TW200738401A - Method of detaching platelike substance and apparatus therefor - Google Patents

Method of detaching platelike substance and apparatus therefor

Info

Publication number
TW200738401A
TW200738401A TW095145708A TW95145708A TW200738401A TW 200738401 A TW200738401 A TW 200738401A TW 095145708 A TW095145708 A TW 095145708A TW 95145708 A TW95145708 A TW 95145708A TW 200738401 A TW200738401 A TW 200738401A
Authority
TW
Taiwan
Prior art keywords
platelike
absorption
substance
absorption sheet
detaching
Prior art date
Application number
TW095145708A
Other languages
Chinese (zh)
Other versions
TWI362308B (en
Inventor
Yasunari Ikuta
Takeo Suzuki
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of TW200738401A publication Critical patent/TW200738401A/en
Application granted granted Critical
Publication of TWI362308B publication Critical patent/TWI362308B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

A glass substrate detaching apparatus that is capable of efficiently, stably detaching a glass substrate from an absorption sheet. There is provided a method of detaching a platelike substance held by absorption on an absorption sheet from the absorption sheet, characterized in that detaching of the platelike substance from the absorption sheet is carried out by retaining the platelike substance held by absorption on an absorption sheet from the plane opposite to the absorption sheet by multiple absorption pads; emitting a jet of pressurized water through a pressurized water supply nozzle toward a boundary region between the platelike substance and the absorption sheet to thereby cause an edge of the platelike substance to depart from the absorption sheet; and while further feeding a pressurized water to the interstice between the departed edge of the platelike substance and the absorption sheet to thereby cancel the absorption of the platelike substance onto the absorption sheet, moving the absorption pads in the direction of detachment.
TW095145708A 2006-01-11 2006-12-07 Method of detaching platelike substance and apparatus therefor TW200738401A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006004053A JP5307970B2 (en) 2006-01-11 2006-01-11 Method and apparatus for peeling large glass substrate

Publications (2)

Publication Number Publication Date
TW200738401A true TW200738401A (en) 2007-10-16
TWI362308B TWI362308B (en) 2012-04-21

Family

ID=38256127

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095145708A TW200738401A (en) 2006-01-11 2006-12-07 Method of detaching platelike substance and apparatus therefor

Country Status (4)

Country Link
JP (1) JP5307970B2 (en)
KR (1) KR101213522B1 (en)
TW (1) TW200738401A (en)
WO (1) WO2007080714A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI400166B (en) * 2009-08-31 2013-07-01 Asahi Glass Co Ltd Stripping device
TWI417939B (en) * 2009-02-06 2013-12-01 Asahi Glass Co Ltd A manufacturing method of an electronic device, and a peeling device for the same
TWI452382B (en) * 2010-04-30 2014-09-11 Lg Display Co Ltd Apparatus and method of fabricating flat panel display device
TWI654654B (en) 2014-05-03 2019-03-21 日商半導體能源研究所股份有限公司 Substrate separation apparatus for stacked body
CN110794598A (en) * 2018-08-01 2020-02-14 夏普株式会社 Panel peeling method, display panel manufacturing method, and capture jig

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014179355A (en) * 2011-07-04 2014-09-25 Asahi Glass Co Ltd Glass substrate peeling method and peeling device of the same
JP2013052998A (en) * 2011-09-06 2013-03-21 Asahi Glass Co Ltd Peeling device, and method of manufacturing electronic device
JP6003675B2 (en) * 2013-01-25 2016-10-05 旭硝子株式会社 Substrate peeling device and peeling method and manufacturing method of electronic device
JP6083749B2 (en) * 2013-07-08 2017-02-22 浜井産業株式会社 Work stripping apparatus and stripping method
KR102165162B1 (en) 2014-03-12 2020-10-14 삼성디스플레이 주식회사 Substrate peeling apparatus and method of manufacturing device using the same
KR102322479B1 (en) 2015-02-25 2021-11-05 삼성디스플레이 주식회사 Substrate detaching apparatus
CN106710442B (en) * 2015-10-21 2021-01-22 京东方科技集团股份有限公司 Backlight source separation equipment
KR102437535B1 (en) 2016-11-15 2022-08-30 코닝 인코포레이티드 How to process the substrate
KR102560167B1 (en) * 2018-10-04 2023-07-25 코닝 인코포레이티드 Apparatus of supporting debonding and method for debonding using the same
CN109926912A (en) * 2019-04-24 2019-06-25 蚌埠中光电科技有限公司 A kind of float glass process TFT-LCD glass surface grinding absorption layer roller paster apparatus
CN109926913B (en) * 2019-04-24 2024-04-16 蚌埠中光电科技有限公司 Float TFT-LCD glass face grinds and gets piece device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2991110B2 (en) * 1996-05-01 1999-12-20 日本電気株式会社 Substrate suction holding device
JP2000084844A (en) * 1998-09-17 2000-03-28 Asahi Glass Co Ltd Plate body separating method and device therefor
JP4103123B2 (en) * 1998-09-18 2008-06-18 旭硝子株式会社 Plate-like body peeling method and apparatus
JP2004195607A (en) * 2002-12-19 2004-07-15 Mitsubishi Paper Mills Ltd Polishing method of plate-like member

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417939B (en) * 2009-02-06 2013-12-01 Asahi Glass Co Ltd A manufacturing method of an electronic device, and a peeling device for the same
TWI400166B (en) * 2009-08-31 2013-07-01 Asahi Glass Co Ltd Stripping device
TWI452382B (en) * 2010-04-30 2014-09-11 Lg Display Co Ltd Apparatus and method of fabricating flat panel display device
US8858859B2 (en) 2010-04-30 2014-10-14 Lg Display Co., Ltd. Apparatus and method of fabricating flat panel display device
TWI654654B (en) 2014-05-03 2019-03-21 日商半導體能源研究所股份有限公司 Substrate separation apparatus for stacked body
CN110794598A (en) * 2018-08-01 2020-02-14 夏普株式会社 Panel peeling method, display panel manufacturing method, and capture jig
CN110794598B (en) * 2018-08-01 2022-07-05 夏普株式会社 Catching jig

Also Published As

Publication number Publication date
KR20080079240A (en) 2008-08-29
JP5307970B2 (en) 2013-10-02
WO2007080714A1 (en) 2007-07-19
KR101213522B1 (en) 2012-12-18
JP2007185725A (en) 2007-07-26
TWI362308B (en) 2012-04-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees