TWI666735B - 薄堆疊封裝 - Google Patents

薄堆疊封裝 Download PDF

Info

Publication number
TWI666735B
TWI666735B TW103133400A TW103133400A TWI666735B TW I666735 B TWI666735 B TW I666735B TW 103133400 A TW103133400 A TW 103133400A TW 103133400 A TW103133400 A TW 103133400A TW I666735 B TWI666735 B TW I666735B
Authority
TW
Taiwan
Prior art keywords
semiconductor wafer
bump
circuit pattern
substrate body
body layer
Prior art date
Application number
TW103133400A
Other languages
English (en)
Other versions
TW201537700A (zh
Inventor
李相龍
Original Assignee
南韓商愛思開海力士有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 南韓商愛思開海力士有限公司 filed Critical 南韓商愛思開海力士有限公司
Publication of TW201537700A publication Critical patent/TW201537700A/zh
Application granted granted Critical
Publication of TWI666735B publication Critical patent/TWI666735B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/13Mountings, e.g. non-detachable insulating substrates characterised by the shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L24/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L24/17Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/1301Shape
    • H01L2224/13012Shape in top view
    • H01L2224/13014Shape in top view being circular or elliptic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/1301Shape
    • H01L2224/13016Shape in side view
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/13099Material
    • H01L2224/131Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/13101Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/13111Tin [Sn] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/13099Material
    • H01L2224/131Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/13138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/13144Gold [Au] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/13099Material
    • H01L2224/131Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/13138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/13147Copper [Cu] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16135Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/16145Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H01L2224/16146Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked the bump connector connecting to a via connection in the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16237Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area disposed in a recess of the surface of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29005Structure
    • H01L2224/29007Layer connector smaller than the underlying bonding area
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/2919Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32135Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/731Location prior to the connecting process
    • H01L2224/73101Location prior to the connecting process on the same surface
    • H01L2224/73103Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8112Aligning
    • H01L2224/81136Aligning involving guiding structures, e.g. spacers or supporting members
    • H01L2224/81138Aligning involving guiding structures, e.g. spacers or supporting members the guiding structures being at least partially left in the finished device
    • H01L2224/8114Guiding structures outside the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8138Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/81385Shape, e.g. interlocking features
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8138Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/81399Material
    • H01L2224/814Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/81438Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/81447Copper [Cu] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818Bonding techniques
    • H01L2224/81801Soldering or alloying
    • H01L2224/81815Reflow soldering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/8385Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/921Connecting a surface with connectors of different types
    • H01L2224/9211Parallel connecting processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
    • H01L2224/92242Sequential connecting processes the first connecting process involving a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06513Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06517Bump or bump-like direct electrical connections from device to substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06541Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
    • H01L2225/06544Design considerations for via connections, e.g. geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06555Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
    • H01L2225/06562Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking at least one device in the stack being rotated or offset
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H01L23/3128Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H01L23/49816Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5384Conductive vias through the substrate with or without pins, e.g. buried coaxial conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L24/80 - H01L24/90
    • H01L24/92Specific sequence of method steps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • H01L2924/143Digital devices
    • H01L2924/1434Memory
    • H01L2924/1435Random access memory [RAM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device
    • H01L2924/15155Shape the die mounting substrate comprising a recess for hosting the device the shape of the recess being other than a cuboid
    • H01L2924/15156Side view
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape
    • H01L2924/1816Exposing the passive side of the semiconductor or solid-state body
    • H01L2924/18161Exposing the passive side of the semiconductor or solid-state body of a flip chip
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/35Mechanical effects
    • H01L2924/351Thermal stress
    • H01L2924/3511Warping

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Geometry (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Wire Bonding (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

一種堆疊封裝包括:基板本體層,其具有頂表面和底表面;第一電路圖案,其設置在所述基板本體層的所述底表面上;第二電路圖案,其設置在所述基板本體層的所述頂表面上;第一半導體晶片,其包括第一凸塊;以及第二半導體晶片,其包括第二凸塊。所述第一凸塊延伸通過所述基板本體層,以電耦合到所述第一電路圖案,並且所述第二凸塊延伸經過所述第一半導體晶片的側壁,以電耦合到所述第二電路圖案。所述第二半導體晶片被堆疊在所述第一半導體晶片上。

