TWI362308B - - Google Patents

Description

1362308 (1) IX. INSTRUCTIONS OF THE INVENTION [Technical Field] The present invention relates to a method and apparatus for peeling a plate-shaped body, and more particularly to a method of finishing honing in a honing step of a continuous honing line A plate-shaped body such as a glass substrate, in particular, a method and apparatus for peeling a plate-shaped body which is peeled off from an adsorption sheet by using a glass substrate for FPD (Flat Panel Display) for liquid crystal display or the like

[Prior Art] A glass substrate for FPD used for a liquid crystal display or the like is formed by a plate glass method using a so-called floating method, and the molten glass is formed into a plate shape, and the honing step of the continuous honing line is performed thereon. In the middle, the fine irregularities or the curvature of the surface are honed and removed, and a thin plate shape having a thickness of 0.5 to 1.1 mm is produced. Further, since the glass substrate is adsorbed and held by the adsorption sheet fixed to the workpiece holding table and transported on the honing line, it is necessary to finish the honing processing of the glass substrate from the adsorption sheet in the substrate peeling region of the honing line. Take the plate (peel). However, if it is intended to be peeled off by the force in the peeling direction of the conveying device called the upper transfer machine, if the force in the peeling direction is strong with respect to the adsorption holding force of the adsorption sheet, When the force is applied once, the glass substrate may not be damaged by the adsorption holding force of the adsorption sheet, so it is necessary to apply force slowly, and if the force is too small, it is necessary to peel it off for a long time. Therefore, it is difficult from the viewpoint of improving the yield only by the peeling of the above transfer machine. -4- (2) 1362308 Therefore, as in Patent Document 1, water is supplied from the compressed air supply nozzle to the boundary portion between the end portion of the glass substrate and the adsorption sheet, and the water is usually sprayed and mixed with water at a pressure of 0.3 to 0.5 MPa. Compressed air, the end of the glass substrate is separated from the adsorption sheet by the pressure of the compressed air, and then the compressed air is supplied to the gap between the separated end and the adsorption sheet, and is mixed by the compressed air. The water removes the adsorption force of the adsorption sheet, and the glass substrate is efficiently peeled off from the adsorption sheet.

[Problem to be Solved by the Invention] However, the peeling device of Patent Document 1 has a problem that compressed air exhibits high peeling ability around the nozzle, but For example, once it leaves the nozzle for more than 500 mm, the compressed air is dispersed, so the peeling ability is lowered. Therefore, even if the nozzles are arranged to face each other along the opposite side portions of the glass substrate, if the sheet is a large glass substrate having a width of more than 1 mm, there is a disadvantage that a sufficient peeling effect cannot be obtained. On the other hand, in recent years, with the large screen of the display, it is required to manufacture a large substrate having a side of more than 1 500 mm. In addition, compressed air has a problem of noise accompanying the opening of the atmosphere, and it is also desired to reduce noise from the viewpoint of improvement of the working environment. The present invention has been made in view of the above circumstances, and an object thereof is to provide a peeling method and a peeling apparatus for a glass substrate which can efficiently and stably peel a glass substrate which has been subjected to honing processing from an adsorption sheet. -5- (3) 1362308 - [Means for Solving the Problem] - In order to achieve the above object, the present invention provides a method for peeling a plate-shaped body (hereinafter referred to as a peeling method of the present invention), which is adsorbed and held in adsorption A method for peeling a sheet-like body from which a sheet-like body of a sheet is peeled off from the sheet, is characterized in that the sheet is adsorbed and held on the sheet by a plurality of adsorption pads from the opposite side of the sheet The body is held by the high-pressure water supply nozzle to discharge high-pressure water toward the boundary portion between the plate-shaped body and the adsorption sheet, so that the edge portion of the plate-like body is separated from the adsorption sheet, and the separated plate-like body edge is separated. The gap between the portion and the adsorption sheet is further supplied with the high-pressure water, and the adsorption of the plate-shaped body with respect to the adsorption sheet is released, and the adsorption pad is moved in the peeling direction, and the plate-shaped body is peeled off from the adsorption sheet. Moreover, in order to achieve the above object, the present invention provides a plate-shaped body peeling device (hereinafter referred to as a peeling device of the present invention) which is a plate-like body in which a plate-like body that adsorbs and holds Φ is peeled off from the adsorbed sheet. The peeling device is characterized in that: a plurality of adsorption pads are provided from the plate-like body that is adsorbed and held on the opposite surface of the adsorption sheet, and are held by the plate-like body; a high-pressure water is sprayed from the boundary portion of the adsorbing sheet to supply the high-pressure water separating the edge portion of the plate-like body from the adsorbing sheet; and the high pressure is further supplied to the gap between the separated edge portion of the plate-like body and the adsorbing sheet The adsorption pad moving means for releasing the adsorption of the plate-shaped body with respect to the adsorption sheet while moving the adsorption pad toward the peeling direction. -6- (4) 1362308 According to the present invention, since the sheet is peeled off by replacing the high-pressure water which is not easily dispersed even if it is compressed air which is dispersed away from the air nozzle, it is obtained even at a position away from the nozzle. Peeling effect. Thereby, even if it is a large glass substrate, the glass substrate can be peeled off efficiently and stably from the adsorption sheet. Moreover, the medium for peeling off the glass substrate

