TWI644361B - 硫摻碳硬遮罩 - Google Patents
硫摻碳硬遮罩 Download PDFInfo
- Publication number
- TWI644361B TWI644361B TW103133764A TW103133764A TWI644361B TW I644361 B TWI644361 B TW I644361B TW 103133764 A TW103133764 A TW 103133764A TW 103133764 A TW103133764 A TW 103133764A TW I644361 B TWI644361 B TW I644361B
- Authority
- TW
- Taiwan
- Prior art keywords
- sulfur
- hard mask
- layer
- semiconductor substrate
- forming
- Prior art date
Links
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 title claims abstract description 54
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 50
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 50
- 229910052717 sulfur Inorganic materials 0.000 title claims abstract description 49
- 239000011593 sulfur Substances 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 105
- 239000000758 substrate Substances 0.000 claims abstract description 74
- 239000004065 semiconductor Substances 0.000 claims abstract description 33
- 238000005530 etching Methods 0.000 claims abstract description 32
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 20
- 229910003481 amorphous carbon Inorganic materials 0.000 claims abstract description 9
- 230000008569 process Effects 0.000 claims description 62
- 239000007789 gas Substances 0.000 claims description 43
- QGJOPFRUJISHPQ-UHFFFAOYSA-N Carbon disulfide Chemical compound S=C=S QGJOPFRUJISHPQ-UHFFFAOYSA-N 0.000 claims description 42
- 238000000151 deposition Methods 0.000 claims description 38
- 230000008021 deposition Effects 0.000 claims description 33
- 239000002243 precursor Substances 0.000 claims description 21
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 12
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 8
- 150000004767 nitrides Chemical class 0.000 claims description 7
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical group S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical group C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 6
- 229920005591 polysilicon Polymers 0.000 claims description 6
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 3
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims description 3
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 229910021398 atomic carbon Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 abstract description 13
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 238000012545 processing Methods 0.000 description 11
- 238000004380 ashing Methods 0.000 description 10
- 230000009977 dual effect Effects 0.000 description 8
- 239000001307 helium Substances 0.000 description 7
- 229910052734 helium Inorganic materials 0.000 description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229930195733 hydrocarbon Natural products 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- UAJUXJSXCLUTNU-UHFFFAOYSA-N pranlukast Chemical compound C=1C=C(OCCCCC=2C=CC=CC=2)C=CC=1C(=O)NC(C=1)=CC=C(C(C=2)=O)C=1OC=2C=1N=NNN=1 UAJUXJSXCLUTNU-UHFFFAOYSA-N 0.000 description 6
- 229960004583 pranlukast Drugs 0.000 description 6
- 239000004215 Carbon black (E152) Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- SKBLJQADGZYMKA-UHFFFAOYSA-N OPOP Chemical compound OPOP SKBLJQADGZYMKA-UHFFFAOYSA-N 0.000 description 4
- 229910002091 carbon monoxide Inorganic materials 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000010849 ion bombardment Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 2
- -1 SiN and TiN) Chemical class 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- DNJIEGIFACGWOD-UHFFFAOYSA-N ethanethiol Chemical compound CCS DNJIEGIFACGWOD-UHFFFAOYSA-N 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001868 water Inorganic materials 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- VYMPLPIFKRHAAC-UHFFFAOYSA-N 1,2-ethanedithiol Chemical compound SCCS VYMPLPIFKRHAAC-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000006664 bond formation reaction Methods 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 239000012707 chemical precursor Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J31/00—Apparatus for making beverages
