JP2011194402A - 超純水製造装置 - Google Patents
超純水製造装置 Download PDFInfo
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- JP2011194402A JP2011194402A JP2011128421A JP2011128421A JP2011194402A JP 2011194402 A JP2011194402 A JP 2011194402A JP 2011128421 A JP2011128421 A JP 2011128421A JP 2011128421 A JP2011128421 A JP 2011128421A JP 2011194402 A JP2011194402 A JP 2011194402A
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- anion exchange
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- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 70
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 70
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 40
- 239000003054 catalyst Substances 0.000 claims abstract description 92
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 62
- 239000003957 anion exchange resin Substances 0.000 claims abstract description 43
- 230000003647 oxidation Effects 0.000 claims abstract description 28
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 28
- 239000007788 liquid Substances 0.000 claims description 48
- 239000007800 oxidant agent Substances 0.000 claims description 13
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 abstract description 53
- 239000012528 membrane Substances 0.000 abstract description 46
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 25
- 229910052760 oxygen Inorganic materials 0.000 abstract description 25
- 239000001301 oxygen Substances 0.000 abstract description 25
- 239000000126 substance Substances 0.000 abstract description 17
- 239000012535 impurity Substances 0.000 abstract description 16
- 238000000354 decomposition reaction Methods 0.000 abstract description 14
- 238000005115 demineralization Methods 0.000 abstract 2
- 230000002328 demineralizing effect Effects 0.000 abstract 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 26
- 239000003456 ion exchange resin Substances 0.000 description 20
- 229920003303 ion-exchange polymer Polymers 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 17
- 238000011033 desalting Methods 0.000 description 17
- 229910052751 metal Inorganic materials 0.000 description 14
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- 239000011347 resin Substances 0.000 description 13
- 229920005989 resin Polymers 0.000 description 13
- 238000005342 ion exchange Methods 0.000 description 12
- 239000007789 gas Substances 0.000 description 10
- 238000007872 degassing Methods 0.000 description 8
- 239000005416 organic matter Substances 0.000 description 8
- 239000003729 cation exchange resin Substances 0.000 description 7
- 238000005374 membrane filtration Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 238000010612 desalination reaction Methods 0.000 description 5
- 238000000108 ultra-filtration Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 238000005345 coagulation Methods 0.000 description 3
- 230000015271 coagulation Effects 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 230000001172 regenerating effect Effects 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 241000894006 Bacteria Species 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 238000005349 anion exchange Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010828 elution Methods 0.000 description 2
- 239000012510 hollow fiber Substances 0.000 description 2
- 239000008235 industrial water Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 238000006864 oxidative decomposition reaction Methods 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 238000001223 reverse osmosis Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 238000005341 cation exchange Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229920001600 hydrophobic polymer Polymers 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000009287 sand filtration Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/145—Ultrafiltration
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/0031—Degasification of liquids by filtration
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
- C02F1/725—Treatment of water, waste water, or sewage by oxidation by catalytic oxidation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/422—Treatment of water, waste water, or sewage by ion-exchange using anionic exchangers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/425—Treatment of water, waste water, or sewage by ion-exchange using cation exchangers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/427—Treatment of water, waste water, or sewage by ion-exchange using mixed beds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
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- Water Supply & Treatment (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Hydrology & Water Resources (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Water Treatments (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Removal Of Specific Substances (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Degasification And Air Bubble Elimination (AREA)
Abstract
【解決手段】一次純水を導入し、超純水を製造する超純水製造装置1の紫外線酸化装置3の後段に、触媒担体と強塩基性アニオン交換樹脂とが混合されて充填されている触媒混合塔4を配置する。触媒混合塔4の後段には、さらに、膜脱気装置5および脱塩装置6を配置する。紫外線酸化装置3で生成された過酸化水素などは、触媒混合塔4に充填された触媒担体と接触して分解され、強塩基性アニオン交換樹脂の分解が抑制される。このため、触媒混合塔4からの溶出物質を低減し、超純水の水質を向上させるとともに、後段に設けられる脱塩装置6の負荷を低くできる。
【選択図】図1
Description
図1に示した超純水製造装置1を用い、原水を前処理装置および一次純水システムで処理して得られた一次純水を被処理液として処理し、超純水を製造した。前処理装置としては、凝集沈殿装置および砂濾過装置を備えたものを用いた。また、一次純水システムとしては、2床3塔式イオン交換樹脂塔、逆浸透膜装置、および真空脱気装置を備えたものを用いた。
図1の超純水装置1の触媒混合塔4に代えて、強塩基性アニオン交換樹脂と強酸性カチオン交換樹脂との混床式のイオン交換樹脂塔を配置し、さらに、脱塩装置6を取り除いて超純水製造装置を構成した。すなわち、比較例1では、一次純水を、紫外線酸化装置、混床式イオン交換樹脂塔、膜脱気装置、および限外膜濾過装置の順で通水して、超純水を製造した。
比較例2として、比較例1の超純水製造装置の膜脱気装置後段に、実施例1で用いたイオン交換装置と同じイオン交換装置を配置した。すなわち、比較例2では、一次純水を紫外線酸化装置、混床式イオン交換樹脂塔、膜脱気装置、混床式イオン交換樹脂塔、および限外膜濾過装置の順で通水して超純水を製造した。
実施例2として実施例1と同様に図1に示す超純水製造装置1を用い、触媒混合塔4に通液される被処理液の通液速度を変えて試験を行なった。具体的には、触媒混合塔4への通液速度は実施例1ではSV=80としたのに対し、実施例2ではSV=53とした。なお触媒混合塔4に供給される紫外線酸化装置3出口液の過酸化水素濃度は、実施例1では表1に示すとおり12μg/Lであったのに対し、実施例2では29μg/Lであった。
触媒混合塔4に代えて強塩基性アニオン交換樹脂を含まず触媒樹脂が単独で充填された触媒塔を用い、この触媒塔に通液速度を変化させて、通液する試験を行った。紫外線酸化装置3の出口液の過酸化水素濃度は実施例2と同じく29μg/Lであった。
2 貯留タンク
3 紫外線酸化装置
4 触媒混合塔
5 膜脱気装置
6 脱塩装置
7 膜濾過装置
Claims (1)
- 紫外線酸化装置を備え、一次純水を被処理液として導入して超純水を製造する超純水製造装置であって、
前記紫外線酸化装置後段に、担体に触媒が担持された触媒担体と、アニオン交換樹脂と、を有する触媒混合塔が配置されていることを特徴とする超純水製造装置。
Priority Applications (1)
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JP2011128421A JP5649520B2 (ja) | 2004-03-31 | 2011-06-08 | 超純水製造装置 |
Applications Claiming Priority (3)
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JP2004106438 | 2004-03-31 | ||
JP2004106438 | 2004-03-31 | ||
JP2011128421A JP5649520B2 (ja) | 2004-03-31 | 2011-06-08 | 超純水製造装置 |
Related Parent Applications (1)
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JP2006511705A Division JP5045099B2 (ja) | 2004-03-31 | 2005-03-30 | 超純水製造装置及び超純水製造装置の運転方法 |
Publications (3)
Publication Number | Publication Date |
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JP2011194402A true JP2011194402A (ja) | 2011-10-06 |
JP2011194402A5 JP2011194402A5 (ja) | 2012-07-05 |
JP5649520B2 JP5649520B2 (ja) | 2015-01-07 |
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JP2006511705A Expired - Fee Related JP5045099B2 (ja) | 2004-03-31 | 2005-03-30 | 超純水製造装置及び超純水製造装置の運転方法 |
JP2011128421A Active JP5649520B2 (ja) | 2004-03-31 | 2011-06-08 | 超純水製造装置 |
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Country Status (4)
Country | Link |
---|---|
US (1) | US20070221581A1 (ja) |
JP (2) | JP5045099B2 (ja) |
TW (1) | TWI408107B (ja) |
WO (1) | WO2005095280A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016172206A (ja) * | 2015-03-16 | 2016-09-29 | オルガノ株式会社 | 被処理液の処理方法及び被処理液の処理装置 |
JP2018127383A (ja) * | 2017-02-09 | 2018-08-16 | 栗田工業株式会社 | アンモニア水溶液の製造装置及びアンモニア水溶液の製造方法 |
JP2018126700A (ja) * | 2017-02-09 | 2018-08-16 | 栗田工業株式会社 | 導電性水溶液の製造装置及び導電性水溶液の製造方法 |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070221581A1 (en) * | 2004-03-31 | 2007-09-27 | Kurita Water Industries Ltd. | Ultrapure Water Production Plant |
JP5124946B2 (ja) * | 2006-01-12 | 2013-01-23 | 栗田工業株式会社 | 超純水製造装置における超純水中の過酸化水素の除去方法 |
US7851406B2 (en) * | 2007-06-12 | 2010-12-14 | Korea Institute Of Chemical Technology | Nano-sized palladium-doped cation exchange resin catalyst, preparation method thereof and method of removing dissolved oxygen in water using the same |
JP5280038B2 (ja) * | 2007-11-06 | 2013-09-04 | 野村マイクロ・サイエンス株式会社 | 超純水製造装置 |
JP5441714B2 (ja) * | 2007-12-26 | 2014-03-12 | オルガノ株式会社 | 純水の製造方法およびその装置、オゾン水製造方法およびその装置、並びに洗浄方法およびその装置 |
JP4920019B2 (ja) * | 2008-09-22 | 2012-04-18 | オルガノ株式会社 | 過酸化水素低減方法、過酸化水素低減装置及び超純水製造装置並びに洗浄方法 |
JP5499753B2 (ja) * | 2010-02-18 | 2014-05-21 | 栗田工業株式会社 | 水処理方法及び装置 |
WO2011149730A2 (en) * | 2010-05-24 | 2011-12-01 | Baxter International Inc. | Systems and methods for removing hydrogen peroxide from water purification systems |
US20140112999A1 (en) * | 2012-08-31 | 2014-04-24 | Water Star, Inc. | Method and apparatus for increasing the concentration of dissolved oxygen in water and aqueous solutions |
WO2015050125A1 (ja) * | 2013-10-04 | 2015-04-09 | 栗田工業株式会社 | 超純水製造装置 |
JP2015093226A (ja) * | 2013-11-11 | 2015-05-18 | 栗田工業株式会社 | 純水製造方法及び装置 |
TWI573765B (zh) * | 2014-09-17 | 2017-03-11 | Zetech Engineering And Services Ltd | Catalyst for removing hydrogen peroxide in water and its preparation method |
JP2016191619A (ja) * | 2015-03-31 | 2016-11-10 | 株式会社荏原製作所 | 復水脱塩装置及び復水脱塩方法 |
JP6439777B2 (ja) * | 2016-12-05 | 2018-12-19 | 栗田工業株式会社 | 超純水製造装置及び超純水製造装置の運転方法 |
WO2021261144A1 (ja) * | 2020-06-23 | 2021-12-30 | オルガノ株式会社 | 水処理装置、超純水製造装置及び水処理方法 |
US11618702B1 (en) * | 2020-06-26 | 2023-04-04 | Kyosuke Kanno | Vital water |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57197032A (en) * | 1981-05-21 | 1982-12-03 | Bayer Ag | Method for carring out catalytic reaction in aqueous medium |
JPS6071085A (ja) * | 1983-09-28 | 1985-04-22 | Kurita Water Ind Ltd | 過酸化水素の除去方法 |
JPS60257840A (ja) * | 1984-06-04 | 1985-12-19 | Kurita Water Ind Ltd | イオン交換装置 |
JPS61101292A (ja) * | 1984-10-24 | 1986-05-20 | Kurita Water Ind Ltd | 純水製造装置 |
JPH05300A (ja) * | 1991-11-20 | 1993-01-08 | Kurita Water Ind Ltd | 純水製造装置 |
JPH09192658A (ja) * | 1996-01-19 | 1997-07-29 | Nomura Micro Sci Co Ltd | 超純水製造装置 |
JPH09304591A (ja) * | 1996-05-16 | 1997-11-28 | Kurita Water Ind Ltd | 復水処理法 |
JPH11277059A (ja) * | 1998-03-27 | 1999-10-12 | Japan Organo Co Ltd | 酸化性物質を低減した純水の製造方法及び超純水製造装置 |
JP2000308815A (ja) * | 1999-04-27 | 2000-11-07 | Kurita Water Ind Ltd | オゾン溶解水の製造装置 |
JP2001062454A (ja) * | 1999-08-27 | 2001-03-13 | Kurita Water Ind Ltd | 電解水の製造装置 |
JP2001179252A (ja) * | 1999-12-22 | 2001-07-03 | Japan Organo Co Ltd | 酸化性物質低減純水製造方法及び装置 |
JP2002210494A (ja) * | 2001-01-18 | 2002-07-30 | Kurita Water Ind Ltd | 超純水製造装置 |
WO2005095280A1 (ja) * | 2004-03-31 | 2005-10-13 | Kurita Water Industries Ltd. | 超純水製造装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0818040B2 (ja) * | 1991-05-17 | 1996-02-28 | 株式会社荏原総合研究所 | 純水又は超純水の精製方法及び装置 |