In other words, since it is changed from compressed air to high-pressure water, the noise generated by the opening of the atmosphere of the compressed air can be reduced, and the working environment can be improved. In addition, high pressure water preferably does not contain air other than unavoidable air. In order to achieve the above object, the peeling method of the present invention is preferably a method of peeling a plate-like body from which the sheet-like body adsorbed and held by the adsorbing sheet is peeled off from the adsorbing sheet, from the compressed air supply nozzle toward the plate shape. The compressed air is ejected from the boundary between the body and the adsorption sheet, so that at least a portion of the edge of the plate-like body is separated from the adsorption sheet, and the gap between the separated plate-shaped body and the adsorption sheet is supplied from the water supply nozzle. After the water is released to adsorb the plate-like body with respect to the adsorption sheet, the peeling method of the present invention is carried out. Further, in order to achieve the above object, the peeling device of the present invention is preferably provided in the front stage of the peeling device of the present invention, wherein the compressed air is discharged toward the boundary portion between the plate-shaped body and the adsorption sheet to form the plate-shaped body. a compressed air supply nozzle that separates at least a portion from the adsorption sheet; and a water supply nozzle that supplies water to the gap between the separated plate-shaped body and the adsorption sheet to release the adsorption of the plate-shaped body from the adsorption sheet . According to this embodiment of the present invention, compressed air can be sprayed (5) 1362308 from the compressed air supply nozzle toward the boundary portion between the plate-shaped body and the adsorption sheet before the peeling step, so that the edge of the plate-like body is at least partially Water is supplied from the adsorption sheet and water is supplied from the water supply nozzle to the gap between the separated plate-shaped body and the adsorption sheet, and a part of the adsorption of the plate-shaped body with respect to the adsorption sheet is released. Thereby, in the peeling step, the production tempo can be improved, and the glass substrate can be more stably peeled off from the adsorption sheet.

In the peeling method of the present invention, it is preferable that a plurality of the adsorption pads are disposed, and a force for moving the plurality of adsorption pads toward the peeling direction is controlled by the adsorption pad moving means for each of the adsorption pads. In the peeling device of the present invention, it is preferable that a plurality of the adsorption pads are disposed, and a suction pad moving means for controlling the force of moving the plurality of adsorption pads in the peeling direction for each of the adsorption pads is provided. According to the above-described adsorption pad moving means of the present invention, in the case where the glass substrate is adsorbed and held by a plurality of adsorption pads, the adsorption pads are not moved together toward the peeling direction, but each adsorption pad can be moved by the adsorption pad moving means. Time control for moving the plurality of adsorption pads in the peeling direction is performed, and the peeled portions are sequentially moved toward the peeling direction. Thereby, the glass substrate can be efficiently and stably peeled off from the adsorption sheet. In the peeling method of the present invention and the peeling device of the present invention, it is preferable that the adsorption pad that adsorbs and holds the corner portion of the plate-like body is moved toward the peeling direction by the adsorption pad moving means, and secondly, the adsorption holding plate-like body is moved. The adsorption pad of the edge portion is moved in the peeling direction, and then the suction pad of the center portion of the adsorption holding plate-like body is moved in the peeling direction, and the force of moving the plurality of adsorption pads toward the peeling direction is performed for each of the adsorption pads. Time control, and the plate-like body is sequentially from the end of the plate-like body toward the center portion from 1362308

