TW200420186A - Solution ejecting device and the method for the same - Google Patents
Solution ejecting device and the method for the sameInfo
- Publication number
- TW200420186A TW200420186A TW093101805A TW93101805A TW200420186A TW 200420186 A TW200420186 A TW 200420186A TW 093101805 A TW093101805 A TW 093101805A TW 93101805 A TW93101805 A TW 93101805A TW 200420186 A TW200420186 A TW 200420186A
- Authority
- TW
- Taiwan
- Prior art keywords
- solution
- ejecting device
- same
- substrate
- solution ejecting
- Prior art date
Links
- 239000000758 substrate Substances 0.000 abstract 3
- 238000001816 cooling Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
- A01K93/00—Floats for angling, with or without signalling devices
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
- A01K97/00—Accessories for angling
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
- H10K85/1135—Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Environmental Sciences (AREA)
- Animal Husbandry (AREA)
- Biodiversity & Conservation Biology (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
This invention can eject solutions efficiently and affix the solution onto the aimed position with high accuracy. The solution ejecting device in according with the present invention comprises: a jet nozzle for ejecting the solution onto a side of a substrate with dropping means; a substrate heater for heating the said substrate; and a cooling means for cooling the said solution within the said nozzle.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003018543A JP2004230209A (en) | 2003-01-28 | 2003-01-28 | Solution-jet device |
JP2003018578A JP2004230211A (en) | 2003-01-28 | 2003-01-28 | Solution jetting apparatus and method for jetting solution |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200420186A true TW200420186A (en) | 2004-10-01 |
TWI293258B TWI293258B (en) | 2008-02-11 |
Family
ID=32775201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093101805A TWI293258B (en) | 2003-01-28 | 2004-01-28 | Solution ejecting device and the method forthe same |
Country Status (4)
Country | Link |
---|---|
US (3) | US6908045B2 (en) |
KR (1) | KR100561009B1 (en) |
CN (1) | CN1568106B (en) |
TW (1) | TWI293258B (en) |
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US8334012B2 (en) * | 2004-12-20 | 2012-12-18 | Palo Alto Research Center Incorporated | Method for preprinting and/or reliquifying subpixels to achieve color uniformity in color filters |
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CN101989533B (en) * | 2009-08-06 | 2013-01-02 | 中芯国际集成电路制造(上海)有限公司 | Chip packaging block de-packaging method and device |
JP4975790B2 (en) * | 2009-08-20 | 2012-07-11 | 東京エレクトロン株式会社 | Resist solution supply apparatus, resist solution supply method, program, and computer storage medium |
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JP4877372B2 (en) * | 2009-08-28 | 2012-02-15 | カシオ計算機株式会社 | Coating apparatus and coating method |
JP5411765B2 (en) * | 2010-03-24 | 2014-02-12 | 富士フイルム株式会社 | Thin film fabrication method |
JP5679689B2 (en) * | 2010-04-08 | 2015-03-04 | 富士フイルム株式会社 | Thin film manufacturing method and manufacturing apparatus |
KR20120068072A (en) * | 2010-10-26 | 2012-06-27 | 삼성모바일디스플레이주식회사 | Apparatus for forming thin layer and method for manufacturing organic light emitting display device using the same and organic light emitting display device |
US20120107486A1 (en) * | 2010-11-01 | 2012-05-03 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Sealant coating device and dispensing method thereof |
FR2968598B1 (en) * | 2010-12-10 | 2013-01-04 | Commissariat Energie Atomique | DEPOSIT OF THERMOELECTRIC MATERIALS BY PRINTING |
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CN102207653A (en) * | 2011-06-02 | 2011-10-05 | 深圳市华星光电技术有限公司 | Liquid crystal dripping device with temperature control |
KR101881894B1 (en) * | 2012-04-06 | 2018-07-26 | 삼성디스플레이 주식회사 | Thin film depositing apparatus and the thin film depositing method using the same |
US8932962B2 (en) * | 2012-04-09 | 2015-01-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chemical dispensing system and method |
US9373551B2 (en) * | 2013-03-12 | 2016-06-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Moveable and adjustable gas injectors for an etching chamber |
US9278564B2 (en) * | 2014-07-18 | 2016-03-08 | Kateeva, Inc. | Gas enclosure systems and methods utilizing multi-zone circulation and filtration |
US10553421B2 (en) * | 2015-05-15 | 2020-02-04 | Tokyo Electron Limited | Substrate processing apparatus, substrate processing method and storage medium |
KR20180059606A (en) * | 2016-11-25 | 2018-06-05 | 삼성디스플레이 주식회사 | mask for deposition, manufacturing method thereof and manufacturing method of display apparatus |
US20190363302A1 (en) * | 2017-02-27 | 2019-11-28 | Sharp Kabushiki Kaisha | Substrate mounting stage, ink-jet applying device, leveling device, and method for manufacturing organic el display device |
CN107247369B (en) * | 2017-07-20 | 2019-12-31 | 深圳市华星光电半导体显示技术有限公司 | Liquid crystal dripping method |
US10281751B2 (en) * | 2017-09-06 | 2019-05-07 | HKC Corporation Limited | Liquid crystal dropping apparatus and heating thermos device |
US11448958B2 (en) * | 2017-09-21 | 2022-09-20 | Canon Kabushiki Kaisha | System and method for controlling the placement of fluid resist droplets |
JP7059086B2 (en) * | 2018-04-13 | 2022-04-25 | 東芝テック株式会社 | Liquid discharge head and liquid discharge device |
JP2019181856A (en) * | 2018-04-13 | 2019-10-24 | 東芝テック株式会社 | Liquid discharge head and liquid discharge device |
KR20200040537A (en) * | 2018-10-10 | 2020-04-20 | 엘지디스플레이 주식회사 | Source for vertical type vacuum deposition, source assembly and vertical type vacuum deposition apparatus using the same |
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CN110112326B (en) * | 2019-04-04 | 2021-07-06 | 深圳市华星光电半导体显示技术有限公司 | Ink-jet printing structure and method for preparing display panel by using ink-jet printing structure |
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-
2004
- 2004-01-22 US US10/763,613 patent/US6908045B2/en not_active Expired - Lifetime
- 2004-01-27 KR KR1020040004898A patent/KR100561009B1/en active IP Right Grant
- 2004-01-28 TW TW093101805A patent/TWI293258B/en not_active IP Right Cessation
- 2004-01-29 CN CN2004100035327A patent/CN1568106B/en not_active Expired - Lifetime
-
2005
- 2005-01-31 US US11/048,509 patent/US7395976B2/en active Active
-
2008
- 2008-01-14 US US12/013,946 patent/US7732019B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
TWI293258B (en) | 2008-02-11 |
US6908045B2 (en) | 2005-06-21 |
US20080118629A1 (en) | 2008-05-22 |
US7732019B2 (en) | 2010-06-08 |
KR100561009B1 (en) | 2006-03-16 |
US20040149834A1 (en) | 2004-08-05 |
US7395976B2 (en) | 2008-07-08 |
KR20040069273A (en) | 2004-08-05 |
CN1568106B (en) | 2010-08-04 |
CN1568106A (en) | 2005-01-19 |
US20050133616A1 (en) | 2005-06-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |