TWI362308B - - Google Patents

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Publication number
TWI362308B
TWI362308B TW095145708A TW95145708A TWI362308B TW I362308 B TWI362308 B TW I362308B TW 095145708 A TW095145708 A TW 095145708A TW 95145708 A TW95145708 A TW 95145708A TW I362308 B TWI362308 B TW I362308B
Authority
TW
Taiwan
Prior art keywords
adsorption
glass substrate
sheet
sized glass
peeling
Prior art date
Application number
TW095145708A
Other languages
English (en)
Chinese (zh)
Other versions
TW200738401A (en
Inventor
Yasunari Ikuta
Takeo Suzuki
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of TW200738401A publication Critical patent/TW200738401A/zh
Application granted granted Critical
Publication of TWI362308B publication Critical patent/TWI362308B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
TW095145708A 2006-01-11 2006-12-07 Method of detaching platelike substance and apparatus therefor TW200738401A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006004053A JP5307970B2 (ja) 2006-01-11 2006-01-11 大型ガラス基板の剥離方法及びその装置

Publications (2)

Publication Number Publication Date
TW200738401A TW200738401A (en) 2007-10-16
TWI362308B true TWI362308B (ko) 2012-04-21

Family

ID=38256127

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095145708A TW200738401A (en) 2006-01-11 2006-12-07 Method of detaching platelike substance and apparatus therefor

Country Status (4)

Country Link
JP (1) JP5307970B2 (ko)
KR (1) KR101213522B1 (ko)
TW (1) TW200738401A (ko)
WO (1) WO2007080714A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8858859B2 (en) 2010-04-30 2014-10-14 Lg Display Co., Ltd. Apparatus and method of fabricating flat panel display device

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010090147A1 (ja) * 2009-02-06 2010-08-12 旭硝子株式会社 電子デバイスの製造方法およびこれに用いる剥離装置
CN102202994B (zh) 2009-08-31 2014-03-12 旭硝子株式会社 剥离装置
JP2014179355A (ja) * 2011-07-04 2014-09-25 Asahi Glass Co Ltd ガラス基板の剥離方法及びその装置
JP2013052998A (ja) * 2011-09-06 2013-03-21 Asahi Glass Co Ltd 剥離装置、及び電子デバイスの製造方法
JP6003675B2 (ja) * 2013-01-25 2016-10-05 旭硝子株式会社 基板の剥離装置及び剥離方法並びに電子デバイスの製造方法
JP6083749B2 (ja) * 2013-07-08 2017-02-22 浜井産業株式会社 ワーク剥離装置および剥離方法
KR102165162B1 (ko) 2014-03-12 2020-10-14 삼성디스플레이 주식회사 기판 박리 장치 및 이를 이용한 소자 제조 방법
JP6548871B2 (ja) 2014-05-03 2019-07-24 株式会社半導体エネルギー研究所 積層体の基板剥離装置
KR102322479B1 (ko) 2015-02-25 2021-11-05 삼성디스플레이 주식회사 기판 분리장치
CN106710442B (zh) * 2015-10-21 2021-01-22 京东方科技集团股份有限公司 背光源分离设备
CN110461606B (zh) 2016-11-15 2021-11-05 康宁公司 用于处理基板的方法
US20200041828A1 (en) * 2018-08-01 2020-02-06 Sharp Kabushiki Kaisha Method of removing panel from suction surface, method of producing display panel, and panel catcher
KR102560167B1 (ko) * 2018-10-04 2023-07-25 코닝 인코포레이티드 디본딩 서포트 장치 및 이를 이용한 디본딩 방법
CN109926912A (zh) * 2019-04-24 2019-06-25 蚌埠中光电科技有限公司 一种浮法tft-lcd玻璃面研磨吸附垫滚筒贴片装置
CN109926913B (zh) * 2019-04-24 2024-04-16 蚌埠中光电科技有限公司 一种浮法tft-lcd玻璃面研磨取片装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2991110B2 (ja) * 1996-05-01 1999-12-20 日本電気株式会社 基板吸着保持装置
JP2000084844A (ja) * 1998-09-17 2000-03-28 Asahi Glass Co Ltd 板状体の剥離方法及びその装置
JP4103123B2 (ja) * 1998-09-18 2008-06-18 旭硝子株式会社 板状体の剥離方法及びその装置
JP2004195607A (ja) * 2002-12-19 2004-07-15 Mitsubishi Paper Mills Ltd 板状部材の研磨方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8858859B2 (en) 2010-04-30 2014-10-14 Lg Display Co., Ltd. Apparatus and method of fabricating flat panel display device

Also Published As

Publication number Publication date
KR20080079240A (ko) 2008-08-29
JP5307970B2 (ja) 2013-10-02
TW200738401A (en) 2007-10-16
WO2007080714A1 (ja) 2007-07-19
JP2007185725A (ja) 2007-07-26
KR101213522B1 (ko) 2012-12-18

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees