TWI564633B - 偏光器、偏光器之製造方法、光配向裝置及偏光器之安裝方法 - Google Patents

偏光器、偏光器之製造方法、光配向裝置及偏光器之安裝方法 Download PDF

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Publication number
TWI564633B
TWI564633B TW104101299A TW104101299A TWI564633B TW I564633 B TWI564633 B TW I564633B TW 104101299 A TW104101299 A TW 104101299A TW 104101299 A TW104101299 A TW 104101299A TW I564633 B TWI564633 B TW I564633B
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TW
Taiwan
Prior art keywords
polarizer
light
shielding film
light shielding
thin
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TW104101299A
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English (en)
Chinese (zh)
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TW201531776A (zh
Inventor
稻月友一
登山伸人
大川泰央
柴田晶彥
笹本和雄
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大日本印刷股份有限公司
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=53542963&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI564633(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 大日本印刷股份有限公司 filed Critical 大日本印刷股份有限公司
Publication of TW201531776A publication Critical patent/TW201531776A/zh
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3025Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3058Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528Polarisers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528Polarisers
    • G02F1/133548Wire-grid polarisers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Polarising Elements (AREA)
TW104101299A 2014-01-15 2015-01-15 偏光器、偏光器之製造方法、光配向裝置及偏光器之安裝方法 TWI564633B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014005220 2014-01-15
JP2014122212 2014-06-13

Publications (2)

Publication Number Publication Date
TW201531776A TW201531776A (zh) 2015-08-16
TWI564633B true TWI564633B (zh) 2017-01-01

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ID=53542963

Family Applications (2)

Application Number Title Priority Date Filing Date
TW104101299A TWI564633B (zh) 2014-01-15 2015-01-15 偏光器、偏光器之製造方法、光配向裝置及偏光器之安裝方法
TW105127436A TWI612362B (zh) 2014-01-15 2015-01-15 偏光器及偏光器之製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW105127436A TWI612362B (zh) 2014-01-15 2015-01-15 偏光器及偏光器之製造方法

