TWI821223B - 負型感光性樹脂組成物 - Google Patents

負型感光性樹脂組成物 Download PDF

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Publication number
TWI821223B
TWI821223B TW107144333A TW107144333A TWI821223B TW I821223 B TWI821223 B TW I821223B TW 107144333 A TW107144333 A TW 107144333A TW 107144333 A TW107144333 A TW 107144333A TW I821223 B TWI821223 B TW I821223B
Authority
TW
Taiwan
Prior art keywords
resin composition
photosensitive resin
negative photosensitive
compound
ink repellent
Prior art date
Application number
TW107144333A
Other languages
English (en)
Chinese (zh)
Other versions
TW201928523A (zh
Inventor
山田光太郎
高橋秀幸
川島正行
Original Assignee
日商Agc股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商Agc股份有限公司 filed Critical 日商Agc股份有限公司
Publication of TW201928523A publication Critical patent/TW201928523A/zh
Application granted granted Critical
Publication of TWI821223B publication Critical patent/TWI821223B/zh

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • C08F2/48Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G75/00Macromolecular compounds obtained by reactions forming a linkage containing sulfur with or without nitrogen, oxygen, or carbon in the main chain of the macromolecule
    • C08G75/02Polythioethers
    • C08G75/04Polythioethers from mercapto compounds or metallic derivatives thereof
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Epoxy Resins (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
TW107144333A 2017-12-11 2018-12-10 負型感光性樹脂組成物 TWI821223B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-236753 2017-12-11
JP2017236753 2017-12-11

Publications (2)

Publication Number Publication Date
TW201928523A TW201928523A (zh) 2019-07-16
TWI821223B true TWI821223B (zh) 2023-11-11

Family

ID=66819240

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107144333A TWI821223B (zh) 2017-12-11 2018-12-10 負型感光性樹脂組成物

Country Status (4)

Country Link
JP (1) JP7375546B2 (ko)
CN (1) CN111480114B (ko)
TW (1) TWI821223B (ko)
WO (1) WO2019117018A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113448164A (zh) * 2020-03-26 2021-09-28 台湾永光化学工业股份有限公司 负型感旋光性树脂组成物及其用途
JPWO2021235541A1 (ko) * 2020-05-22 2021-11-25
WO2024005195A1 (ja) * 2022-07-01 2024-01-04 大阪有機化学工業株式会社 硬化性樹脂組成物、当該組成物を硬化させた絶縁性硬化膜及びタッチパネル用絶縁性硬化膜、並びに、タッチパネル

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200610791A (en) * 2004-09-28 2006-04-01 San Ei Kagaku Co Photosensitive thermosetting resin composition, and photoresist-coated printed circuit board and method for producing the same
TW201133134A (en) * 2009-12-28 2011-10-01 Asahi Glass Co Ltd Photosensitive composition, partition wall, color filter and organic el element
JP2013076793A (ja) * 2011-09-30 2013-04-25 Sanyo Chem Ind Ltd 感光性樹脂組成物およびタッチパネル用保護膜
TW201428425A (zh) * 2012-11-28 2014-07-16 Asahi Glass Co Ltd 負型感光性樹脂組成物、樹脂硬化膜、隔壁及光學元件
TW201543163A (zh) * 2014-02-18 2015-11-16 Asahi Glass Co Ltd 負型感光性樹脂組成物、樹脂硬化膜、隔壁及光學元件
WO2017159543A1 (ja) * 2016-03-15 2017-09-21 東レ株式会社 感光性樹脂組成物、硬化膜、積層体、タッチパネル用部材及び硬化膜の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1095892A (ja) * 1996-09-20 1998-04-14 Nippon Kayaku Co Ltd 封止用樹脂組成物及びその硬化物
JP2008292677A (ja) * 2007-05-23 2008-12-04 Mitsubishi Chemicals Corp 反応性樹脂組成物、カラーフィルター及び画像表示装置
JP2009157235A (ja) * 2007-12-27 2009-07-16 Sanyo Chem Ind Ltd 感光性樹脂組成物
TW201329635A (zh) * 2011-11-11 2013-07-16 Asahi Glass Co Ltd 負型感光性樹脂組成物、隔壁、黑色矩陣及光學元件

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200610791A (en) * 2004-09-28 2006-04-01 San Ei Kagaku Co Photosensitive thermosetting resin composition, and photoresist-coated printed circuit board and method for producing the same
TW201133134A (en) * 2009-12-28 2011-10-01 Asahi Glass Co Ltd Photosensitive composition, partition wall, color filter and organic el element
JP2013076793A (ja) * 2011-09-30 2013-04-25 Sanyo Chem Ind Ltd 感光性樹脂組成物およびタッチパネル用保護膜
TW201428425A (zh) * 2012-11-28 2014-07-16 Asahi Glass Co Ltd 負型感光性樹脂組成物、樹脂硬化膜、隔壁及光學元件
TW201543163A (zh) * 2014-02-18 2015-11-16 Asahi Glass Co Ltd 負型感光性樹脂組成物、樹脂硬化膜、隔壁及光學元件
WO2017159543A1 (ja) * 2016-03-15 2017-09-21 東レ株式会社 感光性樹脂組成物、硬化膜、積層体、タッチパネル用部材及び硬化膜の製造方法

Also Published As

Publication number Publication date
CN111480114B (zh) 2023-12-05
JPWO2019117018A1 (ja) 2020-12-24
WO2019117018A1 (ja) 2019-06-20
JP7375546B2 (ja) 2023-11-08
KR20200088797A (ko) 2020-07-23
CN111480114A (zh) 2020-07-31
TW201928523A (zh) 2019-07-16

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