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1984-07-30 |
1987-08-18 |
Tokyo Denshi Kagaku Co., Ltd. |
Wafer holding frame
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1993-09-29 |
1996-02-06 |
Tokyo Electron Kabushiki Kaisha |
Wafer boat or rack
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1995-05-30 |
1997-04-15 |
Tokyo Electron Limited |
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1996-02-06 |
2001-01-09 |
東京エレクトロン株式会社 |
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1997-01-31 |
1999-01-12 |
Tokyo Electron Ltd. |
Wafer boat for use in a semiconductor wafer heat processing apparatus
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1997-08-20 |
1999-06-22 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus
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1999-05-04 |
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Wafer boat for use in a semiconductor wafer heat processing apparatus
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2000-01-15 |
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2004-01-19 |
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Integrated Materials, Inc. |
Method and apparatus for securing components of wafer processing fixtures
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1999-07-09 |
2000-08-08 |
Union Oil Company Of California |
Vertical semiconductor wafer carrier with slats
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2002-01-29 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Wafer boat having improved wafer holding capability
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2016-08-16 |
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Boat for a deposition apparatus
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2014-04-22 |
Sumitomo Electric Industries, Ltd. |
Wafer holder for ion implantation
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2012-12-27 |
2015-07-21 |
Hitachi Kokusai Electric Inc. |
Boat of substrate processing apparatus
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日立國際電氣股份有限公司 |
基板處理裝置用晶舟
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日立國際電氣股份有限公司 |
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