- A47J31/44—Parts or details or accessories of beverage-making apparatus
- A47J31/60—Cleaning devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
- B65D65/38—Packaging materials of special type or form
- B65D65/46—Applications of disintegrable, dissolvable or edible materials
- B65D65/466—Bio- or photodegradable packaging materials
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
- C11D17/04—Detergent materials or soaps characterised by their shape or physical properties combined with or containing other objects
- C11D17/041—Compositions releasably affixed on a substrate or incorporated into a dispensing means
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
- C11D17/04—Detergent materials or soaps characterised by their shape or physical properties combined with or containing other objects
- C11D17/041—Compositions releasably affixed on a substrate or incorporated into a dispensing means
- C11D17/046—Insoluble free body dispenser
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/39—Organic or inorganic per-compounds
- C11D3/3942—Inorganic per-compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/10—Salts
- C11D7/12—Carbonates bicarbonates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J2203/00—Devices having filling level indicating means
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/20—Industrial or commercial equipment, e.g. reactors, tubes or engines
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Food Science & Technology (AREA)
- Biodiversity & Conservation Biology (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical Vapour Deposition (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Drying Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
- Apparatus For Making Beverages (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361884800P | 2013-09-30 | 2013-09-30 | |
| US61/884,800 | 2013-09-30 | ||
| US14/270,001 | 2014-05-05 | ||
| US14/270,001 US9320387B2 (en) | 2013-09-30 | 2014-05-05 | Sulfur doped carbon hard masks |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201528374A TW201528374A (zh) | 2015-07-16 |
| TWI644361B true TWI644361B (zh) | 2018-12-11 |
Family
ID=52738893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103133764A TWI644361B (zh) | 2013-09-30 | 2014-09-29 | 硫摻碳硬遮罩 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9320387B2 (enExample) |
| JP (1) | JP6689565B2 (enExample) |
| KR (2) | KR102375870B1 (enExample) |
| CN (1) | CN104517815B (enExample) |
| TW (1) | TWI644361B (enExample) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12396588B2 (en) | 2007-07-13 | 2025-08-26 | Adrian Rivera Maynez Enterprises, Inc. | Brewing material container for a beverage brewer |
| US10071851B2 (en) | 2010-07-12 | 2018-09-11 | Robert Bao Vu | Apparatus and products for producing beverages, and methods for making and using same |
| US8707855B2 (en) | 2011-05-09 | 2014-04-29 | Eko Brands, Llc | Beverage Brewing Device |
| US9304396B2 (en) | 2013-02-25 | 2016-04-05 | Lam Research Corporation | PECVD films for EUV lithography |
| US9589799B2 (en) | 2013-09-30 | 2017-03-07 | Lam Research Corporation | High selectivity and low stress carbon hardmask by pulsed low frequency RF power |
| US9307860B2 (en) | 2014-02-14 | 2016-04-12 | Remington Designs, Llc | Processor control of solute extraction system |
| US9948268B2 (en) | 2015-02-09 | 2018-04-17 | Samsung Electro-Mechanics Co., Ltd. | Multiband antenna having external conductor and electronic device including the same |
| US9385318B1 (en) | 2015-07-28 | 2016-07-05 | Lam Research Corporation | Method to integrate a halide-containing ALD film on sensitive materials |
| US11638499B2 (en) | 2020-05-27 | 2023-05-02 | Adrian Rivera | Beverage brewer spray apparatus having multiple dispersion members |
| US12185867B2 (en) | 2015-10-30 | 2025-01-07 | Adrian Rivera | Beverage brewer spray apparatus having accommodation for multiple dispersion members |
| US10702096B2 (en) * | 2015-10-30 | 2020-07-07 | Adrian Rivera | Brewing chamber cleaner |
