230000006866 deterioration Effects 0.000 abstract description 3
- 238000012360 testing method Methods 0.000 description 45
- 239000002245 particle Substances 0.000 description 25
- 238000010586 diagram Methods 0.000 description 15
- 238000005259 measurement Methods 0.000 description 12
- 238000009864 tensile test Methods 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 238000005219 brazing Methods 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 4
- 238000006731 degradation reaction Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/22—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
- B23K20/233—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded without ferrous layer
- B23K20/2336—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded without ferrous layer both layers being aluminium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/04—Tubular or hollow articles
- B23K2101/14—Heat exchangers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/10—Aluminium or alloys thereof
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018240266 | 2018-12-21 | ||
| JP2018-240266 | 2018-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202023722A TW202023722A (zh) | 2020-07-01 |
| TWI830840B true TWI830840B (zh) | 2024-02-01 |
Family
ID=71101298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108146597A TWI830840B (zh) | 2018-12-21 | 2019-12-19 | 接合方法及接合體 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20220009022A1 (https=) |
| EP (1) | EP3900867A4 (https=) |
| JP (2) | JP7641120B2 (https=) |
| KR (3) | KR102887437B1 (https=) |
| CN (1) | CN113195146A (https=) |
| TW (1) | TWI830840B (https=) |
| WO (1) | WO2020129863A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230234160A1 (en) * | 2022-01-24 | 2023-07-27 | Applied Materials, Inc. | Diffusion bonding of pure metal bodies |
Citations (2)
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| CN208005081U (zh) * | 2018-03-30 | 2018-10-26 | 吉林大学 | 铝合金散热冷板扩散焊夹具 |
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| GB8429979D0 (en) * | 1984-11-28 | 1985-02-13 | British Aerospace | Diffusion banding of metals |
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| JPH0292631A (ja) * | 1988-09-30 | 1990-04-03 | Nisshin Steel Co Ltd | 流体流路を内蔵した複合金属板 |
| GB9114258D0 (en) * | 1991-07-02 | 1991-08-21 | Secr Defence | Superplastic deformation of diffusion bonded aluminium structures |
| US5433835B1 (en) * | 1993-11-24 | 1997-05-20 | Applied Materials Inc | Sputtering device and target with cover to hold cooling fluid |
| JPH07320898A (ja) | 1994-05-27 | 1995-12-08 | Mitsubishi Heavy Ind Ltd | 加速管の組立方法 |
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| CN106956072B (zh) * | 2017-04-06 | 2019-11-26 | 哈尔滨工大华策科技有限公司 | 一种扩散焊多层铝箔的连接方法 |
| CN107175398A (zh) * | 2017-06-28 | 2017-09-19 | 合肥工业大学 | 一种钼合金与钨合金的sps扩散焊接方法 |
| CN107486619A (zh) * | 2017-08-30 | 2017-12-19 | 合肥工业大学 | 一种TZM与WRe异种难熔合金的SPS扩散焊接方法 |
| CN111819682B (zh) * | 2018-03-26 | 2025-04-29 | 三菱综合材料株式会社 | 绝缘电路基板用接合体的制造方法及绝缘电路基板用接合体 |
| CN108161324A (zh) * | 2018-03-30 | 2018-06-15 | 吉林大学 | 铝合金散热冷板扩散焊夹具 |
| GB2573546B (en) * | 2018-05-09 | 2021-03-31 | Twi Ltd | A method of diffusion bonding |
| DE102019204131A1 (de) * | 2019-03-26 | 2019-06-06 | Carl Zeiss Smt Gmbh | Vorrichtung zur Führung eines flüssigen oder gasförmigen Mediums, Verfahren zur Herstellung einer entsprechenden Vorrichtung, Feldfacettenmodul und Projektionsbelichtungsanlage |
| CN110328443A (zh) * | 2019-06-24 | 2019-10-15 | 北京航星机器制造有限公司 | 一种脉冲电流辅助铝合金大面积扩散连接装置及方法 |
| CN110253131B (zh) * | 2019-07-01 | 2020-12-04 | 中国科学院工程热物理研究所 | 毛细通道换热器及其制备方法 |
| CN110375567A (zh) * | 2019-07-20 | 2019-10-25 | 中国船舶重工集团公司第七二四研究所 | 一种基于层压扩散焊工艺的多层通道冷板及其成形方法 |
| CN110579123A (zh) * | 2019-09-19 | 2019-12-17 | 中国核动力研究设计院 | 双侧异型流道的高压紧凑换热器结构及其组装方法 |
-
2019
- 2019-12-13 JP JP2020561389A patent/JP7641120B2/ja active Active
- 2019-12-13 US US17/413,680 patent/US20220009022A1/en active Pending
- 2019-12-13 EP EP19900978.8A patent/EP3900867A4/en active Pending
- 2019-12-13 KR KR1020247017491A patent/KR102887437B1/ko active Active
- 2019-12-13 KR KR1020217017680A patent/KR102670607B1/ko active Active
- 2019-12-13 WO PCT/JP2019/049049 patent/WO2020129863A1/ja not_active Ceased
- 2019-12-13 CN CN201980084269.3A patent/CN113195146A/zh active Pending
- 2019-12-13 KR KR1020257038020A patent/KR20250163426A/ko active Pending
- 2019-12-19 TW TW108146597A patent/TWI830840B/zh active
-
2025
- 2025-02-12 JP JP2025020888A patent/JP2025065475A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4838992B2 (ja) * | 2004-10-08 | 2011-12-14 | 古河スカイ株式会社 | ヒータプレート及びヒータプレートの製造方法 |
| CN208005081U (zh) * | 2018-03-30 | 2018-10-26 | 吉林大学 | 铝合金散热冷板扩散焊夹具 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020129863A1 (ja) | 2020-06-25 |
| KR20210089732A (ko) | 2021-07-16 |
| EP3900867A1 (en) | 2021-10-27 |
| TW202023722A (zh) | 2020-07-01 |
| JP2025065475A (ja) | 2025-04-17 |
| JP7641120B2 (ja) | 2025-03-06 |
| KR102887437B1 (ko) | 2025-11-17 |
| KR102670607B1 (ko) | 2024-05-29 |
| KR20240091000A (ko) | 2024-06-21 |
| KR20250163426A (ko) | 2025-11-20 |
| EP3900867A4 (en) | 2022-09-28 |
| CN113195146A (zh) | 2021-07-30 |
| JPWO2020129863A1 (ja) | 2021-11-25 |
| US20220009022A1 (en) | 2022-01-13 |
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