The adsorption sheet is pulled apart. In the present invention, the adsorption pad moving means moves the adsorption pad of the corner portion of the adsorption holding plate-like body in the peeling direction, and then moves the adsorption pad of the edge portion of the adsorption holding plate-like body toward the peeling direction. Then, the adsorption pad of the central portion of the adsorption holding plate-like body is moved toward the peeling direction

In a moving manner, time control is performed for each of the adsorption pads to move a plurality of adsorption pads toward the peeling direction, and the plate-like body is sequentially pulled from the adsorption sheet by the end portion of the plate-shaped body toward the center portion. Therefore, the glass substrate can be peeled off more efficiently and stably with respect to the adsorption sheet. [Effect of the Invention] According to the peeling method and apparatus for a plate-shaped body of the present invention, the sheet is peeled off by high-pressure water having a small pressure loss in the air instead of the compressed air having a high pressure loss in the air. A peeling effect can also be obtained in a position away from the nozzle. Thereby, the φ glass substrate after the completion of the processing can be efficiently and stably peeled off from the adsorption sheet. Further, according to the present invention, since the compressed air is ejected from the compressed air supply nozzle toward the boundary portion between the plate-like body and the adsorption sheet before the peeling step, the edge portion of the plate-like body is separated from the adsorption sheet at least in part, and The compressed air mixed with water is sprayed on the gap between the separated plate-shaped body and the adsorption sheet, and a part of the adsorption of the plate-shaped body with respect to the adsorption sheet is released. Therefore, in the peeling step, the production tempo can be improved, and The glass substrate is more efficiently and stably peeled off from the adsorption sheet. Furthermore, according to the present invention, since a plurality of adsorption pads are disposed, and -9-(7) 1362308 is disposed with a plurality of high-pressure water supply-nozzles along the edges of the opposite sides of the plate-like body, and by the adsorption pad In the moving means, the adsorption pad of the corner portion is moved toward the peeling direction, and then the adsorption pad of the opposite edge portions of the adsorption holding plate-like body is moved toward the peeling direction, and the pick-up is performed. Time-controlling the force of moving the plurality of adsorption pads in the peeling direction for each of the adsorption pads so as to move the adsorption pads in the central portion of the adsorption-retaining plate-like body in the peeling direction, and the plate-like body is removed from the plate-like body Since the end portions of the opposite sides of the φ phase are sequentially pulled away from the adsorption sheet toward the center portion, the glass substrate can be more efficiently and stably peeled off from the adsorption sheet. [Embodiment] Hereinafter, according to the drawing A preferred embodiment (hereinafter referred to as the present example) of the method for peeling off the plate-shaped body of the present invention and the apparatus thereof will be described in detail. 9 is a perspective view showing the entire structure of the glass substrate peeling apparatus 10 of the present embodiment. The glass substrate peeling device 10 is a device for in-line arranging a continuous honing device (not shown) of a glass substrate G and a glass substrate cleaning device (not shown), and includes a plurality of adsorption pads 12, The glass substrate transfer device 14 of 12... and the high-pressure water supply devices 18 and 18 including a plurality of high-pressure water supply nozzles 16 and 16. The glass substrate peeling apparatus 1 is disposed at the exit of the continuous polishing apparatus, and the glass substrate transfer apparatus 14 can transport the peeled glass substrate G to the glass substrate cleaning apparatus. -10- (8) 1362308

In addition, the glass substrate peeling apparatus 10 of this example is a device which peels the glass substrate G used for the thickness of the liquid crystal display from 0.5 to 1.1 mm of the liquid crystal display from the adsorption sheet 22 of the workpiece holder 20, but it is not limited to this. It suffices as long as it is a device which peels the plate-shaped body adsorbed and held in the adsorption sheet from the adsorption sheet. Further, the glass substrate G of the embodiment is, for example, a large substrate of 1 500 x 1 800 mm, but the size is not limited thereto, and may be a size having a larger size or a width of 1 000 mm or less. However, the glass substrate peeling apparatus 10 of the embodiment in which the peeling action is caused by the high-pressure water described later is suitable for peeling off the glass substrate having a width of 100 mm or more which is difficult to achieve stable peeling under compressed air. First, the flow of the glass substrate G in the continuous honing line will be described. The glass substrate G honed by the above-described continuous honing device is in a state of being vacuum-adsorbed and held by an adsorption sheet (for example, a porous urethane sheet) 22 fixed to the workpiece holding table 20, from the outlet of the honing device. Moved out one by one or every time. Then, the glass substrate G is transported to the peeling region 28 of the glass substrate peeling device 10 by the peeling region 26 of the pre-separation devices 24 and 24 disposed on the upstream side of the glass substrate peeling device 10. The glass substrate G conveyed to the peeling region 28 is adsorbed and held by the adsorption pads 1 2 , 12... after being adsorbed from the adsorption pad 12 2 , 1 2 ... of the glass substrate transfer device 14 and peeled off from the adsorption sheet 22 The state is supplied to the mounting table of the substrate cleaning device by the glass substrate transfer device 14. Next, after the glass substrate G is washed by the cleaning device, it is transported to the next step -11 - 1362308 which is not shown. ^ ^ ^ * • Patent Application No. 95145708 * Chinese Manual Revision Page Corrected on March 4th; (9) The high-pressure water supply devices 18, 18 are disposed on opposite sides of the glass substrate G conveyed to the peeling region 28, and the high-pressure water supply nozzles 16, 16 of the respective devices 18, 18... It is disposed at a predetermined interval along the boundary portion between the side portion and the adsorption pad.

As shown in Fig. 2(A), the high-pressure water 30 sprayed from the high-pressure water supply nozzles 16, 16 ... toward the side of the glass substrate G is sucked and pressed by the water 34 stored in the temporary storage tank 32 by the high-pressure water pump 36. Delivered. The high-pressure water 30 is sprayed from the respective high-pressure water supply nozzles 16, 16 ... toward the side of the glass substrate G via the header 38 at a pressure of usually 0.1 to 0.3 MPa, at a pressure of usually 0.1 to 0.3 MPa, for example, at a pressure of 1,500 mm x 800 mm. In the case of the rectangular glass substrate G of a size, a plurality of the rectangular glass substrates G are arranged along the opposite sides thereof at a pitch of 100 to 150 mm. Further, the high-pressure water supply nozzles 16, 16 are oscillated in the horizontal direction along the side of the glass substrate G by a horizontal rocking mechanism (not shown). It is important that the injection angle or the injection position of the high-pressure water 30 of the high-pressure water supply nozzles 16, 6 ... is very important, and the injection angle at the start of peeling is preferably set in the range of 0 to 40 degrees with respect to the horizontal glass substrate G. Preferably, it is about 30 degrees, and the pressure of the high-pressure water 30 is effectively applied to the boundary portion 40 between the end of the glass substrate G and the adsorption sheet 22. Further, if the high-pressure water supply nozzles 16, 16 are provided with the vertical tilting mechanism, and the glass substrate G is gradually peeled off from the adsorption sheet 22 during the ejection of the high-pressure water 30, the high-pressure water 30 reaches the glass substrate G and the adsorption sheet. It is more desirable to adjust the inclination angle of the high-pressure water supply nozzle 16 (the injection angle of the high-pressure water -12-1362308 (ίο) angle). Further, the initial ejection position is not limited to the end portion of the glass substrate - the interface portion 40 with the adsorption sheet, and may be set to be aligned with the adsorption sheet 22 slightly forward. Further, by the horizontal rocking mechanism, the high-pressure water supply nozzle 16 is swung in the horizontal direction, and the high-pressure water 30 is ejected over the entire region of the boundary portion 40, so that the edge portion of the glass substrate G can be uniformly peeled off. Further, the plurality of high-pressure water supply nozzles 16 and 16 disposed along the opposite sides of the glass substrate G simultaneously eject high-pressure water 30, and are managed from the rise time of the adsorption pad 12 to be described later ( Control) is quite ideal. The adsorption pads 12, 12, ... are arranged in a plurality above the glass substrate G as shown in Fig. 1. These adsorption pads 12, 12, ... are arranged in a checkerboard shape on the frame 42 of the glass substrate transfer device 14, but the arrangement may not be equally spaced. When the glass substrate G is peeled off, the frame 42 is moved downward along the guides 44, 44, ..., and the adsorption pads 12, 12, ... are abutting on the surface of the glass-based φ plate G (opposite to the adsorption sheet 22). Previously, this descent movement was stopped by a lifting device not shown. Regarding the size of the adsorption pad 12, if the size is small, the holding power of the glass substrate G is insufficient. The number of the adsorption pads 12, 12, ... becomes large, which is uneconomical. Further, if the size of the adsorption pad 12 is too large, the deformation of the glass substrate G at the center of the adsorption is increased by vacuum suction, and the glass substrate G is damaged depending on the situation. Based on this, the appropriate size (e.g., Φ50 to 80 mm) and the number of the adsorption pads 12 are selected in accordance with the size and thickness of the glass substrate G. -13- 1362308. (11) The adsorption pads 12, 12, ... are connected to the pistons 48 of the independent cylinders 46. The adsorption pads 12 can be moved up and down by the expansion and contraction of the pistons 48. By the lowering operation of the adsorption pad 12, the adsorption pad 12 is pressed against the glass substrate G, the glass substrate G is adsorbed on the adsorption crucible 12, and the glass substrate G is moved from the ascending action of the adsorption pad 12 The adsorption sheet 22 is peeled off. Further, the upward movement of the adsorption pads 12, 12, ... does not cause the adsorption pads 12, 1 2, ... in the entire region of the glass substrate g φ to rise together, but sequentially performs the ascending operation from the corner portion of the glass substrate G toward the center. The way is controlled. Fig. 2(A) to Fig. 2(C) are enlarged views of a main part showing a rising operation of the adsorption pads 12, 12, . . . , and FIGS. 3(A) to (D) are oblique lines showing the adsorption pad. 1 2, 1 2... an illustration of a portion where the lift is moved and peeled off, and FIG. 4 is a block diagram of a control system of the adsorption pad 12. For the sake of convenience, the four adsorption pads '12, 12, ... which are the four corners of the glass substrate G φ are called the adsorption pad A group 50 '. The adsorption of the first column and the first column of the upper column other than the middle adsorption pad a group _ 1 2, 1 2 ... is called the adsorption pad B group 5 2, the upper side; the adsorption column 12 of the second column and the penultimate column 12, referred to as adsorption pad group C-54, the adsorption pads 12, 12 of the third column and the third to last column are referred to as adsorption pad group D 56. / The adsorption pad A group 50 to the group 56 are operated independently of each other, and as shown in Fig. 4', each of the cylinders 46, 46, ... of the adsorption pad a group 50 to the group 56 is provided with solenoid valves 58, 6 , 62, 64, and make these solenoid valves -14-99 March 4 p repair (t) original ^ 1362308 * « (12) 58, 60, 62, 64 switching time by the control unit (adsorption pad moving means) 66 for time management. In other words, the adsorption pad group A 50 to the group 56 is sequentially moved up and down at a predetermined time interval by the portion where the high-pressure water 30 disappears from the adsorption force. Thereby, it is possible to prevent damage of the glass substrate G due to an increase in the portion where the adsorption force remains.

