TWI383937B - Sheet material handling device - Google Patents

Sheet material handling device Download PDF

Info

Publication number
TWI383937B
TWI383937B TW96138008A TW96138008A TWI383937B TW I383937 B TWI383937 B TW I383937B TW 96138008 A TW96138008 A TW 96138008A TW 96138008 A TW96138008 A TW 96138008A TW I383937 B TWI383937 B TW I383937B
Authority
TW
Taiwan
Prior art keywords
thin plate
pneumatic table
shaped material
unit
pneumatic
Prior art date
Application number
TW96138008A
Other languages
English (en)
Chinese (zh)
Other versions
TW200902410A (en
Inventor
Noriyuki Nagura
Setsuji Yumiba
Tsutomu Oguri
Noriyuki Toriyama
Original Assignee
Nihon Sekkei Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Sekkei Kogyo Co Ltd filed Critical Nihon Sekkei Kogyo Co Ltd
Publication of TW200902410A publication Critical patent/TW200902410A/zh
Application granted granted Critical
Publication of TWI383937B publication Critical patent/TWI383937B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
TW96138008A 2006-10-10 2007-10-11 Sheet material handling device TWI383937B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006276392 2006-10-10

Publications (2)

Publication Number Publication Date
TW200902410A TW200902410A (en) 2009-01-16
TWI383937B true TWI383937B (zh) 2013-02-01

Family

ID=39282899

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96138008A TWI383937B (zh) 2006-10-10 2007-10-11 Sheet material handling device

Country Status (6)

Country Link
JP (1) JP4896148B2 (ja)
KR (1) KR101038844B1 (ja)
CN (1) CN101489893B (ja)
HK (1) HK1133238A1 (ja)
TW (1) TWI383937B (ja)
WO (1) WO2008044706A1 (ja)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5151795B2 (ja) * 2008-08-08 2013-02-27 株式会社Ｉｈｉ 浮上搬送装置
JP5262959B2 (ja) * 2009-04-27 2013-08-14 村田機械株式会社 物品保持装置
FI126760B (fi) * 2010-01-11 2017-05-15 Glaston Services Ltd Oy Menetelmä ja laite lasilevyjen kannattamiseksi ja kuumentamiseksi kuumalla kaasutyynyllä
TWI549889B (zh) * 2010-03-26 2016-09-21 太星技研股份有限公司 空氣供應裝置
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
JP5495065B2 (ja) * 2010-12-06 2014-05-21 株式会社ダイフク 板状体搬送装置
JP5485928B2 (ja) * 2011-03-09 2014-05-07 東京エレクトロン株式会社 基板浮上搬送装置及び基板処理装置
JP5745631B2 (ja) * 2011-08-12 2015-07-08 川崎重工業株式会社 板材の搬送装置及び板材の搬送方法
JP2013118307A (ja) * 2011-12-05 2013-06-13 Ihi Corp 搬送装置
JP6076606B2 (ja) * 2012-02-14 2017-02-08 オイレス工業株式会社 浮上搬送装置および浮上搬送方法
KR101610215B1 (ko) 2012-04-26 2016-04-07 가부시키가이샤 아이에이치아이 반송 장치
JP5915358B2 (ja) * 2012-04-26 2016-05-11 株式会社Ihi 搬送装置
CN103373577B (zh) * 2012-04-27 2016-03-09 珠海格力电器股份有限公司 柜式空调器后板加工用传送装置
KR101318212B1 (ko) * 2012-12-31 2013-10-15 한국기계연구원 글라스 이송 장치
KR101773494B1 (ko) * 2013-02-26 2017-08-31 가부시키가이샤 아이에이치아이 반송 장치
TWI491547B (zh) * 2013-02-27 2015-07-11 Ihi Corp Handling device
JP5929831B2 (ja) * 2013-05-23 2016-06-08 トヨタ自動車株式会社 搬送システム
US10807811B2 (en) 2016-03-07 2020-10-20 Purple Innovation, Llc Mattress toppers, air tables for making mattress toppers, and related methods
US10308461B2 (en) 2016-11-25 2019-06-04 Industrial Technology Research Institute Roller assembly and method for transporting a substrate using the same
US9902564B1 (en) 2016-12-26 2018-02-27 Industrial Technology Research Institute Roller assembly, step roller thereof, and method for transporting substrate using the same
CN108710227B (zh) * 2018-05-29 2020-05-05 武汉华星光电技术有限公司 液晶面板的制造装置及制造方法
US10906754B2 (en) 2018-05-29 2021-02-02 Wuhan China Star Optoelectronics Technology Co., Ltd. Apparatus and method for manufacturing liquid crystal panel
KR102301669B1 (ko) 2018-08-10 2021-09-14 주식회사 엘지에너지솔루션 전극기재의 타발시스템 및 타발방법
CN111977375B (zh) * 2019-05-21 2022-01-18 晶彩科技股份有限公司 薄板输送装置及其方法
CN111285107B (zh) * 2020-02-24 2020-09-15 江苏科技大学 无接触移动操作装置及控制方法
CN112830256B (zh) * 2020-12-31 2023-07-28 合肥工业大学 薄板气浮支承系统弹性稳压装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005075543A (ja) * 2003-08-29 2005-03-24 Daifuku Co Ltd 搬送装置
JP2005154040A (ja) * 2003-11-21 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005075543A (ja) * 2003-08-29 2005-03-24 Daifuku Co Ltd 搬送装置
JP2005154040A (ja) * 2003-11-21 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Also Published As

Publication number Publication date
HK1133238A1 (en) 2010-03-19
JPWO2008044706A1 (ja) 2010-02-12
KR20090018134A (ko) 2009-02-19
KR101038844B1 (ko) 2011-06-03
CN101489893A (zh) 2009-07-22
TW200902410A (en) 2009-01-16
CN101489893B (zh) 2012-05-23
JP4896148B2 (ja) 2012-03-14
WO2008044706A1 (fr) 2008-04-17

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