| AU2016350142B2 (en) * | 2015-11-06 | 2022-06-02 | Cafetto Asia Pte. Ltd. | Cleaning arrangement for capsule based beverage dispensers |
| CN106706710A (zh) * | 2015-11-11 | 2017-05-24 | 中国科学院上海微系统与信息技术研究所 | 基于硫掺杂石墨烯的氮氧化物气体传感器及其制备方法 |
| DE102016100724A1 (de) * | 2016-01-18 | 2017-07-20 | Miele & Cie. Kg | Getränkeautomat mit automatischer Reinigungsvorrichtung |
| US10043672B2 (en) * | 2016-03-29 | 2018-08-07 | Lam Research Corporation | Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask |
| US9622616B1 (en) | 2016-03-30 | 2017-04-18 | Eco 2, Llc | Descaling pod for brewing machine |
| US20170280929A1 (en) * | 2016-03-30 | 2017-10-05 | Eco 2, Llc | Descaling device for a beverage machine and method of descaling a beverage machine |
| US20230180963A1 (en) * | 2016-06-23 | 2023-06-15 | Adrian Rivera | Brewing Machine Cleaner |
| US9947558B2 (en) * | 2016-08-12 | 2018-04-17 | Lam Research Corporation | Method for conditioning silicon part |
| JP7177049B2 (ja) | 2016-11-09 | 2022-11-22 | ペプシコ・インク | 炭酸飲料メーカ、方法、及びシステム |
| US10643858B2 (en) | 2017-10-11 | 2020-05-05 | Samsung Electronics Co., Ltd. | Method of etching substrate |
| WO2019175322A1 (en) * | 2018-03-15 | 2019-09-19 | Dsm Ip Assets B.V. | Bags-in-bag packaging system |
| JP7442459B2 (ja) * | 2018-04-24 | 2024-03-04 | アプライド マテリアルズ インコーポレイテッド | カーボンハードマスクのプラズマ強化化学気相堆積 |
| US10985009B2 (en) * | 2018-04-27 | 2021-04-20 | Applied Materials, Inc. | Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources |
| TWI804638B (zh) | 2018-06-22 | 2023-06-11 | 日商關東電化工業股份有限公司 | 使用含硫原子之氣體分子之電漿蝕刻方法 |
| US10692759B2 (en) * | 2018-07-17 | 2020-06-23 | Applied Materials, Inc. | Methods for manufacturing an interconnect structure for semiconductor devices |
| WO2020197866A1 (en) * | 2019-03-25 | 2020-10-01 | Lam Research Corporation | High etch selectivity, low stress ashable carbon hard mask |
| WO2020243342A1 (en) | 2019-05-29 | 2020-12-03 | Lam Research Corporation | High selectivity, low stress, and low hydrogen diamond-like carbon hardmasks by high power pulsed low frequency rf |
| KR102888630B1 (ko) | 2019-08-30 | 2025-11-19 | 램 리써치 코포레이션 | 저압에서의 고밀도, 고모듈러스, 및 고경도 비정질 탄소 막들 |
| WO2021138006A1 (en) * | 2019-12-31 | 2021-07-08 | Mattson Technology, Inc. | Systems and methods for removal of hardmask |
| WO2022005700A1 (en) * | 2020-06-29 | 2022-01-06 | Applied Materials, Inc. | Methods for producing high-density doped-carbon films for hardmask and other patterning applications |
| KR20230078588A (ko) * | 2020-09-25 | 2023-06-02 | 램 리써치 코포레이션 | 견고한 애싱 가능한 하드 마스크 (robust ashable hard mask) |
| WO2022072288A1 (en) * | 2020-09-29 | 2022-04-07 | Lam Research Corporation | Deposition rate enhancement of amorphous carbon hard mask film by purely chemical means |
| KR102890995B1 (ko) * | 2023-05-16 | 2025-11-24 | 나이스 스타 코퍼레이션 | 웨이퍼 식각방법 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5968379A (en) * | 1995-07-14 | 1999-10-19 | Applied Materials, Inc. | High temperature ceramic heater assembly with RF capability and related methods |
| TW200937517A (en) * | 2008-02-21 | 2009-09-01 | Applied Materials Inc | Plasma etching carbonaceous layers with sulfur-based etchants |
| US20100151691A1 (en) * | 2008-12-12 | 2010-06-17 | Novellus Systems Inc. | Method for improved thickness repeatability of pecvd deposited carbon films |
| US7981810B1 (en) * | 2006-06-08 | 2011-07-19 | Novellus Systems, Inc. | Methods of depositing highly selective transparent ashable hardmask films |
| US20120164836A1 (en) * | 2010-12-22 | 2012-06-28 | Globalfoundries Inc. | Integrated circuit fabrication methods utilizing embedded hardmask layers for high resolution patterning |
Family Cites Families (137)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU382671A1 (ru) | 1971-03-25 | 1973-05-25 | Ю. В. Далаго, В. П. Степанюк , В. А. Черненко Московский машиностроительный завод Знам труда | Способ наполнения газообразным ацетиленом емкостей с растворителями |
| US3816976A (en) | 1971-07-15 | 1974-06-18 | Lummus Co | Process for the purification of acetylene and ethylene |
