TWI761776B - 研磨裝置的控制裝置、程式及研磨方法 - Google Patents

研磨裝置的控制裝置、程式及研磨方法 Download PDF

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Publication number
TWI761776B
TWI761776B TW109106871A TW109106871A TWI761776B TW I761776 B TWI761776 B TW I761776B TW 109106871 A TW109106871 A TW 109106871A TW 109106871 A TW109106871 A TW 109106871A TW I761776 B TWI761776 B TW I761776B
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TW
Taiwan
Prior art keywords
workpiece
grinding wheel
grinding
control
feeding
Prior art date
Application number
TW109106871A
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English (en)
Chinese (zh)
Other versions
TW202035063A (zh
Inventor
小原達也
Original Assignee
日商住友重機械精科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 日商住友重機械精科技股份有限公司 filed Critical 日商住友重機械精科技股份有限公司
Publication of TW202035063A publication Critical patent/TW202035063A/zh
Application granted granted Critical
Publication of TWI761776B publication Critical patent/TWI761776B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/07—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a stationary work-table
    • B24B7/075—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a stationary work-table using a reciprocating grinding head mounted on a movable carriage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/003—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving acoustic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/18—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the presence of dressing tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
TW109106871A 2019-03-22 2020-03-03 研磨裝置的控制裝置、程式及研磨方法 TWI761776B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019054515A JP7098257B2 (ja) 2019-03-22 2019-03-22 研削装置の制御装置、プログラム、及び研削方法
JP2019-054515 2019-03-22

Publications (2)

Publication Number Publication Date
TW202035063A TW202035063A (zh) 2020-10-01
TWI761776B true TWI761776B (zh) 2022-04-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW109106871A TWI761776B (zh) 2019-03-22 2020-03-03 研磨裝置的控制裝置、程式及研磨方法

Country Status (4)

Country Link
JP (1) JP7098257B2 (ja)
KR (1) KR102689707B1 (ja)
CN (1) CN111716171B (ja)
TW (1) TWI761776B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7291056B2 (ja) * 2019-09-30 2023-06-14 株式会社ディスコ ウェーハの研磨方法
WO2022075251A1 (ja) * 2020-10-06 2022-04-14 ユアサ化成株式会社 研磨システム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002086354A (ja) * 2000-09-12 2002-03-26 Hitachi Via Mechanics Ltd 平面研削盤
TW201436949A (zh) * 2013-01-30 2014-10-01 Komatsu Ntc Ltd 研磨加工方法
JP2018051665A (ja) * 2016-09-27 2018-04-05 株式会社塩 数値制御研削装置、その制御装置、制御方法、及び制御プログラム

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347954B2 (ja) * 1973-03-23 1978-12-25
JPS62114875A (ja) * 1985-11-14 1987-05-26 Mitsubishi Heavy Ind Ltd 横軸自動平面研削盤での送り時間短縮方法
JPH03196950A (ja) * 1989-12-27 1991-08-28 Toshiba Corp 研削加工方法
JP3210704B2 (ja) * 1991-11-06 2001-09-17 日立ビアメカニクス株式会社 研削盤およびトラバース研削方法
JPH0994745A (ja) * 1995-09-29 1997-04-08 Hitachi Seiko Ltd 平面形状のトラバース研削方法
JP4215228B2 (ja) * 1999-10-26 2009-01-28 独立行政法人理化学研究所 卓上４軸鏡面加工装置
JP2002052444A (ja) * 2000-08-08 2002-02-19 Okamoto Machine Tool Works Ltd 平面研削装置およびワ−クの研削方法
JP4764564B2 (ja) 2001-04-17 2011-09-07 株式会社岡本工作機械製作所 円筒状ワ−クのスキップシフトプランジ研削方法
US8585467B2 (en) * 2008-10-31 2013-11-19 Corning Incorporated Linear pressure feed grinding with voice coil
CN102267053A (zh) * 2011-02-21 2011-12-07 天津市北闸口仪表机床厂 一种改进切刀行进方向的数控车床
JP2012222123A (ja) * 2011-04-08 2012-11-12 Mitsubishi Electric Corp 半導体ウェハの研削方法
JP5930871B2 (ja) * 2012-06-27 2016-06-08 コマツＮｔｃ株式会社 研削加工装置およびその制御方法
JP5813058B2 (ja) * 2013-07-02 2015-11-17 ファナック株式会社 複合形固定サイクルの開始点経路短縮機能を有する数値制御装置
JP6887846B2 (ja) * 2017-03-28 2021-06-16 株式会社東京精密 研削装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002086354A (ja) * 2000-09-12 2002-03-26 Hitachi Via Mechanics Ltd 平面研削盤
TW201436949A (zh) * 2013-01-30 2014-10-01 Komatsu Ntc Ltd 研磨加工方法
JP2018051665A (ja) * 2016-09-27 2018-04-05 株式会社塩 数値制御研削装置、その制御装置、制御方法、及び制御プログラム

Also Published As

Publication number Publication date
KR20200112664A (ko) 2020-10-05
CN111716171B (zh) 2022-03-25
JP7098257B2 (ja) 2022-07-11
TW202035063A (zh) 2020-10-01
KR102689707B1 (ko) 2024-07-29
CN111716171A (zh) 2020-09-29
JP2020151826A (ja) 2020-09-24

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