TWI602763B - Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate - Google Patents

Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate Download PDF

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Publication number
TWI602763B
TWI602763B TW102134370A TW102134370A TWI602763B TW I602763 B TWI602763 B TW I602763B TW 102134370 A TW102134370 A TW 102134370A TW 102134370 A TW102134370 A TW 102134370A TW I602763 B TWI602763 B TW I602763B
Authority
TW
Taiwan
Prior art keywords
glass substrate
substrate
floating
unit
glass
Prior art date
Application number
TW102134370A
Other languages
English (en)
Chinese (zh)
Other versions
TW201412623A (zh
Inventor
Hironori Ise
Original Assignee
Avanstrate Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avanstrate Inc filed Critical Avanstrate Inc
Publication of TW201412623A publication Critical patent/TW201412623A/zh
Application granted granted Critical
Publication of TWI602763B publication Critical patent/TWI602763B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Electroluminescent Light Sources (AREA)
TW102134370A 2012-09-28 2013-09-24 Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate TWI602763B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012218267A JP5943799B2 (ja) 2012-09-28 2012-09-28 ガラス基板の搬送装置、および、ガラス基板の製造方法

Publications (2)

Publication Number Publication Date
TW201412623A TW201412623A (zh) 2014-04-01
TWI602763B true TWI602763B (zh) 2017-10-21

Family

ID=50536226

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102134370A TWI602763B (zh) 2012-09-28 2013-09-24 Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate

Country Status (4)

Country Link
JP (1) JP5943799B2 (ko)
KR (1) KR101929764B1 (ko)
CN (1) CN203568482U (ko)
TW (1) TWI602763B (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6457802B2 (ja) * 2014-12-05 2019-01-23 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス板の製造方法、および、ガラス板の製造装置
JP6741394B2 (ja) * 2014-12-29 2020-08-19 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス基板の製造方法
JP2016161007A (ja) * 2015-02-27 2016-09-05 株式会社日本製鋼所 ガス浮上ワーク支持装置および非接触ワーク支持方法
JP6595276B2 (ja) * 2015-09-18 2019-10-23 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
CN108106996B (zh) * 2017-12-25 2024-05-28 通彩智能科技集团有限公司 一种玻璃检测盛放平台
USD956790S1 (en) 2018-08-30 2022-07-05 Samsung Electronics Co., Ltd. Display screen or portion thereof with graphical user interface
JP6853520B2 (ja) * 2018-09-20 2021-03-31 株式会社Ｎｓｃ 浮上搬送装置
WO2024043280A1 (ja) * 2022-08-25 2024-02-29 株式会社ナノシステムソリューションズ ウェーハ検査装置及びウェーハ搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008192718A (ja) * 2007-02-02 2008-08-21 Dainippon Printing Co Ltd 基板支持装置、基板支持方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法、検査装置、検査方法
JP2009098052A (ja) * 2007-10-18 2009-05-07 Toppan Printing Co Ltd 基板搬送装置用基板把持機構
JP2011105497A (ja) * 2009-11-20 2011-06-02 Seiko Epson Corp ワーク搬送装置、液滴吐出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07137842A (ja) * 1993-11-17 1995-05-30 Ebara Corp 磁気浮上搬送装置
KR101068384B1 (ko) * 2004-06-28 2011-09-28 엘지디스플레이 주식회사 글라스 지지시스템 및 지지핀 구조
JP4529794B2 (ja) * 2005-05-19 2010-08-25 シンフォニアテクノロジー株式会社 気体浮上搬送装置
JP2008254858A (ja) * 2007-04-04 2008-10-23 Yokogawa Electric Corp 基板搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008192718A (ja) * 2007-02-02 2008-08-21 Dainippon Printing Co Ltd 基板支持装置、基板支持方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法、検査装置、検査方法
JP2009098052A (ja) * 2007-10-18 2009-05-07 Toppan Printing Co Ltd 基板搬送装置用基板把持機構
JP2011105497A (ja) * 2009-11-20 2011-06-02 Seiko Epson Corp ワーク搬送装置、液滴吐出装置

Also Published As

Publication number Publication date
TW201412623A (zh) 2014-04-01
JP2014069936A (ja) 2014-04-21
JP5943799B2 (ja) 2016-07-05
KR101929764B1 (ko) 2018-12-17
KR20140043025A (ko) 2014-04-08
CN203568482U (zh) 2014-04-30

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