TWI680826B - 連結機構及基板研磨裝置 - Google Patents

連結機構及基板研磨裝置 Download PDF

Info

Publication number
TWI680826B
TWI680826B TW105102471A TW105102471A TWI680826B TW I680826 B TWI680826 B TW I680826B TW 105102471 A TW105102471 A TW 105102471A TW 105102471 A TW105102471 A TW 105102471A TW I680826 B TWI680826 B TW I680826B
Authority
TW
Taiwan
Prior art keywords
dresser
contact surface
rotation center
polishing
sliding contact
Prior art date
Application number
TW105102471A
Other languages
English (en)
Chinese (zh)
Other versions
TW201637773A (zh
Inventor
篠崎弘行
Original Assignee
日商荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商荏原製作所股份有限公司 filed Critical 日商荏原製作所股份有限公司
Publication of TW201637773A publication Critical patent/TW201637773A/zh
Application granted granted Critical
Publication of TWI680826B publication Critical patent/TWI680826B/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0084—Other grinding machines or devices the grinding wheel support being angularly adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/007—Weight compensation; Temperature compensation; Vibration damping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/16—Bushings; Mountings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Pens And Brushes (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Paper (AREA)
TW105102471A 2015-01-30 2016-01-27 連結機構及基板研磨裝置 TWI680826B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2015017732 2015-01-30
JP2015-017732 2015-01-30
JP2015249121A JP6592355B2 (ja) 2015-01-30 2015-12-21 連結機構および基板研磨装置
JP2015-249121 2015-12-21

Publications (2)

Publication Number Publication Date
TW201637773A TW201637773A (zh) 2016-11-01
TWI680826B true TWI680826B (zh) 2020-01-01

Family

ID=56685798

Family Applications (2)

Application Number Title Priority Date Filing Date
TW105102471A TWI680826B (zh) 2015-01-30 2016-01-27 連結機構及基板研磨裝置
TW108136268A TWI733212B (zh) 2015-01-30 2016-01-27 連結機構、基板研磨裝置、連結機構之轉動中心之位置決定方法、連結機構之轉動中心之位置決定程式、轉動體之最大按壓負荷決定方法、及轉動體之最大按壓負荷決定程式

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW108136268A TWI733212B (zh) 2015-01-30 2016-01-27 連結機構、基板研磨裝置、連結機構之轉動中心之位置決定方法、連結機構之轉動中心之位置決定程式、轉動體之最大按壓負荷決定方法、及轉動體之最大按壓負荷決定程式

Country Status (4)