Description

薄堆疊封裝
本案實施例涉及封裝技術,更具體地說,涉及薄疊層封裝。
相關申請案的交叉參考
本申請案基於35 U.S.C 119(a)主張2014年3月28日於韓國知識產權局所提申的韓國申請案第10-2014-0036526號的優先權,其通過引用將其整體併入本文中。
在許多電子系統中使用的半導體裝置可以包括各種電子電路元件。電子電路元件可以被整合在半導體裝置中的半導體基板中及/或半導體基板上。半導體裝置也可稱為半導體晶片或半導體晶粒。記憶體半導體晶片可以使用在各種電子系統中。在電子系統中使用半導體裝置之前,例如記憶體半導體晶片,半導體裝置可以被囊封以創建半導體封裝。半導體封裝可以在電子系統中使用,其中該電子系統可以例如包括計算機、移動系統或數據存儲介質。
由於諸如智慧手機的移動系統日益更輕且更小,在移動系統中使用的半導體封裝已在尺寸上縮小。此外,多功能移動系統的發展需求增加了相對大容量的半導體封裝。在許多情況下,一直朝向將複數個半導體晶片放置在單一封裝中而努力,以試圖提供相對大容量的半導體封裝。 這樣的半導體封裝的一個例子是堆疊封裝。
薄堆疊封裝的一實施例包括:基板,其包括第一電路圖案和位在與所述第一電路圖案不同層級的第二電路圖案;第一半導體晶片,其包括電連接到所述第一電路圖案的第一凸塊;以及第二半導體晶片,其包括電連接到所述第二電路圖案的第二凸塊。所述第二半導體晶片被堆疊在所述第一半導體晶片的相對於所述基板的表面上,並且所述第二凸塊延伸經過所述第一半導體晶片的側壁。
在一實施例中,薄堆疊封裝包括:基板本體層,其具有頂表面和底表面;第一電路圖案,其設置在所述基板本體層的所述底表面上;第二電路圖案,其設置在所述基板本體層的所述頂表面上;第一半導體晶片,其包括第一凸塊;以及第二半導體晶片,其包括第二凸塊。所述第一凸塊延伸通過所述基板本體層以電耦合到所述第一電路圖案,並且所述第二凸塊延伸經過所述第一半導體晶片的側壁以電耦合到所述第二電路圖案。所述第二半導體晶片被堆疊在所述第一半導體晶片上,其中沿著所述第二半導體晶片的長度的中心線大致垂直於沿著所述第一半導體晶片的長度的中心線。
在一實施例中,薄疊層封裝包括:第一半導體晶片,其包括第一凸塊;以及第二半導體晶片,其堆疊在所述第一半導體晶片上。所述第二半導體晶片包括第二凸塊。基板包括第一電路圖案和第二電路圖案,其中所述第二電路圖案被設置在與所述第一電路圖案不同的層級處。所述第一電路圖案電耦合至所述第一凸塊,並且所述第二電路圖案電耦合至所 述第二凸塊。所述第一電路圖案以第一介電層而覆蓋,以及所述第二電路圖案以第二介電層而覆蓋。所述第一和第二半導體晶片以保護層而覆蓋。
在一實施例中,記憶卡包括記憶體和被配置為控制所述記憶體的操作的記憶體控制器。所述記憶體和所述記憶體控制器中的至少一個包括:基板,包括第一電路圖案和設置在與所述第一電路圖案不同的層級處的第二電路圖案;第一半導體晶片,其包括電耦合到所述第一電路圖案的第一凸塊;以及第二半導體晶片,其包括電耦合到所述第二電路圖案的第二凸塊。所述第二半導體晶片被堆疊在所述第一半導體晶片的相對於所述基板的表面上,並且所述第二凸塊延伸經過所述第一半導體晶片的側壁。
在一實施例中,記憶卡包括記憶體和被配置為控制所述記憶體的操作的記憶體控制器。所述記憶體和所述記憶體控制器中的至少一個包括:基板本體層,其具有頂表面和底表面;第一電路圖案,其設置在所述基板本體層的底表面上;第二電路圖案,其設置在所述基板本體層的頂表面上;第一半導體晶片,其包括第一凸塊;以及第二半導體晶片,其包括第二凸塊。所述第一凸塊延伸通過所述基板本體層以電耦合到所述第一電路圖案,並且所述第二凸塊延伸經過所述第一半導體晶片的側壁以電耦合到所述第二電路圖案。所述第二半導體晶片被堆疊在所述第一半導體晶片上,並且沿著所述第二半導體晶片的長度的中心線大致垂直於沿著所述第一半導體晶片的長度的中心線。
在一實施例中,記憶卡包括記憶體和控制所述記憶體的操作的記憶體控制器。所述記憶體和所述記憶體控制器中的至少一個包括:第一半導體晶片,其包括第一凸塊;以及第二半導體晶片,其堆疊在所述第 一半導體晶片上。所述第二半導體晶片包括第二凸塊。基板包括第一電路圖案和第二電路圖案,其中所述第二電路圖案被設置在與所述第一電路圖案不同的層級處。所述第一電路圖案電耦合至所述第一凸塊,並且所述第二電路圖案電耦合至所述第二凸塊。所述第一電路圖案以第一介電層而覆蓋,以及所述第二電路圖案以第二介電層而覆蓋。所述第一和第二半導體晶片以保護層而覆蓋。
在一實施例中,電子系統包括記憶體和經由匯流排耦合到所述記憶體的控制器。所述記憶體和所述控制器中至少一個包括:基板,包括第一電路圖案和位在與所述第一電路圖案不同的層級處的第二電路圖案;第一半導體晶片,其包括電耦合到所述第一電路圖案的第一凸塊;以及第二半導體晶片,其包括電耦合到所述第二電路圖案的第二凸塊。所述第二半導體晶片被堆疊在所述第一半導體晶片的相對於所述基板的表面上,使得所述第二凸塊延伸經過所述第一半導體晶片的側壁。
在一實施例中,電子系統包括記憶體和經由匯流排耦合到所述記憶體的控制器。所述記憶體和所述控制器中至少一個包括:基板本體層,其具有頂表面和底表面;第一電路圖案,其設置在所述基板本體層的底表面上;第二電路圖案,其設置在所述基板本體層的頂表面上;第一半導體晶片,其包括第一凸塊;以及第二半導體晶片,其包括第二凸塊。所述第一凸塊延伸通過所述基板本體層以電耦合到所述第一電路圖案,並且所述第二凸塊延伸經過所述第一半導體晶片的側壁以電耦合到所述第二電路圖案。所述第二半導體晶片被堆疊在所述第一半導體晶片上,其中沿著所述第二半導體晶片的長度的中心線大致垂直於沿著所述第一半導體晶片 的長度的中心線。
在一實施例中,電子系統包括記憶體和經由匯流排耦合到所述記憶體的控制器。所述記憶體和所述控制器中至少一個包括:第一半導體晶片,其包括第一凸塊;以及第二半導體晶片,其堆疊在所述第一半導體晶片上。所述第二半導體晶片包括第二凸塊。基板包括第一電路圖案和第二電路圖案,其中所述第二電路圖案被設置在與所述第一電路圖案不同的層級處。所述第一電路圖案電耦合至所述第一凸塊,並且所述第二電路圖案電耦合至所述第二凸塊。所述第一電路圖案以第一介電層而覆蓋,以及所述第二電路圖案以第二介電層而覆蓋。所述第一和第二半導體晶片以保護層而覆蓋。
10‧‧‧堆疊封裝
15‧‧‧堆疊封裝
19‧‧‧堆疊封裝
100‧‧‧封裝基板
110‧‧‧基板本體層
113‧‧‧導電穿孔
130‧‧‧第二電路圖案/電路圖案
140‧‧‧第二介電層
142‧‧‧第一開口
143‧‧‧第二開口
145‧‧‧第三開口
150‧‧‧第一電路圖案/電路圖案
160‧‧‧第一介電層
200‧‧‧半導體晶片/第一半導體晶片
201‧‧‧第一表面
203‧‧‧第二表面
210‧‧‧凸塊/第一凸塊
211‧‧‧第一導電黏著層
300‧‧‧半導體晶片/第二半導體晶片
301‧‧‧第三表面
303‧‧‧第四表面
310‧‧‧凸塊/第二凸塊
311‧‧‧第二導電黏著層
420‧‧‧第一黏著層
430‧‧‧黏著層/第二黏著層
500‧‧‧保護層
600‧‧‧外部連接端子
1100‧‧‧封裝基板
1110‧‧‧基板本體層
1113‧‧‧導電穿孔
1130‧‧‧第二電路圖案
1140‧‧‧第二介電層
1142‧‧‧第一開口
1143‧‧‧第二開口
1145‧‧‧第三開口
1150‧‧‧第一電路圖案
1160‧‧‧第一介電層
1161‧‧‧接觸窗口
1200‧‧‧第一半導體晶片
1210‧‧‧第一凸塊