US5302356A (en) * | 1992-03-04 | 1994-04-12 | Arizona Board Of Reagents Acting On Behalf Of University Of Arizona | Ultrapure water treatment system |
TW446687B (en) * | 1996-02-20 | 2001-07-21 | Nomura Micro Science Kk | Method and apparatus for producing ultra pure water |
TW332783B (en) * | 1996-12-05 | 1998-06-01 | Organo Kk | The apparatus for manufacturing ultra-pure water |
EP1188473A4 (en) * | 1999-04-27 | 2005-10-12 | Kurita Water Ind Ltd | WATER PRODUCTION APPARATUS CONTAINING DISSOLVED OZONE |
JP3894788B2 (ja) * | 2001-12-21 | 2007-03-22 | オルガノ株式会社 | 過酸化水素含有排水処理装置 |
JP4109455B2 (ja) * | 2002-01-15 | 2008-07-02 | オルガノ株式会社 | 水素溶解水製造装置 |
JP4219664B2 (ja) * | 2002-12-03 | 2009-02-04 | 野村マイクロ・サイエンス株式会社 | 超純水製造装置 |
-
2005
- 2005-03-30 US US10/599,445 patent/US20070221581A1/en not_active Abandoned
- 2005-03-30 WO PCT/JP2005/006028 patent/WO2005095280A1/ja active Application Filing
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Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57197032A (en) * | 1981-05-21 | 1982-12-03 | Bayer Ag | Method for carring out catalytic reaction in aqueous medium |
JPS6071085A (ja) * | 1983-09-28 | 1985-04-22 | Kurita Water Ind Ltd | 過酸化水素の除去方法 |
JPS60257840A (ja) * | 1984-06-04 | 1985-12-19 | Kurita Water Ind Ltd | イオン交換装置 |
JPS61101292A (ja) * | 1984-10-24 | 1986-05-20 | Kurita Water Ind Ltd | 純水製造装置 |
JPH05300A (ja) * | 1991-11-20 | 1993-01-08 | Kurita Water Ind Ltd | 純水製造装置 |
JPH09192658A (ja) * | 1996-01-19 | 1997-07-29 | Nomura Micro Sci Co Ltd | 超純水製造装置 |
JPH09304591A (ja) * | 1996-05-16 | 1997-11-28 | Kurita Water Ind Ltd | 復水処理法 |
JPH11277059A (ja) * | 1998-03-27 | 1999-10-12 | Japan Organo Co Ltd | 酸化性物質を低減した純水の製造方法及び超純水製造装置 |
JP2000308815A (ja) * | 1999-04-27 | 2000-11-07 | Kurita Water Ind Ltd | オゾン溶解水の製造装置 |
JP2001062454A (ja) * | 1999-08-27 | 2001-03-13 | Kurita Water Ind Ltd | 電解水の製造装置 |
JP2001179252A (ja) * | 1999-12-22 | 2001-07-03 | Japan Organo Co Ltd | 酸化性物質低減純水製造方法及び装置 |
JP2002210494A (ja) * | 2001-01-18 | 2002-07-30 | Kurita Water Ind Ltd | 超純水製造装置 |
WO2005095280A1 (ja) * | 2004-03-31 | 2005-10-13 | Kurita Water Industries Ltd. | 超純水製造装置 |
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JP2016172206A (ja) * | 2015-03-16 | 2016-09-29 | オルガノ株式会社 | 被処理液の処理方法及び被処理液の処理装置 |
JP2018127383A (ja) * | 2017-02-09 | 2018-08-16 | 栗田工業株式会社 | アンモニア水溶液の製造装置及びアンモニア水溶液の製造方法 |
JP2018126700A (ja) * | 2017-02-09 | 2018-08-16 | 栗田工業株式会社 | 導電性水溶液の製造装置及び導電性水溶液の製造方法 |
WO2018146824A1 (ja) * | 2017-02-09 | 2018-08-16 | 栗田工業株式会社 | アンモニア水溶液の製造装置及びアンモニア水溶液の製造方法 |
WO2018146823A1 (ja) * | 2017-02-09 | 2018-08-16 | 栗田工業株式会社 | 導電性水溶液の製造装置及び導電性水溶液の製造方法 |
CN110234608A (zh) * | 2017-02-09 | 2019-09-13 | 栗田工业株式会社 | 导电性水溶液的制造装置和导电性水溶液的制造方法 |
US11104594B2 (en) | 2017-02-09 | 2021-08-31 | Kurita Water Industries Ltd. | Ammonia solution production device and ammonia solution production method |
JP7213006B2 (ja) | 2017-02-09 | 2023-01-26 | 栗田工業株式会社 | 導電性水溶液の製造装置及び導電性水溶液の製造方法 |
US11834638B2 (en) | 2017-02-09 | 2023-12-05 | Kurita Water Industries Ltd. | Conductive aqueous solution production device and conductive aqueous solution production method |
Also Published As
Publication number | Publication date |
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JPWO2005095280A1 (ja) | 2008-02-21 |
TW200538401A (en) | 2005-12-01 |
TWI408107B (zh) | 2013-09-11 |
US20070221581A1 (en) | 2007-09-27 |
JP5045099B2 (ja) | 2012-10-10 |
JP5649520B2 (ja) | 2015-01-07 |
WO2005095280A1 (ja) | 2005-10-13 |
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