Country Link
US (2) US9849557B2 (enExample)
JP (4) JP6592355B2 (enExample)
KR (4) KR102323958B1 (enExample)
TW (2) TWI680826B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6592355B2 (ja) * 2015-01-30 2019-10-16 株式会社荏原製作所 連結機構および基板研磨装置
US10350722B2 (en) * 2016-02-05 2019-07-16 Toshiba Kikai Kabushiki Kaisha Polishing apparatus
US10363647B2 (en) * 2016-02-05 2019-07-30 Toshiba Kikai Kabushiki Kaisha Grinding tool
JP6715153B2 (ja) 2016-09-30 2020-07-01 株式会社荏原製作所 基板研磨装置
JP6810585B2 (ja) * 2016-11-30 2021-01-06 タツモ株式会社 チャック装置及び貼合装置
JP6823541B2 (ja) 2017-05-30 2021-02-03 株式会社荏原製作所 キャリブレーション方法およびキャリブレーションプログラム
US10814457B2 (en) * 2018-03-19 2020-10-27 Globalfoundries Inc. Gimbal for CMP tool conditioning disk having flexible metal diaphragm
KR102561647B1 (ko) * 2018-05-28 2023-07-31 삼성전자주식회사 컨디셔너 및 이를 포함하는 화학 기계적 연마 장치
JP7287761B2 (ja) 2018-07-31 2023-06-06 株式会社荏原製作所 球面軸受の軸受半径決定方法
JP7315332B2 (ja) * 2019-01-31 2023-07-26 株式会社荏原製作所 ダミーディスクおよびダミーディスクを用いた表面高さ測定方法
CN109702638A (zh) * 2019-03-12 2019-05-03 山东科技大学 一种化学机械抛光设备
AU2020253350A1 (en) 2019-03-29 2021-10-28 Saint-Gobain Abrasives, Inc. Performance grinding solutions
KR102721972B1 (ko) * 2019-07-08 2024-10-29 삼성전자주식회사 회전체 모듈 및 이를 구비하는 화학 기계적 연마 장치
US11691241B1 (en) * 2019-08-05 2023-07-04 Keltech Engineering, Inc. Abrasive lapping head with floating and rigid workpiece carrier
JP7403998B2 (ja) * 2019-08-29 2023-12-25 株式会社荏原製作所 研磨装置および研磨方法
JP7354879B2 (ja) * 2020-03-05 2023-10-03 トヨタ自動車株式会社 自動水研装置
CN111546229B (zh) * 2020-06-05 2021-08-10 业成科技（成都）有限公司 研磨设备、研磨治具及其使用方法
CN114571357A (zh) * 2020-11-30 2022-06-03 台山市兰宝磨具有限公司 一种方便更换的磨具
US11766758B2 (en) * 2021-01-27 2023-09-26 Taiwan Semiconductor Manufacturing Company Limited Chemical mechanical polishing apparatus using a magnetically coupled pad conditioning disk
TWI765726B (zh) * 2021-05-28 2022-05-21 大量科技股份有限公司 拋光系統及其修整裝置
CN113290476B (zh) * 2021-07-26 2021-10-08 徐州祥瑞工程机械科技有限公司 一种可以更换抛光角度的抛光机
CN115383622B (zh) * 2022-04-20 2024-08-27 北京晶亦精微科技股份有限公司 抛光头用分体式万向节及抛光装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09314456A (ja) * 1996-05-29 1997-12-09 Toshiba Mach Co Ltd 研磨布ドレッシング方法及び研磨装置
TW200426970A (en) * 2003-04-28 2004-12-01 Strasbaugh Wafer carrier pivot mechanism
TW201436943A (zh) * 2013-02-22 2014-10-01 Ebara Corp 修整器之研磨部材上之滑動距離分布之取得方法、修整器之研磨部材上之滑動向量分布之取得方法、及研磨裝置