Further, the cylinders 46, 46 of the adsorption pad A group 50 to the group 56 are connected to the air pump 76 via the electromagnetic valves 58, 60, 62, 64 and the electropneumatic regulators 68, 70, 72, 74. The electropneumatic regulators 68, 70, 72, 74 are individually controlled by the control unit 66. That is, by individually controlling the electropneumatic regulators 68, 70, 72, 74 by the control unit 66, the amount of air supplied to the cylinders 46, 46, ... is gradually increased, and the rising force of the adsorption pad 12 can be slow. Slowly improve. By performing such force control, it is possible to avoid the problem of damage of the glass substrate G caused by the forced force increase at the beginning, and the necessary time required for peeling can be minimized. On the other hand, the adsorption pads 12, 12, ... are connected to the vacuum pump 82 via a valve 78 and an electropneumatic regulator 80 that can be controlled to open and close by the control unit 66. The control of the air pressure of the adsorption pad 12 is performed by the electropneumatic regulator 80. The rising time and the rising force of the suction pad 12 can be set to an arbitrary 値 by the operator by operating a switch (not shown) such as a touch panel provided on the operation panel of the control unit 66. Next, the action of the glass substrate peeling device 1 如前所述 configured as described above will be described. When the glass substrate G adsorbed on the adsorption sheet 22 is transported to the peeling region 28 and stopped, the frame 42 of the glass substrate transfer device 14 is gradually moved by -15-(13) 1362308, and the adsorption pads 12, 12, ... The descending movement is stopped immediately before abutting against the surface of the glass substrate G. Next, the piston 48' of the elongated cylinder 46 causes the suction pads 12, 12, ... to move downward and push against and abut against the glass substrate G. Next, the air pressure of the adsorption pads 12, 12, ... is controlled by the electropneumatic regulator 80, and the air pressure of the adsorption pads 12, 12, ... is raised to the aforementioned set pressure for a certain period of time. Thereby, all of the adsorption pads 12, 12... are adsorbed on the glass substrate G.