1211‧‧‧第一導電黏著層
1300‧‧‧第二半導體晶片
1310‧‧‧第二凸塊
1311‧‧‧第二導電黏著層
1430‧‧‧黏著層
1500‧‧‧保護層
1600‧‧‧外部連接端子
2100‧‧‧封裝基板
2110‧‧‧基板本體層
2113‧‧‧導電穿孔
2130‧‧‧第二電路圖案
2140‧‧‧第二介電層
2142‧‧‧第一開口
2143‧‧‧第二開口
2145‧‧‧第三開口
2150‧‧‧第一電路圖案
2160‧‧‧第一介電層
2161‧‧‧接觸窗口
2200‧‧‧第一半導體晶片
2210‧‧‧第一凸塊
2211‧‧‧第一導電黏著層
2300‧‧‧第二半導體晶片
2310‧‧‧第二凸塊
2311‧‧‧第二導電黏著層
2430‧‧‧黏著層
2500‧‧‧保護層
2600‧‧‧外部連接端子
1800‧‧‧記憶卡
1810‧‧‧記憶體
1820‧‧‧記憶體控制器
1830‧‧‧主機
2710‧‧‧電子系統
2711‧‧‧控制器
2712‧‧‧輸入/輸出單元
2713‧‧‧記憶體
2714‧‧‧介面
2715‧‧‧匯流排
圖1是堆疊封裝的一實施例的平面視圖;圖2和3是沿著圖1的線X-X'所截取的堆疊封裝的截面視圖;圖4是使用在一堆疊封裝的一個實施例中的封裝基板的截面視圖;圖5和6是使用在一堆疊封裝的一個實施例中的半導體晶片的立體圖;圖7是使用在一堆疊封裝的一個實施例中的半導體晶片的堆疊結構的立體圖;圖8和9的使用在一堆疊封裝的一個實施例中的具有黏著層的半導體晶片的立體圖;圖10是使用在一堆疊封裝的一個實施例中的具有開口的封 裝基板的俯視圖;圖11是使用在一堆疊封裝的一個實施例中的具有開口的封裝基板的俯視圖;圖12是沿著圖11的線X2-X2'的橫截視圖;圖13是沿著圖11的線X2-X2'的橫截視圖;圖14是沿著圖1的線X-X'所取的橫截視圖;圖15是包括堆疊封裝的一個實施例的一電子系統的方塊圖表示;以及圖16是包括堆疊封裝的一個實施例的一電子系統的方塊圖表示。
應當理解的是,儘管術語第一、第二、第三等等可以在本文中用來描述各種元件,但是這些元件不應該受這些術語所限制。這些術語僅用於將一個元件與另一個元件區分。因此,在一些實施例中的第一元件可以被稱為在其它實施例中的第二元件。
還應當理解的是,當一個元件被稱為在另一元件“上”、“上面”、“下面”或“下”時,它可以直接在其它元件“上”、“上面”、“下面”或“下”,或者也可以存在中間元件。因此,在本文中使用的諸如“上”、“上面”、“下面”或“下”的術語僅用於描述特定實施例的目的。
還應當理解的是,當一個元件被稱為“連接”或“耦合”到另一元件時,它可以直接連接或耦合到另一元件,或者可以存在中間元件。 相反地,當一個元件被稱為“直接連接”或“直接耦合”到另一元件時,則不存在中間元件。用於描述元件或層之間的關係的其他詞語應當以類似的方式來解釋。半導體晶片可以藉由使用晶粒鋸切製程將電子電路所整合的半導體基板或晶圓分離成複數片而得到。
所述半導體晶片可以對應於記憶體晶片或邏輯晶片。記憶體晶片可包括整合在所述半導體基板上及/或在所述半導體基板中的動態隨機存取記憶體(dynamic random access memory,DRAM)電路、靜態隨機存取記憶體(static random access memory,SRAM)電路、快閃電路、磁性隨機存取記憶體(magnetic random access memory,MRAM)電路、電阻性隨機存取記憶體(resistive random access memory,ReRAM)電路、鐵電性隨機存取記憶體(ferroelectric random access memory,FeRAM)電路或相變隨機存取記憶體(phase change random access memory,PCRAM)電路。邏輯晶片可以包括整合在所述半導體基板上及/或在所述半導體基板中的邏輯電路。在一些情況下,本文所用的術語“半導體基板”也可以解釋為積體電路所形成的半導體晶片或半導體晶粒。
參見圖1,堆疊封裝10的實施例可以包括封裝基板100和第一和垂直地堆疊在封裝基板100上的第二半導體晶片200、300。第一和第二半導體晶片200、300可以是覆晶晶片。所述第一和第二半導體晶片200、300可以在雙晶粒封裝結構中以大致垂直的方向來堆疊。複數個第一凸塊210可以沿著第一半導體晶片200的底表面的邊緣設置並且可操作以將所述第一半導體晶片200電耦合到封裝基板100。同樣地,複數個第二凸塊310可以沿著所述第二半導體晶片300的底表面的邊緣設置並且可操作以將所述第二 半導體晶片300電耦合至封裝基板100。第三半導體晶片(未示出)可以被堆疊在第二半導體晶片300的表面上,所述表面相對於面向第一半導體晶片200的表面。
第二半導體晶片300和第一半導體晶片200可以被佈置如圖1的平面視圖所示。第一和第二半導體晶片200、300可以各自基本上具有矩形形狀。沿著所述第一半導體晶片200的長度延伸的中心線可以設置成基本上垂直於沿著所述第二半導體晶片300的長度延伸的中心線,如圖1所示。第一凸塊210可以沿著所述第一半導體晶片200的底表面的相對邊緣設置,並且第二凸塊310可以沿著所述第二半導體晶片300的邊緣的底表面的相對邊緣設置。第一和第二凸塊210和310所沿著設置的第一和第二半導體晶片200、300的邊緣可以對應於在第一和第二半導體晶片200、300之間的非重疊區域。沿著第一半導體晶片200的每個邊緣設置的第一凸塊210可以被佈置在第一方向中,並且沿著第二半導體晶片300的每個邊緣設置的第二凸塊310可以被佈置在第二方向中,其中所述第二方向基本上垂直於所述第一方向。在一些實施例中,第一凸塊210可以沿著所述第一半導體晶片200的兩個相對邊緣中的一者來設置。類似地,在一些實施例中,所述第二凸塊310可以沿著所述第二半導體晶片300的兩個相對邊緣中的一者來設置。
雖然圖1說明第一和第二半導體晶片200、300的長度的中心線被設置成相對於彼此基本上為直角的例子,但是第一和第二半導體200、300可以以交替的配置來佈置。例如,在一個實施例中,所述第一和第二半導體晶片200、300以階梯結構配置方式來堆疊。即,所述第二半導體晶片300可以相對於所述第一第二半導體晶片200橫向偏移,使得第二半導體晶片300 的邊緣從所述第一半導體晶片200的側壁橫向地突出。更具體地,如圖1所示的所述第二半導體晶片300以基本上90度的順時鐘方向或逆時鐘方向旋轉,以完全覆蓋第一半導體晶片300。經旋轉的第二半導體晶片300在一方向中橫向偏移以暴露第一半導體晶片200的邊緣。經旋轉和偏移的第二半導體晶片300和第一半導體晶片200的配置可以是階梯結構配置方式。
參照圖1和2,第一和第二半導體晶片200、300可以基本上垂直地堆疊在封裝基板100上,如上所述。封裝基板100可以包括第一電路圖案150和第二電路圖案130。第一半導體晶片200的第一凸塊210可以電耦合到所述第一電路圖案150,並且第二半導體晶片300的第二凸塊310可以電耦合到所述第二電路圖案130。
