USD763807S1 - Boat for a deposition apparatus - Google Patents

Boat for a deposition apparatus Download PDF

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Publication number
USD763807S1
USD763807S1 US29/491,643 US201429491643F USD763807S US D763807 S1 USD763807 S1 US D763807S1 US 201429491643 F US201429491643 F US 201429491643F US D763807 S USD763807 S US D763807S
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United States
Prior art keywords
boat
deposition apparatus
view
deposition
ornamental design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/491,643
Inventor
James Dempster
Jason Maynard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HZO Inc
Original Assignee
HZO Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HZO Inc filed Critical HZO Inc
Priority to US29/491,643 priority Critical patent/USD763807S1/en
Assigned to HZO, INC. reassignment HZO, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DEMPSTER, JAMES, MAYNARD, JASON
Priority to US14/445,628 priority patent/US20140335271A1/en
Priority to US14/634,034 priority patent/US20150167151A1/en
Assigned to PACIFIC WESTERN BANK (AS SUCCESSOR IN INTEREST BY MERGER TO SQUARE 1 BANK) reassignment PACIFIC WESTERN BANK (AS SUCCESSOR IN INTEREST BY MERGER TO SQUARE 1 BANK) SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HZO, INC.
Application granted granted Critical
Publication of USD763807S1 publication Critical patent/USD763807S1/en
Assigned to HZO, INC. reassignment HZO, INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: PACIFIC WESTERN BANK
Assigned to CATHAY BANK reassignment CATHAY BANK SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HZO, INC.
Assigned to CATHAY BANK reassignment CATHAY BANK SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HZO, INC.
Assigned to CATHAY BANK reassignment CATHAY BANK SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HZO HONG KONG LIMITED, HZO, INC.
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a perspective view of a boat for a deposition apparatus showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a top view thereof;
FIG. 5 is a bottom view thereof;
FIG. 6 is a side view thereof; and,
FIG. 7 is another side view thereof.
Broken lines are used in the drawings to illustrate features that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a boat for a deposition apparatus, as shown and described.
US29/491,643 2012-01-10 2014-05-22 Boat for a deposition apparatus Active USD763807S1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US29/491,643 USD763807S1 (en) 2014-05-22 2014-05-22 Boat for a deposition apparatus
US14/445,628 US20140335271A1 (en) 2012-01-10 2014-07-29 Boats configured to optimize vaporization of precursor materials by material deposition apparatuses
US14/634,034 US20150167151A1 (en) 2012-01-10 2015-02-27 Carrier systems for introducing materials into material processing systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/491,643 USD763807S1 (en) 2014-05-22 2014-05-22 Boat for a deposition apparatus

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
US13/737,737 Continuation-In-Part US9156055B2 (en) 2012-01-10 2013-01-09 Precursor supplies, material processing systems with which precursor supplies are configured to be used and associated methods
US29/484,069 Continuation-In-Part USD764423S1 (en) 2012-01-10 2014-03-05 Corrugated elements for defining longitudinal channels in a boat for a deposition apparatus

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US29/484,069 Continuation-In-Part USD764423S1 (en) 2012-01-10 2014-03-05 Corrugated elements for defining longitudinal channels in a boat for a deposition apparatus
US14/445,628 Continuation-In-Part US20140335271A1 (en) 2012-01-10 2014-07-29 Boats configured to optimize vaporization of precursor materials by material deposition apparatuses

Publications (1)

Publication Number Publication Date
USD763807S1 true USD763807S1 (en) 2016-08-16

Family

ID=56610531

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/491,643 Active USD763807S1 (en) 2012-01-10 2014-05-22 Boat for a deposition apparatus

Country Status (1)

Country Link
US (1) USD763807S1 (en)

Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4303694A (en) 1979-05-04 1981-12-01 Daniel Bois Method and device of deposition through vacuum evaporation making use _of a modulated electron beam and a screen
US5743967A (en) * 1995-07-13 1998-04-28 Semiconductor Energy Laboratory Co. Low pressure CVD apparatus
US5752609A (en) * 1996-02-06 1998-05-19 Tokyo Electron Limited Wafer boat
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US5897311A (en) * 1995-05-31 1999-04-27 Tokyo Electron Limited Support boat for objects to be processed
US5904958A (en) 1998-03-20 1999-05-18 Rexam Industries Corp. Adjustable nozzle for evaporation or organic monomers
US6056123A (en) * 1997-12-10 2000-05-02 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
US6095806A (en) * 1998-06-24 2000-08-01 Tokyo Electron Limited Semiconductor wafer boat and vertical heat treating system
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6099302A (en) * 1998-06-23 2000-08-08 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
US6110285A (en) * 1997-04-15 2000-08-29 Toshiba Ceramics Co., Ltd. Vertical wafer boat
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US6450346B1 (en) * 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
US20030024888A1 (en) * 2001-07-16 2003-02-06 Rohm And Haas Company Wafer holding apparatus
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
US6979659B2 (en) * 2001-02-26 2005-12-27 Integrated Materials, Inc. Silicon fixture supporting silicon wafers during high temperature processing
US7033168B1 (en) * 2005-01-24 2006-04-25 Memc Electronic Materials, Inc. Semiconductor wafer boat for a vertical furnace
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD600222S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
US20100081104A1 (en) 2008-09-29 2010-04-01 Applied Materials, Inc. Evaporator for organic materials and method for evaporating organic materials
USD616391S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
US8042697B2 (en) * 2008-06-30 2011-10-25 Memc Electronic Materials, Inc. Low thermal mass semiconductor wafer support

Patent Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4303694A (en) 1979-05-04 1981-12-01 Daniel Bois Method and device of deposition through vacuum evaporation making use _of a modulated electron beam and a screen
US5897311A (en) * 1995-05-31 1999-04-27 Tokyo Electron Limited Support boat for objects to be processed
US5743967A (en) * 1995-07-13 1998-04-28 Semiconductor Energy Laboratory Co. Low pressure CVD apparatus
US5752609A (en) * 1996-02-06 1998-05-19 Tokyo Electron Limited Wafer boat
US6110285A (en) * 1997-04-15 2000-08-29 Toshiba Ceramics Co., Ltd. Vertical wafer boat
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6056123A (en) * 1997-12-10 2000-05-02 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
US5904958A (en) 1998-03-20 1999-05-18 Rexam Industries Corp. Adjustable nozzle for evaporation or organic monomers
US6099302A (en) * 1998-06-23 2000-08-08 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
US6095806A (en) * 1998-06-24 2000-08-01 Tokyo Electron Limited Semiconductor wafer boat and vertical heat treating system
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US6450346B1 (en) * 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US6979659B2 (en) * 2001-02-26 2005-12-27 Integrated Materials, Inc. Silicon fixture supporting silicon wafers during high temperature processing
US20030024888A1 (en) * 2001-07-16 2003-02-06 Rohm And Haas Company Wafer holding apparatus
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
US7033168B1 (en) * 2005-01-24 2006-04-25 Memc Electronic Materials, Inc. Semiconductor wafer boat for a vertical furnace
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD600222S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
US8042697B2 (en) * 2008-06-30 2011-10-25 Memc Electronic Materials, Inc. Low thermal mass semiconductor wafer support
US20100081104A1 (en) 2008-09-29 2010-04-01 Applied Materials, Inc. Evaporator for organic materials and method for evaporating organic materials
USD616391S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers

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