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JP (2) JP6455444B2 (enExample)
KR (2) KR101919210B1 (enExample)
CN (1) CN105874365B (enExample)
TW (2) TWI564633B (enExample)
WO (1) WO2015108075A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6312454B2 (ja) * 2014-02-07 2018-04-18 株式会社ブイ・テクノロジー 偏光光照射装置
JP6766370B2 (ja) * 2015-02-18 2020-10-14 大日本印刷株式会社 偏光子、偏光子ホルダー、及び光配向装置
JP6884501B2 (ja) * 2015-08-25 2021-06-09 大日本印刷株式会社 偏光子
JP6270927B2 (ja) * 2016-07-08 2018-01-31 日本エイアンドエル株式会社 めっき用樹脂組成物及びめっき成形品
JP2018017952A (ja) * 2016-07-29 2018-02-01 ウシオ電機株式会社 光照射装置および光照射方法
JP2019109375A (ja) * 2017-12-19 2019-07-04 セイコーエプソン株式会社 偏光素子、偏光素子の製造方法
CN117518621A (zh) * 2023-11-07 2024-02-06 成都瑞波科材料科技有限公司 光配向装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040174596A1 (en) * 2003-03-05 2004-09-09 Ricoh Optical Industries Co., Ltd. Polarization optical device and manufacturing method therefor
CN101634813A (zh) * 2004-10-11 2010-01-27 三星电子株式会社 改进照明系统、曝光装置和形成线/间隔电路图形的方法
JP2010078437A (ja) * 2008-09-25 2010-04-08 Toshiba Corp 偏光状態検査装置および偏光状態検査方法
CN102939551A (zh) * 2010-05-31 2013-02-20 迪睿合电子材料有限公司 偏振光板及偏振光板的制造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534574B2 (enExample) 1972-11-10 1980-09-08
JP2003131356A (ja) * 2001-10-25 2003-05-09 Hitachi Ltd ホトマスクの製造方法および描画装置
KR100732749B1 (ko) * 2001-12-28 2007-06-27 주식회사 하이닉스반도체 미세 패턴 형성용 마스크
JP4280518B2 (ja) * 2003-03-05 2009-06-17 リコー光学株式会社 偏光光学素子とその製造方法
JP4506412B2 (ja) * 2004-10-28 2010-07-21 ウシオ電機株式会社 偏光素子ユニット及び偏光光照射装置
JP4815995B2 (ja) * 2005-10-24 2011-11-16 ウシオ電機株式会社 光配向用偏光光照射装置
JP4951960B2 (ja) * 2005-12-22 2012-06-13 大日本印刷株式会社 メタルマスク、メタルマスク位置アラインメント方法及び装置
JP2007178763A (ja) 2005-12-28 2007-07-12 Seiko Epson Corp 光学素子の製造方法、液晶装置、及び投射型表示装置
JP2008083215A (ja) * 2006-09-26 2008-04-10 Seiko Epson Corp 配向膜製造用マスク及び液晶装置の製造方法
JP5109520B2 (ja) * 2007-07-27 2012-12-26 セイコーエプソン株式会社 光学素子、液晶装置、液晶装置用マザー基板、及び電子機器、並びにワイヤグリッド偏光素子
JP4968165B2 (ja) 2008-04-24 2012-07-04 ウシオ電機株式会社 光配向用偏光光照射装置
KR20110033025A (ko) * 2009-09-22 2011-03-30 주식회사 엘지화학 광배향막 제조용 자외선 고투과 이중 선 격자 편광판 및 이의 제조방법
JP2011186394A (ja) * 2010-03-11 2011-09-22 Toppan Printing Co Ltd マスクパターンの白欠陥修正方法およびマスクパターン
JP2011203669A (ja) * 2010-03-26 2011-10-13 Toppan Printing Co Ltd 偏光露光装置
JP5682437B2 (ja) * 2010-09-07 2015-03-11 ソニー株式会社 固体撮像素子、固体撮像装置、撮像機器、及び、偏光素子の製造方法
US8873144B2 (en) * 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
JP5077465B2 (ja) * 2011-07-14 2012-11-21 ウシオ電機株式会社 光配向用偏光光照射装置
JP4977794B2 (ja) * 2011-09-21 2012-07-18 信越化学工業株式会社 パターン転写方法およびフォトマスク
JP2013145863A (ja) 2011-11-29 2013-07-25 Gigaphoton Inc 2光束干渉装置および2光束干渉露光システム
US8922890B2 (en) * 2012-03-21 2014-12-30 Moxtek, Inc. Polarizer edge rib modification
CN104395785B (zh) * 2012-06-21 2017-04-12 日立麦克赛尔株式会社 光学元件、光学元件的制造方法和光学装置
JP6308816B2 (ja) * 2013-03-07 2018-04-11 株式会社ブイ・テクノロジー 光配向用偏光照射装置
JP5344105B1 (ja) * 2013-03-08 2013-11-20 ウシオ電機株式会社 光配向用偏光光照射装置及び光配向用偏光光照射方法
JP6428171B2 (ja) * 2013-11-13 2018-11-28 大日本印刷株式会社 偏光子、偏光子用基板および光配向装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040174596A1 (en) * 2003-03-05 2004-09-09 Ricoh Optical Industries Co., Ltd. Polarization optical device and manufacturing method therefor
CN101634813A (zh) * 2004-10-11 2010-01-27 三星电子株式会社 改进照明系统、曝光装置和形成线/间隔电路图形的方法
JP2010078437A (ja) * 2008-09-25 2010-04-08 Toshiba Corp 偏光状態検査装置および偏光状態検査方法
CN102939551A (zh) * 2010-05-31 2013-02-20 迪睿合电子材料有限公司 偏振光板及偏振光板的制造方法

Also Published As

Publication number Publication date
JP2019008318A (ja) 2019-01-17
CN105874365A (zh) 2016-08-17
JP6620854B2 (ja) 2019-12-18
TW201706688A (zh) 2017-02-16
TW201531776A (zh) 2015-08-16
WO2015108075A1 (ja) 2015-07-23
KR101919210B1 (ko) 2018-11-15
KR20160105786A (ko) 2016-09-07
TWI612362B (zh) 2018-01-21
CN105874365B (zh) 2019-08-09
JP6455444B2 (ja) 2019-01-23
KR20180098688A (ko) 2018-09-04
JPWO2015108075A1 (ja) 2017-03-23
KR101991216B1 (ko) 2019-06-19

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