| US4209357A (en) | 1979-05-18 | 1980-06-24 | Tegal Corporation | Plasma reactor apparatus |
| US4274841A (en) | 1980-03-28 | 1981-06-23 | Union Carbide Corporation | Acetylene recovery process and apparatus |
| JPS6018914U (ja) | 1983-07-15 | 1985-02-08 | 近畿印刷株式会社 | 折り込み紙箱 |
| DE3422417A1 (de) | 1984-06-16 | 1985-12-19 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren und vorrichtung zur abtrennung einer gaskomponente aus einem gasgemisch durch ausfrieren |
| US4673589A (en) | 1986-02-18 | 1987-06-16 | Amoco Corporation | Photoconducting amorphous carbon |
| JPS6446098A (en) | 1987-08-07 | 1989-02-20 | Nichigo Acetylen | Method for cleaning inside of container of dissolved acetylene |
| US4863760A (en) | 1987-12-04 | 1989-09-05 | Hewlett-Packard Company | High speed chemical vapor deposition process utilizing a reactor having a fiber coating liquid seal and a gas sea; |
| US4975144A (en) | 1988-03-22 | 1990-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Method of plasma etching amorphous carbon films |
| US5222549A (en) | 1988-07-04 | 1993-06-29 | Japan Oxygen Co., Ltd. | Condenser/evaporator |
| JP2687966B2 (ja) | 1990-08-20 | 1997-12-08 | 富士通株式会社 | 半導体装置の製造方法 |
| JPH05508266A (ja) | 1991-04-03 | 1993-11-18 | イーストマン・コダック・カンパニー | ＧａＡｓをドライエッチングするための高耐久性マスク |
| US5470661A (en) | 1993-01-07 | 1995-11-28 | International Business Machines Corporation | Diamond-like carbon films from a hydrocarbon helium plasma |
| US5261250A (en) | 1993-03-09 | 1993-11-16 | Polycold Systems International | Method and apparatus for recovering multicomponent vapor mixtures |
| DE69408405T2 (de) | 1993-11-11 | 1998-08-20 | Nissin Electric Co Ltd | Plasma-CVD-Verfahren und Vorrichtung |
| JPH07243064A (ja) | 1994-01-03 | 1995-09-19 | Xerox Corp | 基板清掃方法 |
| US6030591A (en) | 1994-04-06 | 2000-02-29 | Atmi Ecosys Corporation | Process for removing and recovering halocarbons from effluent process streams |
| EP0680072B1 (en) | 1994-04-28 | 2003-10-08 | Applied Materials, Inc. | A method of operating a high density plasma CVD reactor with combined inductive and capacitive coupling |
| JPH08152262A (ja) | 1994-11-29 | 1996-06-11 | Kawasaki Steel Corp | 希ガス分離プロセス用の循環吸着装置 |
| US5670066A (en) | 1995-03-17 | 1997-09-23 | Lam Research Corporation | Vacuum plasma processing wherein workpiece position is detected prior to chuck being activated |
| US5792269A (en) | 1995-10-31 | 1998-08-11 | Applied Materials, Inc. | Gas distribution for CVD systems |
| GB9522476D0 (en) | 1995-11-02 | 1996-01-03 | Boc Group Plc | Method and vessel for the storage of gas |
| US5985103A (en) | 1995-12-19 | 1999-11-16 | Micron Technology, Inc. | Method for improved bottom and side wall coverage of high aspect ratio features |
| ES2256948T3 (es) | 1997-06-16 | 2006-07-16 | Robert Bosch Gmbh | Procedimiento y dispositivo para el recubrimiento en fase de vacio de un sustrato. |
| US6150719A (en) | 1997-07-28 | 2000-11-21 | General Electric Company | Amorphous hydrogenated carbon hermetic structure and fabrication method |
| US6258170B1 (en) | 1997-09-11 | 2001-07-10 | Applied Materials, Inc. | Vaporization and deposition apparatus |
| US6035803A (en) | 1997-09-29 | 2000-03-14 | Applied Materials, Inc. | Method and apparatus for controlling the deposition of a fluorinated carbon film |
| US6041734A (en) | 1997-12-01 | 2000-03-28 | Applied Materials, Inc. | Use of an asymmetric waveform to control ion bombardment during substrate processing |
| TWI246633B (en) | 1997-12-12 | 2006-01-01 | Applied Materials Inc | Method of pattern etching a low k dielectric layen |
| US6635185B2 (en) | 1997-12-31 | 2003-10-21 | Alliedsignal Inc. | Method of etching and cleaning using fluorinated carbonyl compounds |
| US6387819B1 (en) | 1998-04-29 | 2002-05-14 | Applied Materials, Inc. | Method for etching low K dielectric layers |
| JP3568394B2 (ja) * | 1998-07-07 | 2004-09-22 | 独立行政法人 科学技術振興機構 | 低抵抗ｎ型ダイヤモンドの合成法 |
| US6331480B1 (en) | 1999-02-18 | 2001-12-18 | Taiwan Semiconductor Manufacturing Company | Method to improve adhesion between an overlying oxide hard mask and an underlying low dielectric constant material |
