TWI313039B - Substrate holding appatatus and substrate examination apparatus - Google Patents

Substrate holding appatatus and substrate examination apparatus Download PDF

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Publication number
TWI313039B
TWI313039B TW092114436A TW92114436A TWI313039B TW I313039 B TWI313039 B TW I313039B TW 092114436 A TW092114436 A TW 092114436A TW 92114436 A TW92114436 A TW 92114436A TW I313039 B TWI313039 B TW I313039B
Authority
TW
Taiwan
Prior art keywords
substrate
substrate holder
base
rocking
holder
Prior art date
Application number
TW092114436A
Other languages
English (en)
Chinese (zh)
Other versions
TW200307339A (en
Inventor
Yasuda Mamoru
Fujisaki Nobuo
Original Assignee
Olympus Corporatio
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corporatio filed Critical Olympus Corporatio
Publication of TW200307339A publication Critical patent/TW200307339A/zh
Application granted granted Critical
Publication of TWI313039B publication Critical patent/TWI313039B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/021—Special mounting in general

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW092114436A 2002-05-30 2003-05-28 Substrate holding appatatus and substrate examination apparatus TWI313039B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002157941A JP3931111B2 (ja) 2002-05-30 2002-05-30 基板保持装置及び基板検査装置

Publications (2)

Publication Number Publication Date
TW200307339A TW200307339A (en) 2003-12-01
TWI313039B true TWI313039B (en) 2009-08-01

Family

ID=29706474

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092114436A TWI313039B (en) 2002-05-30 2003-05-28 Substrate holding appatatus and substrate examination apparatus

Country Status (5)

Country Link
JP (1) JP3931111B2 (enExample)
KR (1) KR20050005390A (enExample)
CN (1) CN100483115C (enExample)
TW (1) TWI313039B (enExample)
WO (1) WO2003102561A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4700365B2 (ja) * 2005-02-09 2011-06-15 オリンパス株式会社 基板検査装置
CN101261234B (zh) * 2008-03-26 2010-06-09 广州中国科学院工业技术研究院 表面缺陷检测装置
CN101256157B (zh) * 2008-03-26 2010-06-02 广州中国科学院工业技术研究院 表面缺陷检测方法和装置
CN101995674B (zh) * 2009-08-13 2013-07-03 爱德牌工程有限公司 用于lcd玻璃的宏观检查设备
US8432540B2 (en) * 2010-03-31 2013-04-30 Cooper S.K. Kuo Support mechanism for inspection systems
JP5722049B2 (ja) * 2011-01-06 2015-05-20 オリンパス株式会社 基板検査システム
CN102629029B (zh) * 2011-11-04 2015-05-13 京东方科技集团股份有限公司 取向膜摩擦方法和装置
KR101326655B1 (ko) * 2012-02-29 2013-11-08 한국표준과학연구원 전도 및 근접복사열 가열수단을 이용한 적외선 열화상 부품 결함 측정 장치
CN103594391B (zh) * 2012-08-14 2017-09-26 营口金辰机械股份有限公司 太阳能电池组件翻转检查机构
JP6053154B2 (ja) * 2013-03-28 2016-12-27 リンテック株式会社 光照射装置および光照射方法
KR101703904B1 (ko) * 2015-08-28 2017-02-22 (주)오로스 테크놀로지 웨이퍼 그립핑 장치 및 이를 포함하는 양면 웨이퍼 스트레스 검사장치
CN107768287B (zh) * 2017-11-03 2020-02-14 德淮半导体有限公司 一种用于测试晶圆的方法和装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2870990B2 (ja) * 1990-06-01 1999-03-17 株式会社日本マイクロニクス 液晶表示パネル用プローバ
JP2740580B2 (ja) * 1991-04-16 1998-04-15 シャープ株式会社 外観検査装置
JPH0559219U (ja) * 1992-01-21 1993-08-06 テクノエイト株式会社 基板検査装置
JPH06118112A (ja) * 1992-10-05 1994-04-28 Asia Electron Inc テストボード固定機構
JPH08189947A (ja) * 1995-01-09 1996-07-23 Fujitsu Ltd 印刷配線板検査装置
JP3590170B2 (ja) * 1995-12-04 2004-11-17 オリンパス株式会社 基板搬送装置及びこれを用いた基板外観検査装置
JPH09236755A (ja) * 1996-02-29 1997-09-09 Jeol Ltd 顕微鏡の試料ステージの位置補正方法および試料ステージ
JP3782525B2 (ja) * 1996-10-09 2006-06-07 オリンパス株式会社 基板検査装置
JP3958852B2 (ja) * 1997-12-22 2007-08-15 株式会社日本マイクロニクス 被測定基板の検査装置
JP2000162133A (ja) * 1998-09-21 2000-06-16 Olympus Optical Co Ltd 基板検査装置および該基板検査装置に用いられるパラレルリンク機構
JP2002090303A (ja) * 2000-09-20 2002-03-27 Olympus Optical Co Ltd ホルダ機構
JP2003014649A (ja) * 2001-06-27 2003-01-15 Hitachi Kokusai Electric Inc 板状物体検査装置

Also Published As

Publication number Publication date
CN1578907A (zh) 2005-02-09
JP3931111B2 (ja) 2007-06-13
TW200307339A (en) 2003-12-01
KR20050005390A (ko) 2005-01-13
JP2003344294A (ja) 2003-12-03
WO2003102561A1 (en) 2003-12-11
CN100483115C (zh) 2009-04-29

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MM4A Annulment or lapse of patent due to non-payment of fees