封裝基板100可以包括由介電材料所構成的基板本體層110。所述第一和第二電路圖案150、130可以設置在基板本體層110上。第一和第二電路圖案150、130可以使用包含例如金屬層的導電材料的一材料來形成。所述金屬層可以是例如銅層。雖然在圖中沒有示出,第一和第二電路圖案150、130可以將所述第一和第二半導體晶片200、300電耦合到外部裝置或外部模組基板。基板本體層110可以包括由介電材料所構成的核心層,或者可以是具有多層互連基板結構的預浸料層。在一個實施例中,封裝基板100可以具有雙層互連基板結構,其包括核心層。所述第一和第二電路圖案150、130可以設置在核心層的兩個相對表面上。可替代地,封裝基板100可以包括對應於所述基板本體層110的預浸料層。第一和第二電路圖案150、130可以設置在預浸料層的兩個相對表面上。第三電路圖案(未示出)可以設置在預浸料層中。第三電路圖案可以設置在單層結構或多層結構的預浸料 層中。
第一電路圖案150可以設置在不同於第二電路圖案130的層級處。即,第一電路圖案150可以設置在比第二電路圖案130的層級相對較高或相對較低的層級處。第一電路圖案150可以被佈置在所述基板本體層110的表面上,並且第二電路圖案130可以被佈置在所述基板本體層110的不同表面上。可替換地,所述第一和第二電路圖案150、130可以被佈置在所述基板本體層110的不同層級處。
如上所述,第一電路圖案150可以設置在比第二電路圖案130的層級相對較高或相對較低的層級處。例如,第一電路圖案150可以設置在基板本體層110的表面上,並且第二電路圖案130可以被佈置在相對於與第一電路圖案150相關聯的表面的基板本體層110的不同表面上。可能有對應於在第一和第二電路圖案150、130之間的基板本體層110的厚度的層級差。在這樣的情況下,第一電路圖案150可以設置在相對於第一半導體晶片200的基板本體層110的底表面上,並且第二電路圖案130可以設置在相對於第一電路圖案150的基板本體層110的頂表面上。
雖然圖2說明第一電路圖案150被佈置在基板本體層110的底表面上並且第二電路圖案130被佈置在基板本體層110的頂表面上的例子,其中交替排列可以使用於相對於該第二電路圖案130排列第一電路圖案150。例如,雖然圖中未示出,但是基板本體層110可以包括階梯表面,其包括第一表面及第二表面,其中第一表面和第二表面是在不同層級。所述第一和第二電路圖案150、130可以分別設置在階梯表面的第一表面和第二表面上。
返回參照圖2,第一開口142可以延伸通過基板本體層110。 第一開口142可以用於將第一半導體晶片200的第一凸塊210電耦合至封裝基板100的第一電路圖案150。第一開口142可以對應於延伸通過基板本體層110的通孔,以暴露第一電路圖案150。第一半導體晶片200可以設置在封裝基板100上,使得每個第一凸塊210被插入第一開口142的各自開口。第一凸塊210可以經由第一導電黏著層211電耦合到第一電路圖案150,其中第一導電黏著層211設置在藉由第一開口142所暴露的第一電路圖案150上。
在一實施例中,第一介電層160可以包括焊料抗蝕材料。各個外部連接端子600可以是連接部件,例如,電耦合到外部裝置或模組基板的焊料球。
封裝基板100可以包括設置在所述基板本體層110的頂表面上並且覆蓋第二電路圖案130的第二介電層140。與第二凸塊310重疊的第二電路圖案130可以藉由延伸通過第二介電層140的第二開口143而暴露。第二介電層140可以包括作為基板本體層110的相同介電材料。在一個實施例中,第二介電層140可以包括焊料抗蝕材料。每個第二凸塊310可以插入在第二開口143中的各自開口中。第二凸塊310可以經由設置在藉由第二開口143所暴露的第二電路圖案130上的第二導電黏著層311而電耦合到第二電路圖案130。每個第二導電黏著層311可以包括焊料材料。另外,第三開口145可以延伸通過第二介電層140。第三開口145可以延伸通過第二介電層140以暴露第一開口142。即,第三開口145可以與第一開口142基本上垂直對準。因此,第一開口142和第三開口145可以提供藉由第一凸塊210所插入的通孔。所述第二半導體晶片300可以被堆疊在第一半導體晶片200上,使得所述第二凸塊310延伸經過所述第一半導體晶片200的側壁,以電耦合到所述第二電路圖案 130。
導電穿孔113可以延伸穿過基板本體層110以將至少一個第一電路圖案150電耦合到至少一個第二電路圖案130。因此,所述第二凸塊310可以經由導電穿孔113而電耦合到外部連接端子600。保護層500可以被佈置在封裝基板100上,以覆蓋第一和第二半導體晶片200、300。保護層500可以藉由模塑環氧樹脂模塑化合物(epoxy molding compound,EMC)材料所形成。可替代地,保護層500可以藉由在封裝基板100上層疊介電層或介電膜來形成,以嵌入第一和第二半導體晶片200、300於其中。在這樣的情況下,封裝10可以具有嵌入式封裝形式。
第一半導體晶片200可以被附接到封裝基板100。第二半導體晶片300可以使用配置在第一和第二半導體晶片200、300之間的黏著層430而附接到所述第一半導體晶片200。黏著層430可以包括絕緣材料。黏著層430可以抑制或防止與第一和第二半導體晶片200、300的翹曲相關的一些故障。基本上類似於層430的額外的黏著層(未示出)可以被佈置在第一半導體晶片200和第二介電層140之間。
所述第一和第二半導體晶片200、300的厚度可以減少以創建相對薄的堆疊封裝10。在這種情況下,如果相對薄的堆疊封裝10遭受熱製程期間的熱,施加到半導體晶片200、300的鈍化層或施加到由介電層所組成的封裝基板100的拉伸應力可能會增加,並且導致半導體晶片200、300的翹曲。結果,在凸塊210、310和電路圖案150和130之間的接觸故障可能發生。此外,當設置在凸塊210、310和電路圖案150、130之間的第一和第二導電黏著層211、311的焊料層頃回焊時,凸塊210、310可以可能導致焊料層的非濕故障 的方式將所述電路圖案150、130分隔開。利用上述黏著層430的實施例可能降低或防止第一和第二半導體晶片200、300的翹曲,並且可以防止在凸塊210、310和電路圖案150、130之間接觸故障。因此,即使相對減少第一和第二半導體晶片200、300的厚度,利用黏著層430可以減少或防止在薄堆疊封裝中的所述第一和第二半導體晶片200、300的翹曲。
參見圖4所示,封裝基板100可以包括設置在基板本體層110的頂表面上的第一電路圖案150以及配置在基板本體層110的的底表面上的第二電路圖案130。因此,第一電路圖案150可以位在相對於第二電路圖案130不同的層級。如圖2所示,第一開口142可以延伸穿過基板本體層110,以暴露所述第一電路圖案150。第一開口142可以延伸到堆疊在基板本體層110上的第二介電層140,以提供通孔。將第一半導體晶片200電耦合到第一電路圖案150的第一凸塊210被插入到通孔中。在這樣的情況下,所述第一開口142的深度D可以藉由第一凸塊(圖2的210)的長度來確定。第一開口142可以具有基本上等於第一凸塊210的長度之深度。實際上,第一開口142可以具有基本上等於第一凸塊210的長度和黏著層211的厚度的總合之深度。延伸通過第二介電層140的第二開口143可以暴露第二電路圖案130的部分,並且可以提供通孔。第二凸塊130被插入到通孔中。所述第一和第二開口142、143的進氣口可以基本上設置在與第二介電層140的頂表面相同的層級處。因此,第二開口143的深度可以比第一開口142的深度D相對較少。第一開口142的深度D和第二開口143的深度之間的的差異可以基本上等於基板本體層110的厚度和第二電路圖案130的厚度之總和。
參見圖5所示,第一半導體晶片200可以包括設置在其之第一 表面201上的第一凸塊210。第一凸塊210可以從第一表面201垂直地延伸。第一凸塊210可以被佈置在第一半導體晶片200的第一面201的兩個相對邊緣上並且可以具有大致圓柱形狀。第一凸塊210可以包括各種導電材料中的任何一個。例如,第一凸塊210可以由從銅材料、金材料、錫材料和它們的任意組合所組成的群組中所選擇的導電材料來形成。參照圖2和5所示,第一半導體晶片200可以設置在封裝基板100上,使得第一半導體晶片200的第一表面201面向封裝基板100。第二半導體晶片300可以被堆疊在相對於封裝基板100的第一半導體晶片200的第二表面203上。第一半導體晶片200的第一表面201可以是前表面,其鄰近於諸如電晶體的電路元件所整合之處的主動層。
參見圖6所示,第二半導體晶片300可以包括設置在其之第三表面301上的第二凸塊310。第二凸塊310可以從第三表面301垂直地延伸。第二凸塊310可以被佈置在第二半導體晶片300的第三表面301的相對邊緣上,並且具有大致圓柱形狀。第二凸塊310可以包括各種導電材料中的任何一個。例如,第二凸塊310可以由從銅材料、金材料、錫材料和它們的任意組合所組成的群組中所選擇的導電材料來形成。如圖2所示,第二半導體晶片300可以被堆疊在第一半導體晶片200上,使得第二凸塊310延伸經過第一半導體晶片200的側壁並且電連接到第二電路圖案130。
第二凸塊310可以具有長度L2,其能與第二電路圖案130電接觸。因此,第二凸塊310的長度L2可以比第一半導體晶片200的厚度(圖5的T1)相對較大。第二半導體晶片300的厚度T2可以基本上等於第一半導體晶片200的厚度T1。第二半導體晶片300可以具有與第一半導體晶片200基本上相同的結構配置。所述第二凸塊310可以具有與第一凸塊210基本上相同的結 構配置或基本上相同的長度。如圖2和3所示,第二半導體晶片300可以被堆疊在封裝基板100上方,使得第二半導體晶片300的第三表面301面向封裝基板100,並且相對於第三表面301的所有第二半導體晶片300的第四表面303是與保護層500接觸。
參照圖2和圖7,第二半導體晶片300可以被堆疊在第一半導體晶片200上,使得第二半導體晶片300的部分與第一半導體晶片200的部分重疊。在這樣的情況下,第二半導體晶片300可以被堆疊在第一半導體晶片200上,使得所有第一和第二凸塊210、310面向封裝基板100。第二半導體晶片300可以基本上直角地橫越第一半導體晶片200,如圖1所示。在這種情況下,每個第一和第二半導體晶片200、300可以具有大致矩形的形狀。即,每個第一和第二半導體晶片200、300可以具有寬度和長度,其中長度相對大於寬度。
參照圖2和8,第一黏著層420可以設置在封裝基板100和第一半導體晶片200之間,並且可以減少或防止第一半導體晶片200的翹曲。第一黏著層420可以包括絕緣材料,並且可以附接到第一表面201。第一黏著層420可以被佈置在第一半導體晶片200的兩個相對邊緣之間的第一表面201上,其中第一凸塊210被排列在第一半導體晶片200的兩個相對邊緣。
參照圖2和圖9,第二黏著層430可以設置在第一半導體晶片200和第二半導體晶片300之間,並且可以減少或防止第一和第二半導體晶片200、300的翹曲。黏著層430可以包括絕緣材料並且可以附接到第三表面301。黏著層430可以被佈置在第二半導體晶片300的兩個相對邊緣之間的第三表面301上,其中第二凸塊310被排列在第二半導體晶片300的兩個相對邊 緣。
參照圖2、4和10,延伸通過第二介電層140的每個第二開口143可以具有大致狹縫形狀,並且可以暴露排列在基板本體層110的邊緣並且彼此隔開的第二電路圖案130。延伸穿過基板本體層110和第二介電層140的第一和第三開口142、145可以具有通孔,其操作以暴露第一電路圖案150的相應開口。第一凸塊210可以延伸到第一和第三開口142、145。第一開口142(或與第一開口142對準的第三開口145)可以被設置成與第一電路圖案150的各自開口重疊。在一個實施例中,第二開口143可以被形成以具有分離的通孔形狀,其基本上類似於第一和第三開口142、145的形狀。每個第二開口143被形成以具有狹縫形狀,並且可以暴露至少兩個或更多個第二電路圖案130,其被排列在所述基板本體層110的邊緣上以作為接合襯墊。當第二凸塊310被插入到第二開口143中,可以創建更大的對準限度。
如上所述,堆疊封裝10的實施例可以藉由垂直堆疊兩個或更多的半導體晶片200、300以及藉由使用於在覆晶晶片技術中的凸塊210、310將半導體晶片200、300電耦合到封裝基板100來實現。半導體晶片200、300可以電耦合到封裝基板100並且經由凸塊210、310而不使用接合導線而與封裝基板100物理上組合。因此,覆蓋半導體晶片200、300的保護層500的厚度可以減小,以實現相對較薄的堆疊封裝。黏著層430可以設置在封裝基板100和半導體晶片200、300之間,並且可以減少或防止在半導體晶片200、300的翹曲。半導體晶片200、300的厚度可以被減小到實現相對較薄的堆疊封裝。
參照圖11、12和13,堆疊封裝15可以包括封裝基板1100以及在封裝基板1100上以覆晶晶片形式垂直堆疊的第一和第二半導體晶片 1200、1300。複數個第一凸塊1210可以設置在第一半導體晶片1200的兩個相對的邊緣的底表面(對應於前表面)上,以將所述第一半導體晶片1200電耦合到封裝基板1100。複數個第二凸塊1310可以設置在第二半導體晶片1300的兩個相對的邊緣的底表面(對應於前表面)上,以將第二半導體晶片1300電耦合到封裝基板1100。另一半導體晶片(未示出)可以被堆疊在相對於第一半導體晶片1200的第二半導體晶片1300的表面上。
封裝基板1100可以包括第二開口1143,其延伸通過第二介電層1140以暴露電耦合到所述第二凸塊1310的第二電路圖案1130。每個第二開口1143可以具有大致狹縫狀並且暴露排列在基板本體層1110的邊緣上與彼此分隔開的第二電路圖案1130。第一開口1142和與第一開口1142對齊的第三開口1145可以延伸穿過基板本體層1110和第二介電層1140,並且可以暴露設置在基板本體層1110的底表面上的第一電路圖案1150。每個第一開口1142和對應的第二開口1145可以具有大致狹縫形狀,並且可以暴露排列在所述基板本體層1110的邊緣的底表面上並且彼此分隔開的第一電路圖案1150。因為第一和第三開口1142、1145具有大致狹縫形狀,所以每個第一開口1142和對應的第三開口1145可以暴露排列在所述基板本體層1110的邊緣上的至少兩個或更多個第一電路圖案1150以作為接合襯墊。在這樣的情況下,當第一凸塊1210插在第一和第三開口1142、1145中時,有可能增加了對準限度。
再次參考圖12和13,第一凸塊1210可以經由設置在第一電路圖案1150上的第一導電黏著層1211而電耦合至第一電路圖案1150,其中第一電路圖案1150藉由第一開口1142所暴露。第一介電層1160可以被佈置在基板本體層1110的底表面上,以覆蓋第一電路圖案1150。至少一個第一電路圖案 1150可以藉由延伸穿過第一介電層1160的接觸窗口1161所暴露。外部連接端子1600可以附接到藉由接觸窗口1161所暴露的第一電路圖案1150。第二凸塊1310可以經由設置在第二電路圖案1130上的第二導電黏著層1311而電耦合到第二電路圖案1130,其中第二電路圖案1130藉由第二開口1143所暴露。導電穿孔1113可以延伸通過基板本體層1110以將至少一個第一電路圖案1150電耦合到至少一個第二電路圖案1130。因此,第二凸塊1310可以經由導電穿孔1113而電耦合至外部連接端子1600。保護層1500可以被佈置在封裝基板1100上以覆蓋所述第一和第二半導體晶片1200、1300。第一半導體晶片1200可以使用黏著層(未示出)而附接到封裝基板1100,其中黏著層設置在第一半導體晶片1200和第二介電層1140之間。第二半導體晶片1300可以使用黏著層1430而附接到第一半導體晶片1200,其中黏著層1430設置在第一和第二半導體晶片1200、1300之間。