| FR2790762B1 (fr) | 1999-03-09 | 2001-06-01 | Centre Nat Rech Scient | Procede de traitement de surface pour protection et fonctionnalisation des polymeres et produit obtenu selon ce procede |
| JP4789035B2 (ja) * | 1999-03-26 | 2011-10-05 | 独立行政法人科学技術振興機構 | ｎ型ダイヤモンドを用いた半導体デバイス |
| US6617553B2 (en) | 1999-05-19 | 2003-09-09 | Applied Materials, Inc. | Multi-zone resistive heater |
| US6367413B1 (en) | 1999-06-15 | 2002-04-09 | Tokyo Electron Limited | Apparatus for monitoring substrate biasing during plasma processing of a substrate |
| US6310366B1 (en) | 1999-06-16 | 2001-10-30 | Micron Technology, Inc. | Retrograde well structure for a CMOS imager |
| US6241793B1 (en) | 1999-08-02 | 2001-06-05 | Taiwan Semiconductor Manufacturing Company, Ltd | Cold trap equipped with curvilinear cooling plate |
| US6537741B2 (en) | 1999-11-24 | 2003-03-25 | Nexpress Solutions Llc | Fusing belt for applying a protective overcoat to a photographic element |
| US6286321B1 (en) | 2000-01-03 | 2001-09-11 | Thermo Savant, Inc. | Condenser cold trap unit with separate fraction collection feature |
| US6422918B1 (en) | 2000-01-04 | 2002-07-23 | Advanced Micro Devices, Inc. | Chemical-mechanical polishing of photoresist layer |
| US6573030B1 (en) | 2000-02-17 | 2003-06-03 | Applied Materials, Inc. | Method for depositing an amorphous carbon layer |
| US6478924B1 (en) | 2000-03-07 | 2002-11-12 | Applied Materials, Inc. | Plasma chamber support having dual electrodes |
| US6319299B1 (en) | 2000-03-30 | 2001-11-20 | Vanguard International Semiconductor Corporation | Adjustable cold trap with different stages |
| JP2002194547A (ja) | 2000-06-08 | 2002-07-10 | Applied Materials Inc | アモルファスカーボン層の堆積方法 |
| US20040224504A1 (en) | 2000-06-23 | 2004-11-11 | Gadgil Prasad N. | Apparatus and method for plasma enhanced monolayer processing |
| JP4559595B2 (ja) | 2000-07-17 | 2010-10-06 | 東京エレクトロン株式会社 | 被処理体の載置装置及びプラズマ処理装置 |
| US6645848B2 (en) | 2001-06-01 | 2003-11-11 | Emcore Corporation | Method of improving the fabrication of etched semiconductor devices |
| US20030044532A1 (en) | 2001-08-29 | 2003-03-06 | Shyh-Dar Lee | Process for preparing porous low dielectric constant material |
| DE10153310A1 (de) | 2001-10-29 | 2003-05-22 | Infineon Technologies Ag | Photolithographisches Strukturierungsverfahren mit einer durch ein plasmaunterstützes Abscheideeverfahren hergestellten Kohlenstoff-Hartmaskenschicht diamantartiger Härte |
| US7091137B2 (en) | 2001-12-14 | 2006-08-15 | Applied Materials | Bi-layer approach for a hermetic low dielectric constant layer for barrier applications |
| US7226853B2 (en) * | 2001-12-26 | 2007-06-05 | Applied Materials, Inc. | Method of forming a dual damascene structure utilizing a three layer hard mask structure |
| US6777349B2 (en) | 2002-03-13 | 2004-08-17 | Novellus Systems, Inc. | Hermetic silicon carbide |
| US6541397B1 (en) | 2002-03-29 | 2003-04-01 | Applied Materials, Inc. | Removable amorphous carbon CMP stop |
| US6936551B2 (en) | 2002-05-08 | 2005-08-30 | Applied Materials Inc. | Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices |
| AU2003231423A1 (en) | 2002-05-09 | 2003-11-11 | Toyoki Kunitake | Thin film material and method for preparation thereof |
| US6835663B2 (en) | 2002-06-28 | 2004-12-28 | Infineon Technologies Ag | Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity |
| US20040018750A1 (en) | 2002-07-02 | 2004-01-29 | Sophie Auguste J.L. | Method for deposition of nitrogen doped silicon carbide films |
| US6740535B2 (en) | 2002-07-29 | 2004-05-25 | International Business Machines Corporation | Enhanced T-gate structure for modulation doped field effect transistors |
| US6939808B2 (en) | 2002-08-02 | 2005-09-06 | Applied Materials, Inc. | Undoped and fluorinated amorphous carbon film as pattern mask for metal etch |
| US6787452B2 (en) | 2002-11-08 | 2004-09-07 | Chartered Semiconductor Manufacturing Ltd. | Use of amorphous carbon as a removable ARC material for dual damascene fabrication |
