TW446687B - Method and apparatus for producing ultra pure water - Google Patents

Method and apparatus for producing ultra pure water Download PDF

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Publication number
TW446687B
TW446687B TW86102030A TW86102030A TW446687B TW 446687 B TW446687 B TW 446687B TW 86102030 A TW86102030 A TW 86102030A TW 86102030 A TW86102030 A TW 86102030A TW 446687 B TW446687 B TW 446687B
Authority
TW
Taiwan
Prior art keywords
water
treated
pure water
ultra pure
producing ultra
Prior art date
Application number
TW86102030A
Other languages
Chinese (zh)
Inventor
Mitsugu Abe
Shuichi Chino
Yutaka Nakamura
Masahiko Kogure
Original Assignee
Nomura Micro Science Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nomura Micro Science Kk filed Critical Nomura Micro Science Kk
Application granted granted Critical
Publication of TW446687B publication Critical patent/TW446687B/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Water Treatments (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Degasification And Air Bubble Elimination (AREA)

Abstract

The present method and apparatus for producing ultra pure water comprises the steps of: irradiating ultraviolet rays to water to be treated to form the first treated water, performing ion-exchange treatment on the first treated water to form the second treated water, wherein the quantity of the ultraviolet rays to be irradiated is determined based on the result of measurement of a TOC concentration of the water to be treated.
TW86102030A 1996-02-20 1997-02-20 Method and apparatus for producing ultra pure water TW446687B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3190796 1996-02-20

Publications (1)

Publication Number Publication Date
TW446687B true TW446687B (en) 2001-07-21

Family

ID=12344075

Family Applications (1)

Application Number Title Priority Date Filing Date
TW86102030A TW446687B (en) 1996-02-20 1997-02-20 Method and apparatus for producing ultra pure water

Country Status (3)

Country Link
JP (2) JP4294731B2 (en)
TW (1) TW446687B (en)
WO (1) WO1997030939A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI408107B (en) * 2004-03-31 2013-09-11 Kurita Water Ind Ltd Extra-pure water production equipment and operating method thereof
TWI460134B (en) * 2005-10-06 2014-11-11 Pionetics Corp Electrochemical ion exchange treatment of fluids
CN109906206A (en) * 2016-11-18 2019-06-18 奥加诺株式会社 Method for treating water and device
CN114269696A (en) * 2019-10-07 2022-04-01 栗田工业株式会社 TOC processing device and processing method

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4264681B2 (en) * 1999-04-20 2009-05-20 栗田工業株式会社 Production equipment for ozone water for wet cleaning process of electronic materials
JP5211414B2 (en) * 2001-03-12 2013-06-12 栗田工業株式会社 Ultrapure water production equipment
JP2002282850A (en) 2001-03-26 2002-10-02 Mitsubishi Electric Corp Ultrapure water producing equipment
JP5280038B2 (en) * 2007-11-06 2013-09-04 野村マイクロ・サイエンス株式会社 Ultrapure water production equipment
JP5512357B2 (en) * 2010-04-05 2014-06-04 オルガノ株式会社 Pure water production method and apparatus
JP5512358B2 (en) * 2010-04-05 2014-06-04 オルガノ株式会社 Pure water production method and apparatus
JP5720122B2 (en) * 2010-06-10 2015-05-20 岩崎電気株式会社 Ultrapure water production system
JP6038597B2 (en) * 2012-11-05 2016-12-07 野村マイクロ・サイエンス株式会社 Pure water production system
JP6029948B2 (en) * 2012-11-21 2016-11-24 野村マイクロ・サイエンス株式会社 Pure water production method and pure water production system
JP6377528B2 (en) * 2013-06-25 2018-08-22 株式会社日本フォトサイエンス Liquid processing apparatus and method
JP2018183761A (en) * 2017-04-27 2018-11-22 野村マイクロ・サイエンス株式会社 Ultrapure water production system and method
WO2024014218A1 (en) * 2022-07-14 2024-01-18 栗田工業株式会社 Ultrapure water production apparatus and method for operating ultrapure water production apparatus
JP2024058285A (en) * 2022-10-14 2024-04-25 栗田工業株式会社 Pure water production equipment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794036B2 (en) * 1988-07-05 1995-10-11 東レ株式会社 Ultrapure water production method
JP3110034B2 (en) * 1990-06-06 2000-11-20 中野 浩二 Method to remove organic matter and dissolved oxygen simultaneously
JPH05293494A (en) * 1992-04-21 1993-11-09 Kurita Water Ind Ltd Apparatus for producing pure water
KR960016302B1 (en) * 1992-05-15 1996-12-09 마쯔시다덴기산교 가부시기가이샤 Apparatus and method for production of pure water
JPH0639366A (en) * 1992-07-22 1994-02-15 Japan Organo Co Ltd Method and equipment for producing ultrapure water
JPH06198279A (en) * 1993-01-05 1994-07-19 Japan Organo Co Ltd Ultraviolet ray decomposition device
JP3262949B2 (en) * 1993-09-13 2002-03-04 野村マイクロ・サイエンス株式会社 Low-concentration organic wastewater treatment equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI408107B (en) * 2004-03-31 2013-09-11 Kurita Water Ind Ltd Extra-pure water production equipment and operating method thereof
TWI460134B (en) * 2005-10-06 2014-11-11 Pionetics Corp Electrochemical ion exchange treatment of fluids
CN109906206A (en) * 2016-11-18 2019-06-18 奥加诺株式会社 Method for treating water and device
CN109906206B (en) * 2016-11-18 2022-03-04 奥加诺株式会社 Water treatment method and apparatus
CN114269696A (en) * 2019-10-07 2022-04-01 栗田工业株式会社 TOC processing device and processing method

Also Published As

Publication number Publication date
WO1997030939A1 (en) 1997-08-28
JP4932757B2 (en) 2012-05-16
JP4294731B2 (en) 2009-07-15
JP2008173637A (en) 2008-07-31

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