參見圖14,堆疊封裝19可以包括封裝基板2100以及在封裝基板2100上以覆晶晶片形式垂直地堆疊的第一和第二半導體晶片2200、2300。複數個第一凸塊2210可以設置在第一半導體晶片2200的兩個相對的邊緣的底表面(對應於前表面)上並且可以將第一半導體晶片2200電耦合到封裝基板2100。複數個第二凸塊2310可以佈置在第二半導體晶片2300的兩個相對的邊緣的底表面(對應於前表面)上並且可以將第二半導體晶片2300電耦合到封裝基板2100。
封裝基板2100可以包括第二開口2143,其延伸通過第二介電層2140以暴露電耦合到第二凸塊2310的第二電路圖案2130。每個第二開口2143可以具有大致狹縫形狀,並且可以暴露排列在基板本體層2110的邊緣上 並且彼此分隔開的第二電路圖案2130。第一開口2142和與第一開口2142對齊的第三開口2145可以延伸穿過基板本體層2110和第二介電層2140,並且可以暴露設置在基板本體層2110的底表面上的第一電路圖案2150。每個第一開口2142和對應的第二開口2145可以具有大致狹縫形狀,並且可以暴露排列在基板本體層2110的邊緣的底表面上並且彼此分隔開的第一電路圖案2150。因為在第一和第三開口2142、2145具有大致狹縫形狀,所以每個第一開口2142和對應的第三開口2145可以暴露排列在基板本體層2110的邊緣上的至少兩個或更多個第一電路圖案2150以作為接合襯墊。在這樣的情況下,當第一凸塊2210插入在第一和第三開口2142、2145中時,有可能相對增加對準限度。
第一凸塊2210可以經由設置在第一電路圖案2150上的第一導電黏著層2211而電耦合至第一電路圖案2150,其中第一電路圖案2150藉由第一開口2142所暴露。第一介電層2160可以設置在基板本體層2110的底表面上,以覆蓋第一電路圖案2150。至少一個第一電路圖案2150可以藉由延伸穿過第一介電層2160的接觸窗口2161所暴露。外部連接端子2600可以附接到藉由接觸窗口2161所暴露的第一電路圖案2150。第二凸塊2310可以經由設置在第二電路圖案2130上的第二導電黏著層2311而電耦合到第二電路圖案2130,其中第二電路圖案2130藉由第二開口2143所暴露。導電穿孔2113可以延伸通過基板本體層2110以將至少一個第一電路圖案2150電耦合到至少一個第二電路圖案2130。因此,第二凸塊2310可以經由導電穿孔2113而電耦合至外部連接端子2600。
保護層2500可以被佈置在封裝基板2100上,並且可以圍繞第一和第二半導體晶片2200、2300。保護層2500可以被佈置在封裝基板2100 上,以暴露相對於第一半導體晶片2200的第二半導體晶片2300的表面。保護層2500可以覆蓋第一和第二半導體晶片2200、2300的側壁。保護層2500可以具有與第二半導體晶片2300的頂表面基本上共面的頂表面或者位於比第二半導體晶片2300的頂表面相對較低的層級處。
第一半導體晶片2200可以使用黏著層(未示出)而附接到封裝基板2100,其中黏著層佈置在第一半導體晶片2200和第二介電層2140之間。第二半導體晶片2300可以使用黏著層2430而附接至第一半導體晶片2200,其中黏著層2430設置在第一和第二半導體晶片2200和2300之間。
圖15是使用至少一個堆疊封裝的一個實施例的包括記憶卡1800的一電子系統的方塊圖表示。
參見圖15所示,記憶卡1800可以包括諸如非易失性記憶體裝置的記憶體1810以及記憶體控制器1820。記憶體1810和記憶體控制器1820可以存儲數據或讀出所存儲的數據。在記憶體1810和記憶體控制器1820中的至少一個可以包括一個或多個堆疊封裝中的一個或多個實施例。
記憶體1810可以包括被應用至一個或多個實施例的技術的非易失性記憶體晶片。記憶體控制器1820可以發出命令到記憶體1810,以響應於來自主機1830的讀/寫請求而管理所存儲的數據的讀出或數據的存儲。
圖16是包括一堆疊封裝的一實施例的電子系統2710的方塊圖表示。
所述電子系統2710可以包括控制器2711、輸入/輸出單元2712和記憶體2713。控制器2711、輸入/輸出單元2712和記憶體2713可以經由匯流排2715而彼此電性耦合。匯流排2715提供了數據移動的途徑。
在一實施例中,控制器2711可以包括至少一個微處理器、至少一個數位信號處理器、至少一個微控制器以及能夠進行與這些構件基本上相同功能的邏輯裝置中的一個或多個。控制器2711或記憶體2713可以包括堆疊封裝的至少一個實施例。輸入/輸出單元2712可以包括袖珍鍵盤、鍵盤、顯示裝置、觸控螢幕等等。記憶體2713是用於存儲數據的裝置。記憶體2713可以存儲數據及/或發出命令以藉由控制器2711來執行等等。
記憶體2713可以包括諸如DRAM的易失性記憶體裝置及/或諸如快閃記憶體的非易失性記憶體裝置。例如,快閃記憶體可以被安裝到諸如移動終端或桌上型電腦的的資訊處理系統。快閃記憶體可以是例如固態磁盤(solid state disk,SSD)的構件。電子系統2710可以在快閃記憶體系統中存儲相對大量的數據。
所述電子系統2710可以包括介面2714,其配置於從通信網絡發送和接收數據以及發送和接收數據至通信網絡。介面2714可以是有線或無線型介面2714。例如,介面2714可以包括天線或有線或無線收發器。
所述電子系統2710可以作為移動系統、個人電腦、工業電腦或執行各種功能的邏輯系統來實現。例如,移動系統可以是個人數位助理(PDA)、便攜式電腦、網絡平板式電腦、行動電話、智慧型手機、無線手機、膝上型電腦、記憶卡、數位音樂系統和資訊發送/接收系統中任何一者。
如果電子系統2710被配置成進行無線通信時,電子系統2710可以使用在通信系統中,諸如CDMA(code division multiple access,分碼多重進接)系統、GSM(global system for mobile communications,全球行動通訊系統)系統、NADC(North American Digital Cellular,北美數位行動電話) 系統、E-TDMA(enhanced-time division multiple access,增強分時多重進接)系統、WCDMA(wideband code division multiple access,寬頻分碼多工接取)系統、CDMA2000、LTE(long term evolution,長期演進技術)系統以及Wibro(wireless broadband internet,無線寬頻網路)系統。
雖然某些實施例已經在上面描述,但對於本領域技術人士來說應理解為所描述的實施例僅僅是作為示例的方式。因此,薄堆疊封裝、包含其之記憶卡以及本文所描述包括其之電子系統不應基於所描述的實施例而被限制。相反地,薄堆疊封裝、包含其之記憶卡以及本文所描述包括其之電子系統應該只受按照上述描述和附圖參酌的申請專利範圍所限制。

