USD763807S1 - Boat for a deposition apparatus - Google Patents
Boat for a deposition apparatus Download PDFInfo
- Publication number
- USD763807S1 USD763807S1 US29/491,643 US201429491643F USD763807S US D763807 S1 USD763807 S1 US D763807S1 US 201429491643 F US201429491643 F US 201429491643F US D763807 S USD763807 S US D763807S
- Authority
- US
- United States
- Prior art keywords
- boat
- deposition apparatus
- view
- deposition
- ornamental design
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
Broken lines are used in the drawings to illustrate features that form no part of the claimed design.
Claims (1)
- The ornamental design for a boat for a deposition apparatus, as shown and described.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/491,643 USD763807S1 (en) | 2014-05-22 | 2014-05-22 | Boat for a deposition apparatus |
US14/445,628 US20140335271A1 (en) | 2012-01-10 | 2014-07-29 | Boats configured to optimize vaporization of precursor materials by material deposition apparatuses |
US14/634,034 US20150167151A1 (en) | 2012-01-10 | 2015-02-27 | Carrier systems for introducing materials into material processing systems |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/491,643 USD763807S1 (en) | 2014-05-22 | 2014-05-22 | Boat for a deposition apparatus |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/737,737 Continuation-In-Part US9156055B2 (en) | 2012-01-10 | 2013-01-09 | Precursor supplies, material processing systems with which precursor supplies are configured to be used and associated methods |
US29/484,069 Continuation-In-Part USD764423S1 (en) | 2012-01-10 | 2014-03-05 | Corrugated elements for defining longitudinal channels in a boat for a deposition apparatus |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/484,069 Continuation-In-Part USD764423S1 (en) | 2012-01-10 | 2014-03-05 | Corrugated elements for defining longitudinal channels in a boat for a deposition apparatus |
US14/445,628 Continuation-In-Part US20140335271A1 (en) | 2012-01-10 | 2014-07-29 | Boats configured to optimize vaporization of precursor materials by material deposition apparatuses |
Publications (1)
Publication Number | Publication Date |
---|---|
USD763807S1 true USD763807S1 (en) | 2016-08-16 |
Family
ID=56610531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/491,643 Active USD763807S1 (en) | 2012-01-10 | 2014-05-22 | Boat for a deposition apparatus |
Country Status (1)
Country | Link |
---|---|
US (1) | USD763807S1 (en) |
Citations (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4303694A (en) | 1979-05-04 | 1981-12-01 | Daniel Bois | Method and device of deposition through vacuum evaporation making use _of a modulated electron beam and a screen |
US5743967A (en) * | 1995-07-13 | 1998-04-28 | Semiconductor Energy Laboratory Co. | Low pressure CVD apparatus |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US5897311A (en) * | 1995-05-31 | 1999-04-27 | Tokyo Electron Limited | Support boat for objects to be processed |
US5904958A (en) | 1998-03-20 | 1999-05-18 | Rexam Industries Corp. | Adjustable nozzle for evaporation or organic monomers |
US6056123A (en) * | 1997-12-10 | 2000-05-02 | Novus Corporation | Semiconductor wafer carrier having the same composition as the wafers |
US6095806A (en) * | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6110285A (en) * | 1997-04-15 | 2000-08-29 | Toshiba Ceramics Co., Ltd. | Vertical wafer boat |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US6450346B1 (en) * | 2000-06-30 | 2002-09-17 | Integrated Materials, Inc. | Silicon fixtures for supporting wafers during thermal processing |
US20030024888A1 (en) * | 2001-07-16 | 2003-02-06 | Rohm And Haas Company | Wafer holding apparatus |
US20050145584A1 (en) * | 2004-01-06 | 2005-07-07 | Buckley Richard F. | Wafer boat with interference fit wafer supports |
US6979659B2 (en) * | 2001-02-26 | 2005-12-27 | Integrated Materials, Inc. | Silicon fixture supporting silicon wafers during high temperature processing |
US7033168B1 (en) * | 2005-01-24 | 2006-04-25 | Memc Electronic Materials, Inc. | Semiconductor wafer boat for a vertical furnace |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
US20100081104A1 (en) | 2008-09-29 | 2010-04-01 | Applied Materials, Inc. | Evaporator for organic materials and method for evaporating organic materials |
USD616391S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
US8042697B2 (en) * | 2008-06-30 | 2011-10-25 | Memc Electronic Materials, Inc. | Low thermal mass semiconductor wafer support |
-
2014
- 2014-05-22 US US29/491,643 patent/USD763807S1/en active Active
Patent Citations (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4303694A (en) | 1979-05-04 | 1981-12-01 | Daniel Bois | Method and device of deposition through vacuum evaporation making use _of a modulated electron beam and a screen |
US5897311A (en) * | 1995-05-31 | 1999-04-27 | Tokyo Electron Limited | Support boat for objects to be processed |
US5743967A (en) * | 1995-07-13 | 1998-04-28 | Semiconductor Energy Laboratory Co. | Low pressure CVD apparatus |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
US6110285A (en) * | 1997-04-15 | 2000-08-29 | Toshiba Ceramics Co., Ltd. | Vertical wafer boat |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6056123A (en) * | 1997-12-10 | 2000-05-02 | Novus Corporation | Semiconductor wafer carrier having the same composition as the wafers |
US5904958A (en) | 1998-03-20 | 1999-05-18 | Rexam Industries Corp. | Adjustable nozzle for evaporation or organic monomers |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6095806A (en) * | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US6450346B1 (en) * | 2000-06-30 | 2002-09-17 | Integrated Materials, Inc. | Silicon fixtures for supporting wafers during thermal processing |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US6979659B2 (en) * | 2001-02-26 | 2005-12-27 | Integrated Materials, Inc. | Silicon fixture supporting silicon wafers during high temperature processing |
US20030024888A1 (en) * | 2001-07-16 | 2003-02-06 | Rohm And Haas Company | Wafer holding apparatus |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
US20050145584A1 (en) * | 2004-01-06 | 2005-07-07 | Buckley Richard F. | Wafer boat with interference fit wafer supports |
US7033168B1 (en) * | 2005-01-24 | 2006-04-25 | Memc Electronic Materials, Inc. | Semiconductor wafer boat for a vertical furnace |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
US8042697B2 (en) * | 2008-06-30 | 2011-10-25 | Memc Electronic Materials, Inc. | Low thermal mass semiconductor wafer support |
US20100081104A1 (en) | 2008-09-29 | 2010-04-01 | Applied Materials, Inc. | Evaporator for organic materials and method for evaporating organic materials |
USD616391S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
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