TWI522746B - A negative photosensitive resin composition, a hardened film, a partition wall and a black matrix, a method of manufacturing the same, a color filter, and an organic EL element - Google Patents

A negative photosensitive resin composition, a hardened film, a partition wall and a black matrix, a method of manufacturing the same, a color filter, and an organic EL element Download PDF

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Publication number
TWI522746B
TWI522746B TW101114725A TW101114725A TWI522746B TW I522746 B TWI522746 B TW I522746B TW 101114725 A TW101114725 A TW 101114725A TW 101114725 A TW101114725 A TW 101114725A TW I522746 B TWI522746 B TW I522746B
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TW
Taiwan
Prior art keywords
group
resin composition
photosensitive resin
negative photosensitive
ink
Prior art date
Application number
TW101114725A
Other languages
English (en)
Chinese (zh)
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TW201248326A (en
Inventor
Hideyuki Takahashi
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of TW201248326A publication Critical patent/TW201248326A/zh
Application granted granted Critical
Publication of TWI522746B publication Critical patent/TWI522746B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031—Organic compounds not covered by group G03F7/029
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Polymerisation Methods In General (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Indole Compounds (AREA)
TW101114725A 2011-04-28 2012-04-25 A negative photosensitive resin composition, a hardened film, a partition wall and a black matrix, a method of manufacturing the same, a color filter, and an organic EL element TWI522746B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011102039 2011-04-28

Publications (2)

Publication Number Publication Date
TW201248326A TW201248326A (en) 2012-12-01
TWI522746B true TWI522746B (zh) 2016-02-21

Family

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Family Applications (1)

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TW101114725A TWI522746B (zh) 2011-04-28 2012-04-25 A negative photosensitive resin composition, a hardened film, a partition wall and a black matrix, a method of manufacturing the same, a color filter, and an organic EL element

Country Status (5)

Country Link
JP (1) JP5910629B2 (ko)
KR (1) KR101842317B1 (ko)
CN (1) CN103502888B (ko)
TW (1) TWI522746B (ko)
WO (1) WO2012147626A1 (ko)

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JP5890297B2 (ja) * 2011-12-22 2016-03-22 東京応化工業株式会社 感光性樹脂組成物、それを用いたカラーフィルタ及び表示装置、オキシムエステル化合物、並びに光重合開始剤
CN103838084B (zh) * 2012-11-26 2020-06-16 住友化学株式会社 感光性树脂组合物
TWI613221B (zh) * 2012-11-27 2018-02-01 富士軟片股份有限公司 光硬化性組成物、轉印材料、硬化物及其製造方法、樹脂圖案製造方法、硬化膜、液晶顯示裝置、有機ｅｌ顯示裝置及觸控面板顯示裝置
KR102107962B1 (ko) * 2012-11-28 2020-05-07 에이지씨 가부시키가이샤 네거티브형 감광성 수지 조성물, 수지 경화막, 격벽 및 광학 소자
JP5890355B2 (ja) * 2013-07-31 2016-03-22 東京応化工業株式会社 感光性樹脂組成物
JP2015041104A (ja) * 2013-08-22 2015-03-02 東友ファインケム株式会社 着色感光性樹脂組成物、これを含むカラーフィルタおよび表示装置
JP6269467B2 (ja) * 2013-12-27 2018-01-31 富士フイルム株式会社 カラーフィルターの製造方法および固体撮像素子の製造方法
JP6294689B2 (ja) * 2014-02-06 2018-03-14 株式会社Adeka 光硬化性組成物
JP2015172664A (ja) * 2014-03-12 2015-10-01 株式会社タムラ製作所 感光性樹脂組成物
JP6565904B2 (ja) * 2014-04-25 2019-08-28 Ａｇｃ株式会社 ネガ型感光性樹脂組成物、隔壁、光学素子および光学素子の製造方法
JPWO2015198603A1 (ja) * 2014-06-25 2017-04-20 株式会社Ｊｏｌｅｄ 有機ｅｌ表示パネルの製造方法
CN106444282A (zh) * 2015-08-13 2017-02-22 常州强力先端电子材料有限公司 一种含肟酯类光引发剂的感光性树脂组合物及其应用
JP6421161B2 (ja) * 2015-11-27 2018-11-07 株式会社タムラ製作所 感光性樹脂組成物
TWI761230B (zh) * 2015-12-08 2022-04-11 日商富士軟片股份有限公司 感放射線性樹脂組成物、硬化膜、圖案形成方法、固體攝影元件及影像顯示裝置
KR102025359B1 (ko) * 2016-03-08 2019-09-25 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 블랙 컬럼 스페이서 및 컬러필터
CN108475019B (zh) * 2016-03-29 2022-02-11 株式会社艾迪科 黑色感光性树脂组合物
CN107325206B (zh) * 2016-04-12 2018-12-18 常州强力先端电子材料有限公司 一种含硝基咔唑肟酯类光引发剂及其制备方法和应用
KR101976660B1 (ko) * 2016-07-13 2019-05-09 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 감광성 수지막 및 디스플레이 장치
JP7043142B2 (ja) * 2016-09-16 2022-03-29 株式会社Adeka 硬化性組成物、硬化物及び硬化物の製造方法
KR101991699B1 (ko) * 2016-09-26 2019-06-21 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 블랙 화소 격벽층 및 디스플레이 장치
KR102121424B1 (ko) * 2016-12-02 2020-06-10 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 블랙 화소 격벽층 및 디스플레이 장치
TWI677761B (zh) * 2016-12-23 2019-11-21 奇美實業股份有限公司 黑色矩陣用負型感光性樹脂組成物、黑色矩陣、彩色濾光片以及液晶顯示元件
JP6845469B2 (ja) * 2017-02-27 2021-03-17 三菱ケミカル株式会社 画像表示装置用着色硬化膜、画像表示装置用感光性着色組成物及び画像表示装置
JP2018180168A (ja) * 2017-04-07 2018-11-15 ホヤ レンズ タイランド リミテッドＨＯＹＡ Ｌｅｎｓ Ｔｈａｉｌａｎｄ Ｌｔｄ 処理パターンが形成された光学部材の製造方法
JP7047642B2 (ja) * 2017-09-05 2022-04-05 Jsr株式会社 隔壁形成用感光性組成物、隔壁および表示素子
KR20190094731A (ko) * 2018-02-05 2019-08-14 동우 화인켐 주식회사 착색 감광성 수지 조성물 및 이를 이용하여 제조된 컬러소자 및 표시장치
KR102617582B1 (ko) * 2018-03-14 2023-12-27 도레이 카부시키가이샤 네거티브형 감광성 착색 조성물, 경화막, 그것을 이용한 터치 패널
JP2019178191A (ja) * 2018-03-30 2019-10-17 東ソー株式会社 フッ素系樹脂
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Also Published As

Publication number Publication date
JPWO2012147626A1 (ja) 2014-07-28
KR20140018319A (ko) 2014-02-12
CN103502888A (zh) 2014-01-08
JP5910629B2 (ja) 2016-04-27
CN103502888B (zh) 2016-05-25
KR101842317B1 (ko) 2018-03-26
TW201248326A (en) 2012-12-01
WO2012147626A1 (ja) 2012-11-01

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