Claims (20)

  1. 一種堆疊封裝,包括:基板,其包括基板本體層以及第一電路圖案和第二電路圖案,所述基板本體層具有第一表面和與所述第一表面相對的第二表面,以及所述第一電路圖案設置在所述基板本體層的所述第二表面上,且所述第二電路圖案設置在所述基板本體層的所述第一表面上;第一半導體晶片,其設置在所述基板本體層的所述第一表面上方且包括第一凸塊,所述第一凸塊穿過所述基板本體層和介電層,以電耦合到所述第一電路圖案;以及第二半導體晶片,其設置在所述基板本體層的所述第一表面上方以堆疊在所述第一半導體晶片的表面上且包括第二凸塊,所述第二凸塊徹底地繞過所述第一半導體晶片,且以所述第二凸塊的側邊接觸所述介電層和保護層的方式穿過所述介電層,以使所述第二凸塊電耦合到所述第二電路圖案,其中,所述第一凸塊和所述第二凸塊具有相同的長度。
  2. 如申請專利範圍第1項的堆疊封裝,進一步包括至少一個導電通孔,其延伸穿過所述基板本體層,以將所述第一電路圖案中的一者電耦合到所述第二電路圖案中的一者。
  3. 如申請專利範圍第1項的堆疊封裝,其中,所述第一電路圖案的至少一部分藉由延伸通過所述基板本體層的第一開口所暴露;以及其中,所述第一凸塊延伸到所述第一開口中。
  4. 如申請專利範圍第3項的堆疊封裝,其中所述第一開口中的每個開口具有大致狹縫形狀,並且所述第一凸塊中的至少兩個第一凸塊延伸到所述第一開口的各自開口中。
  5. 如申請專利範圍第3項的堆疊封裝,其中所述第一開口中的每個開口具有通孔形狀,並且所述第一凸塊中的每個第一凸塊延伸到所述第一開口的各自開口中。
  6. 如申請專利範圍第3項的堆疊封裝,其中,所述基板進一步包括第一介電層,其設置成相鄰所述基板本體層的所述底表面並且暴露所述第一電路圖案中的至少一個;以及其中,外部連接端子電耦合至經暴露的所述第一電路圖案。
  7. 如申請專利範圍第3項的堆疊封裝,其中,所述基板進一步包括第二介電層,其設置成相鄰所述基板本體層的所述頂表面並且覆蓋所述第二電路圖案;以及其中,所述第二電路圖案中的至少一部分是藉由延伸通過所述第二介電層的第二開口所暴露。
  8. 如申請專利範圍第7項的堆疊封裝,其中所述第一開口中的每個開口係與第三開口的各自開口基本上垂直地對齊,其中所述第三開口延伸通過所述第二介電層。
  9. 如申請專利範圍第7項的堆疊封裝,其中,所述第二開口中的每個開口具有大致狹縫形狀,並且所述第二凸塊中的至少兩個第二凸塊延伸到所述第二開口的各自開口中。
  10. 如申請專利範圍第1項的堆疊封裝,進一步包括第一黏著層,其設置在所述基板和所述第一半導體晶片之間。
  11. 如申請專利範圍第1項的堆疊封裝,進一步包括第二黏著層,其設置在所述第一半導體晶片和所述第二半導體晶片之間。
  12. 如申請專利範圍第11項的堆疊封裝,其中所述第二凸塊的長度比所述第一半導體晶片和所述第二黏著層的總組合厚度相對較大。
  13. 如申請專利範圍第1項的堆疊封裝,其中所述第二凸塊沿著所述第二半導體晶片的一個邊緣和所述第二半導體晶片的兩個相對邊緣設置。
  14. 如申請專利範圍第1項的堆疊封裝,其中所述第二半導體晶片的長度以相對於所述第一半導體晶片的長度大致垂直配置方式來堆疊,以跨越所述第一半導體晶片或提供階梯結構。
  15. 一種堆疊封裝,包括:基板本體層,其具有第一表面和第二表面;第一電路圖案,其設置在所述基板本體層的所述第二表面上;第二電路圖案,其設置在所述基板本體層的所述第一表面上;第一半導體晶片,其包括延伸通過所述基板本體層以電耦合到所述第一電路圖案的第一凸塊;以及第二半導體晶片,其設置在所述基板本體層的所述第一表面上方以堆疊在所述第一半導體晶片的表面上且包括第二凸塊,所述第二凸塊徹底地繞過所述第一半導體晶片,且以所述第二凸塊的側邊接觸所述介電層和保護層的方式穿過所述介電層,以使所述第二凸塊電耦合到所述第二電路圖案,其中,沿著所述第二半導體晶片的長度的中心線大致垂直於沿著所述第一半導體晶片的長度的中心線,其中,所述第一凸塊和所述第二凸塊具有基板上相同的長度。
  16. 一種堆疊封裝,包括:基板,其包括基板本體層以及第一電路圖案和第二電路圖案,所述基板本體層具有第一表面和第二表面,所述第一電路圖案設置在所述基板本體層的所述第二表面上,且所述第二電路圖案設置在所述基板本體層的所述第一表面上;第一半導體晶片,其設置在所述基板本體層的所述第一表面上方且包括第一凸塊,所述第一凸塊穿過所述基板本體層和介電層,以電耦合到所述第一電路圖案;第二半導體晶片,其設置在所述基板本體層的所述第一表面上方以堆疊在所述第一半導體晶片的表面上且包括第二凸塊,所述第二凸塊徹底地繞過所述第一半導體晶片,且以所述第二凸塊的側邊接觸所述介電層和保護層的方式穿過所述介電層,以使所述第二凸塊電耦合到所述第二電路圖案;第一介電層,其覆蓋所述第一電路圖案;第二介電層,其覆蓋所述第二電路圖案;以及保護層,其覆蓋所述第一半導體晶片和所述第二半導體晶片,其中,所述第一凸塊和所述第二凸塊具有基板上相同的長度。
  17. 一種堆疊封裝,包括:基板本體層;第一電路圖案,其設置在所述基板本體層的第二表面上;第二電路圖案,其設置在所述基板本體層的與所述第二表面相對的第一表面上;第一半導體晶片,其設置在所述基板本體層的所述第一表面上方;第一凸塊,其具有比所述基板本體層的第一厚度還長之第一長度,所述第一凸塊形成在所述第一半導體晶片上且徹底穿過所述基板本體層,以電耦合到所述第一電路圖案;以及第二半導體晶片,其設置在所述第一半導體晶片上方;保護層,其在所述基板本體層的所述第一表面上,以覆蓋所述第一半導體晶片和所述第二半導體晶片;以及第二凸塊,其具有比所述第一半導體晶片的第二厚度還長之第二長度,所述第二凸塊形成在所述第二半導體晶片上且穿過所述保護層的一部分,致使所述第二凸塊的側邊與所述保護層接觸,以使所述第二凸塊電耦合到所述第二電路圖案。
  18. 如申請專利範圍第17項的堆疊封裝,其中所述第二凸塊繞過所述第一半導體晶片之外側。
  19. 如申請專利範圍第17項的堆疊封裝,其中所述基板本體層具有徹底穿過所述基板本體層之通孔;以及其中所述第一凸塊插入於所述通孔之中。
  20. 如申請專利範圍第17項的堆疊封裝,其中所述基板本體層具有徹底穿過所述基板本體層之直通狹縫;以及其中所述第一凸塊插入於所述直通狹縫之中。
TW103133400A 2014-03-28 2014-09-26 薄堆疊封裝 TWI666735B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020140036526A KR102161776B1 (ko) 2014-03-28 2014-03-28 적층 패키지
??10-2014-0036526 2014-03-28

Publications (2)

Publication Number Publication Date
TW201537700A TW201537700A (zh) 2015-10-01
TWI666735B true TWI666735B (zh) 2019-07-21

Family

ID=54167393

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103133400A TWI666735B (zh) 2014-03-28 2014-09-26 薄堆疊封裝

Country Status (4)

Country Link
US (2) US9721924B2 (zh)
KR (1) KR102161776B1 (zh)
CN (1) CN104952840B (zh)
TW (1) TWI666735B (zh)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI517343B (zh) * 2014-03-25 2016-01-11 恆勁科技股份有限公司 覆晶堆疊封裝結構及其製作方法
KR20160048277A (ko) * 2014-10-23 2016-05-04 에스케이하이닉스 주식회사 칩 내장 패키지 및 그 제조방법
US9935072B2 (en) 2015-11-04 2018-04-03 Sfa Semicon Co., Ltd. Semiconductor package and method for manufacturing the same
WO2017082926A1 (en) * 2015-11-13 2017-05-18 Intel Corporation Apparatus and method for mitigating surface imperfections on die backside film
CN106997875A (zh) * 2016-01-23 2017-08-01 重庆三峡学院 一种PoP堆叠封装结构及其制造方法
CN106997876A (zh) * 2016-01-23 2017-08-01 重庆三峡学院 一种三维PoP堆叠封装结构及其制造方法
WO2017135971A1 (en) * 2016-02-05 2017-08-10 Intel Corporation System and method for stacking wire-bond converted flip-chip die
US10297575B2 (en) * 2016-05-06 2019-05-21 Amkor Technology, Inc. Semiconductor device utilizing an adhesive to attach an upper package to a lower die
CN110114874A (zh) * 2016-12-30 2019-08-09 英特尔Ip公司 微电子设备中堆叠管芯的互连结构
KR102464066B1 (ko) * 2018-04-30 2022-11-07 에스케이하이닉스 주식회사 쓰루 몰드 비아를 포함하는 스택 패키지
US11581287B2 (en) * 2018-06-29 2023-02-14 Intel Corporation Chip scale thin 3D die stacked package
JP7245037B2 (ja) * 2018-11-30 2023-03-23 ローム株式会社 半導体装置
WO2020217394A1 (ja) * 2019-04-25 2020-10-29 日立化成株式会社 ドルメン構造を有する半導体装置及びその製造方法、並びに、支持片形成用積層フィルム及びその製造方法
WO2020217401A1 (ja) 2019-04-25 2020-10-29 日立化成株式会社 ドルメン構造を有する半導体装置及びその製造方法、並びに、支持片形成用積層フィルム及びその製造方法
KR102683202B1 (ko) * 2019-07-08 2024-07-10 에스케이하이닉스 주식회사 적층 반도체 칩을 포함하는 반도체 패키지
US11495574B2 (en) * 2019-08-16 2022-11-08 Samsung Electronics Co., Ltd. Semiconductor package
KR20220054118A (ko) * 2020-10-23 2022-05-02 삼성전자주식회사 적층 칩 패키지
CN115249692A (zh) * 2022-09-02 2022-10-28 王永明 一种曲率芯片、封装及终端设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6121679A (en) * 1998-03-10 2000-09-19 Luvara; John J. Structure for printed circuit design
US20070069371A1 (en) * 2005-09-29 2007-03-29 United Test And Assembly Center Ltd. Cavity chip package

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5721452A (en) * 1995-08-16 1998-02-24 Micron Technology, Inc. Angularly offset stacked die multichip device and method of manufacture
US6884657B1 (en) * 1995-08-16 2005-04-26 Micron Technology, Inc. Angularly offset stacked die multichip device and method of manufacture
US5959845A (en) * 1997-09-18 1999-09-28 International Business Machines Corporation Universal chip carrier connector
US6492726B1 (en) * 2000-09-22 2002-12-10 Chartered Semiconductor Manufacturing Ltd. Chip scale packaging with multi-layer flip chip arrangement and ball grid array interconnection
CN100350607C (zh) * 2001-12-07 2007-11-21 富士通株式会社 半导体器件及其制造方法
US6659512B1 (en) * 2002-07-18 2003-12-09 Hewlett-Packard Development Company, L.P. Integrated circuit package employing flip-chip technology and method of assembly
KR20060128376A (ko) 2005-06-10 2006-12-14 주식회사 하이닉스반도체 칩 스택 패키지
US8026611B2 (en) * 2005-12-01 2011-09-27 Tessera, Inc. Stacked microelectronic packages having at least two stacked microelectronic elements adjacent one another
US7977579B2 (en) * 2006-03-30 2011-07-12 Stats Chippac Ltd. Multiple flip-chip integrated circuit package system
US8618678B2 (en) * 2008-11-05 2013-12-31 Himax Technologies Limited Chip structure and chip package structure
US8169058B2 (en) * 2009-08-21 2012-05-01 Stats Chippac, Ltd. Semiconductor device and method of stacking die on leadframe electrically connected by conductive pillars
US8354743B2 (en) * 2010-01-27 2013-01-15 Honeywell International Inc. Multi-tiered integrated circuit package
KR20110105164A (ko) 2010-03-18 2011-09-26 주식회사 하이닉스반도체 반도체 패키지 및 이를 갖는 적층 반도체 패키지
US8558392B2 (en) * 2010-05-14 2013-10-15 Stats Chippac, Ltd. Semiconductor device and method of forming interconnect structure and mounting semiconductor die in recessed encapsulant
US8736065B2 (en) * 2010-12-22 2014-05-27 Intel Corporation Multi-chip package having a substrate with a plurality of vertically embedded die and a process of forming the same
KR20120129286A (ko) * 2011-05-19 2012-11-28 에스케이하이닉스 주식회사 적층 반도체 패키지
US9391046B2 (en) * 2011-05-20 2016-07-12 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming 3D semiconductor package with semiconductor die stacked over semiconductor wafer
KR101768960B1 (ko) * 2011-07-04 2017-08-18 삼성전자 주식회사 칩 적층 반도체 패키지
KR101346420B1 (ko) * 2011-12-29 2014-01-10 주식회사 네패스 반도체 패키지 및 그 제조 방법
KR102111739B1 (ko) * 2013-07-23 2020-05-15 삼성전자주식회사 반도체 패키지 및 그 제조방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6121679A (en) * 1998-03-10 2000-09-19 Luvara; John J. Structure for printed circuit design
US20070069371A1 (en) * 2005-09-29 2007-03-29 United Test And Assembly Center Ltd. Cavity chip package

Also Published As

Publication number Publication date
US20170287879A1 (en) 2017-10-05
KR102161776B1 (ko) 2020-10-06
US9721924B2 (en) 2017-08-01
CN104952840B (zh) 2019-05-07
CN104952840A (zh) 2015-09-30
KR20150113362A (ko) 2015-10-08
TW201537700A (zh) 2015-10-01
US9985002B2 (en) 2018-05-29
US20150279819A1 (en) 2015-10-01

Similar Documents

Publication Publication Date Title
TWI666735B (zh) 薄堆疊封裝
US10217722B2 (en) Semiconductor packages having asymmetric chip stack structure
TWI732985B (zh) 包含堆疊晶片的半導體封裝
US9153557B2 (en) Chip stack embedded packages
KR102108325B1 (ko) 반도체 패키지
US10008488B2 (en) Semiconductor module adapted to be inserted into connector of external device
US9640473B2 (en) Semiconductor packages
US20150179608A1 (en) Embedded packages having a connection joint group
TWI768119B (zh) 包含晶片堆疊的半導體封裝
KR20160049616A (ko) 반도체 패키지
TWI655737B (zh) 包含複數個堆疊晶片之半導體封裝
US10553567B2 (en) Chip stack packages
CN111524879B (zh) 具有层叠芯片结构的半导体封装
TWI699860B (zh) 包含具有階梯狀邊緣的模製層疊晶粒的半導體封裝
US20160079206A1 (en) Semiconductor package, package-on-package device including the same, and mobile device including the same
US10903189B2 (en) Stack packages including stacked semiconductor dies
CN111668180B (zh) 包括混合布线接合结构的层叠封装件
TW201911492A (zh) 包括多個層疊的晶粒的半導體封裝
TW202101710A (zh) 包含支撐基板的堆疊封裝件
US9875990B2 (en) Semiconductor package including planar stacked semiconductor chips
TW202145457A (zh) 包含堆疊基板的半導體裝置及製造半導體裝置之方法