| US20040180551A1 (en) | 2003-03-13 | 2004-09-16 | Biles Peter John | Carbon hard mask for aluminum interconnect fabrication |
| FR2853313B1 (fr) | 2003-04-04 | 2005-05-06 | Air Liquide | Procede d'elimination d'un solvant contenu dans l'acetylene, installation pour la mise en oeuvre du procede |
| US7205228B2 (en) | 2003-06-03 | 2007-04-17 | Applied Materials, Inc. | Selective metal encapsulation schemes |
| US7041600B2 (en) | 2003-06-30 | 2006-05-09 | International Business Machines Corporation | Methods of planarization |
| US7030023B2 (en) | 2003-09-04 | 2006-04-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for simultaneous degas and baking in copper damascene process |
| US6967405B1 (en) | 2003-09-24 | 2005-11-22 | Yongsik Yu | Film for copper diffusion barrier |
| CN1879238B (zh) | 2003-11-13 | 2010-04-28 | 皇家飞利浦电子股份有限公司 | 包括保护性阻挡层叠层的电子器件 |
| KR100743745B1 (ko) | 2004-01-13 | 2007-07-27 | 동경 엘렉트론 주식회사 | 반도체장치의 제조방법 및 성막시스템 |
| US7064078B2 (en) | 2004-01-30 | 2006-06-20 | Applied Materials | Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme |
| US7638440B2 (en) | 2004-03-12 | 2009-12-29 | Applied Materials, Inc. | Method of depositing an amorphous carbon film for etch hardmask application |
| JP4879159B2 (ja) | 2004-03-05 | 2012-02-22 | アプライド マテリアルズ インコーポレイテッド | アモルファス炭素膜堆積のためのｃｖｄプロセス |
| JP5113982B2 (ja) | 2004-04-23 | 2013-01-09 | トヨタ自動車株式会社 | 金属炭化物粒子が分散した炭素複合材料の製造方法 |
| US7384693B2 (en) | 2004-04-28 | 2008-06-10 | Intel Corporation | Diamond-like carbon films with low dielectric constant and high mechanical strength |
| US7288484B1 (en) | 2004-07-13 | 2007-10-30 | Novellus Systems, Inc. | Photoresist strip method for low-k dielectrics |
| US7220982B2 (en) | 2004-07-27 | 2007-05-22 | Micron Technology, Inc. | Amorphous carbon-based non-volatile memory |
| US7202127B2 (en) | 2004-08-27 | 2007-04-10 | Micron Technology, Inc. | Methods of forming a plurality of capacitors |
| US7271106B2 (en) | 2004-08-31 | 2007-09-18 | Micron Technology, Inc. | Critical dimension control for integrated circuits |
| US7314506B2 (en) | 2004-10-25 | 2008-01-01 | Matheson Tri-Gas, Inc. | Fluid purification system with low temperature purifier |
| US7335980B2 (en) | 2004-11-04 | 2008-02-26 | International Business Machines Corporation | Hardmask for reliability of silicon based dielectrics |
| US7202176B1 (en) | 2004-12-13 | 2007-04-10 | Novellus Systems, Inc. | Enhanced stripping of low-k films using downstream gas mixing |
| US20060205223A1 (en) | 2004-12-30 | 2006-09-14 | Smayling Michael C | Line edge roughness reduction compatible with trimming |
| US7235478B2 (en) | 2005-01-12 | 2007-06-26 | Intel Corporation | Polymer spacer formation |
| US7371461B2 (en) | 2005-01-13 | 2008-05-13 | International Business Machines Corporation | Multilayer hardmask scheme for damage-free dual damascene processing of SiCOH dielectrics |
| KR20060098522A (ko) | 2005-03-03 | 2006-09-19 | 삼성전자주식회사 | 유기 박막 트랜지스터 표시판 및 그 제조 방법 |
| EP1720072B1 (en) | 2005-05-01 | 2019-06-05 | Rohm and Haas Electronic Materials, L.L.C. | Compositons and processes for immersion lithography |
| JP5203575B2 (ja) | 2005-05-04 | 2013-06-05 | ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． | コーティング組成物 |
| US8129281B1 (en) | 2005-05-12 | 2012-03-06 | Novellus Systems, Inc. | Plasma based photoresist removal system for cleaning post ash residue |
| KR100622268B1 (ko) | 2005-07-04 | 2006-09-11 | 한양대학교 산학협력단 | ＲｅＲＡＭ 소자용 다층 이원산화박막의 형성방법 |
| US7323401B2 (en) | 2005-08-08 | 2008-01-29 | Applied Materials, Inc. | Semiconductor substrate process using a low temperature deposited carbon-containing hard mask |
| US7572572B2 (en) | 2005-09-01 | 2009-08-11 | Micron Technology, Inc. | Methods for forming arrays of small, closely spaced features |
| US20070059913A1 (en) | 2005-09-15 | 2007-03-15 | King Sean W | Capping layer to reduce amine poisoning of photoresist layers |
| US7432210B2 (en) | 2005-10-05 | 2008-10-07 | Applied Materials, Inc. | Process to open carbon based hardmask |
