TWI290855B - Coating liquid supply device and slit coat type coating apparatus with the same - Google Patents

Coating liquid supply device and slit coat type coating apparatus with the same Download PDF

Info

Publication number
TWI290855B
TWI290855B TW092129273A TW92129273A TWI290855B TW I290855 B TWI290855 B TW I290855B TW 092129273 A TW092129273 A TW 092129273A TW 92129273 A TW92129273 A TW 92129273A TW I290855 B TWI290855 B TW I290855B
Authority
TW
Taiwan
Prior art keywords
coating liquid
coating
pump
pressure
liquid supply
Prior art date
Application number
TW092129273A
Other languages
English (en)
Chinese (zh)
Other versions
TW200408459A (en
Inventor
Hideo Tankawa
Toshiki Kurokawa
Hiroto Okada
Masanori Ikuma
Yasuhiro Mitsui
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Publication of TW200408459A publication Critical patent/TW200408459A/zh
Application granted granted Critical
Publication of TWI290855B publication Critical patent/TWI290855B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/1013—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work

Landscapes

  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW092129273A 2002-10-23 2003-10-22 Coating liquid supply device and slit coat type coating apparatus with the same TWI290855B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002308156A JP2004141744A (ja) 2002-10-23 2002-10-23 塗布液供給装置及び方法

Publications (2)

Publication Number Publication Date
TW200408459A TW200408459A (en) 2004-06-01
TWI290855B true TWI290855B (en) 2007-12-11

Family

ID=32454369

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092129273A TWI290855B (en) 2002-10-23 2003-10-22 Coating liquid supply device and slit coat type coating apparatus with the same

Country Status (4)

Country Link
JP (1) JP2004141744A (ko)
KR (1) KR101010253B1 (ko)
CN (1) CN100413600C (ko)
TW (1) TWI290855B (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4522187B2 (ja) * 2004-08-04 2010-08-11 東京応化工業株式会社 塗布装置および塗布方法
KR100756811B1 (ko) * 2005-11-24 2007-09-10 쥬가이로 고교 가부시키가이샤 토출 노즐의 세정장치
JP2007305697A (ja) * 2006-05-09 2007-11-22 Az Electronic Materials Kk フォトレジストの塗布方法
KR100823555B1 (ko) * 2006-12-29 2008-04-21 주식회사 나래나노텍 개선된 에어 가압형 도액 공급장치
KR100867429B1 (ko) * 2007-05-08 2008-11-06 주식회사 케이씨텍 슬릿코터의 고점도 도포액 코팅장치 및 코팅방법
CN101712022B (zh) * 2009-08-26 2013-02-13 深圳市腾盛流体控制设备有限公司 一种控制点胶机进行点胶的方法
CN102343320B (zh) * 2011-03-31 2016-05-11 龙梅 一种多介质表层涂层喷涂机
KR101458186B1 (ko) * 2013-06-28 2014-11-04 주식회사 나래나노텍 롤 코팅용 스프레이 장치 및 방법, 및 이를 구비한 스프레이 코팅 장치 및 방법
CN103934158B (zh) * 2014-03-28 2016-05-11 京东方科技集团股份有限公司 一种涂布装置及其预吐控制方法
KR20160077966A (ko) 2014-12-24 2016-07-04 (재)대구기계부품연구원 에어백의 사절판 도포 시스템 및 그 도포방법
CN110727176A (zh) * 2019-10-15 2020-01-24 合肥奕斯伟材料技术有限公司 COF Film光阻涂覆工序、COF Film生产方法及涂布结构

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6115763A (ja) 1984-07-02 1986-01-23 Toyota Motor Corp 粘性流体の流量制御方法
JP3245813B2 (ja) * 1996-11-27 2002-01-15 東京エレクトロン株式会社 塗布膜形成装置
JP3083275B2 (ja) 1997-09-18 2000-09-04 株式会社ワイ・テイ・エス ダブルダイヤフラム式ポンプ
JP4294757B2 (ja) * 1998-06-18 2009-07-15 平田機工株式会社 スリットコート式塗布装置及びスリットコート式塗布方法
JP4349536B2 (ja) 1999-06-08 2009-10-21 大日本印刷株式会社 塗布液供給装置
JP2001137764A (ja) * 1999-11-15 2001-05-22 Dainippon Printing Co Ltd 塗布装置及び塗布方法
JP4646381B2 (ja) * 2000-11-13 2011-03-09 東京エレクトロン株式会社 塗布液供給装置及び塗布装置
JP4206643B2 (ja) * 2001-02-28 2009-01-14 凸版印刷株式会社 スリット式塗布装置

Also Published As

Publication number Publication date
JP2004141744A (ja) 2004-05-20
TW200408459A (en) 2004-06-01
CN1500558A (zh) 2004-06-02
CN100413600C (zh) 2008-08-27
KR20040036623A (ko) 2004-04-30
KR101010253B1 (ko) 2011-01-21

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