Then, all of the high-pressure water supply nozzles 16 and 16 are sprayed toward the opposite sides of the glass substrate G (see FIG. 2(A)), and the high-pressure water 30 is pressed by the pressure of the high-pressure water 30. The edge is open. Next, the control unit 66 controls the electromagnetic valve 58 of Fig. 4, and as shown in Fig. 2(B), the adsorption pad group A 50 of the corner portion 1 of the adsorption holding glass substrate G is moved upward in the peeling direction to form the corner of the glass substrate G. The portion 1 is separated from the adsorption sheet 22 (see Fig. 3(A)). Next, the control unit 66 controls the electromagnetic valve 60 of Fig. 4 to open, and as shown in Fig. 2(C), the adsorption pad B group 52 of the edge portion 2 of the adsorption holding glass substrate G is moved upward in the peeling direction to make the glass The edge portion 2 of the substrate G is separated from the adsorption sheet 22 (see Fig. 3(B)). Next, the control unit 66 controls the electromagnetic valve 62 of Fig. 4 to open, and moves the adsorption pad C group 54 upward in the peeling direction, so that the portion 3 located further inside than the edge portion 2 of the glass substrate G is sucked from the adsorption sheet. 22 peeling (refer to Fig. 3 (C)) ^ Next, the control unit 66 controls the solenoid valve 64 of Fig. 4 to open, and moves the suction pad group D 56 upward in the peeling direction, so that -16-99 years March 4 b repair (3⁄4) original: [ 1362308 * » (14) The central portion 4 of the glass substrate G is separated from the adsorption sheet 22 (Fig. 3 (D)). Thereby, the glass substrate G is completely peeled off from the adsorption sheet 22. As described above, the glass substrate peeling apparatus 10 of the present embodiment performs the sheet peeling by replacing the high-pressure water 30 which is hard to disperse even if it is separated from the compressed air which is dispersed away from the nozzle, so that even in a position away from the nozzle A sufficient peeling effect can be obtained.

Therefore, even in the case of the large-sized glass substrate G, the glass substrate G can be efficiently and stably peeled off from the adsorption sheet 22. Further, since the medium for peeling off the glass substrate G is changed from compressed air to high-pressure water, the noise generated by the opening of the atmosphere of the compressed air can be reduced, and the working environment can be improved. Specifically, in the case of plate peeling by compressed air, the noise decibel generated by the opening of the atmosphere is 90 dB or more, and the labor standard method is handled by the earplug workplace, but by changing to high-pressure water, the noise is greatly reduced. Therefore, it is no longer a specific job workplace. Moreover, according to the glass substrate peeling apparatus 10 of this example, the time which carried out the force which moves the adsorption pad group A 50-D group 56 toward the peeling direction is performed for each adsorption pad group A 50-D group 56, and glass is made. The substrate G is separated from the corner portion 1 of the glass substrate G toward the end portion 2, and secondly from the end portion 2 toward the central portion 4, sequentially from the adsorption sheet 22, so that the glass substrate G can be made more efficient and stable with respect to the adsorption sheet 22. In addition, the rising movement start time of the adsorption pad 12 is not limited to the control by time management, and may also be set in the upward movement of the previous group of adsorption pad groups to detect the glass adsorbed on the adsorption pad group. A sensor for whether the portion of the substrate G is completely peeled off, and when the sensor detects peeling, it is repaired (-17) 1362308*. (15) The next adsorption pad group is raised and controlled.

Further, in the glass substrate peeling apparatus 10 of the present example, the pre-separation regions 26 using the pre-separation devices 24 and 24 are provided on the upstream side of the peeling region 28. The pre-separation device 24 is composed of a plurality of compressed air supply nozzles 84, 84, ... that supply compressed air, and a water supply nozzle that supplies water to the front end of the compressed air supply nozzle 84 to mix water into the compressed air. Similarly to the high-pressure water supply nozzle 16, 84' 84 is a compressed air in which water is mixed and discharged toward the boundary portion 40 between the glass substrate G and the adsorption sheet 22. The water supply nozzles may be provided in a double tube configuration with the compressed air supply nozzles 84, 84, or independently at the front end portions of the compressed air supply nozzles 84, 84, .... Further, the compressed air supply nozzles 84, 84, ... in the upstream portion of the pre-separation device 24 may be configured to eject only compressed air. Therefore, the glass substrate G conveyed to the pre-separation region 26 is separated from the edges 2 and 2 of the glass substrate G by the compressed air from the compressed air supply nozzles 84, 84, ... The adsorption sheets 22 are separated, and the adsorption of the edge portions 2, 2 of the glass substrate G with respect to the adsorption sheet 22 is released by mixing the water of the compressed air. Then, the glass substrate G is transported to the peeling region 28, and the above-described sheet peeling is performed. By releasing the adsorption of the edge portions 2 and 2 of the glass substrate G with respect to the adsorption sheet 22 before the peeling step of the peeling region 28, it is possible to further improve the work efficiency in the peeling step of the peeling region 28. Further, the glass substrate G can be peeled off more efficiently and stably with respect to the adsorption sheet. -18- (16) 1362308 [Industrial Applicability] The present invention is particularly suitable for peeling off a large-sized plate-like body having a thin thickness of a glass substrate for FPD from an adsorption sheet. In addition, the contents of the specification, the scope of the patent, the drawings and the abstract of the patent application No. 2006-004053 filed on Jan. 11, 2006, the entire contents of .

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the entire structure of a glass substrate peeling apparatus according to a preferred embodiment of the present invention. Fig. 2 is an enlarged view of a main part showing a rising operation of the adsorption pad in the mode. Fig. 3 is an explanatory view showing a portion which is peeled off by the upward movement of the adsorption pad.

Figure 4 is a block diagram of the control system of the adsorption pad. [Description of main components] 1 : Corner 2 : Edge 3 : Part 4 on the inside : Center 1 〇 : Glass substrate peeling device 1 2 : Adsorption pad -19- (17) 1362308 14: Glass substrate transfer device 16: high-pressure water supply nozzle 18: high-pressure water supply device 20: workpiece holding table 22: adsorption sheet 24: pre-peeling device 26: pre-peeling area

2 8 : Stripping area 3 0 : High pressure water 32 : Temporary storage tank 34 : Water

3 6 : High pressure water pump 38 : header 40 : junction 42 : frame 44 : guide 46 : cylinder 48 : piston 5 0 : adsorption pad group A 52 : adsorption pad B group 5 4 : adsorption pad C group 5 6 : adsorption Pad group D 58, 60, 62, 64: Solenoid valve 6 6 : Control unit -20- (18) 1362308 68, 70, 72, 74: Regulator 76: Air pump 78: Valve 80: Electropneumatic regulator 82 : Vacuum pump 84 Compressed air supply nozzle #

Claims (1)

