JP6803460B2 - ５族金属化合物、その製造方法、それを含む膜蒸着用前駆体組成物、及びそれを用いる膜の蒸着方法 - Google Patents

５族金属化合物、その製造方法、それを含む膜蒸着用前駆体組成物、及びそれを用いる膜の蒸着方法 Download PDF

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JP6803460B2
JP6803460B2 JP2019511918A JP2019511918A JP6803460B2 JP 6803460 B2 JP6803460 B2 JP 6803460B2 JP 2019511918 A JP2019511918 A JP 2019511918A JP 2019511918 A JP2019511918 A JP 2019511918A JP 6803460 B2 JP6803460 B2 JP 6803460B2
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metal
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pentyl
containing film
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ソク ハン，ウォン
ソク ハン，ウォン
パク，ミョン‐ホ
キム，デ‐ヨン
ファン チェ，ジュン
ファン チェ，ジュン
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ユーピー ケミカル カンパニー リミテッド
ユーピー ケミカル カンパニー リミテッド
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    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP2019511918A 2016-09-08 2017-08-23 ５族金属化合物、その製造方法、それを含む膜蒸着用前駆体組成物、及びそれを用いる膜の蒸着方法 Active JP6803460B2 (ja)

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KR20160115708 2016-09-08
KR10-2016-0115708 2016-09-08
PCT/KR2017/009188 WO2018048124A1 (ko) 2016-09-08 2017-08-23 5족 금속 화합물, 이의 제조 방법, 이를 포함하는 막 증착용 전구체 조성물, 및 이를 이용하는 막의 증착 방법

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JP2019534245A JP2019534245A (ja) 2019-11-28
JP2019534245A5 JP2019534245A5 (https=) 2020-09-17
JP6803460B2 true JP6803460B2 (ja) 2020-12-23

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US (1) US10577385B2 (https=)
JP (1) JP6803460B2 (https=)
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CN (1) CN109689666B (https=)
TW (1) TWI714802B (https=)
WO (1) WO2018048124A1 (https=)

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KR102015276B1 (ko) 2018-02-08 2019-08-28 주식회사 메카로 유기금속화합물 및 이를 이용한 박막
WO2020247237A1 (en) * 2019-06-05 2020-12-10 Versum Materials Us, Llc New group v and vi transition metal precursors for thin film deposition
KR102858491B1 (ko) 2019-10-08 2025-09-10 에스케이트리켐 주식회사 5족 금속 함유 박막 형성용 전구체 및 이를 이용한 5족 금속 함유 박막 형성 방법 및 상기 5족 금속 함유 박막을 포함하는 반도체 소자.
KR20220053482A (ko) * 2020-10-22 2022-04-29 에이에스엠 아이피 홀딩 비.브이. 바나듐 금속을 증착하는 방법, 구조체, 소자 및 증착 어셈블리
KR102621779B1 (ko) * 2021-08-31 2024-01-08 주식회사 이지티엠 박막 증착을 위한 니오비움 전구체 화합물 및 이를 이용한 니오비움 함유 박막의 형성 방법
KR102682682B1 (ko) * 2021-10-05 2024-07-09 주식회사 한솔케미칼 5족 금속 화합물, 이를 포함하는 증착용 전구체 조성물 및 이를 이용하여 박막을 형성하는 방법

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JPH09194526A (ja) * 1996-01-19 1997-07-29 Ube Ind Ltd 共役ジエン重合用触媒
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JP5731519B2 (ja) * 2009-10-26 2015-06-10 エーエスエム インターナショナル エヌ．ヴェー．Ａｓｍ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｎ．Ｖ． Ｖａ族元素を含む薄膜のａｌｄのための前駆体の合成及び使用
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CN109689666A (zh) 2019-04-26
WO2018048124A1 (ko) 2018-03-15
US20190202847A1 (en) 2019-07-04
JP2019534245A (ja) 2019-11-28
KR101841444B1 (ko) 2018-03-23
TW201827445A (zh) 2018-08-01
TWI714802B (zh) 2021-01-01
CN109689666B (zh) 2020-05-05
KR20180028371A (ko) 2018-03-16

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