TWI714802B - 第v族金屬化合物、其製備方法、包含其的膜沉積用前體組合物和利用該組合物的膜沉積方法 - Google Patents

第v族金屬化合物、其製備方法、包含其的膜沉積用前體組合物和利用該組合物的膜沉積方法 Download PDF

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TWI714802B
TWI714802B TW106128864A TW106128864A TWI714802B TW I714802 B TWI714802 B TW I714802B TW 106128864 A TW106128864 A TW 106128864A TW 106128864 A TW106128864 A TW 106128864A TW I714802 B TWI714802 B TW I714802B
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group
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metal compound
present
metal
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TW201827445A (zh
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韓元錫
朴明鎬
金大榮
崔晙煥
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南韓商Ｕｐ化學有限公司
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    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
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    • H10P14/69393—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides characterised by the metal the material containing tantalum, e.g. Ta2O5
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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
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TW106128864A 2016-09-08 2017-08-25 第v族金屬化合物、其製備方法、包含其的膜沉積用前體組合物和利用該組合物的膜沉積方法 TWI714802B (zh)

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KR20160115708 2016-09-08
KR10-2016-0115708 2016-09-08
KR10-2017-0106403 2017-08-23
KR1020170106403A KR101841444B1 (ko) 2016-09-08 2017-08-23 5족 금속 화합물, 이의 제조 방법, 이를 포함하는 막 증착용 전구체 조성물, 및 이를 이용하는 막의 증착 방법

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TWI714802B true TWI714802B (zh) 2021-01-01

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US (1) US10577385B2 (https=)
JP (1) JP6803460B2 (https=)
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KR102015276B1 (ko) 2018-02-08 2019-08-28 주식회사 메카로 유기금속화합물 및 이를 이용한 박막
WO2020247237A1 (en) * 2019-06-05 2020-12-10 Versum Materials Us, Llc New group v and vi transition metal precursors for thin film deposition
KR102858491B1 (ko) 2019-10-08 2025-09-10 에스케이트리켐 주식회사 5족 금속 함유 박막 형성용 전구체 및 이를 이용한 5족 금속 함유 박막 형성 방법 및 상기 5족 금속 함유 박막을 포함하는 반도체 소자.
KR20220053482A (ko) * 2020-10-22 2022-04-29 에이에스엠 아이피 홀딩 비.브이. 바나듐 금속을 증착하는 방법, 구조체, 소자 및 증착 어셈블리
KR102621779B1 (ko) * 2021-08-31 2024-01-08 주식회사 이지티엠 박막 증착을 위한 니오비움 전구체 화합물 및 이를 이용한 니오비움 함유 박막의 형성 방법
KR102682682B1 (ko) * 2021-10-05 2024-07-09 주식회사 한솔케미칼 5족 금속 화합물, 이를 포함하는 증착용 전구체 조성물 및 이를 이용하여 박막을 형성하는 방법

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CN109689666A (zh) 2019-04-26
JP6803460B2 (ja) 2020-12-23
WO2018048124A1 (ko) 2018-03-15
US20190202847A1 (en) 2019-07-04
JP2019534245A (ja) 2019-11-28
KR101841444B1 (ko) 2018-03-23
TW201827445A (zh) 2018-08-01
CN109689666B (zh) 2020-05-05
KR20180028371A (ko) 2018-03-16

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