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1982658A (en) * 1931-12-22 1934-12-04 Packard Motor Car Co Rubber mounted flywheel
US2249292A (en) * 1938-09-16 1941-07-15 Kapitza Peter Means for stabilizing high speed rotors
US2246232A (en) * 1940-11-04 1941-06-17 Gen Motors Corp Vibration suppressor
US2338470A (en) * 1941-10-24 1944-01-04 Control Instr Co Inc Damping mechanism
US2527830A (en) * 1945-07-25 1950-10-31 Barber Coleman Company Flywheel dampener for servos
US2526744A (en) * 1946-06-19 1950-10-24 Schwitzer Cummins Company Vibration damper
US3923349A (en) * 1973-06-25 1975-12-02 Lord Corp Universal bearing support
JPS51114702U (enExample) * 1975-03-14 1976-09-17
US4133146A (en) * 1977-06-22 1979-01-09 Cola Charles R De Rotary abrasive tool
US4194324A (en) * 1978-01-16 1980-03-25 Siltec Corporation Semiconductor wafer polishing machine and wafer carrier therefor
US4313284A (en) * 1980-03-27 1982-02-02 Monsanto Company Apparatus for improving flatness of polished wafers
JPS6052259A (ja) * 1983-09-02 1985-03-25 Hitachi Ltd ラツプ加工機
JPS61146462A (ja) * 1984-12-19 1986-07-04 Toyoda Mach Works Ltd カム研削装置
US4781077A (en) * 1986-12-19 1988-11-01 Massachusetts Institute Of Technology Stable intershaft squeeze film damper
US4887395A (en) * 1987-02-17 1989-12-19 University Of New Mexico Wavy-tilt-dam seal ring and apparatus for shaping seal rings
US4895047A (en) * 1988-04-04 1990-01-23 Household Manufacturing, Inc. Vibration damper
US5702294A (en) * 1989-06-19 1997-12-30 Constant Velocity Systems, Inc. Grinding bit having a novel grinding grip
US6129620A (en) * 1993-04-23 2000-10-10 Jason Incorporated Honing tool and method of making
FR2715884B1 (fr) * 1994-02-04 1996-04-12 Gec Alsthom Electromec Procédé et dispositif pour le traitement de surface et la mise en précontrainte de la paroi intérieure d'une cavité.
US5738568A (en) * 1996-10-04 1998-04-14 International Business Machines Corporation Flexible tilted wafer carrier
JPH10118919A (ja) * 1996-10-25 1998-05-12 Toshiba Mach Co Ltd 平面研磨装置の加工ヘッド
JP3713884B2 (ja) * 1996-11-08 2005-11-09 日立工機株式会社 ボールバランサ及びボールバランサを装着した遠心分離機
US6149506A (en) * 1998-10-07 2000-11-21 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US6200199B1 (en) 1998-03-31 2001-03-13 Applied Materials, Inc. Chemical mechanical polishing conditioner
JP2000052230A (ja) 1998-07-31 2000-02-22 Mitsubishi Materials Corp ウェーハ研磨パッドのツルーイング装置
US6354907B1 (en) * 1999-03-11 2002-03-12 Ebara Corporation Polishing apparatus including attitude controller for turntable and/or wafer carrier
JP2001150329A (ja) 1999-11-25 2001-06-05 Ebara Corp 多段伸縮機構及び研磨装置
US6506105B1 (en) * 2000-05-12 2003-01-14 Multi-Planar Technologies, Inc. System and method for pneumatic diaphragm CMP head having separate retaining ring and multi-region wafer pressure control
US6755723B1 (en) * 2000-09-29 2004-06-29 Lam Research Corporation Polishing head assembly
RU2223168C2 (ru) 2001-01-19 2004-02-10 Евсеев Юрий Федорович Патрон паркетно-шлифовальной машины
JP4072810B2 (ja) * 2001-01-19 2008-04-09 株式会社荏原製作所 ドレッシング装置および該ドレッシング装置を備えたポリッシング装置
US6709322B2 (en) * 2001-03-29 2004-03-23 Lam Research Corporation Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing
US6949016B1 (en) * 2002-03-29 2005-09-27 Lam Research Corporation Gimballed conditioning apparatus
WO2005092564A1 (ja) * 2004-03-25 2005-10-06 Ibiden Co., Ltd. 真空チャックおよび吸着板
JP4808453B2 (ja) * 2005-08-26 2011-11-02 株式会社荏原製作所 研磨方法及び研磨装置
US7252576B1 (en) * 2006-02-21 2007-08-07 The Board Of Regents For Oklahoma State University Method and apparatus for magnetic float polishing
JP4751315B2 (ja) * 2006-12-29 2011-08-17 本田技研工業株式会社 伸縮アクチュエータ
JP2009131920A (ja) * 2007-11-29 2009-06-18 Ebara Corp 研磨装置及び方法
JP4647683B2 (ja) * 2008-11-17 2011-03-09 川崎重工業株式会社 フレキシブルカップリング構造及びそれを備える舶用スラスタ装置
JP5236515B2 (ja) 2009-01-28 2013-07-17 株式会社荏原製作所 ドレッシング装置、化学的機械的研磨装置及び方法
CN101579840B (zh) 2009-05-27 2011-06-29 浙江工业大学 一种高精度球高效研磨/抛光加工方法
FR2954273B1 (fr) * 2009-12-17 2012-02-24 Eurocopter France Structure porteuse d'un rotor, et appareil volant muni d'une telle structure porteuse
US8758088B2 (en) * 2011-10-06 2014-06-24 Wayne O. Duescher Floating abrading platen configuration
US8647170B2 (en) * 2011-10-06 2014-02-11 Wayne O. Duescher Laser alignment apparatus for rotary spindles
JP5976522B2 (ja) * 2012-05-31 2016-08-23 株式会社荏原製作所 研磨装置および研磨方法
JP5927083B2 (ja) 2012-08-28 2016-05-25 株式会社荏原製作所 ドレッシングプロセスの監視方法および研磨装置
JP5919157B2 (ja) * 2012-10-01 2016-05-18 株式会社荏原製作所 ドレッサー
JP6044955B2 (ja) * 2012-12-04 2016-12-14 不二越機械工業株式会社 ウェーハ研磨ヘッドおよびウェーハ研磨装置
JP6592355B2 (ja) * 2015-01-30 2019-10-16 株式会社荏原製作所 連結機構および基板研磨装置
US10086483B2 (en) * 2015-06-29 2018-10-02 Engineered Abrasives, Inc. Apparatus and method for processing a workpiece