| JP5319868B2 (ja) * | 2005-10-17 | 2013-10-16 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| US7399712B1 (en) | 2005-10-31 | 2008-07-15 | Novellus Systems, Inc. | Method for etching organic hardmasks |
| US8664124B2 (en) | 2005-10-31 | 2014-03-04 | Novellus Systems, Inc. | Method for etching organic hardmasks |
| US20070125762A1 (en) | 2005-12-01 | 2007-06-07 | Applied Materials, Inc. | Multi-zone resistive heater |
| KR100735750B1 (ko) | 2005-12-15 | 2007-07-06 | 삼성전자주식회사 | 복수개의 균일한 기준 데이터들을 생성하는 기준 셀 블록및 감지증폭 유니트들을 구비하는 반도체 소자들 및 이를채택하는 시스템들 |
| US7381644B1 (en) | 2005-12-23 | 2008-06-03 | Novellus Systems, Inc. | Pulsed PECVD method for modulating hydrogen content in hard mask |
| US8110493B1 (en) | 2005-12-23 | 2012-02-07 | Novellus Systems, Inc. | Pulsed PECVD method for modulating hydrogen content in hard mask |
| TWI302349B (en) | 2006-01-04 | 2008-10-21 | Promos Technologies Inc | Metal etching process and rework method thereof |
| US20070202640A1 (en) | 2006-02-28 | 2007-08-30 | Applied Materials, Inc. | Low-k spacer integration into CMOS transistors |
| US7645357B2 (en) | 2006-04-24 | 2010-01-12 | Applied Materials, Inc. | Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency |
| KR100764343B1 (ko) | 2006-09-22 | 2007-10-08 | 주식회사 하이닉스반도체 | 비휘발성 메모리 소자 및 그 제조방법 |
| KR100855855B1 (ko) | 2006-10-04 | 2008-09-01 | 주식회사 하이닉스반도체 | 비휘발성 메모리 소자 및 그 제조방법 |
| JP5200371B2 (ja) * | 2006-12-01 | 2013-06-05 | 東京エレクトロン株式会社 | 成膜方法、半導体装置及び記憶媒体 |
| US20080128907A1 (en) | 2006-12-01 | 2008-06-05 | International Business Machines Corporation | Semiconductor structure with liner |
| US7981777B1 (en) | 2007-02-22 | 2011-07-19 | Novellus Systems, Inc. | Methods of depositing stable and hermetic ashable hardmask films |
| US7915166B1 (en) | 2007-02-22 | 2011-03-29 | Novellus Systems, Inc. | Diffusion barrier and etch stop films |
| US20080242912A1 (en) | 2007-03-29 | 2008-10-02 | Olivier Letessier | Methods and Apparatus for Providing a High Purity Acetylene Product |
| US20080264803A1 (en) | 2007-04-20 | 2008-10-30 | Rajat Agrawal | Methods and Apparatus for the Storage of Acetylene in the Absence of Acetone or Dimethylformamide |
| KR100871967B1 (ko) | 2007-06-05 | 2008-12-08 | 주식회사 하이닉스반도체 | 반도체 소자의 미세 패턴 형성 방법 |
| US8962101B2 (en) | 2007-08-31 | 2015-02-24 | Novellus Systems, Inc. | Methods and apparatus for plasma-based deposition |
| US8236476B2 (en) | 2008-01-08 | 2012-08-07 | International Business Machines Corporation | Multiple exposure photolithography methods and photoresist compositions |
| US8119853B2 (en) | 2008-01-10 | 2012-02-21 | L'Air Liquide SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Low pressure acetylene storage |
| US7820556B2 (en) | 2008-06-04 | 2010-10-26 | Novellus Systems, Inc. | Method for purifying acetylene gas for use in semiconductor processes |
| US8435608B1 (en) | 2008-06-27 | 2013-05-07 | Novellus Systems, Inc. | Methods of depositing smooth and conformal ashable hard mask films |
| US7803715B1 (en) | 2008-12-29 | 2010-09-28 | Shai Haimson | Lithographic patterning for sub-90nm with a multi-layered carbon-based hardmask |
| JP5702307B2 (ja) * | 2009-01-30 | 2015-04-15 | エコラボ インコーポレイティド | アルミニウムヒドロキシカルボキシレートビルダーの開発 |
| CN102001616A (zh) * | 2009-08-31 | 2011-04-06 | 上海丽恒光微电子科技有限公司 | 装配和封装微型机电系统装置的方法 |
| US20110244142A1 (en) | 2010-03-30 | 2011-10-06 | Applied Materials, Inc. | Nitrogen doped amorphous carbon hardmask |
| US8563414B1 (en) | 2010-04-23 | 2013-10-22 | Novellus Systems, Inc. | Methods for forming conductive carbon films by PECVD |
| JP2013526061A (ja) | 2010-04-30 | 2013-06-20 | アプライド マテリアルズ インコーポレイテッド | スタック欠陥率を改善するアモルファスカーボン堆積法 |
| US8361906B2 (en) * | 2010-05-20 | 2013-01-29 | Applied Materials, Inc. | Ultra high selectivity ashable hard mask film |
| JP5835587B2 (ja) | 2010-10-14 | 2015-12-24 | 日産化学工業株式会社 | 単分子層又は多分子層形成用組成物 |
| US9155418B2 (en) * | 2010-11-15 | 2015-10-13 | Conair Corporation | Brewed beverage appliance and method |
| EP2525416A2 (en) * | 2011-05-17 | 2012-11-21 | Intevac, Inc. | Method for rear point contact fabrication for solar cells |
