TWI447822B - 半導體裝置及使用具有上及下纖維體密封層的半導體裝置的商品追蹤系統以及其製造方法 - Google Patents

半導體裝置及使用具有上及下纖維體密封層的半導體裝置的商品追蹤系統以及其製造方法 Download PDF

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Publication number
TWI447822B
TWI447822B TW097110379A TW97110379A TWI447822B TW I447822 B TWI447822 B TW I447822B TW 097110379 A TW097110379 A TW 097110379A TW 97110379 A TW97110379 A TW 97110379A TW I447822 B TWI447822 B TW I447822B
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layer
organic resin
semiconductor device
resin
semiconductor
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TW097110379A
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Chinese (zh)
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TW200903665A (en
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Yoshitaka Dozen
Eiji Sugiyama
Hisashi Ohtani
Takuya Tsurume
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Semiconductor Energy Lab
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/021Manufacture or treatment of multiple TFTs
    • H10D86/0214Manufacture or treatment of multiple TFTs using temporary substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/451Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by the compositions or shapes of the interlayer dielectrics
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/481Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs integrated with passive devices, e.g. auxiliary capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

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  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
TW097110379A 2007-03-26 2008-03-24 半導體裝置及使用具有上及下纖維體密封層的半導體裝置的商品追蹤系統以及其製造方法 TWI447822B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007079120 2007-03-26

Publications (2)

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TW200903665A TW200903665A (en) 2009-01-16
TWI447822B true TWI447822B (zh) 2014-08-01

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US (2) US7736958B2 (enExample)
EP (1) EP1976001A3 (enExample)
JP (1) JP5268395B2 (enExample)
KR (1) KR101389758B1 (enExample)
CN (2) CN101276743B (enExample)
TW (1) TWI447822B (enExample)

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CN102496607A (zh) 2012-06-13
EP1976001A2 (en) 2008-10-01
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US7736958B2 (en) 2010-06-15
US8338931B2 (en) 2012-12-25
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TW200903665A (en) 2009-01-16
US20100200663A1 (en) 2010-08-12
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CN102496607B (zh) 2015-03-25

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