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09314456A (ja) * 1996-05-29 1997-12-09 Toshiba Mach Co Ltd 研磨布ドレッシング方法及び研磨装置
TW200426970A (en) * 2003-04-28 2004-12-01 Strasbaugh Wafer carrier pivot mechanism
TW201436943A (zh) * 2013-02-22 2014-10-01 Ebara Corp 修整器之研磨部材上之滑動距離分布之取得方法、修整器之研磨部材上之滑動向量分布之取得方法、及研磨裝置

Also Published As

Publication number Publication date
JP2019141993A (ja) 2019-08-29
JP6592355B2 (ja) 2019-10-16
KR102569773B1 (ko) 2023-08-23
TW202003153A (zh) 2020-01-16
KR20210134577A (ko) 2021-11-10
US10442054B2 (en) 2019-10-15
TW201637773A (zh) 2016-11-01
JP2020138323A (ja) 2020-09-03
JP6710794B2 (ja) 2020-06-17
JP7237136B2 (ja) 2023-03-10
US20180071885A1 (en) 2018-03-15
KR20160094314A (ko) 2016-08-09
KR102580141B1 (ko) 2023-09-19
US9849557B2 (en) 2017-12-26
JP2022042516A (ja) 2022-03-14
KR20220133153A (ko) 2022-10-04
KR102323958B1 (ko) 2021-11-09
JP2016144860A (ja) 2016-08-12
KR20230124872A (ko) 2023-08-28
US20160256976A1 (en) 2016-09-08
KR102446908B1 (ko) 2022-09-23
JP6999745B2 (ja) 2022-02-04
TWI733212B (zh) 2021-07-11

Similar Documents

Publication Publication Date Title
TWI680826B (zh) 連結機構及基板研磨裝置
JP5415735B2 (ja) ドレッシング方法、ドレッシング条件の決定方法、ドレッシング条件決定プログラム、および研磨装置
JP2016144860A5 (enExample)
JP5236515B2 (ja) ドレッシング装置、化学的機械的研磨装置及び方法
US6520835B1 (en) Polishing system, polishing method, polishing pad, and method of forming polishing pad
CN105856057B (zh) 连结机构、基板研磨装置、旋转中心定位方法、最大按压负荷确定方法以及记录介质
JP2015044273A (ja) ドレッシング装置及びそれを備えた化学的機械的研磨装置、それに用いるドレッサーディスク
CN114536221B (zh) 一种用于化学机械抛光的修整装置、系统及方法
KR20200053183A (ko) 기판 처리 장치
JP2019171492A (ja) 基板保持装置およびドライブリングの製造方法
CN110774168B (zh) 具备球面轴承的连结机构、球面轴承的轴承半径决定方法以及基板研磨装置
JP3890188B2 (ja) 研磨装置
CN117506730A (zh) 一种修整头、研磨垫修整器及化学机械抛光系统
HASHIMOTO et al. Analytical Investigation of Workpiece Attitude during Double-Sided Polishing
JP5327589B2 (ja) 研磨装置および研磨方法