1362308 Patent Application No. 095145708 Patent Application Revised in the Chinese Patent Application No. November 24, 100, Application Patent Model 1. A method for stripping large glass substrates is to make a large glass that is attracted to the sheet of the adsorbing sheet by 1000 mm or more. a method for peeling a large-sized glass substrate from which a substrate is peeled off from a sheet, characterized in that the large-sized glass substrate adsorbed and held on the adsorption sheet by a plurality of adsorption φ from the opposite side of the adsorption sheet is added by a high pressure The water supply nozzle discharges high-pressure water of 0.1 to 0.3 MPa toward the boundary portion of the large-sized glass-based adsorption sheet, and the edge portion of the large-sized glass substrate is separated from the adsorption sheet, and the gap between the edge of the large-sized glass substrate and the adsorption is separated. Further, the high-pressure water is supplied, and the adsorption of the large substrate with respect to the adsorption sheet is released, and the force of the adsorption pad is gradually increased so that the adsorption pad is peeled off so as not to be damaged by the adsorption holding force of the glass substrate φ adsorption sheet. The direction is moved to peel the front glass substrate from the adsorption sheet. 2. A method for peeling off a large-sized glass substrate, which is a method for peeling off a large-sized glass substrate from which a large-sized glass substrate having a sheet width of 100 mm or more of suction sheet is peeled off from a sheet, is characterized in that it is supplied from compressed air. The nozzle discharges compressed air toward the boundary portion of the large-sized glass-based adsorption sheet, and separates the large-sized glass base from at least a part of the adsorption sheet, and fixes the suction pad from the water supply squirt, and holds the sheet with the holding plate and the front plate. After the large-sized glass substrate is not allowed to rise, the large-sized glass substrate is adsorbed by the gap between the large-sized glass substrate and the adsorption sheet which are separated from the edge plate of the front plate and the front plate, and the large glass substrate is released from the adsorption sheet. The peeling method described in the first item of the patent application scope is executed. 3. The method for peeling off a large-sized glass substrate according to the first or second aspect of the invention, wherein the adsorption pad is disposed in plural, and a force for moving the plurality of adsorption pads in a peeling direction is by means of an adsorption pad moving means Time control is performed for each adsorption pad. 4. The method for peeling a large-sized glass substrate according to the third aspect of the invention, wherein the adsorption pad that adsorbs and holds the corner portion of the large-sized glass substrate is moved in the peeling direction, and secondly, the adsorption is maintained in a large glass. The adsorption pad of the edge portion of the substrate moves in the peeling direction, and then the adsorption pad that is held in the central portion of the large glass substrate is moved in the peeling direction, and the force of moving the plurality of adsorption pads toward the peeling direction is performed for each of the adsorption pads. The time control is performed, and the large-sized glass substrate is sequentially pulled away from the adsorption pad from the end portion of the large-sized glass substrate toward the center portion. 5. A peeling device for a large-sized glass substrate, which is a peeling device for a large-sized glass substrate that is adsorbed and held on a large-sized glass substrate having a plate width of 1000 mm or more from the adsorption sheet, and is characterized in that: a plurality of adsorption pads that are held by the large-sized glass substrate to be adsorbed and held on the opposite side of the adsorption sheet; and are ejected toward the boundary portion between the edge portion of the large-sized glass substrate and the adsorption sheet. a high-pressure water of 3 MPa', a high-pressure water supply nozzle that separates the edge of the large-sized glass substrate from the adsorption sheet; and -2- 1362308 further supplies the aforementioned high-pressure water to the gap between the separated large-sized glass substrate and the adsorption sheet While the adsorption of the large-sized glass substrate with respect to the adsorption sheet is released, and the glass substrate is prevented from being damaged by the adsorption holding force of the adsorption sheet, the rising force of the adsorption pad is gradually increased to move the adsorption pad toward the peeling direction. Adsorption pad moving means 〇 6. Stripping of a large glass substrate A peeling device for a large-sized glass substrate in which a large-sized glass substrate having a plate width of 1 000 mm or more of the adsorbing sheet is peeled off from the adsorbing sheet is adsorbed and held, and is characterized in that: it is provided on the opposite side from the adsorbing sheet. a plurality of adsorption pads that are held by the large-sized glass substrate that is adsorbed and held by the adsorption sheet; and that discharges compressed air toward a boundary portion between the large-sized glass substrate and the adsorption sheet, thereby causing at least a portion of the edge of the large-sized glass substrate a compressed air supply nozzle in which the adsorption sheets are separated; a water supply nozzle that supplies water to the gap between the large-sized glass substrate and the adsorption sheet that has been separated to release the adsorption of the large glass substrate with respect to the adsorption sheet; and Further, the gap between the large-sized glass substrate and the adsorption sheet is further supplied from the water supply nozzle, and the adsorption of the large-sized glass substrate with respect to the adsorption sheet is released, and the glass substrate is prevented from being damaged by the adsorption holding force of the adsorption sheet. Way ·, will be the adsorption pad The absorbing force of the large-sized glass substrate according to the fifth or sixth aspect of the invention, wherein the absorbing pad is gradually increased in the absorbing force of the absorbing pad. A plurality of arranging means are provided, and the absorbing pad moving means is provided for controlling the time of moving the plurality of absorbing pads toward the peeling direction for each of the absorbing pads. 8. The peeling device for a large-sized glass substrate according to the seventh aspect of the invention, wherein the adsorption pad moving means moves the adsorption pad that adsorbs and holds the corner portion of the large-sized glass substrate toward the peeling direction, and then The adsorption pad which is held by the edge of the large-sized glass substrate is moved in the peeling direction, and then the adsorption pad which is held in the central portion of the large glass substrate is moved in the peeling direction, and a plurality of adsorption pads are applied to each of the adsorption pads. Time control of the force moving toward the peeling direction.