TWI648093B - 超純水製造裝置以及超純水製造方法 - Google Patents

超純水製造裝置以及超純水製造方法 Download PDF

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Publication number
TWI648093B
TWI648093B TW104142774A TW104142774A TWI648093B TW I648093 B TWI648093 B TW I648093B TW 104142774 A TW104142774 A TW 104142774A TW 104142774 A TW104142774 A TW 104142774A TW I648093 B TWI648093 B TW I648093B
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water
ion exchange
exchange resin
pure water
tower
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TW104142774A
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TW201630653A (zh
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育野望
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日商栗田工業股份有限公司
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    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
    • B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction, e.g. ion-exchange, ion-pair, ion-suppression or ion-exclusion
    • B01D15/361—Ion-exchange
    • B01D15/362—Cation-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
    • B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction, e.g. ion-exchange, ion-pair, ion-suppression or ion-exclusion
    • B01D15/361—Ion-exchange
    • B01D15/363—Anion-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0031—Degasification of liquids by filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/025—Reverse osmosis; Hyperfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/08—Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
    • B01D61/44—Ion-selective electrodialysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/58—Multistep processes
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/26—Further operations combined with membrane separation processes
    • B01D2311/2611—Irradiation
    • B01D2311/2619—UV-irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/26—Further operations combined with membrane separation processes
    • B01D2311/2623—Ion-Exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/26—Further operations combined with membrane separation processes
    • B01D2311/2653—Degassing
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C02F2001/422—Treatment of water, waste water, or sewage by ion-exchange using anionic exchangers
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C02F2001/425—Treatment of water, waste water, or sewage by ion-exchange using cation exchangers
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00—Nature of the contaminant
    • C02F2101/30—Organic compounds
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/002—Construction details of the apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nanotechnology (AREA)
  • Toxicology (AREA)
  • Molecular Biology (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Urology & Nephrology (AREA)
  • Physical Water Treatments (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
TW104142774A 2014-12-19 2015-12-18 超純水製造裝置以及超純水製造方法 TWI648093B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014256939A JP6228531B2 (ja) 2014-12-19 2014-12-19 超純水製造装置及び超純水製造方法
JP2014-256939 2014-12-19

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Publication Number Publication Date
TW201630653A TW201630653A (zh) 2016-09-01
TWI648093B true TWI648093B (zh) 2019-01-21

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US (1) US10526226B2 (enExample)
JP (1) JP6228531B2 (enExample)
KR (1) KR102309232B1 (enExample)
CN (1) CN107001075A (enExample)
TW (1) TWI648093B (enExample)
WO (1) WO2016098891A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6752693B2 (ja) * 2016-11-18 2020-09-09 オルガノ株式会社 水処理方法および装置
JP6752692B2 (ja) * 2016-11-18 2020-09-09 オルガノ株式会社 水処理方法および装置
JP6907514B2 (ja) * 2016-11-28 2021-07-21 栗田工業株式会社 超純水製造システム及び超純水製造方法
JP6350706B1 (ja) * 2017-03-30 2018-07-04 栗田工業株式会社 水質調整水製造装置
JP6299912B1 (ja) * 2017-03-30 2018-03-28 栗田工業株式会社 ｐＨ及び酸化還元電位を制御可能な希釈薬液の製造装置
JP6299913B1 (ja) * 2017-03-30 2018-03-28 栗田工業株式会社 ｐＨ・酸化還元電位調整水の製造装置
JP6978353B2 (ja) * 2018-03-13 2021-12-08 オルガノ株式会社 水処理管理装置及び水質監視方法
CN111902368A (zh) * 2018-05-17 2020-11-06 奥加诺株式会社 超纯水的制造方法、超纯水制造系统和离子交换体填充组件
JP7454330B2 (ja) * 2018-06-20 2024-03-22 オルガノ株式会社 被処理水中のホウ素除去方法、ホウ素除去システム、超純水製造システム及びホウ素濃度の測定方法
CN108862756A (zh) * 2018-07-31 2018-11-23 江西鹏凯环保工程设备有限公司 一种超纯水制备装置及其超纯水制备方法
JP2020142178A (ja) * 2019-03-05 2020-09-10 栗田工業株式会社 超純水製造装置及び超純水製造装置の運転方法
JP7200014B2 (ja) 2019-03-13 2023-01-06 オルガノ株式会社 純水製造装置および純水の製造方法
JP7289206B2 (ja) * 2019-03-13 2023-06-09 オルガノ株式会社 ホウ素除去装置及びホウ素除去方法、並びに、純水製造装置及び純水の製造方法
JP6900975B2 (ja) * 2019-06-12 2021-07-14 栗田工業株式会社 ｐＨ調整水製造装置
JP7183208B2 (ja) * 2020-02-14 2022-12-05 栗田工業株式会社 超純水製造装置及び超純水製造方法
JP7368310B2 (ja) * 2020-05-20 2023-10-24 オルガノ株式会社 ホウ素除去装置及びホウ素除去方法、並びに、純水製造装置及び純水の製造方法
JP7610380B2 (ja) * 2020-09-25 2025-01-08 オルガノ株式会社 純水製造装置及び純水製造方法
CN112321099B (zh) * 2020-12-02 2024-02-23 中国电子系统工程第二建设有限公司 一种处理再生水中尿素的方法
JP2023073007A (ja) * 2021-11-15 2023-05-25 栗田工業株式会社 有機物含有水の処理装置及び処理方法

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US5811012A (en) * 1994-07-22 1998-09-22 Organo Corporation Deionized water or high purity water producing method and apparatus
JPH10180254A (ja) * 1996-12-24 1998-07-07 Nomura Micro Sci Co Ltd 純水の製造方法及び製造装置
CN1408653A (zh) * 2002-09-24 2003-04-09 天津大学 一种电子级水的集成膜过程生产工艺与过程
CN201634548U (zh) * 2010-03-04 2010-11-17 安纳社环保工程（苏州）有限公司 半导体行业研磨废水回用为超纯水的处理系统

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US20170327396A1 (en) 2017-11-16
WO2016098891A1 (ja) 2016-06-23
TW201630653A (zh) 2016-09-01
JP6228531B2 (ja) 2017-11-08
KR102309232B1 (ko) 2021-10-05
JP2016117001A (ja) 2016-06-30
US10526226B2 (en) 2020-01-07
KR20170097036A (ko) 2017-08-25
CN107001075A (zh) 2017-08-01

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