| EP2604547A1 (en) * | 2011-12-12 | 2013-06-19 | Nestec S.A. | A capsule for descaling a beverage preparation machine |
| DE102012011204A1 (de) * | 2012-06-06 | 2013-12-12 | Aquis Wasser-Luft-Systeme Gmbh, Lindau, Zweigniederlassung Rebstein | Reinigerkapsel |
| JP2012233259A (ja) * | 2012-06-25 | 2012-11-29 | Tokyo Electron Ltd | アモルファスカーボン膜の成膜方法、それを用いた半導体装置の製造方法、およびコンピュータ読取可能な記憶媒体 |
| US8986921B2 (en) | 2013-01-15 | 2015-03-24 | International Business Machines Corporation | Lithographic material stack including a metal-compound hard mask |
| US9304396B2 (en) | 2013-02-25 | 2016-04-05 | Lam Research Corporation | PECVD films for EUV lithography |
| US8969207B2 (en) | 2013-03-13 | 2015-03-03 | Globalfoundries Inc. | Methods of forming a masking layer for patterning underlying structures |
| US8906802B2 (en) | 2013-03-15 | 2014-12-09 | Globalfoundries Inc. | Methods of forming trench/via features in an underlying structure using a process that includes a masking layer formed by a directed self-assembly process |
| US9589799B2 (en) | 2013-09-30 | 2017-03-07 | Lam Research Corporation | High selectivity and low stress carbon hardmask by pulsed low frequency RF power |
-
2014
- 2014-05-05 US US14/270,001 patent/US9320387B2/en active Active
- 2014-07-08 US US14/326,344 patent/US20150090300A1/en not_active Abandoned
- 2014-09-24 JP JP2014193209A patent/JP6689565B2/ja active Active
- 2014-09-29 CN CN201410513389.XA patent/CN104517815B/zh active Active
- 2014-09-29 TW TW103133764A patent/TWI644361B/zh active
- 2014-09-29 KR KR1020140130456A patent/KR102375870B1/ko active Active
-
2022
- 2022-03-14 KR KR1020220031478A patent/KR102525779B1/ko active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5968379A (en) * | 1995-07-14 | 1999-10-19 | Applied Materials, Inc. | High temperature ceramic heater assembly with RF capability and related methods |
| US7981810B1 (en) * | 2006-06-08 | 2011-07-19 | Novellus Systems, Inc. | Methods of depositing highly selective transparent ashable hardmask films |
| TW200937517A (en) * | 2008-02-21 | 2009-09-01 | Applied Materials Inc | Plasma etching carbonaceous layers with sulfur-based etchants |
| US20100151691A1 (en) * | 2008-12-12 | 2010-06-17 | Novellus Systems Inc. | Method for improved thickness repeatability of pecvd deposited carbon films |
| US20120164836A1 (en) * | 2010-12-22 | 2012-06-28 | Globalfoundries Inc. | Integrated circuit fabrication methods utilizing embedded hardmask layers for high resolution patterning |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015070270A (ja) | 2015-04-13 |
| US20150093915A1 (en) | 2015-04-02 |
| JP6689565B2 (ja) | 2020-04-28 |
| US9320387B2 (en) | 2016-04-26 |
| KR20150037641A (ko) | 2015-04-08 |
| CN104517815A (zh) | 2015-04-15 |
| KR102525779B1 (ko) | 2023-04-25 |
| CN104517815B (zh) | 2017-08-22 |
| KR102375870B1 (ko) | 2022-03-16 |
| TW201528374A (zh) | 2015-07-16 |
| KR20220035900A (ko) | 2022-03-22 |
| US20150090300A1 (en) | 2015-04-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI644361B (zh) | 硫摻碳硬遮罩 | |
| JP2015070270A5 (enExample) | ||
| KR102564160B1 (ko) | 펄스된 저주파수 ｒｆ 전력에 의한 고 선택도 및 저 응력의 탄소 하드마스크 | |
| KR102430939B1 (ko) | 반도체 디바이스 제조시 고품질 실리콘 옥사이드 막들의 저온 형성 | |
| CN107799390B (zh) | 用于半导体图案化应用的高干法蚀刻速率材料 | |
| CN110892332B (zh) | 除去光致抗蚀剂图案化浮渣的原子层清洁 | |
| TWI640469B (zh) | 用於進階圖案化之軟著陸奈米層 | |
| KR102708853B1 (ko) | 실리콘 나이트라이드를 에칭하는 동안 초고선택도를 달성하기 위한 방법 | |
| TWI706049B (zh) | 藉由原子層沉積及原子層蝕刻的保形膜之沉積 | |
| JP2023012492A (ja) | パターニング用途のための原子層エッチング、反応性前駆体、及びエネルギ源 | |
| US20150247238A1 (en) | Rf cycle purging to reduce surface roughness in metal oxide and metal nitride films | |
| JP7668292B2 (ja) | ハードマスクの選択性改善のための不活性ガス注入 | |
| CN113891954A (zh) | 通过高功率脉冲低频率rf产生的高选择性、低应力、且低氢的类金刚石碳硬掩模 | |
| CN115917714A (zh) | 通过纯化学手段实现非晶碳硬掩模膜的沉积速率增强 | |
| WO2022132642A1 (en) | High selectivity, low stress, and low hydrogen carbon hardmasks in low-pressure conditions with wide gap electrode spacing | |
| KR20210076997A (ko) | 3d nand 집적에 대해 개선된 에칭 선택도를 가지는 나이트라이드 막들 |